CN217052485U - Furnace chassis of location thermal field - Google Patents
Furnace chassis of location thermal field Download PDFInfo
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- CN217052485U CN217052485U CN202220291588.0U CN202220291588U CN217052485U CN 217052485 U CN217052485 U CN 217052485U CN 202220291588 U CN202220291588 U CN 202220291588U CN 217052485 U CN217052485 U CN 217052485U
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- thermal field
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- furnace chassis
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Abstract
The utility model provides a furnace chassis of a positioning thermal field, relating to the technical field of single crystal furnaces. The utility model discloses a furnace chassis body is equipped with the copper electrode on the furnace chassis body, and the felt sets up on the furnace chassis body admittedly at the bottom of the thermal field, is equipped with the electrode sheath on the felt admittedly at the bottom of the thermal field, is equipped with locating component on the outlying furnace chassis body of copper electrode, locating component have with the location portion of electrode sheath lateral wall adaptation, the electrode sheath with location portion contact realizes coaxial with the copper electrode.
Description
Technical Field
The utility model relates to a single crystal growing furnace technical field, concretely relates to furnace chassis of location thermal field.
Background
The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method.
In the prior art, as the furnace type and the thermal field of a single crystal furnace are larger and larger, and the operation time is longer and often exceeds 400h, the thermal field centering requirement is higher and higher when the furnace is closed. Because a gap exists between an electrode sheath assembled at the bottom of a furnace and an electrode, the bottom felt fixing and positioning of a thermal field are difficult, at present, a method for efficiently and accurately positioning the thermal field does not exist, and when the furnace is closed, a worker only can use measuring tools such as a tape measure to measure, calibrate and center each distance of the thermal field, and the like, so that the method is long in time consumption, low in operation efficiency, poor in thermal field centering and repeatability, and very influences the standardization and automation implementation of crystal pulling operation.
SUMMERY OF THE UTILITY MODEL
The utility model aims at developing a positioning thermal field furnace chassis which can quickly complete thermal field centering and improve the operation efficiency.
The utility model discloses a following technical scheme realizes:
a furnace chassis for locating a thermal field, comprising:
a furnace chassis body;
the copper electrode is arranged on the furnace chassis body;
the thermal field bottom fixing felt is arranged on the furnace chassis body;
the electrode sheath is arranged on the thermal field bottom fixing felt;
the positioning assembly is arranged on the furnace chassis body at the periphery of the copper electrode;
the positioning assembly is provided with a positioning part matched with the side wall of the electrode sheath, and the electrode sheath is in contact with the positioning part to realize coaxiality with the copper electrode.
Optionally, the positioning assembly is a positioning ring arranged on the furnace chassis body, the positioning ring is a circular ring coaxial with the copper electrode, and the inner wall of the positioning ring is matched with the outer wall of the bottom end of the electrode sheath.
Optionally, the top surface of the positioning ring is of a round corner structure.
Optionally, the upper portion of the inner wall of the positioning ring is of an inclined surface structure, and the top end of the inclined surface inclines outwards.
Optionally, the positioning assembly includes a plurality of positioning blocks, and a plurality of the positioning blocks are in the coaxial circular arrangement with the copper electrode, the inner wall of positioning block and the outer wall of electrode sheath bottom contact.
Optionally, the inner wall of the positioning block is an arc surface with a shape matched with the outer wall of the bottom end of the electrode sheath.
Optionally, the number of the positioning blocks is at least three, and the positioning blocks are uniformly arranged in the circumferential direction of the arrangement of the positioning blocks at equal intervals.
Optionally, be equipped with the trompil on the stove chassis body, be equipped with the inflator in the trompil, the inflator center is equipped with the gas pocket, be equipped with the clamping ring of fixing the inflator in the trompil on the trompil.
Optionally, the trompil is from last to including coaxial coupling and the internal diameter first trompil, second trompil, third trompil and the fourth trompil that reduces gradually down in order, the inflator is installed in second trompil, third trompil and fourth trompil, the shape and second trompil, third trompil and fourth trompil adaptation of inflator outer wall, the clamping ring is located in the first trompil.
Optionally, the bottom ends of the second opening and the third opening are provided with conical grooves, the conical grooves are inclined planes, the inner sides of the conical grooves are lower ends, and conical rings matched with the conical grooves are arranged at corresponding positions on the outer wall of the inflator.
The beneficial effects of the utility model are that:
the utility model discloses the electrode sheath card is gone into the position location of holding ring or a plurality of locating piece can realize the solid felt in the bottom of the thermal field, makes the thermal field centering, need not the operation personnel and uses measuring tool can accomplish the centering to the thermal field fast, and the operating efficiency improves by a wide margin, and the impurity gathering that produces in the single crystal growing furnace operation is in the gas pocket of inflator, during the clearance, take off the inflator change can, need not to change whole furnace chassis body, reduction in production cost by a wide margin.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a structural view of embodiment 1;
FIG. 2 is an enlarged view of FIG. 1 at A;
FIG. 3 is a structural view of embodiment 3;
FIG. 4 is an enlarged view of FIG. 3 at B;
FIG. 5 is a structural view of embodiment 4;
fig. 6 is an enlarged view of fig. 5 at C.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the inventive concept. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present invention, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present invention.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Example 1
As shown in fig. 1 and fig. 2, the embodiment discloses a furnace chassis for positioning a thermal field, which includes a furnace chassis body 1, a copper electrode 4 is arranged on the furnace chassis body 1, and a thermal field bottom fixing felt 2 is arranged on the furnace chassis body 1.
An electrode sheath 3 matched with the copper electrode 4 is arranged on the thermal field bottom fixing felt 2, and the electrode sheath 3 is made of graphite and is arranged vertically in a cylindrical shape.
When the thermal field bottom fixing felt 2 is arranged on the furnace chassis body 1, the electrode sheath 3 is sleeved on the periphery of the copper electrode 4. The furnace chassis body 1 on the periphery of the copper electrode 4 is provided with a positioning component matched with the electrode sheath 3, and the positioning component is provided with a positioning part contacted with the electrode sheath 3. When the electrode sheath 3 contacts with the positioning part of the positioning component, the positioning component realizes the positioning and fixing of the position of the electrode sheath 3.
In this embodiment, the positioning component is a positioning ring 5, the positioning ring 5 is a circular ring structure, and the top surface of the positioning ring 5 is a fillet structure. The positioning ring 5 and the copper electrode 4 are in a coaxial state, the inner diameter of the positioning ring 5 is matched with the outer diameter of the bottom end of the electrode sheath 3, the inner wall of the positioning ring 5 is a positioning portion, the bottom end of the electrode sheath 3 is clamped into the positioning ring 5, the electrode sheath 3 is coaxial with the positioning ring 5, the electrode sheath 3 is aligned with the copper electrode 4, the thermal field bottom fixing felt 2 is aligned, and the effect of quickly finishing thermal field centering is achieved.
The electrode sheath 3 of the embodiment is clamped into the positioning ring 5, so that the position of the thermal field bottom fixing felt 2 can be positioned, the thermal field is centered, the operator can quickly complete the centering of the thermal field without using a measuring tool, and the operation efficiency is greatly improved.
Example 2
The difference between the embodiment and the embodiment 1 is that, in the embodiment, the positioning assembly is a plurality of positioning blocks, the plurality of positioning blocks are arranged in a circular shape coaxial with the copper electrode 4, the plurality of positioning blocks are uniformly arranged in the circumferential direction at equal intervals, and the number of the positioning blocks is at least three. The inner wall of the positioning block is a positioning part, the inner wall of the positioning block is an arc surface matched with the outer wall of the bottom end of the electrode sheath 3 in shape, the electrode sheath 3 is clamped between a plurality of positioning blocks, and the inner wall of the positioning block is in contact with the outer wall of the bottom end of the electrode sheath 3 to realize positioning and fixing of the positioning block. The positioning assembly of the embodiment has smaller volume and occupied space and reduced cost.
Example 3
As shown in fig. 3 and 4, the difference between the present embodiment and embodiment 1 is that in the present embodiment, the upper portion of the inner wall of the positioning ring 5 is a guiding portion, the lower portion of the inner wall of the positioning ring 5 is a positioning portion, the guiding portion is an inclined surface structure, and the top end of the inclined surface inclines outward, so that the guiding portion is in a circular truncated cone shape and has a larger inner diameter at the upper portion. The location portion is still for the cylindrical with 3 bottom outer walls of electrode sheath adaptations, and 3 bottom inner walls of electrode sheath contact with the location portion.
The guide part is horn mouth structure, and electrode sheath 3 is in the in-process of card income holding ring 5, and the guide part is 3 location for electrode sheath, makes 3 bottoms of electrode sheath slide in the locating part. The guide part is arranged, so that a certain deviation can exist between the electrode sheath 3 and the positioning ring 5, the electrode sheath 3 can be quickly inserted into the positioning part through the guide part, and the clamping efficiency of the electrode sheath 3 and the positioning ring 5 is improved.
Example 4
As shown in fig. 5 and 6, the present embodiment is different from embodiment 1 in that an opening is provided in a furnace base plate body 1, an air cylinder 7 is provided in the opening, an air hole 8 is provided in the center of the air cylinder 7, and a pressing ring 6 for fixing the air cylinder 7 in the opening is provided in the opening.
The trompil is from last to including coaxial coupling in order and the first trompil 9, second trompil 10, third trompil 11 and fourth trompil 12 that the internal diameter reduces gradually down, and inflator 7 is installed in second trompil 10, third trompil 11 and fourth trompil 12, and second trompil 10 and third trompil 11 bottom all are the inclined plane and the inboard is the lower end for second trompil 10 and third trompil 11 bottom are the taper groove structure. The shape of the outer wall of the air cylinder 7 is matched with the second open hole 10, the third open hole 11 and the fourth open hole 12, and a conical ring matched with the conical grooves at the bottom ends of the second open hole 10 and the third open hole 11 is arranged at the corresponding position of the outer wall of the air cylinder 7. After the air cylinder 7 is installed, the bottom end of the air cylinder 7 is flush with the bottom end of the fourth opening 12, and the top end of the air cylinder 7 is flush with the top end of the second opening 10. The clamping ring 6 is arranged in the first opening 9, the clamping ring 6 is pressed on the air cylinder 7, the air cylinder 7 is fixed, and the clamping ring 6 is movably connected with the first opening 9 through a bolt or a thread.
In the embodiment, impurities generated in the operation of the single crystal furnace are accumulated in the air holes 8 of the air cylinder 7, the air cylinder 7 is taken down for replacement during cleaning, and the conical groove and the conical ring are matched to enhance the air tightness between the air cylinder 7 and the opening.
The above-mentioned embodiment is only the preferred embodiment of the present invention, and is not to the limitation of the technical solution of the present invention, as long as the technical solution can be realized on the basis of the above-mentioned embodiment without creative work, all should be regarded as falling into the protection scope of the right of the present invention.
Claims (10)
1. A furnace chassis for locating a thermal field, comprising:
a furnace chassis body;
the copper electrode is arranged on the furnace chassis body;
the thermal field bottom fixing felt is arranged on the furnace chassis body;
the electrode sheath is arranged on the thermal field bottom fixing felt;
the positioning assembly is arranged on the furnace chassis body at the periphery of the copper electrode;
the positioning assembly is provided with a positioning part matched with the side wall of the electrode sheath, and the electrode sheath is in contact with the positioning part to realize coaxiality with the copper electrode.
2. The furnace chassis for positioning the thermal field according to claim 1, wherein the positioning component is a positioning ring arranged on the furnace chassis body, the positioning ring is a circular ring coaxial with the copper electrode, and the inner wall of the positioning ring is matched with the outer wall of the bottom end of the electrode sheath.
3. The furnace bottom tray for positioning the thermal field according to claim 2, wherein the top surface of the positioning ring is in a round corner structure.
4. The furnace chassis for positioning the thermal field according to claim 2, wherein the upper part of the inner wall of the positioning ring is of a slope structure, and the top end of the slope inclines outwards.
5. The furnace chassis for positioning the thermal field according to claim 1, wherein the positioning assembly comprises a plurality of positioning blocks, the plurality of positioning blocks are arranged in a circular shape coaxial with the copper electrode, and the inner walls of the positioning blocks are in contact with the outer wall of the bottom end of the electrode sheath.
6. The furnace chassis for positioning the thermal field according to claim 5, wherein the inner wall of the positioning block is a circular arc surface with a shape matched with the outer wall of the bottom end of the electrode sheath.
7. The furnace chassis for positioning the thermal field according to claim 5, wherein the number of the positioning blocks is at least three, and a plurality of the positioning blocks are uniformly arranged at equal intervals in the circumferential direction of the arrangement of the positioning blocks.
8. The furnace chassis for positioning the thermal field according to claim 1, wherein the furnace chassis body is provided with an opening, the opening is internally provided with an air cylinder, the center of the air cylinder is provided with an air hole, and the opening is provided with a pressing ring for fixing the air cylinder in the opening.
9. The furnace chassis for positioning the thermal field according to claim 8, wherein the openings comprise a first opening, a second opening, a third opening and a fourth opening which are coaxially connected in sequence and have gradually reduced inner diameters from top to bottom, the gas cylinder is installed in the second opening, the third opening and the fourth opening, the outer wall of the gas cylinder is matched with the second opening, the third opening and the fourth opening in shape, and the pressing ring is arranged in the first opening.
10. The furnace chassis for positioning the thermal field according to claim 9, wherein the bottom ends of the second and third openings are provided with conical grooves, the conical grooves are inclined planes, the inner sides of the conical grooves are lower ends, and the outer walls of the gas cylinders are provided with conical rings matched with the conical grooves at corresponding positions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220291588.0U CN217052485U (en) | 2022-02-14 | 2022-02-14 | Furnace chassis of location thermal field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220291588.0U CN217052485U (en) | 2022-02-14 | 2022-02-14 | Furnace chassis of location thermal field |
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| Publication Number | Publication Date |
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| CN217052485U true CN217052485U (en) | 2022-07-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220291588.0U Active CN217052485U (en) | 2022-02-14 | 2022-02-14 | Furnace chassis of location thermal field |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115506033A (en) * | 2022-09-28 | 2022-12-23 | 乌海市京运通新材料科技有限公司 | Thermal field centering structure and centering method of single crystal furnace |
-
2022
- 2022-02-14 CN CN202220291588.0U patent/CN217052485U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115506033A (en) * | 2022-09-28 | 2022-12-23 | 乌海市京运通新材料科技有限公司 | Thermal field centering structure and centering method of single crystal furnace |
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