CN217008009U - Detection system for orifice in machine table - Google Patents

Abstract

The utility model relates to a detection system for an orifice in a machine, which comprises a machine processor; a blower; a DVU in communication with a tool processor; a gate member opened by the DVU; the orifice valve is connected with the CDA air inlet through an air pipe, and the opening and closing of the orifice valve are controlled by the CDA pressure; a PVU in communication with the tool processor and connected to the gas line and configured to close the CDA to the orifice valve to zero the pressure of the CDA, such that the orifice valve is normally open; a detecting device configured to receive the opening signal of the door part and detect the CDA, and when it is detected that the CDA has pressure and the pressure exceeds a preset threshold value under the condition that the pressure of the CDA should be zero, the blower is switched off to make the machine down. The utility model can detect the CDA leading to the orifice valve when the PVU plate of the machine is abnormal, and can send out an alarm in time and make the machine down when the CDA is detected to be abnormal, thereby protecting the wafer product.

Description

Detection system for orifice in machine table

Technical Field

The present invention relates to a detection system, and more particularly, to a detection system for an aperture in a tool.

Background

The HJTC RTP-53 tool often has an abnormal PVU (pneumatic valve unit) that may result in excessive oxygen in the chamber and thus low wafer yield. During inspection, the PVU plate is found to be abnormal (a solenoid valve element for controlling CDA (clean dry air) to the orifice valve is not normally opened and frequently switched for a long time to cause failure), so that the orifice valve cannot be normally opened, the oxygen content in the chamber exceeds the standard, and the color of the crystal edge of the product is abnormal. No MFC (mass flow meter) is arranged behind the orifice of the HJTC RTP-53 machine, the flow is controlled only by a PVU electromagnetic valve, and the opening and closing orifice of a pneumatic valve can be controlled, so that if the PVU electromagnetic valve for controlling the orifice fails, the oxygen in a cavity can be directly overproof, the product is abnormal, and the loss is large due to the lack of detection and wide influence range.

Accordingly, a detection system for an aperture in a tool is desirable.

SUMMERY OF THE UTILITY MODEL

In view of the deficiencies of the prior art, it is an object of the present invention to provide a detection system for an aperture in a tool.

In order to solve the technical problems, the utility model adopts the following technical scheme:

according to an aspect of the present invention, there is provided a detection system for an aperture in a machine, comprising:

a machine processor;

a blower;

a gate valve unit DVU in communication with the tool processor;

a gate member that is opened by the DVU;

an orifice valve connected to an inlet of clean dry air CDA through an air pipe and whose opening and closing is controlled by the pressure of CDA;

a Pneumatic Valve Unit (PVU) in communication with the tool processor and connected to the gas line, the PVU configured to close the CDA to the orifice valve to zero the pressure of the CDA, thereby causing the orifice valve to be normally open; and

a detecting device configured to receive the opening signal of the door part and detect the CDA, and when it is detected that there is a pressure in the CDA and the pressure in the CDA exceeds a preset threshold value in case that the pressure in the CDA should be made zero, an alarm is issued and the blower is turned off to make the machine down.

In an embodiment of the present invention, the detection system further includes:

a pressure gauge inline into the trachea connected to the orifice valve connection and used to monitor the pressure of the CDA within the trachea.

In one embodiment of the utility model, the detection device includes a controller configured to receive a signal of opening of the door member and to receive a signal of pressure of the CDA monitored by the pressure gauge, the controller interacting with the panel, the panel communicating with the blower and turning off the blower when the pressure of the CDA exceeds a preset threshold causing a machine downtime.

In one embodiment of the utility model, bleed N is provided when the orifice valve is normally open₂And through N₂Cleaning O in a chamber containing a wafer₂。

In one embodiment of the present invention, a solenoid valve is disposed within the DVU.

In one embodiment of the utility model, the PVU is internally provided with a solenoid valve.

In one embodiment of the utility model, the orifice valve closes when the pressure of the CDA is not zero.

In one embodiment of the present invention, the preset threshold is at least 5 PSI.

In an embodiment of the present invention, the detection system further includes:

a sensor for sensing a signal that the door member is open.

In an embodiment of the present invention, the detection system further includes:

an indicator light connected to the sensor and illuminated to indicate when the sensor senses that the door member is open.

By adopting the technical scheme, compared with the prior art, the utility model has the following advantages:

by the detection system, the CDA leading to the orifice valve can be detected when the PVU plate of the machine is abnormal, and an alarm is timely sent out and the machine is down when the CDA is detected to be abnormal, so that wafer products are protected.

Drawings

FIG. 1 illustrates a schematic diagram of a detection system for an aperture in a tool provided by the present invention;

fig. 2 shows a schematic connection diagram of an orifice valve provided by the present invention.

Detailed Description

It should be understood that the embodiments of the utility model shown in the exemplary embodiments are illustrative only. Although only a few embodiments of the present invention have been described in detail above, those skilled in the art will readily appreciate that many modifications are possible without materially departing from the teachings of the present subject matter. Accordingly, all such modifications are intended to be included within the scope of this invention. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and parameters and the like of the following exemplary embodiments without departing from the spirit of the present invention.

The utility model provides a detection system for an orifice in a machine, which comprises: a machine processor; a blower; a gate valve unit DVU in communication with the tool processor; a gate member that is opened by the DVU; an orifice valve which is connected with the air inlet of the clean and dry air CDA through an air pipe and the opening and the closing of the orifice valve are controlled by the pressure of the CDA, namely the CDA drives the closing of the orifice valve by air pressure, when the CDA exists in the air pipe, the pressure exists, so the orifice valve is closed, and when the pressure does not exist in the air pipe, the orifice valve is opened; a Pneumatic Valve Unit (PVU) in communication with the tool processor and connected to the gas line, the PVU configured to close the CDA to the orifice valve to zero the pressure of the CDA, thereby causing the orifice valve to be normally open; and a detecting device configured to receive the opening signal of the door part and detect the CDA, and when the CDA pressure is detected to be present (i.e. PVU anomaly) and the CDA pressure exceeds a preset threshold value, an alarm is given and the blower is turned off to make the machine down if the CDA pressure should be zeroed.

In the above technical solution, the detecting system further includes: a pressure gauge inline into the trachea connected to the orifice valve connection and used to monitor the pressure of the CDA within the trachea.

In the above technical solution, the detecting device includes a controller and a panel, the controller is configured to receive the opening signal of the door part and receive the signal of the pressure of the CDA monitored by the pressure gauge, the controller interacts with the panel, and the panel communicates with the blower and turns off the blower when the pressure of the CDA exceeds a preset threshold value, so as to cause a machine downtime.

In the above technical scheme, when the orifice valve is normally open, the N flows out₂And through N₂Cleaning O in a chamber containing a wafer₂。

In the above technical solution, an electromagnetic valve is provided inside the DVU.

In the above technical solution, an electromagnetic valve is arranged inside the PVU.

In the above solution, the orifice valve is closed when the pressure of the CDA is not zero.

In the above technical solution, the preset threshold is at least 5 PSI.

In the above technical solution, the detecting system further includes: a sensor for sensing a signal that the door member is open.

In the above technical solution, the detecting system further includes: an indicator light connected to the sensor and illuminated to indicate when the sensor senses that the door member is open.

The detection system provided by the present invention is described in detail by the following embodiments.

As shown in fig. 1-2, a detection system for an aperture in a tool comprises: the system comprises a machine platform processor, a blower, a gate valve unit DVU, a pneumatic valve unit PVU, a gate component, an orifice valve, a controller of a detection device, a panel of the detection device and a pressure gauge. The DVU is in communication with the machine processor; a solenoid valve inside the DVU for opening the door member; the orifice valve is connected to the inlet of clean and dry air CDA via an air pipe and the opening and closing of the orifice valve is controlled by the pressure of the CDA, i.e. the CDA drives the orifice pneumaticallyWhen the port valve is closed, pressure exists in the trachea when CDA exists, so that the port valve can be closed, and the port valve can be opened when no pressure exists in the trachea; the PVU is in communication with the tool processor and is connected to the gas line, and the PVU switches an internally disposed battery valve to close the CDA to the orifice valve to null the CDA pressure, thereby causing the orifice valve to be normally open and flowing N₂(ii) a A pressure gauge is strung into the trachea connected to the orifice valve connection and is used to monitor the pressure of the CDA within the trachea; the controller of the sniffing device interacts information with the panel, which is in communication with the blower, the controller receives the open signal of the door member and receives the signal of the pressure of the CDA monitored by the pressure gauge and sniffs the CDA, and in case it is detected that there is pressure of the CDA (i.e. PVU anomaly) and the pressure of the CDA exceeds a preset threshold, e.g. 5PSI, in case the CDA pressure should be zeroed, an alarm is issued and the blower is turned off to bring down the machine.

In the above detection system, N flowing out when the orifice valve is normally open₂For removing O in the chamber where the wafer is₂To protect the wafer product.

In the detection system described above, the orifice valve closes when the pressure of the CDA is not zero.

In the above detection system, the detection system further includes: a sensor for sensing a signal that the door part is opened and an indicator light (both not shown); an indicator light is connected to the sensor and is illuminated to indicate when the sensor senses that the door member is open.

When the detection system is operating, the tool processor first controls the DVU to open the gate member, the PVU closes the CDA to the orifice valve to make the pressure of the CDA zero, i.e. the degree of the pressure gauge is observed to be zero, at this time, the orifice valve is kept normally open because of no CDA, and the tool components work normally. Then, in the machine operation process, a detection device (comprising a controller and a panel) is used for detecting the CDA passing through the orifice valve when the door part is opened in the operation process, if the pressure of the detected CDA is always zero (the pressure gauge has no reading), the PVU or the machine is not abnormal, and the machine operates normally; if the CDA pressure is detected to be present under the condition that the CDA pressure should be zeroed (i.e., no reading should be taken by the pressure gauge at this time and a reading is displayed), it should be considered that the PVU or the machine is abnormal, and in this case, when the detected CDA pressure exceeds the preset threshold 5PSI set by the user, the detection device gives an alarm and turns off the blower to make the machine down, thereby protecting the wafer products in the chamber.

Therefore, through the detection system, the CDA leading to the orifice valve can be detected when the PVU plate of the machine is abnormal, and an alarm is timely sent out and the machine is down when the CDA is detected to be abnormal, so that the wafer product is protected.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; it is intended that the following claims be interpreted as including all such alterations, modifications, and equivalents as fall within the true spirit and scope of the utility model.

Claims (10)

1. A detection system for an aperture in a tool, comprising:

a machine processor;

a blower;

a gate valve unit DVU in communication with the tool processor;

a gate member that is opened by the DVU;

an orifice valve connected to the inlet of clean dry air CDA through an air pipe and whose opening and closing is controlled by the CDA pressure;

a Pneumatic Valve Unit (PVU) in communication with the tool processor and connected to the gas line, the PVU configured to close the CDA to the orifice valve to zero pressure of the CDA, thereby causing the orifice valve to be normally open; and

a sniffing device configured to receive the opening signal of the door member and sniff the CDA, issue an alarm and turn off the blower to shut down the machine when it is detected that there is pressure in the CDA and the pressure in the CDA exceeds a preset threshold if the pressure in the CDA should be made zero.

2. A system as claimed in claim 1, further comprising:

a pressure gauge inline into the trachea connected to the orifice valve connection and for monitoring the pressure of the CDA within the trachea.

3. A system for spying on an aperture in a machine platform as claimed in claim 2, wherein said spying device comprises a controller and a panel, said controller configured to receive signals of opening of said door member and of pressure of said CDA monitored by said pressure gauge, said controller interacting with said panel, said panel communicating with said blower and turning off the blower when the pressure of said CDA exceeds a preset threshold causing a downtime of said machine platform.

4. The system of claim 1, wherein the flow N is determined when the port valve is normally open₂And through N₂Cleaning O in a chamber containing a wafer₂。

5. A detection system for an aperture in a tool as claimed in claim 1, wherein the DVU is internally provided with a solenoid valve.

6. The system of claim 1, wherein a solenoid valve is disposed inside the PVU.

7. The detection system as claimed in claim 1, wherein the orifice valve is closed when the pressure of the CDA is not zero.

8. A system as claimed in claim 1, wherein the predetermined threshold is at least 5 PSI.

9. A system as claimed in claim 1, further comprising:

a sensor for sensing a signal that the door member is open.

10. The detection system as claimed in claim 9, further comprising:

an indicator light connected to the sensor and illuminated to indicate when the sensor senses that the door member is open.

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