CN216998659U - Bottom exhaust device of straight pulling single crystal furnace - Google Patents

Abstract

The utility model discloses a bottom exhaust device of a Czochralski single crystal furnace, belonging to the technical field of single crystal furnaces and comprising: a water cooling pipe, a corrugated pipe, a three-way pipe and a converging pipe; one end of the water-cooled tube is fixedly connected to the outer bottom of the single crystal furnace bottom plate, the other end of the water-cooled tube is fixedly connected with the corrugated tube, the other end of the corrugated tube is fixedly connected with the first port of the three-way tube, the second port of the three-way tube is sealed, the third port of the three-way tube is fixedly connected with one end of the converging tube, and the other end of the converging tube is connected with the ball valve; wherein the water cooling pipe is communicated with a graphite exhaust pipe in the single crystal furnace bottom plate. This scheme is through improving current side exhaust mode for lower mode, and gaseous from the top flows in, enlarges the inflow area, has increased exhaust pipe's flow, simultaneously, the diameter of increase gas vent makes the further increase of mouth of pipe flow.

Description

Bottom exhaust device of straight pulling single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal furnaces, in particular to a bottom exhaust device of a straight pulling single crystal furnace.

Background

An exhaust system of a czochralski single crystal furnace is a very important system in single crystal furnace equipment, and during the single crystal pulling process of the single crystal furnace, a large amount of impurities and oxides are generated in raw materials in the furnace, and the products can have adverse effects on the equipment and the pulling process and cause serious damage to the equipment and the pulling process.

The existing czochralski crystal growing furnace is provided with side exhaust holes, and impurities and oxides in the pipeline are easily accumulated by the structure, so that unsmooth air extraction and exhaust are caused. The exhaust structure has great risk to production, impurities and oxides generated in the furnace body can not be removed in time, equipment in the furnace is damaged, and the crystallization quality is seriously reduced.

In view of the above, a new exhaust structure is designed to solve this problem.

SUMMERY OF THE UTILITY MODEL

The utility model aims at the problems and provides a bottom exhaust device of a czochralski crystal growing furnace.

The technical scheme adopted by the utility model is as follows: a bottom exhaust device of a czochralski crystal pulling furnace comprises: a water cooling pipe, a corrugated pipe, a three-way pipe and a converging pipe;

one end of the water-cooling pipe is fixedly connected with the outer bottom of the single crystal furnace bottom plate, the other end of the water-cooling pipe is fixedly connected with the corrugated pipe,

the other end of the corrugated pipe is fixedly connected with a first port of the three-way pipe, a second port of the three-way pipe is sealed, a third pipe orifice of the three-way pipe is fixedly connected with one end of the converging pipe,

the other end of the converging pipe is connected with the ball valve;

wherein the water-cooled tube is communicated with a graphite exhaust pipe in the single crystal furnace bottom plate.

Further, the water-cooling pipe is connected with the single crystal furnace bottom plate through a flange.

Furthermore, the water cooling pipe is connected with a water inlet nozzle seat and a water outlet nozzle seat, and the water inlet nozzle seat and the water outlet nozzle seat are connected with a water source through pipelines.

Furthermore, the second port of the three-way pipe is fixedly connected with a safety valve.

Furthermore, an explosion-proof detection tube and a temperature measurement detection tube are fixedly connected to the confluence tube;

and a pressure detection instrument is installed at the port of the explosion-proof detection tube, and a temperature detection instrument is installed at the port of the temperature measurement detection tube.

Further, the junction pipe appearance is T type shape, wherein, the blind is all connected to junction pipe first port and second port, the blind passes through clamp fixed connection respectively in junction pipe first port department and second port department.

Furthermore, the small-diameter exhaust port on the bottom plate of the single crystal furnace is blocked by a blind plate,

the diameter of two electrode holes on the bottom plate of the single crystal furnace is phi 125mm, the center distance of the two electrode holes is 660mm, and the graphite exhaust pipe is fixedly connected to the electrode holes.

The utility model has the beneficial effects that:

this scheme is through improving current side exhaust mode for lower mode, and gaseous from the top flows in, enlarges the inflow area, has increased exhaust pipe's flow, simultaneously, the diameter of increase gas vent makes the further increase of mouth of pipe flow.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the utility model and, together with the description, serve to explain the utility model and not to limit the utility model.

FIG. 1 is a schematic side view of a manifold and pipe configuration according to an embodiment of the present invention;

FIG. 2 is a schematic side view of an embodiment of the present invention;

FIG. 3 is a schematic top view of an embodiment of the present invention;

FIG. 4 is a single crystal furnace floor of an embodiment of the present invention;

fig. 5 is a schematic perspective view of an embodiment of the present invention.

Reference numerals:

the device comprises a water cooling pipe 1, a corrugated pipe 2, a three-way pipe 3, a converging pipe 4, a single crystal furnace bottom plate 5, a graphite exhaust pipe 6, an explosion-proof detection pipe 7, a temperature measurement detection pipe 8, an electrode hole 9 and an exhaust port 10.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the utility model and do not limit the utility model.

Referring to fig. 1 to 5, as shown in fig. 1 to 5, a bottom exhaust device of a czochralski crystal pulling furnace comprises: a water cooling pipe 1, a corrugated pipe 2, a three-way pipe 3 and a converging pipe 4;

one end of the water-cooling pipe 1 is fixedly connected with the outer bottom of the single crystal furnace bottom plate 5, the other end of the water-cooling pipe 1 is fixedly connected with the corrugated pipe 2,

the other end of the corrugated pipe 2 is fixedly connected with a first port of the three-way pipe 3, a second port of the three-way pipe 3 is sealed, a third pipe orifice of the three-way pipe is fixedly connected with one end of the converging pipe 4,

the other end of the confluence pipe 4 is connected with a ball valve;

wherein the water-cooled tube 1 is communicated with a graphite exhaust pipe 6 in the single crystal furnace bottom plate 5.

The main invention of the scheme is that a new exhaust system is designed by modifying the existing exhaust system of the single crystal furnace, so that the accumulation of impurities and oxides in the exhaust pipeline in the furnace is reduced, the exhaust flow of the exhaust pipeline is increased, the capacity of the impurities and the oxides and the damage to equipment are reduced, the production environment in the furnace is improved, and the crystallization rate is improved.

Wherein, the side exhaust mode of graphite pipe follow single crystal growing furnace is passed through in current exhaust, changes into the mode that waste gas was arranged down, and through increasing the water-cooled tube to waste gas cooling, can detect waste gas pressure and temperature through the convergent pipe that sets up to the working process of more convenient control single crystal growing furnace.

In addition, the bellows is used for controlling the pressure in the pipeline, and the pressure in the pipeline can be adjusted by utilizing the contractive work of the bellows.

Wherein, the connection order of bellows and three-way pipe can be connected the bellows with the water-cooled tube earlier, then the bellows is connected with the three-way pipe again, and the three-way pipe that does is connected with the water-cooled tube earlier, then the three-way pipe is connected with the bellows again.

In one embodiment of the utility model, the water-cooled tube 1 is connected with the single crystal furnace bottom plate 5 through a flange. Wherein, flange joint water-cooling pipe, the dismantlement and the maintenance in the later stage of being convenient for.

In one embodiment of the utility model, the water cooling pipe 1 is connected with a water inlet nozzle seat and a water outlet nozzle seat, and the water inlet nozzle seat and the water outlet nozzle seat are connected with a water source through pipelines.

Wherein, the effect of water-cooled tube is, cools down waste gas, reduces the damage of waste gas pipeline in to follow-up flow.

In an embodiment of the present invention, the second port of the three-way pipe 3 is fixedly connected to a safety valve.

In one embodiment of the utility model, an explosion-proof detection tube 7 and a temperature measurement detection tube 8 are fixedly connected to the confluence tube 4;

and a pressure detection instrument is installed at the port of the explosion-proof detection tube 7, and a temperature detection instrument is installed at the port of the temperature measurement detection tube 8.

The explosion-proof detection tube has the advantages that the pressure detection instrument can detect the pressure of the waste gas conveniently, and when the pressure exceeds a set value, the pressure detection element can give an alarm in time.

The temperature detection pipe has the effect that a temperature detection instrument can conveniently detect the temperature of the waste gas, so that the temperature of the water in the water cooling pipe can be adjusted in time.

In an embodiment of the present invention, the junction pipe 4 is shaped like a T, wherein the first port and the second port of the junction pipe 4 are both connected to a blind plate, and the blind plates are respectively and fixedly connected to the first port and the second port of the junction pipe 4 through a clamp.

In one embodiment of the utility model, the small-diameter exhaust port 10 on the bottom plate 5 of the single crystal furnace is sealed by a blind plate,

the diameter of two electrode holes 9 on the single crystal furnace bottom plate 5 is phi 125mm, the center distance of the two electrode holes is 660mm, and the graphite exhaust pipe 6 is fixedly connected to the electrode holes.

When the bottom exhaust device of the straight pulling single crystal furnace is used, gas generated in the single crystal furnace enters the graphite exhaust pipe, then sequentially enters the water cooling pipe, the corrugated pipe, the three-way pipe and the converging pipe along the graphite exhaust pipe, and finally is discharged from a third pipe orifice of the round pipe;

in this process, because of having increased the pipe diameter of graphite blast pipe, waste gas gets into in the water-cooling pipe more easily, waste gas gets into in the water-cooling pipe, the process of cooling down waste gas is carried out to the flowing water through the water-cooling pipe, waste gas after the cooling gets into the bellows, get into the three-way pipe through the bellows after that, at last in the gathering of converging the pipe, wherein, waste gas is when converging intraductally, in time detect the intraductal temperature and the pressure of converging through temperature-detecting instrument and pressure-detecting instrument, thereby the convenient temperature of in time adjusting the water-cooling pipe and the interior relevant process of pressure of single crystal growing furnace.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (7)

1. A bottom exhaust device of a czochralski crystal pulling furnace is characterized by comprising: a water cooling pipe, a corrugated pipe, a three-way pipe and a converging pipe;

one end of the water-cooling pipe is fixedly connected with the outer bottom of the single crystal furnace bottom plate, the other end of the water-cooling pipe is fixedly connected with the corrugated pipe,

the other end of the corrugated pipe is fixedly connected with a first port of the three-way pipe, a second port of the three-way pipe is sealed, a third pipe orifice of the three-way pipe is fixedly connected with one end of the converging pipe,

the other end of the converging pipe is connected with the ball valve;

wherein the water cooling pipe is communicated with a graphite exhaust pipe in the single crystal furnace bottom plate.

2. The bottom exhaust device of the czochralski crystal growing furnace according to claim 1, wherein the water-cooling pipe is connected with the bottom plate of the single crystal growing furnace through a flange.

3. The bottom exhaust device of the czochralski single crystal furnace according to claim 2, wherein the water cooling pipe is connected with a water inlet nozzle seat and a water outlet nozzle seat, and the water inlet nozzle seat and the water outlet nozzle seat are connected with a water source through a pipeline.

4. The bottom exhaust device of the czochralski single crystal furnace according to claim 1, wherein the second port of the three-way pipe is fixedly connected with a safety valve.

5. The bottom exhaust device of the czochralski single crystal furnace according to claim 1, wherein an explosion-proof detection tube and a temperature measurement detection tube are fixedly connected to the confluence tube;

and a pressure detection instrument is installed at the port of the explosion-proof detection tube, and a temperature detection instrument is installed at the port of the temperature measurement detection tube.

6. The bottom exhaust device of a czochralski single crystal furnace as claimed in claim 5, wherein the junction pipe has a T-shaped outer shape, wherein the first port and the second port of the junction pipe are connected with blind plates, and the blind plates are fixedly connected with the first port and the second port of the junction pipe respectively through clamping bands.

7. The bottom exhaust device of the Czochralski single crystal furnace of claim 1, wherein the small-diameter exhaust port on the bottom plate of the single crystal furnace is blocked by a blind plate,

the diameter of two electrode holes on the bottom plate of the single crystal furnace is phi 125mm, the center distance of the two electrode holes is 660mm, and the graphite exhaust pipe is fixedly connected to the electrode holes.

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