CN216966669U - Nondestructive lobe cutting head - Google Patents
Nondestructive lobe cutting head Download PDFInfo
- Publication number
- CN216966669U CN216966669U CN202220410049.4U CN202220410049U CN216966669U CN 216966669 U CN216966669 U CN 216966669U CN 202220410049 U CN202220410049 U CN 202220410049U CN 216966669 U CN216966669 U CN 216966669U
- Authority
- CN
- China
- Prior art keywords
- lens
- focal length
- cutting head
- splinter
- nondestructive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Lenses (AREA)
Abstract
The utility model provides a nondestructive splinter cutting head which comprises a first lens, a second lens and a third lens which are sequentially arranged along the propagation direction of a light beam, wherein the light beam can form an oval focusing light spot on an image plane through a light path; the first lens is of a double-concave structure, the focal length of the first lens is negative, the focal length of the second lens is of a double-concave structure, the distance between the first lens and the second lens is adjustable and used for adjusting the size of the long axis/short axis of the focusing light spot, the adjusting range of the long axis of the focusing light spot is 18-14mm, and the adjusting range of the short axis of the focusing light spot is 7.5-1.5 mm. The utility model can enable the working wavelength of the lens to be 1030-1090nm, and the field lens has the characteristics of small lens aperture, simple structure, low cost, elliptical light spot formation, increased heating efficiency, capability of adjusting the size of the light spot through an optical element and the like, can improve the splitting yield to 99 ten thousandths, and simultaneously realizes the remarkable improvement of the splitting speed.
Description
Technical Field
The utility model belongs to the technical field of laser cutting lenses, and particularly relates to a nondestructive splinter cutting head.
Background
The silicon wafer can be divided into a semiconductor silicon wafer and a photovoltaic silicon wafer according to the application, the photovoltaic silicon wafer can be monocrystalline silicon or polycrystalline silicon, the semiconductor silicon wafer can only be monocrystalline silicon, the maximum difference between the semiconductor silicon wafer and the photovoltaic silicon wafer is that the silicon content is different, and the product mainly aims at the photovoltaic silicon wafer.
With the continuous promotion of carbon neutralization, the proportion of photovoltaic power generation to the total generated energy is gradually increased, and monocrystalline silicon has higher photoelectric conversion efficiency than polycrystalline silicon.
An important process in the production process of the silicon wafer is cracking, the existing silicon wafer cracking process is that a telecentric or Bessel cutting lens is used for slotting on two sides of the silicon wafer, and then a round light spot is used for heating a slotting end to realize automatic cracking of the silicon wafer, and the silicon wafer is high in section smoothness and minimum in edge breakage in the cracking process.
However, the existing round spot has low heating efficiency, the yield of the splinters is 95-97 ten thousandths, the splinter speed is low, and the efficiency and yield are still required to be further improved.
Thus, there is a need for an atraumatic splinter cutting head.
SUMMERY OF THE UTILITY MODEL
The utility model provides a nondestructive splinter cutting head, which solves the problems that the existing circular light spot is low in heating efficiency, the splinter yield is 95-97 ten thousandth, the splinter speed is low, and the efficiency and the yield still need to be further improved.
The technical scheme of the utility model is realized as follows: a nondestructive splinter cutting head comprises a first lens, a second lens and a third lens which are sequentially arranged along the propagation direction of a light beam, wherein the light beam can form an oval focusing light spot on an image surface through the light path; the first lens is of a biconcave structure and has a negative focal length, the second lens is of a biconcave structure and has a negative focal length, the distance between the first lens and the second lens is adjustable so as to adjust the size of the long axis/the short axis of the focusing light spot, the long axis adjustment range of the focusing light spot is 18-14mm, and the short axis adjustment range is 7.5-1.5 mm; the third lens is a cylindrical lens and is of a plano-convex structure, the meridional focal length of the third lens is positive, and the sagittal focal length of the third lens is infinite.
As a preferred embodiment, the meridional focal length of the first lens, the second lens and the third lens and the focal length of the nondestructive splinter cutting head satisfy the following condition: -0.1 < f1/f < -0.7, 0.5 < f2/f < 1.5, 1.5 < f3/f < 3; wherein f1 is the focal length of the first lens, f2 is the focal length of the second lens, f3 is the focal length of the third lens in the meridian direction, and f is the focal length of the lossless split lens.
As a preferred embodiment, the meridional focal length of the first lens, the second lens, and the third lens and the focal length of the lossless split lens satisfy: f1/f is-0.42, f2/f is 0.97, f3/f is 2.11; wherein f1 is the focal length of the first lens, f2 is the focal length of the second lens, f3 is the focal length of the third lens in the meridian direction, and f is the focal length of the lossless split lens.
In a preferred embodiment, the front and rear sides of the first lens have radii of curvature R1-27 mm and R2-27 mm, respectively, and the center thickness of the first lens is d 1-1.5 mm.
In a preferred embodiment, the front and rear sides of the second lens have radii of curvature R3 ∞ and R4 ∞ -31mm, respectively, and the center thickness of the second lens is d3 ∞ 4.2 mm.
In a preferred embodiment, the radius of curvature of the third lens is 67.5mm in the meridional direction R5, infinity in the sagittal direction R5, and infinity in the R6, and the center thickness of the third lens is 3.2mm in d 5.
In a preferred embodiment, the first lens, the second lens and the third lens are all fused quartz lenses, and the refractive index Nd is 1.46.
In a preferred embodiment, the air gap between the first lens and the second lens is 24mm ≤ d2 ≤ 44mm, and the air gap between the second lens and the third lens is d4 ≤ 5 mm.
After the technical scheme is adopted, the utility model has the beneficial effects that:
the utility model can lead the working wavelength of the lens to be 1030-1090nm, lead the field lens to have the characteristics of small lens caliber, simple structure, low cost, elliptical light spot formation, increased heating efficiency, light spot size adjustment through the optical element and the like, lead the splitting yield to be improved to 99 ten thousandths, and simultaneously realize the remarkable improvement of the splitting speed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a meridional structure of the present invention;
FIG. 2 is a schematic view of the sagittal direction structure of the present invention;
FIG. 3 is a schematic view of a meridional ray tracing of the present invention;
FIG. 4 is a schematic view of sagittal ray tracing according to the present invention;
FIG. 5 is a schematic diagram of a maximum focused spot of the present invention;
FIG. 6 is a schematic view of a standard position focused spot of the present invention;
FIG. 7 is a schematic view of a minimum focused spot of the present invention;
in the figure: 1. a first lens; 2. a second lens; 3. a third lens.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example (b):
referring to fig. 1-7, the present invention provides a nondestructive splinter cutting head: the focusing lens comprises a first lens 1, a second lens 2 and a third lens 3 which are sequentially arranged along the propagation direction of a light beam, wherein the light beam can form an oval focusing light spot on an image surface through the light path; the first lens 1 is of a biconcave structure and has a negative focal length, the second lens 2 is of a biconcave structure and has a negative focal length, the distance between the first lens 1 and the second lens 2 is adjustable and is used for adjusting the size of a long axis/a short axis of a focusing light spot, the long axis adjusting range of the focusing light spot is 18-14mm, and the short axis adjusting range is 7.5-1.5 mm; the third lens 3 is a cylindrical lens and has a plano-convex structure, and the focal length in the meridian direction is positive, and the focal length in the sagittal direction is infinite.
Specifically, the meridional focal length of the first lens 1, the second lens 2 and the third lens 3 and the focal length of the lossless splinter cutting head satisfy: -0.1 < f1/f < -0.7, 0.5 < f2/f < 1.5, 1.5 < f3/f < 3; wherein f1 is the focal length of the first lens 1, f2 is the focal length of the second lens 2, f3 is the focal length of the third lens 3 in the meridional direction, f is the focal length of the lossless split lens, and the focal lengths of the first lens 1, the second lens 2 and the third lens 3 in the meridional direction and the focal length of the lossless split lens satisfy: f1/f is-0.42, f2/f is 0.97, f3/f is 2.11; wherein f1 is the focal length of the first lens 1, f2 is the focal length of the second lens 2, f3 is the focal length of the third lens 3 in the meridian direction, and f is the focal length of the lossless split lens.
Referring to fig. 1 and 2, the front and rear sides of the first lens 1 have radii of curvature R1-27 mm and R2-27 mm, respectively, and the center thickness d1 of the first lens 1 is 1.5 mm; the front and rear sides of the second lens 2 have radii of curvature of R3 ∞ and R4 ∞ -31mm, respectively, and the center thickness of the second lens 2 is d3 ═ 4.2 mm; the curvature radius of the front and rear sides of the third lens 3 is 67.5mm in the meridional direction R5, infinity in the sagittal direction R5, and infinity in the sagittal direction R6, and the center thickness of the third lens 3 is 3.2mm in d 5.
Meanwhile, the first lens 1, the second lens 2 and the third lens 3 are all fused quartz lenses, the refractive index Nd is 1.46, the air gap between the first lens 1 and the second lens 2 is more than or equal to 24mm and less than or equal to d2 and less than or equal to 44mm, and the air gap between the second lens 2 and the third lens 3 is more than or equal to d4 and less than or equal to 5 mm.
The above design parameters refer to the following table:
| spherical surface | Radius of curvature R (mm) | Air gap d (mm) | Material Nd: Vd |
| R1 | -27 | d1＝1.5 | 1.46:68 |
| R2 | 27 | 24mm≤d2≤44 | |
| R3 | ∞ | d3＝4.2 | 1.46:68 |
| R4 | -31 | d4＝5 | |
| R5 | Meridian 67.5 sagittal infinity | d5＝3.2 | 1.46:68 |
| R6 | ∞ | d6＝125 |
Other parameters corresponding to the above embodiment design are as follows:
f＝70mm，EPD＝7mm，λ＝1030-1090nm；
f1/f＝-0.42，f2/f＝0.97，f3/f＝2.11；
in the above formula, f1 is the focal length of the first lens 1, f2 is the focal length of the second lens 2, f3 is the focal length of the third lens 3 in the meridian direction, f is the focal length of the lossless splinter cutting head, and EPD is the entrance pupil diameter of the lossless splinter cutting head.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (8)
1. The utility model provides a harmless lobe of a leaf cutting head which characterized in that: the focusing device comprises a first lens (1), a second lens (2) and a third lens (3) which are sequentially arranged along the propagation direction of light beams, wherein the light beams can form oval focusing light spots on an image surface through the light path;
the first lens (1) is of a biconcave structure, the focal length of the first lens is negative, the second lens (2) is of a biconcave structure, the focal length of the second lens is negative, the distance between the first lens (1) and the second lens (2) is adjustable and used for adjusting the size of a long axis/a short axis of the focusing light spot, the adjusting range of the long axis of the focusing light spot is 18-14mm, and the adjusting range of the short axis is 7.5-1.5 mm;
the third lens (3) is a cylindrical lens and is of a plano-convex structure, the focal length in the meridian direction is positive, and the focal length in the sagittal direction is infinite.
2. The nondestructive splinter cutting head of claim 1 wherein: the meridional focal length of the first lens (1), the second lens (2) and the third lens (3) and the focal length of the lossless splinter cutting head meet the following requirements: -0.1 < f1/f < -0.7, 0.5 < f2/f < 1.5, 1.5 < f3/f < 3;
wherein f1 is the focal length of the first lens (1), f2 is the focal length of the second lens (2), f3 is the focal length of the third lens (3) in the meridian direction, and f is the focal length of the lossless split lens.
3. A nondestructive splinter cutting head as claimed in claim 1 wherein: the meridional focal length of the first lens (1), the second lens (2) and the third lens (3) and the focal length of the lossless splitting lens meet the following requirements: f1/f is-0.42, f2/f is 0.97, f3/f is 2.11;
wherein f1 is the focal length of the first lens (1), f2 is the focal length of the second lens (2), f3 is the focal length of the third lens (3) in the meridian direction, and f is the focal length of the lossless split lens.
4. The nondestructive splinter cutting head of claim 1 wherein: the curvature radiuses of the front and rear sides of the first lens (1) are respectively 27mm (R1) and 27mm (R2), and the center thickness of the first lens (1) is 1.5mm (d 1).
5. The nondestructive splinter cutting head of claim 1 wherein: the front and rear sides of the second lens (2) have radii of curvature of R3 ∞ and R4 ∞ -31mm, respectively, and the center thickness of the second lens (2) is d3 ∞ 4.2 mm.
6. A nondestructive splinter cutting head as claimed in claim 1 wherein: the curvature radius of the front and back sides of the third lens (3) is 67.5mm in the meridian direction R5, infinity in the sagittal direction R5, and infinity in the R6, and the center thickness of the third lens (3) is 3.2mm in d 5.
7. A nondestructive splinter cutting head as claimed in claim 1 wherein: the first lens (1), the second lens (2) and the third lens (3) are all fused quartz lenses, and the refractive indexes Nd are all 1.46.
8. The nondestructive splinter cutting head of claim 1 wherein: the air gap between the first lens (1) and the second lens (2) is more than or equal to 24mm and less than or equal to d2 and less than or equal to 44mm, and the air gap between the second lens (2) and the third lens (3) is more than or equal to d4 and 5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220410049.4U CN216966669U (en) | 2022-02-28 | 2022-02-28 | Nondestructive lobe cutting head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220410049.4U CN216966669U (en) | 2022-02-28 | 2022-02-28 | Nondestructive lobe cutting head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216966669U true CN216966669U (en) | 2022-07-15 |
Family
ID=82356699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220410049.4U Active CN216966669U (en) | 2022-02-28 | 2022-02-28 | Nondestructive lobe cutting head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216966669U (en) |
-
2022
- 2022-02-28 CN CN202220410049.4U patent/CN216966669U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206696536U (en) | A kind of Ultra-Violet Laser continuous zoom beam expanding lens | |
| CN111736329A (en) | ZOOM optical system of double-sheet type aspherical mirror | |
| CN117215078A (en) | Variable divergence angle laser illumination lens based on beam shaping | |
| CN216966669U (en) | Nondestructive lobe cutting head | |
| CN110471144B (en) | Aberration-eliminating myriawatt-level optical fiber connector | |
| CN111463656A (en) | Optical fiber coupling system | |
| CN111458813A (en) | Laser coupling optical path | |
| CN114326055B (en) | Infrared field lens with large scanning angle | |
| CN210243948U (en) | Novel laser cutting camera lens | |
| CN220739796U (en) | Short-focal length long-working distance cutting focusing lens | |
| CN110018565B (en) | Method and device for improving focusing capacity of ultrafast laser beam | |
| CN114754329B (en) | Large-angle high-magnification zoom laser illumination lens | |
| CN210427969U (en) | ZOOM cutting device based on adjustable annular light spot of aspherical mirror | |
| CN113376844A (en) | Continuous zoom beam expander suitable for high-power-density ultraviolet laser | |
| CN112404704A (en) | Variable-power laser beam expander and laser processing system | |
| CN218122342U (en) | Laser ranging optical system | |
| CN214872765U (en) | M-type short-focus infrared laser lens | |
| CN110560919A (en) | Optical aberration-based optical fiber laser cutting lens group | |
| CN212162326U (en) | Optical fiber coupling system | |
| CN216083234U (en) | F-theta objective lens | |
| CN212160164U (en) | Laser coupling optical path | |
| CN213764516U (en) | Telecentric lens for laser cutting processing | |
| CN110328445B (en) | Near-infrared monochromatic objective lens | |
| CN215181169U (en) | F-theta objective lens | |
| CN220340475U (en) | High-power objective lens for laser cutting |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |