CN216965463U - A height adjusting device for carborundum substrate piece washes process - Google Patents
A height adjusting device for carborundum substrate piece washes process Download PDFInfo
- Publication number
- CN216965463U CN216965463U CN202123013778.0U CN202123013778U CN216965463U CN 216965463 U CN216965463 U CN 216965463U CN 202123013778 U CN202123013778 U CN 202123013778U CN 216965463 U CN216965463 U CN 216965463U
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- column
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- lifting rod
- fixed
- rod
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- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 title claims abstract description 15
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000001680 brushing effect Effects 0.000 claims abstract description 9
- 238000009434 installation Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 12
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000006004 Quartz sand Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002006 petroleum coke Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
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- Cleaning In General (AREA)
Abstract
The utility model belongs to the technical field of silicon carbide, and particularly relates to a height adjusting device for a brushing process of a silicon carbide substrate. The utility model achieves the technical effect of adjusting the height position of the bristles through the lifting rod unit for connecting the brush head, the fixed column unit for installing the lifting rod unit and the rotating column unit which is arranged on the fixed column unit and used for adjusting the position of the lifting rod unit. The utility model has the advantages of simple structure and convenient installation, the lifting column is combined with the fixed column to drive the brush head to adjust the height position, the rotating column is arranged outside to drive the lifting column to move up and down, the rotating column is provided with the limiting structure to fix the height of the lifting column, and the rotating fixed connection structure is arranged on the lifting column to enable the rotating column to rotate freely on the lifting column.
Description
Technical Field
The utility model belongs to the technical field of silicon carbide, and particularly relates to a height adjusting device for a brushing process of a silicon carbide substrate.
Background
Silicon carbide is an inorganic substance and is formed by smelting quartz sand, petroleum coke, wood chips and other raw materials in a resistance furnace at high temperature. Silicon carbide is one of the most concerned third-generation semiconductor materials at present, has excellent performance under conditions of high temperature, high pressure, high frequency and the like, and has great potential in aspects of semiconductor lighting photoelectric devices, power electronics, radio frequency microwave devices, lasers, detection devices, solar cells, biosensors and other devices, etc., a silicon carbide substrate sheet is generally prepared by adopting a method of cutting silicon carbide rods by electroplating diamond wires, however, some fragment residues possibly remain on the surface of the silicon carbide substrate sheet in the preparation process and need to be cleaned, however, the traditional cleaning device cannot adjust the height of bristles, and cannot adapt to silicon carbide substrate sheets at different height positions, so that a silicon carbide substrate sheet cleaning device capable of adjusting the height positions of the bristles is urgently needed in the market.
The Chinese patent with publication number CN109585268A and publication number 2019-04-05 discloses a method for cleaning a silicon carbide wafer, which comprises the steps of plasma cleaning and wet cleaning, and comprises the steps of SPM cleaning, water cleaning, HPM cleaning, DHF cleaning, N2 environment drying and the like.
Although the utility model has the advantages of high cleaning degree of plasma cleaning and wet cleaning; however, the utility model has the disadvantage of complex cleaning method.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a height adjusting device for a brushing process of a silicon carbide substrate slice. The utility model has the advantages of simple structure and convenient installation, the lifting column is combined with the fixed column to drive the brush head to adjust the height position, the rotating column is arranged outside to drive the lifting column to move up and down, the rotating column is provided with the limiting structure to fix the height of the lifting column, and the rotating fixed connection structure is arranged on the lifting column to enable the rotating column to rotate freely on the lifting column.
The technical scheme adopted by the utility model for solving the problems is as follows: a height adjusting device for a brushing process of a silicon carbide substrate slice comprises a lifting rod unit used for being connected with a brush head, a fixed column unit used for installing the lifting rod unit, and a rotary column unit arranged on the fixed column unit and used for adjusting the position of the lifting rod unit.
The further preferred technical scheme is as follows: the lifting rod unit comprises a lifting rod arranged on the brush head; the fixed column unit comprises a fixed rod which is arranged on a fixed surface and used for connecting the lifting rod.
The further preferred technical scheme is as follows: the fixed column unit further comprises a fixed rod cavity and a lifting rod hole, wherein the fixed rod cavity is formed in the fixed rod, and the lifting rod hole is formed in the fixed rod, communicated with the fixed rod cavity and used for fixing the lifting rod.
The further preferred technical scheme is as follows: the fixed column unit also comprises a rotary column hole which is arranged on the fixed rod, communicated with the cavity of the fixed rod and used for mounting the rotary column unit; the spin column unit includes a spin column passing through the spin column hole and for connecting the lift lever.
The further preferred technical scheme is as follows: the fixed column unit also comprises a clamping groove which is arranged on the inner annular surface of the hole of the rotating column and is used for fixing the rotating column; the rotating column unit further comprises a clamping column which is arranged on the rotating column and used for clamping the clamping groove.
The further preferred technical scheme is as follows: the lifting rod unit further comprises a limiting column arranged on the fixing rod; the rotating column unit further comprises a limiting groove which is arranged on the rotating column and used for clamping the limiting column.
The further preferred technical scheme is as follows: the lifting rod unit further comprises a limiting ring arranged on the limiting column; the rotating column unit further comprises an annular limiting groove which is arranged on the inner ring surface of the limiting groove and used for clamping the limiting ring.
The further preferred technical scheme is as follows: the lifting rod unit also comprises a sliding groove arranged on the lifting rod; the fixed column unit further comprises a sliding column which is arranged on the top surface of the inner side of the fixed rod cavity and used for installing the sliding groove.
The further preferred technical scheme is as follows: the spin column unit further includes a rotation plate disposed on the spin column.
The further preferred technical scheme is as follows: the contact surface of the clamping column and the clamping groove is an arc surface.
The utility model achieves the technical effect of adjusting the height position of the bristles through the lifting rod unit for connecting the brush head, the fixed column unit for installing the lifting rod unit and the rotating column unit which is arranged on the fixed column unit and used for adjusting the position of the lifting rod unit. The utility model has the advantages of simple structure and convenient installation, the lifting column is combined with the fixed column to drive the brush head to adjust the height position, the rotating column is arranged outside to drive the lifting column to move up and down, the rotating column is provided with the limiting structure to fix the height of the lifting column, and the rotating fixed connection structure is arranged on the lifting column to enable the rotating column to rotate freely on the lifting column.
Drawings
Fig. 1 is a schematic structural view of the height adjusting device driving the brush head to ascend.
Fig. 2 is a schematic structural view of the height adjusting device driving the brush head to descend.
FIG. 3 is a schematic view of the connection between the fixing rod and the lifting rod and the structure of the parts inside the cavity of the fixing rod.
Fig. 4 is a schematic structural view of a connection mode of the limiting groove and the limiting column in the utility model.
FIG. 5 is a schematic structural view of the connection between the engaging post and the engaging groove of the present invention.
Detailed Description
The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.
Example (b): as shown in fig. 1, 2, 3, 4 and 5, a height adjusting device for a silicon carbide substrate brushing process comprises a lifting rod unit 2 for connecting a brush head a, a fixed column unit 1 for installing the lifting rod unit 2, and a rotary column unit 3 arranged on the fixed column unit 1 for adjusting the position of the lifting rod unit 2.
In this embodiment, the lifting rod unit 2 is disposed on the back of the brush head a and has a function of moving up and down, the fixed column unit 1 is disposed on a fixed surface B and is used for fixedly mounting the lifting rod unit 2, and the rotary column unit 3 is disposed on the fixed column unit 1 and is connected to the lifting rod unit 2 for adjusting the height position of the lifting rod unit 2.
The lifting rod unit 2 comprises a lifting rod 201 arranged on the brush head A; the fixed column unit 1 includes a fixed rod 101 disposed on a fixed surface B and used for connecting the lifting rod 201.
In this embodiment, the lifting rod 201 is a rod body having a lifting function, and the fixing rod 101 is used for fixing the lifting rod 201.
The fixing column unit 1 further includes a fixing column cavity 102 provided on the fixing column 101, and a lifting column hole 103 provided on the fixing column 101 and communicating with the fixing column cavity 102 and fixing the lifting column 201.
In this embodiment, the lifting rod 201 enters the fixing rod cavity 102 by being inserted into the lifting rod hole 103, and can be fixed through the lifting rod hole 103, so that the lifting rod 201 can only move up and down, but cannot rotate or translate.
The fixed column unit 1 further comprises a rotary column hole 104 provided on the fixed rod 101 and communicating with the fixed rod cavity 102 for mounting the rotary column unit 3; the spin column unit 3 includes a spin column 301 passing through the spin column hole 104 and for connecting the lift lever 201.
In this embodiment, the rotary column 301 can be controlled by the operator to move up and down in the fixed rod cavity 102 by moving up and down in the outside, and the rotary column hole 104 can fix the rotary column 301.
The fixed column unit 1 further comprises an engaging groove 105 which is arranged on the inner annular surface of the rotating column hole 104 and used for fixing the rotating column 301; the spin column unit 3 further includes an engaging column 302 provided on the spin column 301 and engaging with the engaging groove 105.
In this embodiment, a plurality of the engaging slots 105 are arranged in an array on the side surface of the rotating column hole 104, and the engaging columns 302 are fixed in the engaging slots 105 in a manner of engaging with the rotating column 301, so that the lifting rod 201 is fixed at a specific height position.
The lifting rod unit 2 further comprises a limiting column 202 arranged on the fixing rod 101; the spin column unit 3 further includes a stopper groove 303 provided on the spin column 301 and adapted to engage with the stopper column 202.
In this embodiment, the position-limiting column 202 is engaged in the position-limiting groove 303 and can freely rotate in the position-limiting groove 303, so that the rotating column 301 can drive the lifting rod 201 to move up and down and can rotate.
The lifting rod unit 2 further comprises a limiting ring 203 arranged on the limiting column 202; the spin column unit 3 further includes an annular limiting groove 304 disposed on an inner annular surface of the limiting groove 303 and configured to engage with the limiting ring 203.
In this embodiment, the stop collar 203 is disposed on the rotation column 301 and is engaged in the annular stop groove 304, so that the rotation column 301 can freely rotate on the stop column 202 and cannot be disengaged from the stop column 202.
The lifting rod unit 2 further comprises a sliding groove 204 arranged on the lifting rod 201; the fixing post unit 1 further includes a sliding post 106 disposed on an inner top surface of the fixing post cavity 102 and used for mounting the sliding groove 204.
In this embodiment, the sliding groove 204 is disposed at the central portion of the top of the lifting rod 201, and the sliding column 106 is disposed at the top of the fixing rod cavity 102 and inserted into the sliding groove 204, so that the lifting rod 201 does not shake left and right during the up and down movement.
The spin column unit 3 further includes a rotation plate 305 provided on the spin column 301.
In this embodiment, the rotating plate 305 increases the torque for rotating the rotating column 301, so that the rotating process is more labor-saving.
The contact surface of the clamping column 302 and the clamping groove 105 is an arc surface.
In this embodiment, the front end of the engaging column 302 is an arc surface, so that when the rotating column 301 is rotated, the engaging column 302 can easily slide into the engaging groove 105 through the elasticity of the engaging column 302 and the sliding action of the arc surface.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various modifications can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. These are non-inventive modifications, which are intended to be protected by patent laws within the scope of the claims appended hereto.
Claims (4)
1. A height adjusting device for a brushing process of a silicon carbide substrate slice is characterized by comprising a lifting rod unit (2) used for connecting a brush head (A), a fixed column unit (1) used for installing the lifting rod unit (2), and a rotary column unit (3) arranged on the fixed column unit (1) and used for adjusting the position of the lifting rod unit (2); the lifting rod unit (2) comprises a lifting rod (201) arranged on the brush head (A); the fixed column unit (1) comprises a fixed rod (101) which is arranged on a fixed surface (B) and is used for connecting the lifting rod (201); the fixing column unit (1) further comprises a fixing rod cavity (102) arranged on the fixing rod (101), and a lifting rod hole (103) which is arranged on the fixing rod (101), communicated with the fixing rod cavity (102) and used for fixing the lifting rod (201); the fixed column unit (1) further comprises a rotary column hole (104) which is arranged on the fixed rod (101), communicated with the fixed rod cavity (102) and used for mounting the rotary column unit (3); the rotary column unit (3) comprises a rotary column (301) which passes through the rotary column hole (104) and is used for connecting the lifting rod (201); the fixed column unit (1) further comprises a clamping groove (105) which is arranged on the inner annular surface of the rotary column hole (104) and used for fixing the rotary column (301); the rotating column unit (3) further comprises an engaging column (302) which is arranged on the rotating column (301) and is used for engaging with the engaging groove (105); the lifting rod unit (2) further comprises a limiting column (202) arranged on the fixing rod (101); the rotating column unit (3) further comprises a limiting groove (303) which is arranged on the rotating column (301) and used for clamping the limiting column (202); the lifting rod unit (2) further comprises a limiting ring (203) arranged on the limiting column (202); the rotary column unit (3) further comprises an annular limiting groove (304) which is arranged on the inner annular surface of the limiting groove (303) and used for clamping the limiting ring (203).
2. A height adjusting device for a brushing process of a silicon carbide substrate sheet according to claim 1, wherein the lift lever unit (2) further comprises a sliding groove (204) provided on the lift lever (201); the fixed column unit (1) further comprises a sliding column (106) which is arranged on the top surface of the inner side of the fixed rod cavity (102) and used for installing the sliding groove (204).
3. A height adjusting apparatus for a brushing process of a silicon carbide substrate sheet according to claim 1, wherein the spin column unit (3) further comprises a rotation plate (305) provided on the spin column (301).
4. The height adjusting device for the brushing process of the silicon carbide substrate as recited in claim 1, wherein the contact surface of the engaging column (302) and the engaging groove (105) is an arc surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123013778.0U CN216965463U (en) | 2021-12-02 | 2021-12-02 | A height adjusting device for carborundum substrate piece washes process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123013778.0U CN216965463U (en) | 2021-12-02 | 2021-12-02 | A height adjusting device for carborundum substrate piece washes process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216965463U true CN216965463U (en) | 2022-07-15 |
Family
ID=82346607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123013778.0U Active CN216965463U (en) | 2021-12-02 | 2021-12-02 | A height adjusting device for carborundum substrate piece washes process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216965463U (en) |
-
2021
- 2021-12-02 CN CN202123013778.0U patent/CN216965463U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240201 Address after: No. 588, Liji East Road, Zhili Town, Wuxing District, Huzhou, Zhejiang Province 313000 Patentee after: Huzhou Dongni Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 313000 No. 555 Liji East Road, Zhili Town, Wuxing District, Huzhou City, Zhejiang Province Patentee before: ZHEJIANG TONY ELECTRONIC Co.,Ltd. Country or region before: China Patentee before: Huzhou Dongni Semiconductor Technology Co.,Ltd. |