CN216957988U

CN216957988U - Device for automatically assembling and disassembling cover plate

Info

Publication number: CN216957988U
Application number: CN202220575839.8U
Authority: CN
Inventors: 刘应建; 黄建友; 杨清明
Original assignee: CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
Current assignee: CHENGDU KINGBRI FREQUENCY TECHNOLOGY CO LTD
Priority date: 2022-03-15
Filing date: 2022-03-15
Publication date: 2022-07-12
Anticipated expiration: 2032-03-15

Abstract

The utility model discloses a device for automatically assembling and disassembling a cover plate, which comprises an adsorption device, a fixed plate and a lifting and grabbing device, wherein a clamp is arranged on the adsorption device and is fixed through the fixed plate, a wafer is adsorbed and fixed on the clamp, and the lifting and grabbing device grabs the clamp and then places the clamp. The device for automatically assembling and disassembling the cover plate can be used for multiple times, reduces dislocation and pollution caused by manual touch, is simple and convenient to operate, reduces uncontrollable influence caused by manual intervention, and is suitable for wide industrial application.

Description

Device for automatically assembling and disassembling cover plate

Technical Field

The utility model belongs to the technical field of automatic assembly and disassembly of clamps, and particularly relates to a device for automatically assembling and disassembling a cover plate.

Background

In traditional wafer production process, to the last piece of wafer and coating film after, need artifical manual cover the apron or take off, can take away from the trench with wafer in the anchor clamps when putting the apron by hand, produce defective products and extravagant influence to subsequent handling.

When the wafer is taken and placed manually, the wafer is inevitably touched, and pollution is caused. Therefore, there is a need for a new cover plate automatic loading and unloading device for loading and unloading the cover plate of the wafer.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the problems and provide a device for automatically assembling and disassembling a cover plate, which can be used for multiple times, reduces manual touch on a wafer and is simple to operate.

In order to solve the technical problem, the technical scheme of the utility model is as follows: the utility model provides an automatic device of loading and unloading apron, includes adsorption equipment, fixed plate and lift grabbing device, installs anchor clamps on the adsorption equipment and fixes through the fixed plate, and the wafer adsorbs to be fixed on anchor clamps, and the lift grabbing device is placed after snatching anchor clamps.

Preferably, the adsorption device comprises an adsorption plate, a negative pressure pump is installed at the bottom of the adsorption plate, an adsorption hole is formed in the adsorption plate, air adsorption force generated by the negative pressure pump adsorbs the clamp through the adsorption hole in the adsorption plate, and meanwhile, the wafer is adsorbed and fixed on the clamp.

Preferably, the number of the fixed plates is four, the four fixed plates form a rectangular structure, each fixed plate is connected with an air cylinder, and a piston rod of each air cylinder pushes the fixed plate to move.

Preferably, the lifting grabbing device comprises a lifting grabbing rod and a lifting grabbing body, and the lifting grabbing body is located at the end of the lifting grabbing rod and used for grabbing the clamp.

Preferably, the body is grabbed in the lift and is equipped with clamping jaw cylinder and clamping jaw, and clamping jaw cylinder drives clamping jaw (33) and opens and shuts the motion, and the pointed end of clamping jaw is the wedge column structure.

The utility model has the beneficial effects that:

the device for automatically assembling and disassembling the cover plate can be used for multiple times, reduces dislocation and pollution caused by manual touch, is simple and convenient to operate, reduces uncontrollable influence caused by manual intervention, and is suitable for wide industrial application.

Drawings

FIG. 1 is a schematic view of the installation structure of the adsorption device and the fixing plate according to the present invention;

FIG. 2 is a schematic structural view of the lifting and gripping device of the present invention;

figure 3 is a schematic view of the structure of the jaw of the present invention.

Description of the reference numerals: 1. an adsorption device; 2. a fixing plate; 3. a lifting and grabbing device; 11. an adsorption plate; 12. an adsorption hole; 31. lifting the grabbing rod; 32. lifting the grabbing main body; 33. a clamping jaw; 311. lifting and grabbing the vertical rod; 312. the lifting grabbing cross rod.

Detailed Description

The utility model is further described with reference to the following figures and specific embodiments:

as shown in fig. 1 to 3, the device for automatically loading and unloading a cover plate provided by the utility model comprises an adsorption device 1, a fixing plate 2 and a lifting and grabbing device 3, wherein a clamp is arranged on the adsorption device 1 and fixed by the fixing plate 2, a wafer is adsorbed and fixed on the clamp, and the lifting and grabbing device 3 grabs the clamp and then places the clamp.

The adsorption device 1 comprises an adsorption plate 11, a negative pressure pump is installed at the bottom of the adsorption plate 11, an adsorption hole 12 is formed in the adsorption plate 11, air adsorption force generated by the negative pressure pump adsorbs the clamp through the adsorption hole 12 in the adsorption plate 11, and meanwhile, a wafer is adsorbed and fixed on the clamp. In this embodiment, the negative pressure pump is a prior art device, and can generate negative pressure, and the wafer is fixed on the clamp by the air adsorption force generated by the negative pressure.

The quantity of adsorption holes 12 is a plurality of and array form distributes on adsorption plate 11, through the setting of a plurality of adsorption holes 12, can make the negative pressure that the negative pressure pump produced carry out better absorption fixed to the anchor clamps of installing the wafer, can not take place the condition appearance such as not hard up.

The cross section of the adsorption plate 11 is a rectangular plate-shaped structure, and a clamp installed on the adsorption plate 11 is a conventional mature technology, and the clamp is a conventional fixing clamp for fixing a wafer.

The quantity of fixed plate 2 is four, and four fixed plate 2 constitute rectangle column structure, are connected with the cylinder on every fixed plate 2, and the piston rod of cylinder promotes fixed plate 2 and moves. The fixing plate 2 is pushed to move by the control cylinder, so that the clamp is fixed.

The lifting grabbing device 3 comprises a lifting grabbing rod 31 and a lifting grabbing body 32, wherein the lifting grabbing body 32 is positioned at the end part of the lifting grabbing rod 31 and is used for grabbing the clamp.

In this embodiment, the lifting grabbing rod 31 includes a lifting grabbing vertical rod 311 and a lifting grabbing cross rod 312, a lifting nut is sleeved on the lifting grabbing vertical rod 311, a nut seat is sleeved outside the lifting nut, and the lifting grabbing cross rod 312 is fixedly connected with the nut seat. The lifting grabbing vertical rod 311 is of a screw rod structure, the bottom of the lifting grabbing vertical rod 311 is connected with a lifting motor and a speed reducer, the output end of the lifting motor is connected with the speed reducer, and the speed reducer is connected with the lifting grabbing vertical rod 311. The lifting motor drives the lifting grabbing vertical rod 311 to rotate during working, so that the lifting nut drives the nut seat to move along the axis of the lifting grabbing vertical rod 311, and the lifting grabbing cross rod 312 moves up and down. Thereby, the lifting grabbing rod 31 can drive the lifting grabbing main body 32 to move, and the grabbing of the clamp is completed.

Be equipped with clamping jaw cylinder and clamping jaw 33 on the body 32 is snatched in the lift, and clamping jaw cylinder drives clamping jaw 33 and opens and shuts the motion, and the pointed end of clamping jaw 33 is the wedge column structure. The lifting grabbing cross rod 312 drives the clamping jaw 33 to move in the lifting process, the cross section of the clamping jaw 33 is in a trapezoid shape with an opening at the bottom, and the end part of the clamping jaw 33 can grab the fixture. The opening of clamping jaw 33 is adjustable structure, according to current anchor clamps size of dimensions, adjusts the opening size of clamping jaw 33 bottom to be convenient for better snatch anchor clamps. In this embodiment, the clamping jaw 33 is rotatably connected with the clamping jaw body 32, the clamping jaw 33 comprises a first clamping jaw and a second clamping jaw, the first clamping jaw and the second clamping jaw are rotatably connected with the clamping jaw body 32 respectively, clamping jaw connecting pieces are arranged on the first clamping jaw and the second clamping jaw, and the end parts of the two clamping jaw connecting pieces are rotatably connected with the first clamping jaw and the second clamping jaw respectively. The other ends of the two clamping jaw connecting pieces are rotatably connected with the piston rod end of the clamping jaw air cylinder, and when the clamping jaw air cylinder is used, the clamping jaw air cylinder works to push the first clamping jaw and the second clamping jaw to move through the piston rod, so that the clamping function of the clamp is realized. The tips of the jaws 33 are the tips of the first and second jaws. The first clamping jaw and the second clamping jaw are of existing mature clamping jaw structures and are properly adjusted according to a clamp needing to be grabbed.

The clamping jaw 33 is made of ceramic materials and used for protecting a clamp cover plate in the clamping process. The ends of the first jaw and the second jaw can be inserted along the gap of the edge of the clamp, thereby facilitating the clamping operation.

When the clamp is used, the clamp is placed on the adsorption plate 11, and the periphery of the clamp is folded and fixed through the fixing plate 2. And simultaneously, the negative pressure pump works to start to pump negative pressure. The clamp comprises a clamp bottom plate and a clamp cover plate, the wafer is located on the clamp bottom plate, a clamp bottom plate through hole is formed in the clamp bottom plate and communicated with the negative pressure pump, and the wafer is fixedly adsorbed on a set position in the clamp through negative pressure adsorption force generated by the negative pressure pump.

The lifting grabbing rod 31 carries out lifting operation, when the position to be clamped is reached, the two clamping jaws 33 are tightened inwards, so that the left vacant parts on the two sides of the clamp cover plate are clamped, the lifting grabbing rod 31 is lifted upwards, and grabbing of the clamp cover plate is completed.

It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the utility model and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the utility model, and these changes and combinations are within the scope of the utility model.

Claims

1. The utility model provides an automatic device of loading and unloading apron which characterized in that: the wafer adsorption device comprises an adsorption device (1), a fixing plate (2) and a lifting grabbing device (3), wherein a fixture is installed on the adsorption device (1) and fixed through the fixing plate (2), a wafer is adsorbed and fixed on the fixture, and the lifting grabbing device (3) grabs the fixture and then places the fixture.

2. An apparatus for automatically loading and unloading a cover plate according to claim 1, wherein: adsorption equipment (1) is including adsorption plate (11), and the negative pressure pump is installed to the bottom of adsorption plate (11), is equipped with on adsorption plate (11) and adsorbs hole (12), and the air adsorption affinity that the negative pressure pump produced adsorbs anchor clamps through adsorption hole (12) on adsorption plate (11), adsorbs the wafer simultaneously and fixes on anchor clamps.

3. An apparatus for automatically loading and unloading a cover plate according to claim 1, wherein: the quantity of fixed plate (2) is four, and four fixed plate (2) constitute rectangle column structure, are connected with the cylinder on every fixed plate (2), and the piston rod of cylinder promotes fixed plate (2) and moves.

4. An apparatus for automatically loading and unloading a cover plate according to claim 1, wherein: the lifting grabbing device (3) comprises a lifting grabbing rod (31) and a lifting grabbing body (32), wherein the lifting grabbing body (32) is located at the end part of the lifting grabbing rod (31) and used for grabbing the clamp.

5. An apparatus for automatically loading and unloading a cover plate according to claim 4, wherein: be equipped with clamping jaw cylinder and clamping jaw (33) on going up and down to snatch main part (32), clamping jaw cylinder drives clamping jaw (33) and opens and close the motion, and the pointed end of clamping jaw (33) is wedge column structure.