CN216956522U - Two-dimensional MEMS micro-mirror - Google Patents
Two-dimensional MEMS micro-mirror Download PDFInfo
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- CN216956522U CN216956522U CN202220234690.7U CN202220234690U CN216956522U CN 216956522 U CN216956522 U CN 216956522U CN 202220234690 U CN202220234690 U CN 202220234690U CN 216956522 U CN216956522 U CN 216956522U
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Abstract
The utility model discloses a two-dimensional MEMS micro-mirror, which comprises a mirror surface, a frame, a driving device and a rotating shaft, wherein a frame suspension and internal bonding structure is adopted, the structure can obtain larger static electric force moment, so that the mirror surface has a larger rotating angle, an electric isolation groove is not needed, and comb tooth etching is not needed for multiple times.
Description
Technical Field
The utility model relates to the technical field of micro-electro-mechanical systems (MEMS), in particular to a two-dimensional MEMS micro-mirror.
Background
The two-dimensional MEMS micro-mirror is widely applied to the fields of projection, laser radar, display and the like. Such as miniature laser projectors, automotive lidar for autonomous intelligent driving, heads-up displays HUD that project vehicle travel information, and the like.
The existing electrostatic driving type two-dimensional micromirror generally comprises a Gimbal structure and driving comb teeth, wherein the driving comb teeth are mutually independent. The two-dimensional electrostatic micromirror is manufactured mainly in two modes, one mode adopts a mode of etching comb teeth for multiple times, firstly, fixed comb teeth are etched at the bottom, the fixed comb teeth are separately arranged and can be independently driven, then, a bonding mode is adopted, movable comb teeth and a Gimbal structure are arranged on the upper layer, and the two-dimensional electrostatic micromirror can be manufactured. The other method is to arrange an electric isolation groove on the movable frame to keep the insulation between the movable comb teeth and the static comb teeth. The movable frame is provided with an electric isolation groove, the structural strength of the movable frame is ensured on the premise of ensuring electric insulation, and the electric isolation groove is required to be filled after the electric isolation groove is manufactured. The process for manufacturing the fillable electrical isolation groove needs to be carried out by a plurality of processes such as groove etching, insulating layer deposition/oxidation, polysilicon filling and the like, so that the whole process becomes complicated, the yield is reduced, and the production cost is increased.
SUMMERY OF THE UTILITY MODEL
The utility model aims at: the two-dimensional MEMS micro-mirror is simple in structure, high in yield and low in production cost.
In order to achieve the purpose, the utility model designs a two-dimensional MEMS micro-mirror which comprises mirror surfaces 1-8, two first rotating shafts 1-9, a frame 1-1 and two groups of driving devices.
The frame 1-1 is an annular structure, all parts of the frame 1-1 are coplanar, the mirror surface 1-8 is positioned in the annular structure of the frame 1-1, two first rotating shafts 1-9 which are made of the same material as the frame 1-1 are respectively positioned at two sides of the mirror surface 1-8, one end of each first rotating shaft 1-9 is respectively butted with the edge of the mirror surface 1-8, the other end of each first rotating shaft 1-9 is butted with the inner side edge of the frame 1-1, straight lines where the first rotating shafts 1-9 are respectively positioned are collinear with each other, and the straight lines pass through the central point of the mirror surface 1-8; two comb tooth groups are respectively arranged on two side edges of each first rotating shaft 1-9 and outwards, each comb tooth group is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals.
Two groups of driving devices are positioned inside the annular structure of the frame 1-1, the two groups of driving devices are respectively positioned at two sides of a straight line where the first rotating shafts 1-9 are positioned, each group of driving devices is provided with a first comb tooth group at each side edge position corresponding to each comb tooth group position on each first rotating shaft 1-9, each first comb tooth group on each group of driving devices is coplanar, each first comb tooth group comprises at least one comb tooth, each comb tooth in each first comb tooth group is parallel to each other, and adjacent comb teeth are at equal intervals; in the direction perpendicular to the plane of the driving device, the projections of the comb teeth in the first comb tooth groups on the driving devices are parallel to and staggered with the projections of the comb teeth in the corresponding comb tooth groups on the first rotating shafts 1-9 at the corresponding positions.
The first electrodes 1-7 are respectively arranged on the driving devices, power is respectively supplied to the first comb tooth groups on the driving devices through the first electrodes 1-7, and electrostatic force is generated between each comb tooth in each driving device and each comb tooth at the corresponding position by combining the power supply to each comb tooth group on the first rotating shaft 1-9, so that the driving mirror surfaces 1-8 rotate by taking the straight line where the first rotating shafts 1-9 are positioned as an axis.
As a preferred technical scheme of the utility model: the material of each second rotating shaft 1-10 is the same as that of the frame 1-1, one end of each second rotating shaft 1-10 is butted with the middle point of the side edge opposite to the side where each first comb tooth group is located on the corresponding driving device, the other end of each second rotating shaft 1-10 is butted with the inner side edge of the frame 1-1, and the straight lines where the second rotating shafts 1-10 are located are collinear with each other.
The connection relation between each group of driving devices and the corresponding second rotating shafts 1-10 is the same, for each group of driving devices, a connecting line of the middle point of the side edge where the second rotating shafts 1-10 are butted with the middle point of the side edge where the first comb tooth group is located on the driving device is defined as a reference line, the outer sides of the two side edges corresponding to the straight line which is vertically staggered with the reference line on the driving device are respectively provided with the second comb tooth group, each second comb tooth group on each group of driving devices is coplanar, each second comb tooth group respectively comprises at least one comb tooth, all comb teeth in each second comb tooth group are parallel to each other, and the adjacent comb teeth are at equal intervals.
Each inner side edge position of the frame 1-1 corresponding to each second comb tooth group position of each group of driving devices is respectively provided with a comb tooth group, each comb tooth group on the frame 1-1 is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals; in the direction perpendicular to the plane of the driving device, the projections of the comb teeth in the second comb tooth groups on the driving devices are parallel to and staggered with the projections of the comb teeth in the corresponding comb tooth groups on the corresponding position frame 1-1.
Each group of driving devices is respectively provided with a second electrode 1-5, power is supplied to each second comb tooth group on the driving device through each second electrode 1-5, and electrostatic force is generated between each comb tooth in each group of driving devices and each comb tooth at the corresponding position in combination with the power supply to each comb tooth group on the frame 1-1, so that the frame 1-1 and each group of driving devices are driven to generate relative displacement.
As a preferred technical scheme of the utility model: the substrate silicon wafer comprises a substrate silicon wafer 2, a plurality of groups of driving devices and a plurality of groups of driving devices, wherein the substrate silicon wafer 2 corresponds to the driving devices one by one and is made of insulating materials, each group of driving devices respectively comprises a frame fixed end 1-2, a first comb tooth fixing frame 1-4 and a second comb tooth fixing frame 1-6, the frame fixed end 1-2, the first comb tooth fixing frame 1-4 and the second comb tooth fixing frame 1-6 are respectively fixedly arranged on one surface of the substrate silicon wafer 2 corresponding to the driving devices at intervals, each first comb tooth group and each first electrode 1-7 in each group of driving devices are respectively positioned on each first comb tooth fixing frame 1-4, each second comb tooth group and each second electrode 1-5 in each group of driving devices are respectively positioned on each second comb tooth fixing frame 1-6, the side edge of each group of each driving device, which is opposite to the side edge where each first comb tooth group is positioned, is positioned at the midpoint of the frame in the group of driving devices The fixed ends 1-2 are respectively provided with a third electrode 1-3 on each frame fixed end 1-2, power is supplied to each comb tooth group on the inner side edge of the frame 1-1 and on each first rotating shaft 1-9 through each third electrode 1-3, electrostatic force is generated between each comb tooth in each comb tooth group and each comb tooth under the corresponding position, and the frame 1-1 and each group of driving devices are driven to generate relative displacement.
As a preferred technical scheme of the utility model: the comb teeth of each first comb tooth group on each group of driving devices and the comb teeth of each comb tooth group on the two side edges of each first rotating shaft 1-9 are respectively vertical to the straight line where each first rotating shaft 1-9 is located.
The frame 1-1, the comb tooth groups on the two side edges of the first rotating shaft 1-9, the mirror surfaces 1-8 and the driving devices of all groups are respectively in axial symmetry by taking the straight line of the first rotating shaft 1-9 as a symmetry axis.
As a preferred technical scheme of the utility model: the comb teeth in the second comb tooth groups on the driving devices and the comb teeth in the comb tooth groups on the inner side edge of the frame 1-1 are respectively vertical to the straight line where the second rotating shaft 1-10 is located.
The frame 1-1, the comb tooth groups on the two side edges of the first rotating shaft 1-9, the mirror surfaces 1-8 and the driving devices of all groups are respectively in axial symmetry by taking the straight line of the second rotating shaft 1-10 as a symmetry axis.
Has the beneficial effects that: compared with the prior art, the utility model has the advantages that:
the utility model designs a two-dimensional MEMS micro-mirror, wherein a frame with an annular structure is arranged at the outermost side, and compared with the condition that the frame is arranged at the inner side, the same electrostatic force has larger electrostatic moment, so that the mirror surface has a larger corner; the frame fixing end, the first comb fixing frame and the second comb fixing frame are intensively anchored in the region corresponding to the substrate silicon wafer, so that routing power supply is facilitated, and an electric isolation groove is prevented from being manufactured on the frame.
Drawings
FIG. 1 is a block diagram of a two-dimensional MEMS micro-mirror provided in accordance with an embodiment of the present invention;
FIG. 2 is a top view of a two-dimensional MEMS micro-mirror provided in accordance with an embodiment of the present invention;
fig. 3a to 3f are flow charts of the fabrication process of the two-dimensional MEMS micro-mirror according to the embodiment of the present invention.
Detailed Description
The utility model is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
Referring to fig. 1 and 2, a two-dimensional MEMS micro-mirror according to an embodiment of the present invention includes a mirror 1-8, two first rotating shafts 1-9, a frame 1-1, and two sets of driving devices.
The frame 1-1 is an annular structure, all parts of the frame 1-1 are coplanar, the mirror surface 1-8 is positioned in the annular structure of the frame 1-1, two first rotating shafts 1-9 which are made of the same material as the frame 1-1 are respectively positioned at two sides of the mirror surface 1-8, one end of each first rotating shaft 1-9 is respectively butted with the edge of the mirror surface 1-8, the other end of each first rotating shaft 1-9 is butted with the inner side edge of the frame 1-1, straight lines where the first rotating shafts 1-9 are respectively positioned are collinear with each other, and the straight lines pass through the central point of the mirror surface 1-8; two comb tooth groups are respectively arranged on two side edges of each first rotating shaft 1-9 and outwards, each comb tooth group is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals.
Two groups of driving devices are positioned inside the annular structure of the frame 1-1, the two groups of driving devices are respectively positioned at two sides of a straight line where the first rotating shafts 1-9 are positioned, each group of driving devices is provided with a first comb tooth group at each side edge position corresponding to each comb tooth group position on each first rotating shaft 1-9, each first comb tooth group on each group of driving devices is coplanar, each first comb tooth group comprises at least one comb tooth, each comb tooth in each first comb tooth group is parallel to each other, and adjacent comb teeth are at equal intervals; in the direction perpendicular to the plane of the driving device, the projections of the comb teeth in the first comb tooth groups on the driving devices are parallel to and staggered with the projections of the comb teeth in the corresponding comb tooth groups on the first rotating shafts 1-9 at the corresponding positions.
The first electrodes 1-7 are respectively arranged on the driving devices, power is respectively supplied to the first comb tooth groups on the driving devices through the first electrodes 1-7, and electrostatic force is generated between each comb tooth in each driving device and each comb tooth at the corresponding position by combining the power supply to each comb tooth group on the first rotating shaft 1-9, so that the driving mirror surfaces 1-8 rotate by taking the straight line where the first rotating shafts 1-9 are positioned as an axis.
The comb teeth of each first comb tooth group on each group of driving devices and the comb teeth of each comb tooth group on the two side edges of each first rotating shaft 1-9 are respectively vertical to the straight line where each first rotating shaft 1-9 is located.
The frame 1-1, the comb tooth groups on the two side edges of the first rotating shaft 1-9, the mirror surfaces 1-8 and the driving devices of all groups are respectively in axial symmetry by taking the straight line of the first rotating shaft 1-9 as a symmetry axis.
The two-dimensional MEMS micro-mirror provided by the embodiment of the utility model further comprises two second rotating shafts 1-10 which are respectively in one-to-one correspondence with each group of driving devices, the material of each second rotating shaft 1-10 is the same as that of the frame 1-1, one end of each second rotating shaft 1-10 is respectively butted with the midpoint of the side edge of the corresponding driving device, where each first comb tooth group is located, the other end of each second rotating shaft 1-10 is butted with the inner side edge of the frame 1-1, and the straight lines, where each second rotating shaft 1-10 is located, are collinear with each other.
The connection relation between each group of driving devices and the corresponding second rotating shafts 1-10 is the same, for each group of driving devices, a connecting line of the middle point of the side edge where the second rotating shafts 1-10 are butted with the middle point of the side edge where the first comb tooth group is located on the driving device is defined as a reference line, the outer sides of the two side edges corresponding to the straight line which is vertically staggered with the reference line on the driving device are respectively provided with the second comb tooth group, each second comb tooth group on each group of driving devices is coplanar, each second comb tooth group respectively comprises at least one comb tooth, all comb teeth in each second comb tooth group are parallel to each other, and the adjacent comb teeth are at equal intervals.
Each inner side edge position of the frame 1-1 corresponding to each second comb tooth group position of each group of driving devices is respectively provided with a comb tooth group, each comb tooth group on the frame 1-1 is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals; in the direction perpendicular to the plane of the driving device, the projections of the comb teeth in the second comb tooth groups on the driving devices are parallel to and staggered with the projections of the comb teeth in the corresponding comb tooth groups on the corresponding position frame 1-1.
The second electrodes 1-5 are respectively arranged on each group of driving devices, power is respectively supplied to each second comb tooth group on the driving device through each second electrode 1-5, and electrostatic force is generated between each comb tooth in each group of driving devices and each comb tooth under the corresponding position by combining the power supply to each comb tooth group on the frame 1-1, so that the frame 1-1 and each group of driving devices are driven to generate relative displacement.
In one embodiment, in order to further increase the electrostatic driving force, the driving comb sets are correspondingly arranged on the outer sides opposite to the inner sides of the comb sets on the frame 1-1 and the outer sides opposite to the comb sets on the inner sides, the driving comb sets are coplanar, each driving comb set comprises at least one comb tooth, the comb teeth in each driving comb set are parallel to each other and are equally spaced, and the comb teeth of each driving comb set on the outer sides of the frame 1-1 are respectively perpendicular to the straight line of the second rotating shaft 1-10.
The comb teeth in the second comb tooth groups on the driving devices and the comb teeth in the comb tooth groups on the inner side edge of the frame 1-1 are respectively vertical to the straight line where the second rotating shaft 1-10 is located.
The frame 1-1, the comb tooth groups on the two side edges of the first rotating shaft 1-9, the mirror surfaces 1-8 and the driving devices of all groups are respectively in axial symmetry by taking the straight line of the second rotating shaft 1-10 as a symmetry axis.
The two-dimensional MEMS micro-mirror provided by the embodiment of the utility model further comprises substrate silicon wafers 2 which are in one-to-one correspondence with each group of driving devices and are made of insulating materials, wherein each group of driving devices respectively comprises a frame fixing end 1-2, a first comb fixing frame 1-4 and a second comb fixing frame 1-6, wherein the frame fixing end 1-2, the first comb fixing frame 1-4 and the second comb fixing frame 1-6 are respectively fixedly arranged on one surface of the substrate silicon wafer 2 corresponding to the driving devices at intervals of a preset gap, and referring to fig. 2, a black frame line area is an anchoring range of each substrate silicon wafer 2; each first comb tooth group and each first electrode 1-7 in each group of driving devices are respectively positioned on each first comb tooth fixing frame 1-4, each first electrode 1-7 applies voltage U2 to the first comb tooth fixing frame 1-6, each second comb tooth group and each second electrode 1-5 in each group of driving devices are respectively positioned on each second comb tooth fixing frame 1-6, each second electrode 1-5 applies voltage U3 to the second comb tooth fixing frame 1-4, the midpoint of the side edge of each group of driving devices, which is opposite to the side edge where each first comb tooth group is positioned, is positioned on the frame fixing end 1-2 in the group of driving devices, each frame fixing end 1-2 is respectively provided with a third electrode 1-3, each third electrode 1-3 applies voltage U1 to the frame 1-1, and the third electrodes 1-3 apply voltage U1 to the inner side edge of the frame 1-1, the inner side edge of the frame 1, And each comb tooth group on each first rotating shaft 1-9 supplies power, electrostatic force is generated between each comb tooth in each comb tooth group and each comb tooth under the corresponding position, and the driving frame 1-1 and each group of driving devices generate relative displacement.
Referring to fig. 3a, the following steps are performed on a top-layer SOI silicon wafer 1 and a single silicon wafer 3 to achieve the manufacturing of the two-dimensional MEMS micro-mirror, wherein the single silicon wafer 3 may have a resistivity higher than 104The high-resistance silicon wafer of omega cm can also be a glass sheet.
Step a, referring to fig. 3b, for the top-layer SOI wafer 1, wherein the top-layer SOI wafer 1 is formed by stacking a substrate silicon, an oxide insulation layer, and a top silicon, wherein the thickness of the substrate silicon is 300um to 700um, and the resistivity of the top silicon is lower than 103And (B) etching the substrate silicon to obtain a pair of substrate silicon wafers 2 fixedly connected with the oxidation insulation layer respectively, wherein the thickness of the low-resistance silicon of omega-cm is between 30 and 200um, and the thickness of the oxidation insulation layer is between 0.5 and 5um, and then the step B is carried out.
And step B, referring to fig. 3C, aiming at the oxidation insulating layer of the top-layer SOI silicon chip 1, reserving the oxidation insulating layer between the substrate silicon chip 2 and the top silicon layer, removing the oxidation insulating layer exposed outside, and then entering the step C.
The etching method for the substrate silicon is one of sand blasting, deep reactive ion etching and KOH/TMAH wet etching processes.
And step C, referring to fig. 3D, aiming at the top-layer SOI silicon wafer 1 obtained in the step B, the top-layer SOI silicon wafer 1 and the single silicon wafer 3 are fused into a whole by bonding the top-layer SOI silicon wafer and the single silicon wafer 3, and then the step D is carried out.
The bonding method for the top-layer SOI silicon wafer 1 and the single silicon wafer 3 is one of metal bonding, anodic bonding and silicon-silicon bonding.
And D, referring to fig. 3e, aiming at the top-layer SOI silicon chip 1 obtained in the step C, manufacturing mirror surfaces 1-8, first electrodes 1-7, second electrodes 1-5 and third electrodes 1-3 on the top-layer silicon.
The method for manufacturing the mirror surfaces 1-8, the first electrodes 1-7, the second electrodes 1-5 and the third electrodes 1-3 is one of physical vapor deposition, chemical vapor deposition and evaporation of metal.
And step E, referring to fig. 3f, aiming at the top-layer SOI silicon chip 1 obtained in the step D, manufacturing a frame 1-1, first rotating shafts 1-9, second rotating shafts 1-10, driving devices and comb tooth groups on the top silicon through etching.
The materials of the mirror surfaces 1-8, the first electrodes 1-7, the second electrodes 1-5 and the third electrodes 1-3 are one or a combination of more of gold, silver, aluminum, platinum, titanium, zirconium and copper.
The embodiments of the present invention have been described in detail with reference to the drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.
Claims (5)
1. A two-dimensional MEMS micro-mirror, comprising: comprises a mirror surface (1-8), two first rotating shafts (1-9), a frame (1-1) and two groups of driving devices;
the frame (1-1) is of an annular structure, all parts of the frame (1-1) are coplanar, the mirror surface (1-8) is positioned inside the annular structure of the frame (1-1), two first rotating shafts (1-9) which are made of the same materials as the frame (1-1) are respectively positioned on two sides of the mirror surface (1-8), one end of each first rotating shaft (1-9) is respectively butted with the edge of the mirror surface (1-8), the other end of each first rotating shaft (1-9) is butted with the inner side edge of the frame (1-1), the straight lines of the first rotating shafts (1-9) are respectively collinear, and the straight lines pass through the central point of the mirror surface (1-8); two sides of each first rotating shaft (1-9) are respectively provided with a comb tooth group outwards, each comb tooth group is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals;
two groups of driving devices are positioned inside the annular structure of the frame (1-1), the two groups of driving devices are respectively positioned at two sides of a straight line where the first rotating shaft (1-9) is positioned, each group of driving devices is provided with a first comb tooth group at each side edge position corresponding to each comb tooth group position on each first rotating shaft (1-9), each first comb tooth group on each group of driving devices is coplanar, each first comb tooth group comprises at least one comb tooth, each comb tooth in each first comb tooth group is parallel to each other, and adjacent comb teeth are at equal intervals; in the direction vertical to the surface of the driving device, the projection of each comb tooth in each first comb tooth group on each group of driving device is parallel to and staggered with the projection of each comb tooth in the corresponding comb tooth group on the corresponding position first rotating shaft (1-9);
the first electrodes (1-7) are respectively arranged on each group of driving devices, power is supplied to each first comb tooth group on the driving device through each first electrode (1-7), electrostatic force is generated between each comb tooth in each group of driving devices and each comb tooth at the corresponding position by combining the power supply to each comb tooth group on each first rotating shaft (1-9), and the driving mirror surface (1-8) rotates by taking a straight line where the first rotating shaft (1-9) is positioned as an axis.
2. The two-dimensional MEMS micro-mirror of claim 1, wherein: the material of each second rotating shaft (1-10) is the same as that of the frame (1-1), one end of each second rotating shaft (1-10) is butted with the middle point of the side edge opposite to the side edge where each first comb tooth group is located on the corresponding driving device, the other end of each second rotating shaft (1-10) is butted with the inner side edge of the frame (1-1), and the straight lines where the second rotating shafts (1-10) are located are collinear with each other;
the connection relation between each group of driving devices and the corresponding second rotating shaft (1-10) is the same, for each group of driving devices, a connecting line of the middle point of the side edge where the second rotating shaft (1-10) is butted with the middle point of the side edge where the first comb tooth group is located on the driving device is defined as a reference line, the outer sides of the two side edges corresponding to the straight line which is vertically staggered with the reference line on the driving device are respectively provided with the second comb tooth group, each second comb tooth group on each group of driving devices is coplanar, each second comb tooth group respectively comprises at least one comb tooth, each comb tooth in each second comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals;
each inner side edge position of the frame (1-1) corresponding to each second comb tooth group position of each group of driving devices is respectively provided with a comb tooth group, each comb tooth group on the frame (1-1) is coplanar, each comb tooth group respectively comprises at least one comb tooth, each comb tooth in each comb tooth group is parallel to each other, and the adjacent comb teeth are at equal intervals; in the direction vertical to the surface of the driving device, the projection of each comb tooth in each second comb tooth group on each group of driving device is parallel to and staggered with the projection of each comb tooth in the corresponding comb tooth group on the corresponding position frame (1-1);
the second electrodes (1-5) are respectively arranged on the driving devices, power is supplied to the second comb tooth groups on the driving devices through the second electrodes (1-5), and electrostatic force is generated between each comb tooth in each driving device and each comb tooth at the corresponding position by combining the power supply to each comb tooth group on the frame (1-1), so that the driving frame (1-1) and each driving device generate relative displacement.
3. The two-dimensional MEMS micro-mirror of claim 2, wherein: the silicon wafer substrate comprises a substrate silicon wafer (2) which is in one-to-one correspondence with each group of driving devices and is made of insulating materials, each group of driving devices respectively comprises a frame fixed end (1-2), a first comb tooth fixing frame (1-4) and a second comb tooth fixing frame (1-6), wherein the frame fixed end (1-2), the first comb tooth fixing frame (1-4) and the second comb tooth fixing frame (1-6) are respectively fixedly arranged on one surface of the substrate silicon wafer (2) corresponding to the driving devices at intervals of preset gaps, each first comb tooth group and each first electrode (1-7) in each group of driving devices are respectively positioned on each first comb tooth fixing frame (1-4), each second comb tooth group and each second electrode (1-5) in each group of driving devices are respectively positioned on each second comb tooth fixing frame (1-6), the middle point of the side edge of each group of driving devices opposite to the side where each first comb tooth group is located on a frame fixed end (1-2) in the group of driving devices, each frame fixed end (1-2) is respectively provided with a third electrode (1-3), power is supplied to each comb tooth group on the inner side edge of the frame (1-1) and each first rotating shaft (1-9) through each third electrode (1-3), electrostatic force is generated between each comb tooth in each comb tooth group and each comb tooth under the corresponding position, and the driving frame (1-1) and each group of driving devices generate relative displacement.
4. The two-dimensional MEMS micro-mirror according to claim 1, wherein each comb tooth of each first comb tooth set of each driving device and each comb tooth of each comb tooth set on both sides of each first rotation axis (1-9) are perpendicular to the straight line of each first rotation axis (1-9), respectively;
the frame (1-1), the comb tooth groups on the two side edges of the first rotating shaft (1-9), the mirror surfaces (1-8) and the driving devices of all groups are respectively in axial symmetry by taking the straight line of the first rotating shaft (1-9) as a symmetry axis.
5. The two-dimensional MEMS micro-mirror according to claim 2, wherein each comb tooth of each second comb tooth set of each driving means, each comb tooth of each comb tooth set of the inner side edge of the frame (1-1) are perpendicular to the line of the second rotation axis (1-10), respectively;
the frame (1-1), the comb tooth groups on the two sides of the first rotating shaft (1-9), the mirror surfaces (1-8) and the driving devices of all groups are in axial symmetry by taking the straight line of the second rotating shaft (1-10) as a symmetry axis.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202220234690.7U CN216956522U (en) | 2022-01-28 | 2022-01-28 | Two-dimensional MEMS micro-mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202220234690.7U CN216956522U (en) | 2022-01-28 | 2022-01-28 | Two-dimensional MEMS micro-mirror |
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| CN216956522U true CN216956522U (en) | 2022-07-12 |
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| CN202220234690.7U Active CN216956522U (en) | 2022-01-28 | 2022-01-28 | Two-dimensional MEMS micro-mirror |
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