CN216947192U - ALD coating equipment and material mobile device thereof - Google Patents
ALD coating equipment and material mobile device thereof Download PDFInfo
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- CN216947192U CN216947192U CN202220659519.0U CN202220659519U CN216947192U CN 216947192 U CN216947192 U CN 216947192U CN 202220659519 U CN202220659519 U CN 202220659519U CN 216947192 U CN216947192 U CN 216947192U
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Abstract
The utility model provides an ALD coating device and a material moving device thereof, and relates to the technical field of atomic layer deposition devices. Wherein the material moving device comprises a first moving assembly, a driving assembly and a first pawl assembly. The first moving assembly is configured to be disposed on the ALD coating apparatus. The first movement assembly is configured to: can move along a predetermined trajectory. The driving assembly is coupled to the first moving assembly. The drive assembly is configured to: the first moving assembly can be driven to move forward or backward along a predetermined track. The first pawl assembly is disposed on the first moving assembly and is configured to: when the first moving assembly moves in the reverse direction, the first moving assembly can abut against an external object and avoid the external object, and when the first moving assembly moves in the forward direction, the first moving assembly can abut against the external object and drive the external object to move in the forward direction. The first movable assembly moving left and right drives the first pawl assembly, the carrying disc assembly moves along the preset direction, automatic material taking and placing is achieved, and manual operation is avoided.
Description
Technical Field
The utility model relates to the technical field of atomic layer deposition equipment, in particular to ALD coating equipment and a material moving device thereof.
Background
Atomic layer deposition (Atomic layer deposition) is a process by which a substance can be deposited on a substrate surface layer by layer as a monoatomic film. In an atomic layer deposition process, the chemical reaction of a new atomic film is directly related to the previous one in such a way that only one layer of atoms is deposited per reaction. Also, the deposited layer has an extremely uniform thickness and excellent uniformity.
In the coating equipment in the prior art, manual operation is mostly adopted for taking and placing the substrate, the operation is troublesome, and the risk of misoperation exists. The robot is partially used for picking and placing the substrate, but the structure is too complex, the cost is high and the substrate is easy to damage.
In view of the above, the applicant has specifically proposed the present application after studying the existing technologies.
SUMMERY OF THE UTILITY MODEL
The utility model provides ALD coating equipment and a material moving device thereof, aiming at improving the technical problem.
The first aspect,
In order to solve the technical problem, the utility model provides a material moving device of an ALD coating equipment, which comprises a first moving assembly, a driving assembly and a first pawl assembly.
The first moving assembly is configured on the ALD coating equipment. The first moving assembly is configured to: can be moved along a predetermined trajectory. The driving assembly is coupled to the first moving assembly. The drive assembly is configured to: the first moving assembly can be driven to move forward or backward along a predetermined track. The first pawl assembly is disposed on the first moving assembly and is configured to: when the first moving assembly moves in the reverse direction, the first moving assembly can abut against an external object and avoid the external object, and when the first moving assembly moves in the forward direction, the first moving assembly can abut against the external object and drive the external object to move in the forward direction.
In an alternative embodiment, the material moving apparatus further comprises a second pawl assembly disposed on the first moving assembly. The first pawl assembly and the second pawl assembly are respectively arranged at two ends of the first moving assembly.
The second pawl assembly is configured to: when the first moving assembly moves in the reverse direction, the first moving assembly can be extruded by an external object to avoid the first moving assembly, and when the first moving assembly moves in the forward direction, the first moving assembly can be abutted against the external object and drive the external object to move in the forward direction.
In an alternative embodiment, each of the first and second pawl assemblies includes a push plate rotatably disposed on the first moving assembly, and a resilient member coupled between the push plate and the first moving assembly. The push plate is provided with a butting part which is used for butting against the first moving component. The abutting part is used for limiting the push plate when the first moving assembly moves forwards. The elastic piece is used for resetting the push plate when the push plate is not abutted against an external object.
In an alternative embodiment, the material moving apparatus further comprises a second moving assembly. The second moving assembly is connected with the driving assembly and is used for being configured on the ALD coating equipment. The second moving assembly is configured to: can be driven by the driving assembly to move forward or backward along a predetermined trajectory.
The first moving component is configured on the second moving component in a sliding way. The first moving assembly is configured to: the second moving component can move along the moving direction of the second moving component when the driving component drives the second moving component to move.
In an alternative embodiment, the material moving apparatus further comprises a base assembly. The base assembly is configured on the ALD coating equipment. The second moving component is configured on the base component in a sliding way. The first moving component is configured on the second moving component in a sliding way.
In an alternative embodiment, the base assembly includes a first gear and a first rack. The second moving assembly includes a second rack engaged with the first gear, and a second gear engaged with the first rack. The first moving assembly includes a third rack engaged to the second gear.
In an alternative embodiment, the drive assembly includes a drive motor, and a magnetofluid vacuum seal transmission drivingly connected to the drive motor and the first gear.
The driving assembly further comprises at least two transmission gears which are in transmission connection with the first gear and the magnetic fluid vacuum sealing transmission device. The first gear and the at least two transmission gears are sequentially arranged along the vertical direction.
In an optional embodiment, the material moving device further comprises a guide rail assembly configured to be configured on the ALD coating equipment, and a carrying tray assembly capable of moving along the guide rail assembly. The top of the carrying disc assembly is provided with a component placing groove for placing the substrate. The bottom of the carrying disc assembly is provided with a driving groove for the first pawl assembly to be embedded in.
In an alternative embodiment, the boat assembly is provided with a boat roller that is slidable on the rail assembly. The guide rail assembly is provided with limiting grooves for limiting the carrier disc roller at intervals.
The second aspect,
The utility model provides an ALD coating device comprising the material moving device in any section of the first aspect.
By adopting the technical scheme, the utility model can obtain the following technical effects:
the first moving assembly is driven to move left and right through the driving assembly, the first moving assembly can always drive the loading disc assembly to move along the preset direction when moving through the first pawl assembly, so that the loading disc assembly is driven to move along the preset direction, a product to be coated is driven by the loading disc assembly, the structure required by automatic material taking and placing is greatly simplified, and the non-normativity of manual operation is avoided.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is an isometric view of a material moving device installed in an ALD coating apparatus.
Fig. 2 is an exploded view of a first perspective of a material moving device.
Fig. 3 is an exploded view (with parts hidden) of the material moving device from a second perspective.
Fig. 4 is an exploded view of the first pawl assembly, the second pawl assembly and the first base plate.
FIG. 5 is an isometric view of a boat assembly.
The labels in the figure are: 1-a first pawl component, 2-a guide rail component, 3-a limiting groove, 4-a first moving component, 5-a magnetic fluid vacuum sealing transmission device, 6-a driving motor, 7-a first bottom plate, 8-a first roller, 9-a roller mounting seat, 10-a second bottom plate, 11-a base roller, 12-a base supporting plate, 13-a first gear, 14-a first rack, 15-a third rack, 16-a second gear, 17-a second rack, 18-a push plate, 19-an abutting part, 20-an elastic part, 21-a carrier plate roller and 22-a driving groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the equipment or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The utility model is described in further detail below with reference to the following detailed description and accompanying drawings:
the first embodiment,
Referring to fig. 1 to 5, an embodiment of the present invention provides a material moving device of an ALD coating apparatus, which includes a first moving assembly 4, a driving assembly, and a first pawl assembly 1.
The first moving assembly 4 is configured to be disposed in the ALD coating apparatus. The first moving assembly 4 is configured to: can be moved along a predetermined trajectory. The drive assembly is coupled to the first moving assembly 4. The drive assembly is configured to: the first moving assembly 4 can be driven to move forward or backward along a predetermined trajectory. The first pawl assembly 1 is disposed on the first moving assembly 4, and is configured to: when the first moving component 4 moves reversely, the first moving component can be abutted against an external object and can avoid the external object, and when the first moving component 4 moves forwards, the first moving component can be abutted against the external object and can drive the external object to move forwards.
Concretely, remove about through the first removal subassembly 4 of drive assembly drive, make first removal subassembly 4 can drive all the time and carry a set subassembly to move along the predetermined direction when removing through first pawl subassembly 1 to the realization is carried a set subassembly and is taken the product of treating the coating film and move along the predetermined direction, has simplified the automatic required structure of getting the material of putting greatly, has avoided manual work's non-standardization.
As shown in fig. 5, on the basis of the above embodiment, in an alternative embodiment of the present invention, the material moving apparatus further includes a second moving assembly. The second moving assembly is connected with the driving assembly and is used for being configured on the ALD coating equipment. The second moving assembly is configured to: can be driven by the driving assembly to move forward or backward along a predetermined trajectory. The first moving assembly 4 is slidably disposed on the second moving assembly. The first moving assembly 4 is configured to: the second moving component can move along the moving direction of the second moving component when the driving component drives the second moving component to move. The material moving device also comprises a base assembly. The base assembly is configured on the ALD coating equipment. The second moving component is slidably arranged on the base component. The first moving assembly 4 is slidably disposed on the second moving assembly. In particular, the base assembly comprises a first gear 13 and a first rack 14. The second moving assembly comprises a second rack 17 engaged with the first gear 13, and a second gear 16 engaged with the first rack 14. The first movement assembly 4 comprises a third rack 15 coupled to a second gear 16. The driving assembly comprises a driving motor 6 and a magnetic fluid vacuum sealing transmission device 5 which is in transmission connection with the driving motor 6 and a first gear 13. The drive assembly further comprises at least two transmission gears in transmission connection with the first gear 13 and the magnetofluid vacuum tight transmission 5. The first gear 13 and the at least two transmission gears are arranged in sequence along the vertical direction.
In the present embodiment, the base assembly includes a base support plate 12 for mounting on the ALD coating apparatus, and a plurality of base rollers 11 mounted on the base support plate 12. The second moving assembly includes a second base plate 10, and roller mounting seats 9 installed on the second base plate 10 and having guide grooves formed at both sides thereof. The first moving assembly 4 includes a first base plate 7, and a first roller 8 mounted on the first base plate 7. The first roller 8 and the base roller 11 can be respectively embedded into both sides of the roller mounting seat 9, thereby allowing the first moving assembly 4 to be movably mounted on the second moving assembly and allowing the second moving assembly to be movably mounted on the base assembly.
The base assembly further comprises a first gear 13 drivingly mounted to the base support plate 12, and the second moving assembly comprises a second rack 17 mounted to the second base plate 10; wherein the second rack 17 is engaged with the first gear 13. The driving assembly drives the second moving assembly to move along a predetermined direction by driving the first gear 13 to rotate. The base assembly further includes a first rack 14 disposed on the base support plate 12; the second moving assembly further comprises a rotatably arranged second gear 16; the first moving assembly 4 further comprises a third rack 15 disposed on the first base plate 7; wherein, the second gear 16 is respectively connected with the first rack 14 and the third rack 15 in a transmission way. When the second moving component moves, the second gear 16 displaces relative to the first rack 14 to rotate, and drives the third rack 15 to move the first moving component 4 while rotating.
The second moving assembly and the first moving assembly 4 realize two-stage movement, so that the length of the material moving device when the material moving device extends outwards is greatly increased. The long moving distance in the preset direction can be achieved under the structure that the length of the moving device is short, and the moving device can be achieved through the gear and rack structure, is simple in structure and has good practical significance.
As shown in fig. 5, in an alternative embodiment of the present invention based on the above embodiment, the material moving apparatus further includes a second pawl assembly disposed on the first moving assembly 4. The first pawl assembly 1 and the second pawl assembly are respectively arranged at two ends of the first moving assembly 4. The second pawl assembly is configured to: when the first moving component 4 moves reversely, the first moving component 4 can be extruded by an external object to avoid the external object, and when the first moving component 4 moves forwards, the first moving component can be abutted against the external object and drive the external object to move forwards. Preferably, the first and second pawl assemblies 1 and 4 each include a push plate 18 rotatably disposed on the first moving assembly 4, and an elastic member 20 coupled between the push plate 18 and the first moving assembly 4. The push plate 18 is provided with an abutting portion 19 for abutting against the first moving member 4. The abutting portion 19 is used for limiting the push plate 18 when the first moving assembly 4 moves forward. The elastic member 20 serves to reset the push plate 18 when the push plate 18 is not abutted against an external object.
In the present embodiment, the push plate 18 is rotatably disposed on the first bottom plate 7 and configured to rotate only in one direction, so that when the first moving assembly 4 moves to the right (with respect to fig. 4), it abuts on the carrier tray assembly to rotate to realize inevitable rotation, and when moving to the left, it can hook on the carrier tray assembly to move the carrier tray assembly. Simple structure and difficult damage. In other embodiments, the avoidance and driving can be realized by a spring pin structure provided with a guide surface like a door lock, and the specific structure of the first pawl assembly 1 and the second pawl assembly is not limited by the utility model.
Through first pawl subassembly 1 and second pawl subassembly, can remove the top that the subassembly was removed to the material from one side of material mobile device with year dish subassembly, then remove the opposite side that the subassembly was removed to the material to the realization carries the removal of dish subassembly, simple structure has fine practical meaning.
As shown in fig. 1 and fig. 5, in the present embodiment, the material moving device further includes a guide rail assembly 2 configured to be disposed on the ALD coating apparatus, and a tray assembly capable of moving along the guide rail assembly 2. The top of the carrying disc assembly is provided with an element placing groove for placing the substrate. The bottom of the boat assembly is provided with a drive slot 22 for the first ratchet assembly 1 to be inserted into. Preferably, the boat assembly is provided with a boat roller 21 that is slidable on the rail assembly 2. The guide rail component 2 is provided with a spacing groove 3 for spacing the carrier disc roller 21 at intervals.
Specifically, the friction force of the carrying disc assembly in the moving process can be greatly reduced by adopting the running of the roller, and the power required by the material moving device is greatly reduced. In other embodiments, the movable part can be in the form of a sliding groove. The utility model is not limited in this regard. It can be understood that the friction force of the roller is small, and in order to avoid the tray assembly from sliding on the moving device in disorder, a shallow limiting groove 3 is arranged on the guide rail to avoid the tray assembly from sliding in disorder when the tray assembly moves to a preset position.
Example II,
As shown in fig. 1, an ALD coating apparatus is provided in an embodiment of the present invention, which includes the material moving device in any one of the paragraphs.
According to the ALD coating equipment, the first moving assembly 4 is driven to move left and right through the driving assembly, the first pawl assembly 1 enables the first moving assembly 4 to always drive the carrying disc assembly to move along the preset direction when moving, so that the carrying disc assembly can drive a product to be coated to move along the preset direction, the structure required by automatic material taking and placing is greatly simplified, and the non-standardization of manual operation is avoided.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A material moving device of an ALD coating equipment is characterized by comprising:
the first moving assembly (4) is used for being configured on the ALD coating equipment; the first movement assembly (4) is configured to: movable along a predetermined trajectory;
a drive assembly coupled to the first moving assembly (4); the drive assembly is configured to: the first moving component (4) can be driven to move forwards or backwards along the preset track; and
a first pawl assembly (1) arranged to the first moving assembly (4) and configured to: when the first moving component (4) moves reversely, the first moving component can be abutted against an external object and can avoid the external object, and when the first moving component (4) moves forwards, the first moving component can be abutted against the external object and can drive the external object to move forwards.
2. The material moving device according to claim 1, further comprising a second pawl assembly arranged to the first moving assembly (4); the first pawl assembly (1) and the second pawl assembly are respectively arranged at two ends of the first moving assembly (4);
the second pawl assembly is configured to: when the first moving component (4) moves reversely, the first moving component can be extruded by an external object to avoid, and when the first moving component (4) moves forwards, the first moving component can be abutted against the external object and drive the external object to move forwards.
3. The material moving apparatus according to claim 2, wherein the first and second pawl assemblies (1, 4) each comprise a push plate (18) rotatably disposed on the first moving assembly (4), and an elastic member (20) engaged between the push plate (18) and the first moving assembly (4); the push plate (18) is provided with an abutting part (19) which is abutted to the first moving component (4); the abutting part (19) is used for limiting the push plate (18) when the first moving assembly (4) moves forwards; the elastic piece (20) is used for resetting the push plate (18) when the push plate (18) is not abutted against an external object.
4. The material movement apparatus of claim 1, further comprising a second movement assembly; the second moving assembly is connected with the driving assembly and is used for being configured on the ALD coating equipment; the second moving assembly is configured to: can be driven by the driving component to move forward or backward along the preset track;
the first moving component (4) is configured to the second moving component in a sliding way; the first movement assembly (4) is configured to: the driving component can drive the second moving component to move along the moving direction of the second moving component when the driving component drives the second moving component to move.
5. The material movement apparatus of claim 4, further comprising a base assembly; the base assembly is used for being configured on the ALD coating equipment; the second moving component is configured on the base component in a sliding way; the first moving assembly (4) is slidably arranged on the second moving assembly.
6. The material moving device according to claim 5, wherein the base assembly comprises a first gear (13) and a first rack (14); the second movement assembly comprises a second rack (17) engaged with the first gear (13), and a second gear (16) engaged with the first rack (14); the first moving assembly (4) comprises a third rack (15) engaged with the second gear (16).
7. A material moving device according to claim 6, characterized in that the drive assembly comprises a drive motor (6), and a magnetic fluid vacuum seal transmission (5) drivingly connected to the drive motor (6) and the first gear (13);
the driving assembly further comprises at least two transmission gears which are in transmission connection with the first gear (13) and the magnetic fluid vacuum sealing transmission device (5); the first gear (13) and the at least two transmission gears are sequentially arranged along the vertical direction.
8. The material moving device according to any one of claims 1 to 7, further comprising a guide rail assembly (2) configured to be disposed on the ALD coating apparatus, and a tray assembly movable along the guide rail assembly (2); the top of the carrying disc assembly is provided with an element placing groove for placing a substrate; the bottom of the carrying disc assembly is provided with a driving groove (22) for the first pawl assembly (1) to be embedded in.
9. A material moving device according to claim 8, wherein the tray assembly is provided with a tray roller (21) slidable on the rail assembly (2); the guide rail assembly (2) is provided with limiting grooves (3) used for limiting the carrying disc idler wheels (21) at intervals.
10. An ALD coating apparatus comprising the material moving apparatus of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220659519.0U CN216947192U (en) | 2022-03-25 | 2022-03-25 | ALD coating equipment and material mobile device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220659519.0U CN216947192U (en) | 2022-03-25 | 2022-03-25 | ALD coating equipment and material mobile device thereof |
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| CN216947192U true CN216947192U (en) | 2022-07-12 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116288271A (en) * | 2023-03-01 | 2023-06-23 | 无锡邑文电子科技有限公司 | Horizontal transmission device and atomic layer deposition equipment |
| WO2023178950A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Material moving structure of continuous ald coating device |
-
2022
- 2022-03-25 CN CN202220659519.0U patent/CN216947192U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023178950A1 (en) * | 2022-03-25 | 2023-09-28 | 厦门韫茂科技有限公司 | Material moving structure of continuous ald coating device |
| CN116288271A (en) * | 2023-03-01 | 2023-06-23 | 无锡邑文电子科技有限公司 | Horizontal transmission device and atomic layer deposition equipment |
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Inventor after: Tian Yufeng Inventor after: Zhao Maosheng Inventor before: Tian Yufeng |