CN216946228U - Exhaust hood for czochralski monocrystalline silicon furnace - Google Patents
Exhaust hood for czochralski monocrystalline silicon furnace Download PDFInfo
- Publication number
- CN216946228U CN216946228U CN202220443011.7U CN202220443011U CN216946228U CN 216946228 U CN216946228 U CN 216946228U CN 202220443011 U CN202220443011 U CN 202220443011U CN 216946228 U CN216946228 U CN 216946228U
- Authority
- CN
- China
- Prior art keywords
- exhaust hood
- furnace
- hood
- cover body
- czochralski silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 238000009434 installation Methods 0.000 claims abstract description 8
- 239000013078 crystal Substances 0.000 claims abstract description 6
- 230000007797 corrosion Effects 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 239000012535 impurity Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses an exhaust hood for a czochralski silicon single crystal furnace, which comprises a hood body, wherein air vents are formed in the surfaces of two sides of the bottom in the hood body, an electric hydraulic push rod is installed in the hood body through an installation frame and a bolt, the output end of the bottom of the electric hydraulic push rod is provided with a push plate through the installation frame and a screw, and the bottom of the push plate is provided with a thimble through the screw. According to the exhaust hood for the czochralski silicon single crystal furnace, the output end of the electric hydraulic push rod can drive the push plate to descend, so that the ejector pin is inserted into the vent hole, impurities adhered in the vent hole are cleaned, the vent hole is prevented from being blocked by the impurities, the exhaust performance of the vent hole is ensured, and the exhaust hood is suitable for being widely popularized and used.
Description
Technical Field
The utility model relates to the technical field of exhaust hoods, in particular to an exhaust hood for a czochralski silicon single crystal furnace.
Background
In the production process of the czochralski silicon, argon is required to be introduced into a czochralski silicon furnace for cooling, and waste gas generated in the process of pulling the single crystal is taken away.
The common exhaust hood of the monocrystalline silicon furnace has the following defects: 1. in long-time use, there is a large amount of impurity adhesions in the exhaust hole, and can't be convenient clean it, influence the use, 2, in furnace body intensification in-process, can't be convenient with the exhaust hole shutoff, lead to the heat to run off great.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide an exhaust hood for a czochralski silicon furnace, which can effectively solve the problems in the background art.
In order to achieve the purpose, the utility model adopts the technical scheme that:
the utility model provides an exhaust hood for czochralski silicon single crystal furnace, includes the cover body, the air vent has been seted up on the bottom both sides surface in the cover body, and covers the internal electronic hydraulic rod of installing through mounting bracket and bolt, electronic hydraulic rod bottom output passes through mounting bracket and screw installation push pedal, and the screw installation thimble is passed through to the push pedal bottom.
Furthermore, a limiting groove is formed in the surface of the bottom of the cover body, a rotating shaft is rotatably connected in the limiting groove, a rotating plate is mounted at the bottom of the rotating shaft through screws, and notches corresponding to the vent holes are formed in the surfaces of two ends of the rotating plate; when the positions of the rotating plate except the notch are contacted with the vent hole, the vent hole can be blocked.
Furthermore, upright columns are arranged on two sides of the cover body, and supporting plates are arranged at the bottoms of the upright columns; the stand and the supporting legs can enable a certain distance to be reserved between the bottom of the cover body and the ground, and therefore the rotating plate can be rotated by a person conveniently.
Furthermore, a fixing threaded hole is formed in the top surface of the cover body.
Further, the outer surface of the cover body is electroplated with a corrosion-resistant zinc layer.
Compared with the prior art, the utility model has the following beneficial effects:
1. through setting up electronic hydraulic rod and thimble, electronic hydraulic rod's output can drive the push pedal and descend to make in the thimble inserts the venthole, and then clear up the impurity of adhesion in the venthole, in order to prevent that the venthole from being blockked up by impurity, guarantee the exhaust performance of venthole.
2. Through setting up rotor plate and breach, when the furnace body heaies up, personnel can rotate the rotor plate to make rotor plate shutoff air vent, and when the furnace body need exhaust, personnel can rotate the rotor plate once more, thereby make the breach of rotor plate be located the air vent bottom, and then make the gas in the furnace body discharge through the air vent, this enclosure for venting can be convenient shutoff or open the air vent, in order to prevent that a large amount of heats from the air vent loss when the furnace body heaies up.
Drawings
FIG. 1 is a schematic diagram of the whole structure of an exhaust hood for a Czochralski single crystal silicon furnace of the utility model.
FIG. 2 is a schematic sectional view of the exhaust hood of the Czochralski single crystal silicon furnace.
FIG. 3 is a schematic diagram of the position structures of a rotating plate, a vent hole, a cover body and a notch of an exhaust hood of the Czochralski single crystal silicon furnace.
In the figure: 1. a rotating plate; 2. a column; 3. a cover body; 4. fixing the threaded hole; 5. an electric hydraulic push rod; 6. a support plate; 7. a limiting groove; 8. a rotating shaft; 9. a thimble; 10. pushing the plate; 11. a vent hole; 12. and (4) a notch.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the utility model easy to understand, the utility model is further described with the specific embodiments.
As shown in figures 1-3, the exhaust hood for the czochralski monocrystalline silicon furnace comprises a hood body 3, vent holes 11 are formed in the surfaces of two sides of the bottom in the hood body 3, an electric hydraulic push rod 5 is installed in the hood body 3 through a mounting frame and a bolt, the output end of the bottom of the electric hydraulic push rod 5 is provided with a push plate 10 through the mounting frame and a screw, and the bottom of the push plate 10 is provided with a thimble 9 through the screw.
The bottom surface of the cover body 3 is provided with a limiting groove 7, a rotating shaft 8 is rotatably connected in the limiting groove 7, the bottom of the rotating shaft 8 is provided with a rotating plate 1 through screws, and the surfaces of two ends of the rotating plate 1 are provided with notches 12 corresponding to the vent holes 11.
In this embodiment, as shown in fig. 1 and 2, the rotating shaft 8 can rotate in the limiting groove 7, so that the rotating plate 1 can rotate.
Wherein, the cover body 3 both sides are provided with stand 2, and stand 2 bottom is provided with backup pad 6.
In this embodiment, as shown in fig. 1, the upright 2 and the supporting plate 6 can support the cover 3.
Wherein, the top surface of the cover body 3 is provided with a fixed threaded hole 4.
In this embodiment, as shown in fig. 1, a person can connect the cover 3 with an external corresponding mechanism through the fixing threaded hole 4.
Wherein, the outer surface of the cover body 3 is electroplated with a corrosion-resistant zinc layer.
In this embodiment, as shown in fig. 1, the corrosion-resistant zinc layer can provide the cover 3 with good corrosion resistance.
It should be noted that the utility model is an exhaust hood for a czochralski silicon furnace, when in use, a person can fix the exhaust hood at a designated position, then an external wire of an electric hydraulic push rod 5 is connected with an external power supply device, next, in the process of heating the furnace body, the person can manually rotate a rotating plate 1, so that the rotating plate 1 blocks a vent hole 11, further, a large amount of heat in the furnace body is prevented from losing from the vent hole 11, when in need of cooling, the person can rotate the rotating plate 1 again, so that a notch 12 of the rotating plate 1 is positioned at the bottom of the vent hole 11, further, gas in the furnace body can be discharged through the vent hole 11, next, in the process of long-time use, the person can manually control the electric hydraulic push rod 5, the output end of the electric hydraulic push rod drives a push plate 10 to descend, so that a thimble 9 is inserted into the vent hole 11, further, the impurities adhered in the vent hole 11 are cleaned, to avoid the air vent hole 11 from being clogged with impurities to cause deterioration of the air discharge performance.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (5)
1. An exhaust hood for a czochralski silicon single crystal furnace comprises a hood body (3), and is characterized in that: air vent (11) have been seted up on bottom both sides surface in the cover body (3), and through mounting bracket and bolt installation electronic hydraulic rod (5) in the cover body (3), electronic hydraulic rod (5) bottom output passes through mounting bracket and screw installation push pedal (10), and push pedal (10) bottom passes through screw installation thimble (9).
2. The exhaust hood for a czochralski silicon furnace as claimed in claim 1, wherein: the mask body (3) bottom surface has been seted up spacing groove (7), and spacing groove (7) internal rotation is connected with axis of rotation (8), screw installation rotor plate (1) is passed through to axis of rotation (8) bottom, and rotor plate (1) both ends surface sets up breach (12) corresponding with air vent (11).
3. The exhaust hood for a czochralski silicon furnace as claimed in claim 1, wherein: the novel mask is characterized in that upright columns (2) are arranged on two sides of the mask body (3), and a supporting plate (6) is arranged at the bottoms of the upright columns (2).
4. The exhaust hood for a czochralski silicon furnace as claimed in claim 1, wherein: the top surface of the cover body (3) is provided with a fixed threaded hole (4).
5. The exhaust hood for a czochralski silicon furnace as claimed in claim 1, wherein: and the outer surface of the cover body (3) is electroplated with a corrosion-resistant zinc layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220443011.7U CN216946228U (en) | 2022-03-03 | 2022-03-03 | Exhaust hood for czochralski monocrystalline silicon furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220443011.7U CN216946228U (en) | 2022-03-03 | 2022-03-03 | Exhaust hood for czochralski monocrystalline silicon furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216946228U true CN216946228U (en) | 2022-07-12 |
Family
ID=82292558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220443011.7U Expired - Fee Related CN216946228U (en) | 2022-03-03 | 2022-03-03 | Exhaust hood for czochralski monocrystalline silicon furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216946228U (en) |
-
2022
- 2022-03-03 CN CN202220443011.7U patent/CN216946228U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220712 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |