CN216939936U - Grinding device for processing V-shaped groove of semiconductor crystal bar - Google Patents
Grinding device for processing V-shaped groove of semiconductor crystal bar Download PDFInfo
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- CN216939936U CN216939936U CN202220643334.0U CN202220643334U CN216939936U CN 216939936 U CN216939936 U CN 216939936U CN 202220643334 U CN202220643334 U CN 202220643334U CN 216939936 U CN216939936 U CN 216939936U
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Abstract
The utility model relates to a grinding device for processing a V-shaped groove of a semiconductor crystal bar, which structurally comprises a motor arranged on a support and a grinding spindle arranged in a spindle box on one side of the support, wherein an A toothed belt wheel is arranged on the motor shaft, a B toothed belt wheel is arranged at the rear end of the grinding spindle, a toothed belt is connected between the A toothed belt wheel and the B toothed belt wheel, the front end of the grinding spindle extends to the outer side of the spindle box and is provided with a grinding wheel, an air sealing mechanism is arranged between the grinding spindle and the spindle box, and the support is arranged on a driving sliding table in a sliding manner. The utility model has the advantages that: structural design is reasonable, can effectively process the V-arrangement groove of grinding out on the crystal bar, convenient to use, and the abrasive machining degree of accuracy is high, and it is sealed to form the grinding main shaft non-contact through preferred airtight mechanism, still can prevent that the filth from getting into in the headstock, increase of service life.
Description
Technical Field
The utility model relates to a grinding device for processing a V-shaped groove of a semiconductor crystal bar, in particular to a grinding device for processing a V-shaped groove of a crystal line of a semiconductor crystal bar.
Background
After a semiconductor crystal bar is processed into a cylinder with a standard size, the crystal orientation of the crystal bar needs to be marked on the side surface of the cylinder by processing, generally, a V-shaped groove perpendicular to the crystal orientation is processed to mark the crystal orientation, and the processing accuracy of the V-shaped groove has great influence on the performance of the crystal bar.
The grinding device for the V-shaped groove of the semiconductor crystal bar in the prior art has the defects of unreasonable structural design, inconvenience in use, poor grinding accuracy and the like, and dirt can easily enter a spindle box during use, so that the service life of the device is influenced, and the use requirement can not be effectively met.
SUMMERY OF THE UTILITY MODEL
The utility model provides a grinding device for processing a V-shaped groove of a semiconductor crystal bar, aiming at overcoming the defects in the prior art, ensuring the processing quality and prolonging the service life.
The technical scheme of the utility model is as follows: a grinding device for processing a V-shaped groove of a semiconductor crystal bar structurally comprises a motor and a grinding spindle, wherein the motor is installed on a support, the grinding spindle is installed in a spindle box on one side of the support, an A toothed belt wheel is installed on a motor shaft, a B toothed belt wheel is installed at the rear end of the grinding spindle, a toothed belt is connected between the A toothed belt wheel and the B toothed belt wheel, the front end of the grinding spindle extends to the outer side of the spindle box 3 and is provided with a grinding wheel, an air sealing mechanism is arranged between the grinding spindle and the spindle box, and the support is installed on a driving sliding table in a sliding mode.
Preferably, angular contact bearings are respectively supported between the front and rear parts of the outer side surface of the grinding spindle and the spindle box, a spacer is arranged on the outer side surface of the grinding spindle between the front and rear angular contact bearings, a mechanical sealing sleeve is connected to the outer side surface of the grinding spindle outside the angular contact bearings, an A locking nut is fastened to the outer side surface of the grinding spindle outside the rear mechanical sealing sleeve, the grinding wheel is mounted on the grinding spindle through a grinding wheel seat, the grinding wheel seat is mounted on the grinding spindle through a nut, and a B locking nut is fastened to the front end of the grinding spindle.
Preferably, the air sealing mechanism comprises a main shaft air sealing vent hole and a mechanical sealing sleeve, wherein the main shaft air sealing vent hole is formed beside the grinding main shaft at the front end of the main shaft box, and the main shaft air sealing vent hole is communicated with the mechanical sealing sleeve and is filled with air.
Preferably, the middle part of the toothed belt is tightly connected with a tension wheel, the toothed belt wheel A and the motor shaft are tightly fixed through an A tension sleeve, and the toothed belt wheel B and the grinding spindle are tightly fixed through a B tension sleeve and are pressed with a gland.
Preferably, the outer side of the support close to the spindle box part is further wrapped with a protective cover.
The utility model has the advantages that: structural design is reasonable, can effectively process the V-arrangement groove of grinding out on the crystal bar, convenient to use, and the abrasive machining degree of accuracy is high, and it is sealed to form the grinding main shaft non-contact through the airtight mechanism of preferred, still can prevent that the filth from getting into in the headstock, increase of service life.
Drawings
FIG. 1 is a schematic structural diagram of a grinding device for processing a V-shaped groove of a semiconductor crystal bar according to the present invention.
Fig. 2 is a sectional view of fig. 1.
Fig. 3 is a side view of fig. 1.
In the figure, 1 is a support, 2 is a motor, 3 is a spindle box, 4 is a grinding spindle, 5 is an A toothed belt wheel, 6 is a B toothed belt wheel, 7 is a toothed belt, 8 is a grinding wheel, 9 is a tension wheel, 10 is an A expansion sleeve, 11 is a B expansion sleeve, 12 is a gland, 13 is an angular contact bearing, 14 is a spacer, 15 is a mechanical seal sleeve, 16 is an A locking nut, 17 is a grinding wheel seat, 18 is a nut, 19 is a B locking nut, 20 is a spindle air-tight air vent, 21 is a protective cover, and A is a crystal bar.
Detailed Description
The present invention will be described in further detail with reference to examples and specific embodiments.
As shown in fig. 1-3, a grinding device for processing a V-shaped groove of a semiconductor crystal bar structurally comprises a motor 2 arranged on a support 1 and a grinding spindle 4 arranged in a spindle box 3 on one side of the support 1, wherein an a toothed belt wheel 5 is arranged on the shaft of the motor 2, a B toothed belt wheel 6 is arranged at the rear end of the grinding spindle 4, a toothed belt 7 is connected between the a toothed belt wheel 5 and the B toothed belt wheel 6, the front end of the grinding spindle 4 extends to the outer side of the spindle box 3 and is provided with a grinding wheel 8, an air sealing mechanism is arranged between the grinding spindle 4 and the spindle box 3, and the support 1 is slidably arranged on a driving sliding table (not shown).
The middle part of the toothed belt 7 is connected with a tension wheel 9 in a tension way, the A toothed belt wheel 5 and the motor 2 shaft are fixedly tensioned through an A tension sleeve 10, and the B toothed belt wheel 6 and the grinding spindle 4 are fixedly tensioned through a B tension sleeve 11 and are in compression joint with a gland 12.
The air sealing mechanism comprises a main shaft air sealing vent hole 20 and a mechanical sealing sleeve 15, wherein the main shaft air sealing vent hole 20 is formed beside the grinding main shaft 4 at the front end of the main shaft box 3, and the main shaft air sealing vent hole 20 is communicated with the mechanical sealing sleeve 15 and is filled with air.
The outer side of the part of the support 1 close to the spindle box 3 is also wrapped with a protective cover 21.
According to the structure, when the grinding machine is installed, the motor 2 for driving is installed on the support 1, the shaft of the motor 2 is provided with the A-shaped belt wheel 5, and the A-shaped belt wheel 5 is provided with the toothed belt 7 and is connected with the B-shaped belt wheel 6 installed at the rear end of the grinding main shaft 4. The B toothed belt wheel 6 and the grinding spindle 4 are fixed by a B expansion sleeve 11 for tensioning, and the toothed belt 7 is tensioned by a tensioning wheel 9. The grinding spindle 4 is supported by an angular contact bearing 13, and the angular contact bearing 13 is fastened according to the torque meeting the requirement by a mechanical seal sleeve 15, a spacer 14, a grinding wheel seat 17 and the like through an A locking nut 16 and a B locking nut 19. The grinding wheel 8 is mounted at the front end of the grinding spindle 4 and is fastened by a nut 18. The grinding spindle 4 system adopts air seal, air enters the front end of the grinding spindle 4 through a spindle air seal vent hole 20, a non-contact seal of the grinding spindle 4 is formed through a labyrinth such as a mechanical seal sleeve 15, and dirt can be prevented from entering the spindle box 3.
During operation, the motor 2 drives the grinding spindle 4 to rotate through the toothed belt 7, namely, the grinding wheel 8 is driven to rotate, and the horizontal feeding of the grinding wheel is realized through the driving sliding table below the device, so that the V-shaped groove on the crystal bar A is ground. The outer diameter of the grinding wheel 8 can be adjusted according to the size and the shape of the V-shaped groove.
All the above components are prior art, and those skilled in the art can use any model and existing design that can implement their corresponding functions.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the inventive concept of the present invention, and these changes and modifications are all within the scope of the present invention.
Claims (5)
1. The grinding device for processing the V-shaped groove of the semiconductor crystal bar is characterized by comprising a motor (2) arranged on a support (1) and a grinding spindle (4) arranged in a spindle box (3) on one side of the support (1), wherein an A toothed belt wheel (5) is arranged on a shaft of the motor (2), a B toothed belt wheel (6) is arranged at the rear end of the grinding spindle (4), a toothed belt (7) is connected between the A toothed belt wheel (5) and the B toothed belt wheel (6), the front end of the grinding spindle (4) extends to the outer side of the spindle box (3) and is provided with a grinding wheel (8), an air sealing mechanism is arranged between the grinding spindle (4) and the spindle box (3), and the support (1) is slidably arranged on a driving sliding table.
2. The grinding device for processing the V-shaped groove of the semiconductor crystal bar as claimed in claim 1, wherein angular contact bearings (13) are respectively supported between the front and rear parts of the outer side surface of the grinding spindle (4) and the spindle box (3), a spacer (14) is arranged on the outer side surface of the grinding spindle (4) between the front and rear angular contact bearings (13), a mechanical sealing sleeve (15) is connected to the outer side surface of the grinding spindle (4) outside the angular contact bearings (13), an A locking nut (16) is fastened on the outer side surface of the grinding spindle (4) outside the rear mechanical sealing sleeve (15), a grinding wheel (8) is mounted on the grinding spindle (4) through a grinding wheel seat (17), the grinding wheel seat (17) is mounted on the grinding spindle (4) through a nut (18), and a B locking nut (19) is fastened on the front end of the grinding spindle (4).
3. The grinding device for processing the V-shaped groove of the semiconductor crystal bar as claimed in claim 2, wherein the gas sealing mechanism comprises a main shaft gas sealing vent hole (20) and a mechanical sealing sleeve (15) which are arranged beside the grinding main shaft (4) at the front end of the main shaft box (3), and the main shaft gas sealing vent hole (20) is communicated with the mechanical sealing sleeve (15) and is filled with gas.
4. The grinding device for processing the V-shaped groove of the semiconductor crystal bar as claimed in claim 3, wherein the middle part of the toothed belt (7) is connected with a tension wheel (9) in a tensioning manner, the A toothed belt wheel (5) and the shaft of the motor (2) are fixed in a tensioning manner through an A tension sleeve (10), and the B toothed belt wheel (6) and the grinding spindle (4) are fixed in a tensioning manner through a B tension sleeve (11) and are pressed with a gland (12).
5. A grinding apparatus for processing a V-shaped groove of a semiconductor ingot as defined in claim 4, wherein the support (1) is further covered with a shield (21) at an outer side of a portion thereof adjacent to the headstock (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220643334.0U CN216939936U (en) | 2022-03-22 | 2022-03-22 | Grinding device for processing V-shaped groove of semiconductor crystal bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220643334.0U CN216939936U (en) | 2022-03-22 | 2022-03-22 | Grinding device for processing V-shaped groove of semiconductor crystal bar |
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| Publication Number | Publication Date |
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| CN216939936U true CN216939936U (en) | 2022-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220643334.0U Active CN216939936U (en) | 2022-03-22 | 2022-03-22 | Grinding device for processing V-shaped groove of semiconductor crystal bar |
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| CN (1) | CN216939936U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117300808A (en) * | 2023-11-07 | 2023-12-29 | 响水县龙威油泵附件有限公司 | Lubricating oil pump shaft sealing assembly machining equipment and method thereof |
-
2022
- 2022-03-22 CN CN202220643334.0U patent/CN216939936U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117300808A (en) * | 2023-11-07 | 2023-12-29 | 响水县龙威油泵附件有限公司 | Lubricating oil pump shaft sealing assembly machining equipment and method thereof |
| CN117300808B (en) * | 2023-11-07 | 2024-04-12 | 广州石化建筑安装工程有限公司 | Lubricating oil pump shaft sealing assembly machining equipment and method thereof |
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