CN216928521U - Automatic material frame that comes unstuck of monocrystalline silicon material - Google Patents
Automatic material frame that comes unstuck of monocrystalline silicon material Download PDFInfo
- Publication number
- CN216928521U CN216928521U CN202220528703.1U CN202220528703U CN216928521U CN 216928521 U CN216928521 U CN 216928521U CN 202220528703 U CN202220528703 U CN 202220528703U CN 216928521 U CN216928521 U CN 216928521U
- Authority
- CN
- China
- Prior art keywords
- frame
- rods
- clamping
- silicon wafer
- sides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a monocrystalline silicon material degumming automatic material frame, which comprises: a frame; the elastic clamping components are arranged on two sides of the top of the frame; the bearing assembly is fixedly arranged in the frame; the elastic clamping components are arranged on two sides in the frame; and the water receiving component is fixedly arranged at the bottom in the frame. The degumming automatic material frame can realize automatic installation and disassembly of monocrystalline silicon materials, and improves the production efficiency.
Description
Technical Field
The utility model relates to the technical field of degumming of single crystal silicon materials, in particular to an automatic material frame for degumming of single crystal silicon materials.
Background
In the production process of the monocrystalline silicon material, the silicon wafer is bonded at the bottom of the silicon wafer material rack, and the silicon wafer needs to be subjected to degumming treatment. In the process of degumming the silicon wafer, the silicon wafer and the silicon wafer rack are placed in the material frame. In the existing material frame, the silicon wafer material frame needs to be installed and fixed manually before the silicon wafer is degummed, and the silicon wafer material frame needs to be detached manually after the silicon wafer is degummed. The arrangement efficiency of the silicon wafer is low, and the production efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned defects or shortcomings in the prior art, it is desirable to provide an automatic material frame for degumming single crystal silicon material, which can realize automatic installation and disassembly and improve production efficiency.
The utility model provides a monocrystalline silicon material degumming automatic material frame, which comprises:
a frame;
the elastic clamping components are arranged on two sides of the top of the frame and used for clamping and fixing the silicon wafer rack;
the bearing assembly is fixedly arranged in the frame and used for bearing the fallen silicon wafer;
the elastic clamping components are arranged on two sides in the frame and used for clamping and limiting the silicon wafer;
and the water receiving component is fixedly arranged at the bottom in the frame and is used for receiving water dripped from the silicon wafer.
Furthermore, the elastic clamping component comprises shaft levers symmetrically arranged on two sides of the top of the frame, two ends of each shaft lever are rotatably connected with the frame through bearings, vertical clamping plates are rotatably sleeved at two ends of each shaft lever, the two clamping plates on each shaft lever are fixedly connected through a first connecting rod, torsion springs sleeved on the shaft levers are arranged between the clamping plates and the frame, and limiting supporting plates are fixedly arranged on the inner sides of the end portions of the shaft levers on the frame.
Furthermore, accept the subassembly including set up in two first side levers of one side and two second side levers of opposite side in the frame, below between first side lever and the second side lever is provided with two bearing rods, be provided with two baffles between first side lever and the second side lever, two the bottom of baffle all with two the bearing rod slides and cup joints.
Furthermore, the elasticity centre gripping subassembly including the symmetry set up in both sides supporting rod in the frame, be provided with on the frame with the spout of the tip one-to-one of supporting rod, the spout all sets up along the horizontal direction, the equal slidable of tip of supporting rod passes the correspondence the spout, the connecting piece has all been cup jointed to the tip of supporting rod, two with the one end be connected through the extension spring between the connecting piece.
Furthermore, the water receiving assembly comprises mounting rods which are symmetrically and fixedly arranged on two sides of the bottom in the frame, and a water receiving tray is fixedly connected between the two mounting rods.
Furthermore, the frame includes two parallel arrangement's end plate, two the both sides at the top between the end plate are through second connecting rod fixed connection, two the both sides of the low portion between the end plate are through angle bar fixed connection.
Compared with the prior art, the utility model has the beneficial effects that:
the automatic material frame for degumming the monocrystalline silicon material is provided with a frame, an elastic clamping component, a bearing component, an elastic clamping component and a water receiving component. When the automatic loading machine is used for loading, a manipulator of the automatic loading machine grabs the silicon wafer rack to place, and meanwhile, the automatic loading machine presses down the elastic clamping component and pulls open the elastic clamping component. The elastic clamping component is matched with the downward placement of the silicon wafer rack and clamped in the grooves on the two sides of the silicon wafer rack to complete the clamping fixation of the silicon wafer rack; meanwhile, the elastic clamping assemblies are loosened and clamped on two sides of the silicon wafer to limit the silicon wafer. And the automatic installation of the silicon wafer is realized. The silicon chip drops from the silicon chip work or material rest after being heated, falls into and accepts the subassembly in, comes unstuck the completion back, takes away the silicon chip work or material rest, and the automatic bounceing of elasticity joint subassembly, workman take away the silicon chip after coming unstuck, has realized the automatic dismantlement of silicon chip work or material rest. By adopting the single crystal silicon material degumming automatic material frame, the production efficiency is effectively improved.
In the process of degumming the silicon wafer, the silicon wafer moves along with the degumming automatic material frame, and the sewage dripped on the silicon wafer is collected by the water receiving assembly, so that the pollution to the operation environment is avoided, and the cleanness of the operation environment is ensured.
It should be understood that what is described in this summary section is not intended to limit key or critical features of the embodiments of the utility model, nor is it intended to limit the scope of the utility model. Other features of the present invention will become apparent from the following description.
Drawings
Other features, objects and advantages of the utility model will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic structural diagram of an automatic material frame for degumming of a monocrystalline silicon material;
FIG. 2 is a schematic view of the internal structure of the frame;
FIG. 3 is a schematic structural diagram of mounting of a monocrystalline silicon material in the degumming automatic material frame;
fig. 4 is a schematic structural diagram of the silicon wafer holder and the silicon wafer.
Reference numbers in the figures: 1. a frame; 2. an elastic clamping component; 3. a receiving assembly; 4. an elastic clamping assembly; 5. a water receiving component; 6. a silicon wafer rack; 7. a silicon wafer;
11. an end plate; 12. a second connecting rod; 13. angle iron;
21. a shaft lever; 22. clamping a plate; 23. a first connecting rod; 24. a torsion spring; 25. a limiting support plate;
31. a first side bar; 32. a second side bar; 33. a support rod; 34. a baffle plate;
41. a clamping rod; 42. a chute; 43. a connecting member; 44. a tension spring.
51. Mounting a rod; 52. a water receiving tray.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 1 to 4, an embodiment of the utility model provides an automatic material frame for degumming a monocrystalline silicon material, including:
a frame 1;
the elastic clamping components 2 are arranged on two sides of the top of the frame 1 and used for clamping and fixing the silicon wafer rack 6;
the bearing component 3 is fixedly arranged in the frame 1 and used for bearing the fallen silicon wafer 7;
the elastic clamping components 4 are arranged on two sides in the frame 1 and used for clamping and limiting the silicon wafer 7;
and the water receiving component 5 is fixedly arranged at the bottom in the frame 1 and is used for receiving water dripped from the silicon wafer 7.
In this embodiment, the degumming automatic material frame disclosed by the application is used in cooperation with an automatic loading machine, a manipulator of the automatic loading machine grasps a silicon wafer rack 6 to place the silicon wafer rack, when a silicon wafer 7 is placed in a frame 1, the automatic loading machine presses down an elastic clamping component 2 inwards, the elastic clamping component 2 is clamped in grooves in two sides of the silicon wafer rack 6 in cooperation with the downward placement of the silicon wafer rack 6, and the silicon wafer rack 6 is clamped and fixed in the frame 1 by the elastic clamping component 2 after being placed;
before the silicon wafer rack 6 and the silicon wafer 7 are placed, the elastic clamping component 4 is pulled open by the automatic loading machine, after the silicon wafer rack 6 is clamped and fixed, the elastic clamping component 4 is loosened, and the elastic clamping component 4 is clamped on two sides of the silicon wafer 7 to limit the silicon wafer. And the automatic installation of the silicon wafer rack 6 and the silicon wafer 7 is completed.
In the degumming process of the silicon wafer 7, the silicon wafer 7 falls off from the silicon wafer rack 6 after being heated and falls into the receiving component 3. After the silicon wafer 7 is degummed, the silicon wafer rack 6 is taken away, the elastic clamping component 2 automatically bounces, and a worker takes away the degummed silicon wafer 7 from the bearing component 3. The automatic disassembly of the silicon wafer material rack 6 is realized.
By adopting the monocrystalline silicon material degumming automatic material frame, automatic installation and disassembly of the silicon wafer material rack 6 are realized, and the production efficiency is effectively improved.
In the degumming process of the silicon wafer 7, the silicon wafer 7 moves along with the degumming automatic material frame, and sewage dripping on the silicon wafer 7 is collected by the water receiving assembly 5, so that the pollution to the operation environment is avoided, and the cleanness of the operation environment is ensured.
In a preferred embodiment, as shown in fig. 1 and 2, the elastic clamping component 2 includes the symmetrical shaft levers 21 disposed on both sides of the top of the frame 1, both ends of the shaft lever 21 are rotatably connected to the frame 1 through bearings, the two ends of the shaft lever 21 are rotatably sleeved with the vertical clamping plates 22, two clamping plates 22 on the same shaft lever 21 are fixedly connected through the first connecting rod 23, the torsion springs 24 sleeved on the shaft lever 21 are disposed between the clamping plates 22 and the frame 1, and the inner sides of the ends of the shaft lever 21 on the frame 1 are fixedly provided with the limit supporting plates 25.
In this embodiment, the two clamping plates 22 on the same side are fixedly connected through the first connecting rod 23, so that the two clamping plates 22 rotate synchronously. Torsion spring 24 is provided to maintain catch plate 22 in an upright, open position in the absence of an external force. In the process that the silicon wafer 7 is placed into the frame 1 along with the silicon wafer rack 6, the clamping plate 22 is pressed downwards inwards by the automatic loading machine, the clamping plate 22 is rotationally matched with the silicon wafer rack 6 to move downwards to be clamped in grooves in two sides of the silicon wafer rack 6 inwards until the clamping plate 22 is supported by the limiting supporting plate 25, and clamping and fixing of the silicon wafer rack 6 are completed. The installation operation is not needed manually, and the installation efficiency of the silicon wafer 7 and the silicon wafer rack 6 is improved.
In a preferred embodiment, as shown in fig. 2, the receiving assembly 3 includes two first side rods 31 disposed on one side and two second side rods 32 disposed on the other side in the frame 1, two supporting rods 33 are disposed below the first side rods 31 and the second side rods 32, two blocking plates 34 are disposed between the first side rods 31 and the second side rods 32, and bottom ends of the two blocking plates 34 are slidably sleeved with the two supporting rods 33.
In this embodiment, after the silicon wafer rack 6 is clamped and fixed, the silicon wafer falls into the space surrounded by the first side bar 31, the second side bar 32 and the support bar 33. The two baffle plates 34 are respectively moved to two ends of the silicon wafer 7 to be degummed to block the silicon wafer 7 falling after degummed, so that the falling silicon wafer 7 is orderly fallen on the two supporting rods 33.
In a preferred embodiment, as shown in fig. 1 and fig. 2, the elastic clamping assembly 4 includes two clamping rods 41 symmetrically disposed in the frame 1, sliding grooves 42 corresponding to the ends of the clamping rods 41 one to one are disposed on the frame 1, the sliding grooves 42 are all disposed along the horizontal direction, the ends of the clamping rods 41 slidably pass through the corresponding sliding grooves 42, the ends of the clamping rods 41 are all sleeved with connecting members 43, and two connecting members 43 at the same end are connected through a tension spring 44.
In this embodiment, the two holding rods 41 are held in a clamped state by the elastic force of the tension spring 44 between the end portions, and when the silicon wafer 7 to be degummed is placed, the automatic loading machine pulls apart the two holding rods 41, so that the silicon wafer 7 is smoothly dropped. And then the clamping rods 41 are loosened to enable the clamping rods 41 to be tightly attached to the outer sides of the silicon wafers 7, so that the silicon wafers 7 are limited, and the silicon wafers 7 falling after degumming are ensured to be arranged in order.
In a preferred embodiment, as shown in fig. 2, the water receiving assembly 5 includes two mounting rods 51 symmetrically and fixedly disposed at two sides of the bottom of the frame 1, and a water receiving tray 52 is fixedly connected between the two mounting rods 51. The sewage dropping from the silicon chip 7 is collected by the water receiving tray 52, so that the pollution to the working environment is avoided.
In a preferred embodiment, as shown in fig. 1 and 2, the frame 1 comprises two end plates 11 arranged in parallel, wherein two sides of the top part between the two end plates 11 are fixedly connected through a second connecting rod 12, and two sides of the lower part between the two end plates 11 are fixedly connected through an angle iron 13.
In the description of the present specification, the terms "connect", "mount", "fix", and the like are to be understood in a broad sense, for example, "connect" may be a fixed connection, a detachable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In the description of the present application, the description of the terms "one embodiment," "some embodiments," etc. means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (6)
1. The utility model provides a monocrystalline silicon material comes unstuck automatic material frame which characterized in that includes:
a frame;
the elastic clamping components are arranged on two sides of the top of the frame and used for clamping and fixing the silicon wafer rack;
the bearing assembly is fixedly arranged in the frame and used for bearing the fallen silicon wafer;
the elastic clamping components are arranged on two sides in the frame and used for clamping and limiting the silicon wafer;
and the water receiving component is fixedly arranged at the bottom in the frame and is used for receiving water dripped from the silicon wafer.
2. The automatic material frame for degumming single crystal silicon material according to claim 1, wherein the elastic clamping component comprises shaft rods symmetrically arranged at two sides of the top of the frame, two ends of each shaft rod are rotatably connected with the frame through bearings, vertical clamping plates are rotatably sleeved at two ends of each shaft rod, two clamping plates on the same shaft rod are fixedly connected through a first connecting rod, torsion springs sleeved on the shaft rods are arranged between the clamping plates and the frame, and limiting supporting plates are fixedly arranged on the inner sides of the frame at the ends of the shaft rods.
3. The automatic material frame for degumming single crystal silicon material according to claim 2, wherein the receiving assembly comprises two first side rods arranged at one side in the frame and two second side rods arranged at the other side, two supporting rods are arranged below the first side rods and the second side rods, two baffle plates are arranged between the first side rods and the second side rods, and the bottom ends of the two baffle plates are respectively in sliding sleeve joint with the two supporting rods.
4. The automatic material frame for monocrystalline silicon material degumming according to claim 3, wherein the elastic clamping assembly comprises two clamping rods symmetrically arranged in the frame, sliding grooves which are in one-to-one correspondence with the end parts of the clamping rods are arranged on the frame, the sliding grooves are arranged along the horizontal direction, the end parts of the clamping rods can slidably penetrate through the corresponding sliding grooves, connecting pieces are sleeved on the end parts of the clamping rods, and the two connecting pieces at the same end are connected through tension springs.
5. The automatic material frame for monocrystalline silicon material degumming according to claim 4, wherein the water receiving assembly comprises mounting rods which are symmetrically and fixedly arranged at two sides of the bottom in the frame, and a water receiving tray is fixedly connected between the two mounting rods.
6. The automatic material frame for degumming single crystal silicon material according to claim 5, wherein the frame comprises two end plates which are arranged in parallel, two sides of the top part between the two end plates are fixedly connected through a second connecting rod, and two sides of the lower part between the two end plates are fixedly connected through angle iron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220528703.1U CN216928521U (en) | 2022-03-11 | 2022-03-11 | Automatic material frame that comes unstuck of monocrystalline silicon material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220528703.1U CN216928521U (en) | 2022-03-11 | 2022-03-11 | Automatic material frame that comes unstuck of monocrystalline silicon material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216928521U true CN216928521U (en) | 2022-07-08 |
Family
ID=82226672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220528703.1U Active CN216928521U (en) | 2022-03-11 | 2022-03-11 | Automatic material frame that comes unstuck of monocrystalline silicon material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216928521U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115556248A (en) * | 2022-12-08 | 2023-01-03 | 釜川(无锡)智能科技有限公司 | Silicon wafer degumming and inserting integrated machine |
-
2022
- 2022-03-11 CN CN202220528703.1U patent/CN216928521U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115556248A (en) * | 2022-12-08 | 2023-01-03 | 釜川(无锡)智能科技有限公司 | Silicon wafer degumming and inserting integrated machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN216928521U (en) | Automatic material frame that comes unstuck of monocrystalline silicon material | |
| CN107840074B (en) | A kind of machine driving feed device | |
| CN105059954B (en) | A kind of book holder of laser positioning | |
| CN100363242C (en) | Base board carrier | |
| CN207793249U (en) | A kind of biological cell observation platform | |
| CN113479475B (en) | Multi-functional portable environmental monitoring equipment based on constant temperature effect | |
| CN220233127U (en) | Cell slice containing flower basket structure capable of reducing effusion | |
| CN213397557U (en) | Semiconductor package device testing arrangement | |
| CN210690295U (en) | Multifunctional drop hammer type impact test loading device | |
| CN211309997U (en) | Battery tray enclasping module and enclasping device | |
| CN208528882U (en) | It is a kind of more stable to remove brick device | |
| CN214529557U (en) | Knitting socks processingequipment | |
| CN110963265A (en) | Battery tray holding module, holding device and holding method | |
| CN112025297A (en) | Electric iron opening and closing rod assembling machine | |
| CN219002828U (en) | Quick shaking device for soil diluent | |
| CN210476880U (en) | Special extracting tool of sieve bearing shakes | |
| CN112828415B (en) | Auxiliary soldering device for high-frequency transformer | |
| CN221115463U (en) | Snatch formula crucible transfer device | |
| CN110987613A (en) | Performance detection device for metal material | |
| CN216260902U (en) | Portable trapezoidal pipet stand | |
| CN214168155U (en) | Oil removing device for steel belt | |
| CN211615638U (en) | Automobile electronic rod-shaped component grabbing and releasing manipulator | |
| CN216812665U (en) | Buffer mechanism for endurance power supply | |
| CN216208170U (en) | Electromechanical manufacturing steel plate strength testing device | |
| CN219714726U (en) | Testing device for lid flip hinge |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |