CN216922439U

CN216922439U - Multi-gas vacuumizing and inflating system

Info

Publication number: CN216922439U
Application number: CN202122825244.1U
Authority: CN
Inventors: 孙尚勇; 薛淼; 于杨; 崔庆冬; 王洪亮
Original assignee: Jilin Yongli Laser Technology Co ltd
Current assignee: Jilin Yongli Laser Technology Co ltd
Priority date: 2021-11-18
Filing date: 2021-11-18
Publication date: 2022-07-08
Anticipated expiration: 2031-11-18

Abstract

A multi-gas vacuum pumping and inflating system relates to the field of vacuum inflation, solves the problems of complicated operation process, long air pumping process time, poor inflating precision and the like in the prior art, and comprises a mechanical pump, a molecular pump, a valve, a flow sensor, a pressure sensor, a vacuum degree sensor, an electric control device and a touch screen; the molecular pump, the mechanical pump, the pressure sensor and the vacuum degree sensor are all connected with an air extraction pipeline; the flow sensor is connected to an inflation pipeline, and the mechanical pump, the molecular pump, the valve, the flow sensor, the pressure sensor and the vacuum degree sensor are all connected with the electric control device; the electric control device is connected with the touch screen. This novel accessible manual control and two kinds of modes of automatic control supply the selection, are applicable to various occasions such as scientific research, production in the vacuum inflation field, have that the function is various, easily operation, automatic control, real-time supervision, vacuum height, aerify the precision height, aerify advantages such as proportion can be according to prescription storage, call.

Description

Multi-gas vacuumizing and inflating system

Technical Field

The utility model relates to the field of vacuum inflation, in particular to a system for automatically vacuumizing and then automatically inflating various gases.

Background

At present, there are two key steps in the process of manufacturing a carbon dioxide laser. 1. The sealed cavity needs to be evacuated first. 2. Filling a plurality of gases (including rare gases) into the closed cavity according to a certain sequence and any proportion.

The prior art adopts a glass system, adopts a full glass structure, needs manual operation, is complex in process, is inflated, has long air exhaust process time and low inflation precision, and has less quantity of workpieces finished at one time.

Therefore, an inflation system which is convenient to operate and high in inflation precision needs to be designed.

SUMMERY OF THE UTILITY MODEL

The utility model provides a multi-gas vacuumizing inflation system, which aims to solve the problems of complicated operation process, long air exhaust process time, poor inflation precision and the like in the prior art.

A multi-gas vacuumizing inflation system comprises a mechanical pump, a molecular pump, a flow sensor, a pressure sensor, a vacuum degree sensor, an electric control device and a touch screen; the molecular pump, the mechanical pump, the pressure sensor and the vacuum degree sensor are all connected with an air extraction pipeline; the flow sensor is connected to an inflation pipeline, and the mechanical pump, the molecular pump, the flow sensor, the pressure sensor and the vacuum degree sensor are all connected with an electric control device; the electric control device is connected with the touch screen.

Furthermore, a first valve is arranged between the pressure sensor and the air pumping pipeline, a second valve is arranged between the flow sensor and the air charging pipeline, a third valve is arranged between the mechanical pump and the air pumping pipeline, and a fourth valve is arranged between the molecular pump and the air pumping pipeline.

Further, the electric control device is a PLC controller.

Further, the flow sensor 1 and the pressure sensor 5 are both multiple.

Further, a heating belt is wound outside the air exhaust pipeline.

Furthermore, the touch screen adopts an industrial control all-in-one machine.

The utility model has the beneficial effects that: this neotype inflation system, not only from accomplishing in quantity, all improve evacuation and gas filled efficiency greatly from operating time moreover.

The inflation system of the utility model realizes automatic vacuum pumping and multiple gas inflation, the vacuum degree can be set in system parameters, the inflation type and the inflation quantity can be set in the system parameters, and the related parameters can be monitored in real time in the processes of air pumping and inflation. The following advantages exist:

1. the full automation of the vacuum pumping is realized. And under the condition that an operator selects the automatic air suction mode, the PLC controls to open the air suction fourth valve, open the third valve and open the mechanical pump. The system compares the set pre-pumping pressure value with the pressure sensor, and completes the pre-pumping process when the pre-pumping pressure value reaches the pressure sensor. The pre-vacuum degree of the system is to reach e^-5And (4) stages.

2. Under the automatic air extraction mode, the PLC controls to close the side extraction valve, open the molecular pump and the gate valve, and the system starts high-vacuum air extraction, and the pre-vacuum degree of a general system is to reach e^-7And (4) stages. The time for evacuation can be long (over 10 hours) and the automatic mode evacuation process does not require human follow-up.

3. In the process of vacuumizing, a heating belt is wound outside a system pipeline to heat the pipeline, so that the vacuumizing efficiency can be improved.

4. And (4) an automatic inflation process. And filling corresponding parameter settings in the parameter setting interface according to the type and proportion of the required inflatable body. The number of the gas types can be combined at will, the proportion of the gas can be combined at will, and the inflation sequence of the gas can be combined at will.

5. In order to improve the precision of inflation, two parameters of gradient and opening degree are designed. In each stage of automatic inflation, the system selects corresponding gradient and opening degree at any time according to the pressure and real-time feedback data of the flowmeter, and the automatic inflation process is completed.

6. This neotype inflation system realizes aerifing the precision height, and the response is fast. The proportion of the gas inflation of various gases can be preserved, and the time for mixing the gases can be set at will after the gas inflation process of various gases is comprehensively completed. The full-automatic timing can further guarantee the precision of the air inflation quantity.

Drawings

FIG. 1 is a schematic diagram of a multi-gas evacuation inflation system according to the present invention;

FIG. 2 is a control schematic diagram of a multi-gas vacuum pumping and inflating system according to the present invention;

Detailed Description

The embodiment is described with reference to fig. 1 and fig. 2, and a multi-gas vacuum pumping and inflating system includes a mechanical pump 8, a molecular pump 2, a valve 3, a flow sensor 1, a pressure sensor 5, a vacuum degree sensor 4, an electric control device 7 and a touch screen 6;

the molecular pump 2, the mechanical pump 8, the pressure sensor 5 and the vacuum sensor 4 are all connected with an air extraction pipeline;

the flow sensor 1 is connected to an inflation pipeline, and the mechanical pump 8, the molecular pump 2, the valve 3, the flow sensor 1, the pressure sensor 5 and the vacuum degree sensor 4 are all connected with an electric control device 7; the electric control device 7 is connected with the touch screen 6.

In this embodiment, a first valve 3 is arranged between the pressure sensor 5 and the air pumping pipeline, a second valve 9 is arranged between the flow sensor 1 and the air charging pipeline, a third valve 10 is arranged between the mechanical pump 8 and the air pumping pipeline, and a fourth valve 11 is arranged between the molecular pump 2 and the air pumping pipeline.

In this embodiment, the operator sets the vacuum degree and pressure value of the evacuation through the touch screen 6, and sets parameters such as the type and ratio of the inflation. The stored parameter setting in the system can be directly called, and the touch screen 6 transmits the set parameters and instructions to the PLC in the electric control device 7.

The PLC reads the pressure value in the system pipeline from the pressure sensor 5 in real time, reads the vacuum degree value from the vacuum degree sensor 4 in real time, controls the opening and closing of the first door 3, controls the mechanical pump 8 and the molecular pump 2 to work until reaching the set parameter value, and finishes the air extraction process.

The operator sets the type, inflation sequence and inflation quantity of each gas through the touch screen 6, and the touch screen 6 transmits the set parameters and instructions to the PLC in the electric control device 7.

And the PLC in the electric control device 7 opens the second valve 9 according to a control program to control the flow of the flow sensor 1, reads the flow value fed back by the flow sensor 1 in real time, automatically adjusts the flow of the flow sensor until the inflation volume of the system meets the parameter setting requirement, and completes gas inflation.

In this embodiment, the system has the function of saving the set parameters by number and group, and can re-input the parameters each time, search the parameters in the system, and call the saved parameters, so that the air pumping and inflating processes are more intelligent.

As shown in fig. 1, the electric control device controls the third valve, starts the mechanical pump to work, pre-pumps the system to a certain vacuum degree, opens the fourth valve, starts the molecular pump, and pumps the system to a higher vacuum degree. In the process of vacuumizing, the outer wall of the system pipeline is heated, so that the vacuumizing effect can be improved. When filling two kinds or more than two kinds of gas, the process of aerifing need have the time of mixing, and this uses novel mixing time to set up wantonly, and PLC control, response speed is fast, and the precision is high, can reach 0.1ms level.

In this embodiment, touch-sensitive screen 6 adopts industry control all-in-one, and pressure sensor 5 adopts a plurality ofly, can accomplish the process of bleeding to a plurality of work pieces simultaneously, and flow sensor 1 adopts a plurality ofly, can accomplish the process of filling multiple gas to a plurality of work pieces simultaneously.

The system of the embodiment has manufactured 2 prototype machines, and the air suction and inflation processes are completed excellently.

The air pumping system can pump air and inflate air, and can inflate various rare gases, and the functions are selected by two modes of manual control and automatic control, so that the air pumping system is suitable for various occasions such as scientific research and production in the field of vacuum inflation, and has the advantages of multiple functions, easiness in operation, automatic control, real-time monitoring, high vacuum degree, high inflation precision, capability of storing and calling inflation proportion according to a formula and the like.

Claims

1. A multi-gas vacuumizing inflation system is characterized in that: the system comprises a mechanical pump (8), a molecular pump (2), a flow sensor (1), a pressure sensor (5), a vacuum degree sensor (4), an electric control device (7) and a touch screen (6);

the molecular pump (2), the mechanical pump (8), the pressure sensor (5) and the vacuum sensor (4) are all connected with an air extraction pipeline;

the flow sensor (1) is connected to an inflation pipeline, and the mechanical pump (8), the molecular pump (2), the flow sensor (1), the pressure sensor (5) and the vacuum degree sensor (4) are all connected with an electric control device (7); the electric control device (7) is connected with the touch screen (6).

2. A multi-gas evacuation inflation system as claimed in claim 1, wherein: a first valve (3) is arranged between the pressure sensor (5) and the air exhaust pipeline, a second valve (9) is arranged between the flow sensor (1) and the air inflation pipeline, a third valve (10) is arranged between the mechanical pump (8) and the air exhaust pipeline, and a fourth valve (11) is arranged between the molecular pump (2) and the air exhaust pipeline.

3. A multi-gas evacuation inflation system as claimed in claim 1, wherein: and a heating belt is wound outside the air exhaust pipeline.

4. A multi-gas evacuation inflation system as claimed in claim 1, wherein: the electric control device (7) is a PLC controller.

5. A multi-gas evacuation inflation system as claimed in claim 1, wherein: the flow sensors (1) and the pressure sensors (5) are multiple.

6. A multi-gas evacuation inflation system as claimed in claim 1, wherein: and the touch screen (6) adopts an industrial control all-in-one machine.