CN216919396U - Assembled vapor deposition furnace diathermy screen - Google Patents
Assembled vapor deposition furnace diathermy screen Download PDFInfo
- Publication number
- CN216919396U CN216919396U CN202220433953.7U CN202220433953U CN216919396U CN 216919396 U CN216919396 U CN 216919396U CN 202220433953 U CN202220433953 U CN 202220433953U CN 216919396 U CN216919396 U CN 216919396U
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- diathermanous
- screen
- holes
- hoisting
- vapor deposition
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- 238000007740 vapor deposition Methods 0.000 title claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 2
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 239000000725 suspension Substances 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 210000001503 joint Anatomy 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a diathermanous screen technical field provides an assembled vapor deposition stove diathermanous screen, including diathermanous board, the shop bolt, fastening screw and hanging connect the subassembly, diathermanous board is provided with the polylith and encloses into the round, the both sides limit of each diathermanous board all is equipped with locating hole and the screw hole that a plurality of intervals set up, the side overlap joint of two piece adjacent diathermanous boards is so that the locating hole aligns and the screw hole aligns, the shop bolt is installed in the locating hole, fastening screw installs in the screw hole, the one end of each diathermanous board is equipped with the hoist and mount blind hole, the hoist and mount blind hole is used for detachable installation to hang and connects the subassembly. The diathermanous screen adopts the equipment of the diathermanous board of polylith to form, and connects as a whole through fastening screw and locating pin nail, when needs maintain the stove in, will hang and connect the subassembly to install on the diathermanous board through the hoist and mount blind hole, then uses the equipment of lifting by crane to connect and hang and connect the subassembly just can hang whole diathermanous screen out of stove in, need not to carry out equipment many times to diathermanous board like this, has guaranteed the life and the saving cost of diathermanous screen.
Description
Technical Field
The application belongs to the technical field of diathermy screens, and particularly relates to a diathermy screen of an assembled vapor deposition furnace.
Background
The chemical vapor deposition furnace is special equipment for CVI process, and is characterized by that under the condition of a certain vacuum or inert atmosphere, the workpiece in the furnace is heated to a certain temperature by utilizing resistance heating principle, then carbon source gas is introduced, the gas is cracked at high temperature to produce carbon-containing substance, and deposited on the surface of workpiece so as to attain the goal of densifying tissue. The diathermanous screen is an important part of the chemical vapor deposition furnace, separates a heating body from a workpiece in the furnace, and mainly plays roles in heat transfer and sealing: the heat of the heating body is transferred to the workpiece in the furnace, and meanwhile, the carbon source gas in the furnace is prevented from leaking and depositing on the heating body, so that the heating body is short-circuited or damaged.
At present, a plurality of diathermanous screens are generally assembled together for use, and the assembly and disassembly of the diathermanous screens are carried out in a furnace, so that when parts such as electrodes or heating bodies in the furnace are subjected to fault maintenance, the maintenance space is limited, the diathermanous screens need to be disassembled from each other in the furnace, and the diathermanous screens are spliced and installed after the maintenance is finished, on one hand, the environment in the furnace is poor after the use, the operation is inconvenient, and the maintenance efficiency is influenced; on the other hand, the heat-transmission screen is easy to damage after being disassembled and assembled for many times, so that the service life is shortened, and the cost is increased.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of this application is to provide an assembled vapor deposition stove diathermy screen to it all needs carry out the dismouting and influences its life's technical problem in the stove to solve among the prior art diathermy screen.
In order to achieve the purpose, the technical scheme adopted by the application is as follows: the utility model provides an assembled vapor deposition stove diathermanous screen, includes diathermanous board, dowel pin, fastening screw and hangs and connect the subassembly, diathermanous board is provided with the polylith and encloses into the round, each the both sides limit of diathermanous board all is equipped with locating hole and the screw hole that a plurality of intervals set up, adjacent two the side overlap joint of diathermanous board is so that corresponding the locating hole is aligned and corresponding the screw hole aligns, dowel pin install in the locating hole, fastening screw install in the screw hole, each the one end of diathermanous board is equipped with the hoist and mount blind hole, the hoist and mount blind hole is used for detachable installation hang and connect the subassembly.
In one embodiment, one side edge of the heat transmission plate is provided with a trapezoidal inclined surface, the other side edge of the heat transmission plate is provided with a notch inclined surface, the positioning holes and the threaded holes are arranged on the trapezoidal inclined surface and the notch inclined surface at intervals, and the trapezoidal inclined surface is attached to the notch inclined surface.
In one embodiment, the inclination of the trapezoidal slope and the notch slope is 10-30 °.
In one embodiment, at least two positioning holes are arranged on the same side surface, at least three threaded holes are arranged, and the threaded holes and the positioning holes are alternately arranged at intervals.
In one embodiment, the heat transmissive plate is a graphite plate or a carbon-carbon plate.
In one embodiment, the hoisting assembly comprises a hoisting ring frame, a plurality of connecting screws and a hoisting spiral ring, the hoisting ring frame is provided with a plurality of through holes corresponding to the hoisting blind holes one to one, the connecting screws are connected to the through holes in a threaded manner, the connecting screws are connected with the hoisting blind holes in an inserted manner or in a threaded manner, and the hoisting spiral ring is arranged at the top of the hoisting ring frame and is provided with a plurality of hoisting blind holes at intervals.
In one embodiment, the bail frame is a metal loop.
The application provides a assembled vapor deposition stove passes through heat shield's beneficial effect lies in: the diathermanous screen adopts the equipment of the diathermanous board of polylith to form, and connect as a whole through fastening screw and locating pin nail, when needs maintain the stove in, will hang and connect the subassembly to install on the diathermanous board through the hoist and mount blind hole, then use the equipment of lifting by crane to connect and hang and connect the subassembly just can hang whole diathermanous screen out of stove in, need not to carry out equipment many times to diathermanous board like this, facilitate the use and overhaul, improved production efficiency greatly, guaranteed the life and the saving cost of diathermanous screen.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic plan view of a heat transfer shield of an assembled vapor deposition furnace according to an embodiment of the present disclosure;
FIG. 2 is a schematic perspective view of a circle of heat-transmitting plates in a heat-transmitting shield of an assembled vapor deposition furnace according to an embodiment of the present disclosure;
FIG. 3 is a schematic cross-sectional view of a heat-transmitting plate of a heat-transmitting panel of an assembled vapor deposition furnace according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a heat-permeable plate in a heat-permeable panel of an assembled vapor deposition furnace according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram illustrating a suspension assembly of a thermal shield of an assembled vapor deposition furnace according to an embodiment of the present disclosure.
Wherein, in the figures, the respective reference numerals:
1. a heat-permeable plate; 11. positioning holes; 12. a threaded hole; 13. hoisting the blind holes; 14. a trapezoidal slope; 15. a notch inclined plane; 2. positioning a pin; 3. fastening screws; 4. a suspension assembly; 41. a suspension ring frame; 411. a through hole; 42. a connecting screw; 43. and hanging the spiral ring.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1 to 5, a description will now be given of a thermal shield of an assembled vapor deposition furnace according to an embodiment of the present application. The assembled vapor deposition furnace diathermy screen comprises a diathermy plate 1, a positioning pin 2, a fastening screw 3 and a suspension assembly 4. The heat transmission plates 1 are provided with a plurality of positioning holes 11 and threaded holes 12 which are arranged at intervals, the two side edges of each heat transmission plate 1, which are close to the adjacent heat transmission plate 1, are provided with a plurality of positioning holes 11 and threaded holes 12, the side edges of the two adjacent heat transmission plates 1 are lapped to align the corresponding positioning holes 11 on the two heat transmission plates 1 and align the corresponding threaded holes 12, the positioning pins 2 are arranged in the two aligned positioning holes 11, and the fastening screws 3 are arranged in the two aligned threaded holes 12, so that the heat transmission plates 1 are firmly connected together; one end of each heat transmission plate 1 is provided with a hoisting blind hole 13, and the hoisting blind holes 13 are used for detachably mounting the hoisting connection assemblies 4. The hoisting blind holes 13 ensure the sealing performance of the diathermanous plate 1 on one hand, and are used for installing the hoisting assembly 4 on the other hand, and the hoisting assembly 4 is convenient for hoisting the diathermanous plate 1 which is surrounded into a circle out of the vapor deposition furnace by means of hoisting equipment.
In this embodiment, diathermanous screen adopts the equipment of polylith diathermanous board 1 to form, and connects as a whole through fastening screw 3 and dowel 2, has the equipment convenience and is adapted to the gas tank deposition furnace of not unidimensional. When needs maintain the stove in, will hang and connect subassembly 4 to install on polylith diathermanous board 1 through hoist and mount blind hole 13, then use the equipment of lifting by crane to connect 4 and just can hang out the stove with whole diathermanous screen of hanging, need not to carry out equipment many times to diathermanous board 1 like this, diathermanous board 1 can not impaired, has guaranteed the life and the saving cost of diathermanous screen. The hoisting equipment can be an electric hoist, a winch and the like.
In this embodiment, a side of penetrating hot plate 1 is equipped with trapezoidal inclined plane 14, and another side is equipped with breach inclined plane 15, and when two adjacent 1 overlap joints of penetrating hot plate, trapezoidal inclined plane 14 on one penetrating hot plate 1 and the 15 overlap joints of breach inclined plane on another penetrating hot plate make things convenient for polylith to penetrate hot plate 1 to enclose into the lapped leakproofness between the round in order to penetrate hot plate 1 like this. In this embodiment, the positioning holes 11 and the threaded holes 12 are disposed on the trapezoidal inclined surface 14 and the notch inclined surface 15 at intervals, and the trapezoidal inclined surface 14 is attached to the notch inclined surface 15. In the present embodiment, the heat transmission plate 1 is a graphite plate or a carbon plate. Preferably, a graphite sealing strip can be arranged at the joint, and the material of the graphite sealing strip is the same as that of the heat transmission plate 1, so that the sealing property and the heat transmission property are ensured.
In the present embodiment, the inclination of the trapezoidal slope 14 and the notch slope 15 is 10 to 30 °, and the inclination is adjusted according to the number of the heat transmission plates 1, for example, in the present embodiment, the number of the heat transmission plates 1 is 24, and the inclination is 15 °.
In the present embodiment, at least two positioning holes 11 are provided on the same side, typically 2-4, at least three threaded holes 12 are provided, typically 3-6, and the threaded holes 12 and the positioning holes 11 are alternately arranged at intervals. When two adjacent heat transmission plates 1 are overlapped, two positioning bolts are firstly installed in the positioning holes 11, and then the fastening screws 3 are assembled, so that the fastening screws 3 are convenient to install. The number of the positioning holes 11 and the threaded holes 12 can be increased properly according to the length of the heat transmission plate 1 so as to ensure that the two heat transmission plates 1 can be connected in a sealing way.
In this embodiment, as shown in fig. 5, the suspension assembly 4 includes a suspension ring frame 41, a plurality of connection screws 42 and a suspension ring 43, a plurality of through holes 411 corresponding to the respective suspension blind holes 13 are formed in the suspension ring frame 41, the connection screws 42 are connected to the through holes 411 in a threaded manner, the connection screws 42 are connected to the suspension blind holes 13 in an inserted manner or in a threaded manner, and the suspension ring 43 is disposed at the top of the suspension ring frame 41 and is provided at intervals. When the diathermanous screen needs to be taken out of the furnace, the lifting ring frame 41 is arranged on the inner side of the diathermanous screen, so that the through holes 411 and the lifting blind holes 13 are in one-to-one butt joint communication, then the lifting ring frame 41 is fixed on the diathermanous screen by using the connecting screws 42, then the lifting equipment is used for connecting the plurality of lifting screw rings 43, and the diathermanous screen is integrally lifted out of the furnace. In one embodiment, the through hole 411 is a screw hole, and the hoisting blind hole 13 may also be a screw hole, and the hoisting blind hole 13 may be implemented by providing a metal stud with a screw hole therein. In the present embodiment, the hanging ring frame 41 is a metal ring, preferably a steel ring, and the diameter of the hanging ring frame 41 is smaller than that of the heat-transmission screen.
In this embodiment, because this diathermanous screen can integral hoist and mount get into the stove, for equipment diathermanous screen in the stove among the prior art, have the convenient advantage of equipment, when overhauing simultaneously, diathermanous screen hangs out of the stove in, makes things convenient for all the other maintenance operations, shortens the maintenance cycle, and need not to carry out the dismouting to the polylith diathermanous board 1 of diathermanous screen, guarantees can not be impaired to the maintenance cost has been reduced.
The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (7)
1. The assembled vapor deposition furnace heat transmission screen is characterized by comprising heat transmission plates (1), positioning pins (2), fastening screws (3) and a hoisting assembly (4), wherein the heat transmission plates (1) are provided with a plurality of blocks and enclose into a circle, two side edges of each heat transmission plate (1) are respectively provided with a plurality of positioning holes (11) and threaded holes (12) which are arranged at intervals, the side edges of two adjacent heat transmission plates (1) are lapped to enable the corresponding positioning holes (11) to be aligned and the corresponding threaded holes (12) to be aligned, the positioning pins (2) are installed in the positioning holes (11), the fastening screws (3) are installed in the threaded holes (12), one end of each heat transmission plate (1) is provided with a hoisting blind hole (13), and the hoisting blind holes (13) are used for detachably installing the hoisting assembly (4).
2. The assembled vapor deposition furnace diathermy screen of claim 1, wherein: one side edge of the heat transmission plate (1) is provided with a trapezoidal inclined plane (14), the other side edge of the heat transmission plate is provided with a notch inclined plane (15), the positioning hole (11) and the threaded hole (12) are arranged on the trapezoidal inclined plane (14) and the notch inclined plane (15) at equal intervals, and the trapezoidal inclined plane (14) is attached to the notch inclined plane (15).
3. The assembled vapor deposition furnace diathermy screen of claim 2, wherein: the inclination of the trapezoidal inclined plane (14) and the notch inclined plane (15) is 10-30 degrees.
4. The assembled vapor deposition furnace diathermy screen of claim 3, wherein: the positioning holes (11) on the same side face are at least two, the threaded holes (12) are at least three, and the threaded holes (12) and the positioning holes (11) are alternately arranged at intervals.
5. The assembled vapor deposition furnace diathermy screen of claim 4, wherein: the heat transmission plate (1) is a graphite plate or a carbon-carbon plate.
6. The assembled vapor deposition furnace diathermy screen of any one of claims 1-5, wherein: the hoisting assembly (4) comprises a hoisting ring frame (41), connecting screws (42) and hoisting spiral rings (43), a plurality of through holes (411) which correspond to the hoisting blind holes (13) one to one are formed in the hoisting ring frame (41), the connecting screws (42) are in threaded connection with the through holes (411), the connecting screws (42) are in plug-in connection or threaded connection with the hoisting blind holes (13), and the hoisting spiral rings (43) are arranged at the top of the hoisting ring frame (41) and are arranged in a plurality at intervals.
7. The assembled vapor deposition furnace diathermy screen of claim 6, wherein: the lifting ring frame (41) is a metal ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220433953.7U CN216919396U (en) | 2022-03-02 | 2022-03-02 | Assembled vapor deposition furnace diathermy screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220433953.7U CN216919396U (en) | 2022-03-02 | 2022-03-02 | Assembled vapor deposition furnace diathermy screen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216919396U true CN216919396U (en) | 2022-07-08 |
Family
ID=82225046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220433953.7U Active CN216919396U (en) | 2022-03-02 | 2022-03-02 | Assembled vapor deposition furnace diathermy screen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216919396U (en) |
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2022
- 2022-03-02 CN CN202220433953.7U patent/CN216919396U/en active Active
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