CN216902880U - Exercise device - Google Patents

Abstract

The present invention provides a sports apparatus, including: a moving assembly and a rotating assembly, wherein: the moving assembly includes: a moving part on which a mounting cavity is provided; the first positioning sleeve is sleeved on the moving part, and a first air layer gap is formed between the moving part and the first positioning sleeve; the moving component is movably arranged along the vertical direction relative to the first positioning sleeve; the rotating assembly is arranged in the mounting cavity, and the moving part can drive the rotating assembly to move in the vertical direction relative to the first positioning sleeve; the rotating assembly includes: the rotating component and the second positioning sleeve; the second positioning sleeve is sleeved on the rotating component and fixedly connected to the moving component, and the rotating component is rotatably arranged around a preset axis relative to the second positioning sleeve; and a second air layer gap is arranged between the second positioning sleeve and the rotating part. The utility model solves the problems of lower repeatability and positioning accuracy of the movement device in the prior art.

Description

Exercise device

Technical Field

The utility model relates to the field of integrated circuit equipment manufacturing, in particular to a motion device.

Background

In the detection of the thickness of the semiconductor silicon wafer film, a workpiece platform is required to complete the handover of the silicon wafer with a silicon wafer transmission system, and meanwhile, a moving device is required to bear silicon wafers with different sizes to complete the rotation and vertical movement so as to complete the detection of the thickness of the silicon wafer film.

In the existing motion device, the vertical direction and the Rz direction (rotation direction) are mostly guided by a mechanical guide rail or a bearing, the guiding precision is low, the silicon chip is difficult to be positioned with high precision, and the mechanical guide rail is seriously worn after being repeatedly used for a certain number of times and has low repeatability.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide a motion device to solve the problems of low repeatability and positioning accuracy of the motion device in the prior art in the vertical and Rz directions.

In order to achieve the above object, the present invention provides a sporting apparatus comprising: a moving assembly and a rotating assembly, wherein: the moving assembly includes: a moving part on which a mounting cavity is provided; the first positioning sleeve is sleeved on the moving part, and a first air layer gap is formed between the moving part and the first positioning sleeve; the moving component is movably arranged along the vertical direction relative to the first positioning sleeve; the rotating assembly is arranged in the mounting cavity, and the moving part can drive the rotating assembly to move in the vertical direction relative to the first positioning sleeve; the rotating assembly includes: the rotating component and the second positioning sleeve; the second positioning sleeve is sleeved on the rotating component and fixedly connected to the moving component, and the rotating component is rotatably arranged around a preset axis relative to the second positioning sleeve; and a second air layer gap is arranged between the second positioning sleeve and the rotating part.

Further, the first positioning sleeve comprises: a first sleeve body extending in a circumferential direction of the movable member; the first air outlet channel is arranged in the first sleeve body, the first air outlet channel extends along the circumferential direction of the first sleeve body, and the air outlet end of the first air outlet channel is opposite to the moving part so as to supply air to the first air layer gap through the first air outlet channel.

Further, be provided with air intake passage on the moving part, the second position sleeve includes: a second sleeve body; and the second air outlet channel is arranged in the second sleeve body and communicated with the air inlet channel, and the air outlet end of the second air outlet channel is opposite to the rotating part and supplies air towards the second air layer gap through the second air outlet channel.

Further, the rotating member includes: the rotating shaft is rotatably arranged around the axis of the rotating shaft, and the second sleeve body is sleeved on the rotating shaft; the first thrust plate comprises a first fixed end and a first free end, and the first fixed end of the first thrust plate is fixedly connected with the first radial end face of the rotating shaft; the second thrust plate comprises a second fixed end and a second free end, and the second fixed end of the second thrust plate is fixedly connected with the second radial end face of the rotating shaft; the first free end of the first thrust plate and the second free end of the second thrust plate both extend towards the direction away from the rotating shaft, so that an avoiding space for avoiding the second sleeve body is formed by surrounding the first thrust plate, the rotating shaft and the second thrust plate.

Further, the second cover body has along the relative first spigot surface and the second spigot surface that sets up of vertical direction, connects through the third spigot surface between first spigot surface and the second spigot surface, and second air outlet channel includes: the radial circulation channel extends along the radial direction of the second sleeve body, and an air outlet of the radial circulation channel is opposite to the circumferential end face of the rotating shaft; an axial flow channel in communication with the radial flow channel; a first air outlet of the axial flow channel is arranged on the first guide surface, and a second air outlet of the axial flow channel is arranged on the second guide surface; the first guide surface is arranged corresponding to the first free end, and the second guide surface is arranged corresponding to the second free end.

Further, the second air layer gap comprises: the first branch air layer gap is arranged between the circumferential end surface of the rotating shaft and the second sleeve body; the second branch air layer gap is arranged between the first guide surface of the second sleeve body and the first thrust plate; and the third branch gas layer gap is arranged between the second guide surface of the second sleeve body and the second thrust plate.

Further, the second sleeve body includes: the first thrust bearing part and the second thrust bearing part are sequentially connected along the vertical direction, and are annular, and the central axes of the first thrust bearing part and the second thrust bearing part are overlapped; the maximum diameters of the first thrust bearing portions are all smaller than the maximum diameter of the second thrust bearing portion; the upper surface of the first thrust bearing part is arranged corresponding to the first thrust plate; the inner side surface of the second thrust bearing part is arranged corresponding to the rotating shaft; the lower surface of the second thrust bearing portion is disposed corresponding to the second thrust plate.

Further, the moving assembly further comprises: the first driving part is used for driving the moving part to move along the vertical direction relative to the first positioning sleeve; the first driving component comprises a first stator part and a first rotor part, and the first stator part is connected with the first positioning sleeve; the first rotor part is connected with the moving component; the rotating assembly further comprises: the second driving component is used for driving the rotating component to rotate around a preset axis relative to the second positioning sleeve; the second driving part comprises a second stator part and a second rotor part, the second stator part is connected with the second positioning sleeve, and the second rotor part is connected with the rotating part; the second stator part is positioned above the second thrust bearing part and is opposite to the second mover part; the second driving member has a first end face attached to the mounting face of the second thrust bearing portion and a second end face opposite to the first end face, and a vertical distance between the second end face and the mounting face of the second thrust bearing portion is smaller than a vertical distance between the air outlet end face of the first thrust plate and the mounting face of the second thrust bearing portion.

Furthermore, the axial flow channels extend along the axial direction of the second sleeve body, and the number of the axial flow channels is multiple; the plurality of axial flow channels are uniformly distributed along the circumferential direction of the second sleeve body, and the vertical distances from the axial flow channels to the central shaft of the second sleeve body are equal.

Further, the height of the rotating assembly is not higher than the depth of the installation cavity.

Compared with the prior art, the utility model has the following beneficial effects:

1. by applying the technical scheme of the utility model, the movement device comprises a moving assembly and a rotating assembly, wherein the moving assembly comprises a moving part and a first positioning sleeve, the moving part is provided with an installation cavity, the first positioning sleeve is sleeved on the moving part, and a first air layer gap is arranged between the moving part and the first positioning sleeve; the moving component is movably arranged along the vertical direction relative to the first positioning sleeve; the rotating assembly is arranged in the mounting cavity, and the moving part can drive the rotating assembly to move in the vertical direction relative to the first positioning sleeve; further, the rotating assembly comprises a rotating component and a second locating sleeve, the second locating sleeve is arranged on the rotating component and fixedly connected to the moving component, and the rotating component is rotatably arranged around a preset axis relative to the second locating sleeve; and a second air layer gap is arranged between the second positioning sleeve and the rotating part. The vertical (vertical) air floatation guide rail can be formed by the gas in the first gas layer gap, the moving part is vertically guided in the moving process of the moving part, and meanwhile, due to the existence of the gas in the first gas layer gap, the moving part cannot be in direct contact with the first positioning sleeve, so that the friction force between the moving part and the first positioning sleeve is reduced, and the service life of the moving part and the first positioning sleeve is prolonged; in the process that the moving part drives the rotating assembly to reciprocate in the vertical direction, the rotating part can rotate around a preset axis relative to the second positioning sleeve, and because a second air layer gap is arranged between the second positioning sleeve and the rotating part, and an Rz-direction air floatation guide rail is formed by gas in the second air layer gap, the second positioning sleeve and the rotating part cannot be in direct contact, and Rz-direction guiding is performed by the gas in the second air layer gap, so that the moving device in the embodiment realizes high-precision guiding in the vertical direction and high-precision guiding in the Rz direction (circumferential direction), and solves the problems of low repeatability and positioning precision of the moving device in the prior art during vertical and Rz-direction movement;

2. the rotating assembly further comprises a second driving component for driving the rotating component to rotate around a preset axis relative to the second positioning sleeve; the second driving component comprises a second stator part and a second moving part, the second stator part is connected with the second positioning sleeve, and the second moving part is connected with the rotating component; the second stator part is arranged on the mounting surface of the second thrust bearing part and is opposite to the second rotor part; the second stator portion is provided with a first end face attached to the mounting face of the second thrust bearing portion and a second end face opposite to the first end face, and the vertical distance between the second end face and the mounting face of the second thrust bearing portion is smaller than the vertical distance between the air outlet end face of the first thrust plate and the mounting face of the second thrust bearing portion. Due to the size design, the space between the heights of the first thrust plates on the second thrust bearing part can be effectively utilized, the flat design of the rotating assembly is guaranteed, the flat of the whole moving device is further realized, and the whole volume is reduced;

3. the axial flow channels extend along the axial direction of the second sleeve body, and the number of the axial flow channels is multiple; the plurality of axial flow channels are uniformly distributed along the circumferential direction of the second sleeve body, and the vertical distances from the axial flow channels to the central shaft of the second sleeve body are equal. By the design, uniform air buoyancy can be provided for the first thrust plate and the second thrust plate respectively, so that the phenomenon that the precision of the movement device is influenced due to the fact that the first thrust plate and the second thrust plate are inclined possibly caused by uneven stress is avoided;

4. in addition, owing to set up the installation cavity on the moving part, the rotating assembly sets up in the installation cavity, as shown in fig. 1, has formed moving part and the nested formula design of rotating assembly, and the installation cavity is the cell body structure, and the whole height of rotating assembly is not higher than the groove depth of installation cavity, and the design can be with rotating assembly monolithic mounting in the installation cavity like this, and then with overall structure's high reduction, realizes the flattening design of telecontrol equipment.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the utility model and, together with the description, serve to explain the utility model and not to limit the utility model. In the drawings:

FIG. 1 shows a schematic view of a motion device in an embodiment of the utility model;

FIG. 2 shows a cross-sectional view of a motion device in an embodiment of the utility model;

FIG. 3 is a diagram illustrating the engagement of the moving parts of the exercise apparatus with the first positioning sleeve in accordance with an exemplary embodiment of the present invention;

FIG. 4 is a schematic diagram showing the structure of the moving parts of the exercise apparatus in an embodiment of the present invention;

FIG. 5 is a schematic view showing the structure of a first positioning sleeve of the exercise apparatus according to the embodiment of the present invention;

FIG. 6 is a diagram showing the relationship between the rotating part and the moving part of the moving device according to the exemplary embodiment of the present invention;

FIG. 7 is a diagram illustrating the engagement of the rotating member of the exercise apparatus with the second positioning sleeve in accordance with the exemplary embodiment of the present invention;

FIG. 8 is a schematic diagram of a second alignment sleeve of the exercise apparatus in an embodiment of the present invention;

fig. 9 is a schematic structural view showing a first thrust plate of the moving device in the embodiment of the present invention;

fig. 10 is a schematic structural view showing a second thrust plate of the moving device in the embodiment of the present invention;

FIG. 11 is a schematic view showing the structure of a rotation shaft of the exercise apparatus in the embodiment of the present invention;

FIG. 12 illustrates a schematic structural diagram of a gravity compensation assembly in an exemplary embodiment of the utility model;

fig. 13 is a schematic view showing the structure of a sporting apparatus according to another embodiment of the present invention.

Wherein the figures include the following reference numerals:

1. a moving member; 10. a mounting cavity; 11. an air intake passage; 101. a step structure; 1010. a first step end face; 1011. a second step end face; 12. moving the body; 13. a yielding groove; 14. mounting holes;

2. a first positioning sleeve; 20. a first sleeve body; 201. an air outlet end face; 2010. a first air outlet; 202. an air inlet end face; 2020. a first air intake hole; 21. a first air outlet channel; 210. a circumferential flow channel; 211. a longitudinal communication channel; 22. a boss portion; 23. a first seal member;

3. a rotating member; 30. a rotating shaft; 301. a third exhaust passage; 31. a first thrust plate; 32. a second thrust plate; 310. a first exhaust passage; 320. a second exhaust passage; 3201. a first exhaust section; 3202. a second exhaust section;

4. a second positioning sleeve; 40. a second sleeve body; 401. a first thrust bearing portion; 402. a second thrust bearing portion; 41. a second air outlet channel; 410. a radial flow channel; 411. an axial flow channel; 42. a second seal member; 43. a series channel; 403. an exhaust groove;

5. a base; 6. a gravity compensation component; 601. a first magnetic steel; 602. a second magnetic steel; 603. end magnetic steel;

7. a position detecting part; 8. a limiting component; 91. a second stator portion; 92. a second rotor portion;

100. a suction cup air supply hole; 200. a suction cup gas supply pipe; 300. a first gas layer gas supply pipe; 400. a second gas layer supply pipe.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.

Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.

The embodiments of the present invention will be described in detail below with reference to the accompanying drawings in order to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.

Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.

In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.

Referring to fig. 1 to 11, the present embodiment provides a sports apparatus, including: a moving assembly and a rotating assembly, wherein: the moving assembly includes: a moving part 1 on which a mounting cavity 10 is provided; the first positioning sleeve 2 is sleeved on the moving part 1, and a first air layer gap is formed between the moving part 1 and the first positioning sleeve 2; the moving part 1 is movably arranged in the vertical direction relative to the first positioning sleeve 2; the rotating assembly is arranged in the mounting cavity 10, and the moving part 1 can drive the rotating assembly to move in the vertical direction relative to the first positioning sleeve 2; the rotating assembly includes: the rotating part 3 and the second positioning sleeve 4; the second positioning sleeve 4 is sleeved on the rotating component 3 and is fixedly connected to the moving component 1, and the rotating component 3 is rotatably arranged around a preset axis relative to the second positioning sleeve 4; a second air layer gap is arranged between the second positioning sleeve 4 and the rotating component 3.

In the moving device provided by the embodiment, a first air layer gap is arranged between the moving part 1 and the first positioning sleeve 2; a second air layer gap is arranged between the second positioning sleeve 4 and the rotating component 3. The arrangement can form a vertical (vertical) air floatation guide rail through the gas in the first gas layer gap, the moving part 1 is vertically guided in the moving process of the moving part 1, and meanwhile, due to the existence of the gas in the first gas layer gap, the moving part 1 cannot be in direct contact with the first positioning sleeve 2, so that the friction force between the moving part and the first positioning sleeve 2 is reduced, and the service lives of the moving part 1 and the first positioning sleeve 2 are prolonged; in the process that the moving part 1 drives the rotating assembly to reciprocate in the vertical direction, the rotating part 3 can rotate around a preset axis relative to the second positioning sleeve, and because a second air layer gap is arranged between the second positioning sleeve 4 and the rotating part 3, and an Rz-direction air-floating guide rail is formed by gas in the second air layer gap, the second positioning sleeve 4 and the rotating part 3 cannot be in direct contact, but the Rz-direction guide is performed by the gas in the second air layer gap, so that the moving device in the embodiment realizes vertical (vertical) high-precision guide and Rz-direction (circumferential) high-precision guide, and solves the problems of low repeatability and positioning precision of the moving device in the prior art when the moving device moves in the vertical direction and the Rz direction; in addition, owing to set up installation cavity 10 on moving part 1, the rotating assembly sets up in installation cavity 10, as shown in fig. 1, has formed moving part 1 and the nested formula design of rotating assembly, and installation cavity 10 is the cell body structure, and the whole height of rotating assembly is not higher than the groove depth of installation cavity 10, and the design can be with rotating assembly monolithic mount in installation cavity 10 like this, and then with overall structure's high reduction, realizes the flattening design of telecontrol equipment.

In the present embodiment, the rotating member 3 and the second positioning sleeve 4 are coaxially disposed, and the predetermined axis, i.e., the central axis of the rotating member 3 and the second positioning sleeve 4, extends in the vertical direction, coinciding with the moving direction of the moving member 1.

Specifically, as shown in fig. 1 to 3, the first positioning sleeve 2 includes: a first sleeve 20, the first sleeve 20 extending in a circumferential direction of the moving member 1; and the first air outlet channel 21 is arranged in the first sleeve 20, the first air outlet channel 21 extends along the circumferential direction of the first sleeve 20, and the air outlet end of the first air outlet channel 21 is opposite to the moving part 1 so as to supply air to the first air layer gap through the first air outlet channel 21. The arrangement can utilize the first gas outlet channel 21 to be directly connected with a first gas source to supply gas to the first gas layer gap, wherein the first sleeve body 20 is provided with a first gas layer gas supply pipe 300, one end of the first gas layer gas supply pipe 300 is communicated with the first gas source, and the other end of the first gas layer gas supply pipe 300 is communicated with the first gas outlet channel 21.

Specifically, as shown in fig. 5, the first sleeve 20 includes an outlet end face 201 opposite to the moving part 1, and the outlet end face 201 is surrounded by a plurality of sub outlet end faces; a plurality of groups of first air outlet holes 2010 are formed in the air outlet end face 201, the plurality of groups of first air outlet holes 2010 are arranged along the circumferential direction of the air outlet end face 201 at intervals, and the plurality of groups of first air outlet holes 2010 are communicated with the first air outlet channel 21. The first air outlet holes 2010 of the multiple groups supply air to the first air layer gaps, so that the air distribution in the first air layer gaps is more uniform, and the guiding precision of the moving part 1 is improved.

As shown in fig. 3 and 5, the first housing 20 further includes an air inlet end face 202 opposite to the air outlet end face 201, a first air inlet 2020 is disposed on the air inlet end face 202, and the first air inlet 2020 communicates with the first air outlet channel 21, so as to input air flow into the first air outlet channel 21 through the first air inlet 2020. The first gas layer air supply pipe 300 is connected to the first air outlet channel 21 through a first air inlet 2020.

In order to make the gas distribution in the first gas layer gap uniform, the first gas outlet channel 21 includes: the circumferential flow channels 210 are arranged along the circumferential direction of the first sleeve 20, the number of the circumferential flow channels 210 is at least two, and the at least two circumferential flow channels 210 are arranged at intervals along the height direction of the first sleeve 20; a longitudinal communication passage 211 extending in a height direction of the first sleeve 20, at least two circumferential flow passages 210 being communicated with each other through the longitudinal communication passage 211; the longitudinal communication passage 211 is plural, and the plural longitudinal communication passages 211 are provided at intervals in the circumferential direction of the first sleeve 20. In this way, the first air inlet 2020 is formed in the air inlet end face 202, so that air can be introduced into the circumferential circulation channel 210 and the longitudinal communication channel 211. Specifically, the first sleeve 20 includes a plurality of plate bodies connected in sequence along the circumferential direction of the moving part 1, the inner side surface of each plate body is an air outlet end surface, and in order to avoid gas leakage in the first gas layer gap, a first sealing part 23 is arranged between two adjacent plate bodies to improve the sealing performance of the first gas layer gap. The high-pressure gas in the first gas layer gap flows through the end face of the first sleeve 20 and is then discharged, so that the high-pressure gas in the first gas layer gap is kept stable.

In this embodiment, the cross section of the first positioning sleeve 2 is rectangular as shown in fig. 1, the first sleeve 20 includes four plate bodies (see fig. 5) connected in sequence, and as for the air outlet end face 201 of the first sleeve 20, the first positioning sleeve includes four sub air outlet end faces, wherein each sub air outlet end face is at least provided with one or more groups of first air outlet holes 2010, and the number of the first air outlet holes 2010 on each sub air outlet end face is kept consistent, so that the air is uniformly distributed around the moving component 1. In another embodiment of the utility model, as shown in fig. 13, the cross section of the first positioning sleeve 2 of the exercise apparatus may be hexagonal, and the utility model does not limit the specific shape of the first positioning sleeve; it should be noted that, when the shape of the first positioning sleeve 2 changes, the shape of the moving part 1 also needs to be changed adaptively to match with the first positioning sleeve 2, so as to ensure that the first air outlet channel 21 in the first positioning sleeve 2 can uniformly supply air to the moving part 1; and the shape of the second positioning sleeve and the rotating component 3 can be matched according to the shape of the installation cavity. It is to be explained here that the moving direction of the moving member 1 is taken as a longitudinal direction, and the vertical and longitudinal directions are taken as lateral directions.

As shown in fig. 5, the first positioning sleeve 2 further includes: a plurality of protruding portions 22, which are arranged on the air outlet end face 201, wherein the protruding portions 22 protrude towards the direction close to the moving part 1 relative to the air outlet end face 201, and each protruding portion 22 is provided with a group of first air outlet holes 2010; the plurality of protruding portions 22 are arranged at intervals along the extending direction of the air outlet end surface 201, and the plurality of protruding portions 22 and the plurality of groups of first air outlet holes 2010 are arranged in a one-to-one correspondence manner. Each set of first outlet holes 2010 includes a plurality of first outlet holes, and the first outlet holes are uniformly spaced on the protruding portion 22 to provide a stable air flow. In the present embodiment, two protruding portions 22 are provided on each sub-air outlet end surface, which is only an example, and the present invention does not limit the number of protruding portions 22 on each sub-air outlet end surface.

In a specific use, the movement device is also provided with a position detection means 7. In this embodiment, two position detection components 7 are provided, two position detection components 7 are respectively provided on two opposite sub air outlet end faces, and the position detection component 7 is provided between two adjacent convex portions 22 on the sub air outlet end faces. The position detection component 7 is preferably a grating scale and a reading head, the grating scale is arranged on the moving component 1, the reading head is arranged on the first sleeve 20, the moving position of the moving component 1 can be detected, and meanwhile blocking of the grating scale to the flowing of the air flow is avoided.

In this embodiment, the plurality of sub-air outlet end faces include a first sub-air outlet end face, a second sub-air outlet end face, a third sub-air outlet end face and a fourth sub-air outlet end face which are connected in sequence, and the two position detection components 7 are respectively disposed on the first sub-air outlet end face and the third sub-air outlet end face which are opposite to each other.

The limiting assembly 8 is further arranged between the first sleeve body 20 and the moving part 1, the limiting assembly 8 comprises a first limiting portion and a second limiting portion, a first limiting portion is arranged on the bottom surface of the first limiting sleeve 2, a second limiting portion is arranged on the moving part 1, the first limiting portion is arranged on the air outlet end surface of the second sub-air outlet end surface and the air outlet end surface of the fourth sub-air outlet end surface which are opposite, and is arranged between two adjacent protruding portions 22 on the air outlet end surface of the second sub-air outlet end surface and between two adjacent protruding portions 22 on the air outlet end surface of the fourth sub-air outlet end surface, the first limiting portion is in a hook shape, the second limiting portion is in a hook shape, when the moving part 1 rises to a preset position, the first limiting portion stops the second limiting portion to limit the moving stroke of the moving part 1, and device damage caused by over-extension of the moving part 1 is avoided. It should be explained here that, in order to avoid the position detection part 7 and the limiting component 8 from affecting each other, the position detection part 7 and the limiting component 8 are respectively disposed on different sub air outlet end surfaces to ensure that the two parts can stably operate respectively.

As shown in fig. 1, 6 and 7, in order to supply gas into the second gas layer gap, the moving member 1 is provided with an air inlet passage 11, and the second positioning sleeve 4 includes: a second sleeve body 40; and a second air outlet channel 41 arranged in the second sleeve body 40 and communicated with the air inlet channel 11, wherein the air outlet end of the second air outlet channel 41 is opposite to the rotating component 3, and air is supplied to the second air layer gap through the second air outlet channel 41. Wherein, be provided with second gas blanket air supply pipe 400 on first casing 20, the one end and the second air supply intercommunication of second gas blanket air supply pipe 400, the other end and inlet channel 11 intercommunication set up like this and can drive the in-process that rotating part 3 removed at moving part 1, input gas in the clearance to the second gas blanket simultaneously to realize the Rz to the guide effect to rotating part 3.

As shown in fig. 7, the rotating member 3 includes: the rotating shaft 30 is rotatably arranged around the axis of the rotating shaft, and the second sleeve body 40 is sleeved on the rotating shaft 30; the first thrust plate 31, the first thrust plate 31 includes a first fixed end and a first free end, the first fixed end of the first thrust plate 31 is fixedly connected with the first radial end face of the rotating shaft 30; a second thrust plate 32, where the second thrust plate 32 includes a second fixed end and a second free end, and the second fixed end of the second thrust plate 32 is fixedly connected to the second radial end surface of the rotating shaft 30; the first free end of the first thrust plate 31 and the second free end of the second thrust plate 32 both extend in a direction away from the rotating shaft 30, so as to form an avoidance space for avoiding the second sleeve body 40 between the first thrust plate 31, the rotating shaft 30 and the second thrust plate 32. Thus, part of the second sleeve body 40 is embedded in the avoiding space, so that the whole structure of the rotating part 3 is more compact, the whole height of the rotating part 3 can be reduced, and the whole volume of the device is reduced. The rotating shaft 30 and the second sleeve body 40 are coaxially disposed, and the "own axis" of the rotating shaft 30, that is, the central axis of the rotating shaft 30 and the central axis of the second sleeve body 40 extend in the vertical direction and coincide with the moving direction of the moving member 1. A first fixed end and a first free end of the first thrust plate 31 are oppositely arranged along the radial direction of the first thrust plate 31, the first thrust plate 31 is annular, the first fixed end is one end close to the inner circumferential surface of the first thrust plate 31, and the first free end is one end close to the outer circumferential surface of the first thrust plate 31; similarly, the second thrust plate 32 is annular, and the second fixed end and the second free end are arranged in the same manner as the first fixed end and the first free end.

Specifically, the second sleeve body 40 has a first guide surface and a second guide surface which are arranged oppositely along the vertical direction, the first guide surface and the second guide surface are connected through a third guide surface, and the second air layer gap comprises: a first branch air layer gap arranged between the circumferential end surface of the rotating shaft and the third guide surface of the second sleeve body 40; the second branch air layer gap is arranged between the first guide surface of the second sleeve body 40 and the first thrust plate 31; and a third branched gas layer gap is arranged between the second guide surface of the second sleeve body 40 and the second thrust plate 32. Because part of the second sleeve body 40 is embedded in the avoiding space, and then a first branch air layer gap, a second branch air layer gap and a third branch air layer gap are arranged, so that an air floatation guide rail is formed between each end face of the rotating part 3 opposite to the second sleeve body 40, and the guiding precision of the rotating part 3 is improved.

Specifically, second outlet channel 41 includes: a radial flow channel 410, wherein the radial flow channel 410 extends along the radial direction of the second sleeve body 40, and an air outlet of the radial flow channel 410 is opposite to the circumferential end surface of the rotating shaft 30; an axial flow channel 411 communicating with the radial flow channel 410, a first outlet of the axial flow channel 411 being arranged on a first guide surface of the second jacket body 40 and a second outlet of the axial flow channel 411 being arranged on a second guide surface of the second jacket body 40. Wherein, the first guiding surface is arranged corresponding to the first free end of the first thrust plate 31, the second guiding surface is arranged corresponding to the second free end of the second thrust plate 32, the radial flow passage 410 is multi-segment, the multi-segment radial flow passage 410 is arranged along the axial direction of the second sleeve body 40 at intervals, wherein, the radial flow channel 410 is two segments, the two segments of radial flow channels 410 are both opposite to the first branch gas layer gap, wherein, one radial flow channel of the two sections of radial flow channels 410 is communicated with the air inlet channel 11, the two sections of radial flow channels 410 are communicated through an axial flow channel 411, two ports of the axial flow channel 411 are respectively opposite to the second branch gas layer gap and the third branch gas layer gap, so as to supply air into the first branch air layer gap, the second branch air layer gap and the third branch air layer gap respectively through the two sections of radial flow channels 410 and the axial flow channel 411. Preferably, in this embodiment, the second jacket body 40 is provided with a serial channel 43, the serial channel 43 extends along the circumferential direction of the second jacket body 40, the two sections of radial flow channels 410 include a plurality of first radial flow channels, one of the plurality of first radial flow channels is communicated with the air inlet channel 11, the plurality of first radial flow channels are communicated with each other through the serial channel 43, the serial channel 43 is in a groove structure, the second jacket body 40 is further provided with a second sealing member 42, the second sealing member 42 is covered on the serial channel 43 and connected with the second jacket body 40, and the serial channel 43 is sealed by the second sealing member 42, so that the gas flows into each first radial flow channel. As shown in fig. 8, the inner wall surface of the second jacket body 40 is provided with an exhaust groove 403, the exhaust groove 403 extends along the circumferential direction of the second jacket body 40, and the exhaust groove 403 is communicated with the third exhaust channel 301 provided on the rotating shaft 30, so that the high-pressure gas in the first branch gas layer gap passes through the third exhaust channel 301 and then is exhausted through the exhaust groove 403, so that the high-pressure gas in the first branch gas layer gap is kept stable.

Further, the first thrust plate 31 is provided with a first exhaust passage 310, the second thrust plate 32 is provided with a second exhaust passage 320, the rotating shaft 30 is provided with a third exhaust passage 301, and the second gas layer gap is respectively communicated with the first exhaust passage 310, the second exhaust passage 320 and the third exhaust passage 301. The arrangement is such that the high-pressure gas in the second gas layer gap is discharged through the first exhaust passage 310, the second exhaust passage 320 and the third exhaust passage 301, so as to maintain the stability of the high-pressure gas in the second gas layer gap.

The second exhaust passage 320 includes a first exhaust section 3201 and a second exhaust section 3202 connected to each other, the first exhaust section 3201 extends in the axial direction of the first thrust plate 31 and communicates with the first branch gas layer gap, and the second exhaust section 3202 extends in the radial direction of the first thrust plate 31. As shown in fig. 6 and 7, the bottom end face of the second thrust plate 32 is opposite to the inner wall face of the mounting cavity 10, so as to avoid blocking the air flow in the second exhaust passage 320 when the air exhausted from the second exhaust passage 320 flows to the bottom of the second thrust plate 32, therefore, the second exhaust passage 320 is provided as a first exhaust section 3201 and a second exhaust section 3202, and the second exhaust section 3202 extends in the radial direction of the first thrust plate 31, so as to avoid the exhausted air from affecting the air exhaust in the second exhaust passage 320.

It should be noted that the exhaust passage of the present embodiment is used to exhaust the excessive high-pressure gas to ensure the stability of the high-pressure gas in the gas layer gap. The air outlet channel of the embodiment is used for supplying air to the air layer gap so as to travel the air floatation guide rail. The roles of the two are different.

In a specific implementation, as shown in fig. 7, the second sheath body 40 includes: the bearing comprises a first thrust bearing part 401 and a second thrust bearing part 402 which are sequentially connected along the vertical direction, wherein the first thrust bearing part 401 and the second thrust bearing part 402 are both annular and have overlapped central axes; the maximum diameter of the first thrust bearing portion 401 is smaller than the maximum diameter of the second thrust bearing portion 402; the upper surface of the first thrust bearing portion 401 is disposed corresponding to the first thrust plate 31; the inner side surface of the second thrust bearing portion 402 is provided corresponding to the rotary shaft 30; the lower surface of the second thrust bearing portion 402 is provided corresponding to the second thrust plate 32. The first branched gas layer gap is provided between the circumferential end surface of the rotating shaft 30 and the inner side surface of the second thrust bearing portion 402; the second branched gas layer gap is provided between the first thrust bearing portion and the first thrust plate 31; and a third branched gas layer gap provided between the second thrust bearing portion and the second thrust plate 32. Here, it should be noted that the first guide surface of the second sleeve 40 is located on the upper surface of the first thrust bearing portion 401, the second guide surface is located on the lower surface of the second thrust bearing portion 402, and the third guide surface is located on the inner side surface of the second thrust bearing portion 402.

In this embodiment, the moving assembly further includes: the first driving part is used for driving the moving part 1 to move along the vertical direction (vertical direction) relative to the first positioning sleeve 2; the first driving component comprises a first stator part and a first rotor part, and the first stator part is connected with the first positioning sleeve 2; the first rotor part is connected with the moving component 1; the rotating assembly further comprises: a second driving member for driving the rotating member 3 to rotate about a predetermined axis with respect to the second positioning sleeve 4; the second driving part comprises a second stator part 91 and a second rotor part 92, the second stator part 91 is connected with the second positioning sleeve 4, and the second rotor part 92 is connected with the rotating part 3; the second stator portion 91 is provided on the mounting surface of the radial bearing portion and is provided opposite to the second rotor portion 92; the second stator portion 91 has a first end face that is attached to the attachment face of the second thrust bearing portion 402 and a second end face that is opposite to the first end face, and the vertical distance between the second end face and the attachment face of the second thrust bearing portion is smaller than the vertical distance between the gas outlet end face of the first thrust plate 31 and the attachment face of the second thrust bearing portion. Due to the size design, the space between the heights of the first thrust plate 31 on the second thrust bearing part 402 can be effectively utilized, the flat design of the rotating assembly is guaranteed, the flat of the whole moving device is further realized, and the whole volume is reduced. In the present embodiment, the "attachment surface of the second thrust bearing portion" is the upper surface of the second thrust bearing portion 402 and is not connected to the first thrust bearing portion 401.

To further achieve a flattened design of the movement device, the height of the rotating assembly is not higher than the depth of the mounting cavity 10. That is to say, the rotating assembly is integrally installed in the installation cavity 10, so as to form a nested structure design, thereby saving installation space. Wherein, be provided with the cell body on the moving part 1, installation cavity 10 is the cell cavity of cell body, and the degree of depth of installation cavity 10 is the groove depth of cell body, and the groove depth direction of cell body is unanimous with the moving direction of moving part 1 and is vertical direction promptly.

Preferably, the first stator part is a first coil component, the first rotor part is a first magnetic steel component, and the moving component 1 is driven to move under the action of magnetic force between the first coil component and the first magnetic steel component; the second stator portion 91 is a second coil component, and the second rotor portion 92 is a second magnetic steel component, and the rotating member 3 is driven to rotate by the magnetic force between the second coil component and the second magnetic steel component. It should be noted that the driving manner of the first driving component and the second driving component is not limited to the driving manner by matching the coil and the magnetic steel, and the utility model is within the protection of the utility model as long as the technical solution of driving the moving component 1 to move and the rotating component 3 to rotate can be realized.

The axial flow channels 411 extend along the axial direction of the second sleeve body 40, and a plurality of axial flow channels 411 are provided; a plurality of axial flow channels 411 are evenly distributed along the circumference of the second jacket body 40, and the vertical distances from each axial flow channel 411 to the central axis of the second jacket body 40 are equal. Taking the first thrust plate 31 as an example to illustrate the benefit of such design, "the vertical distance between each axial flow channel 411 and the central axis of the second sleeve body 40 is equal" means that only one circle of air supply and air throttle holes (communicated with the axial flow channel 411) on the first guide surface of the second sleeve body 40 supplies air to the second branch air layer gap, which can provide uniform air buoyancy for the first thrust plate 31, thereby avoiding the problem that the inclination of the first thrust plate 31 possibly caused by uneven stress affects the precision of the moving device. The benefits of the second thrust plate 32 and the first thrust plate 31 are identical and will not be described here. And the design can also ensure that the gas blown into the second branch gas layer gap and the third branch gas layer gap is kept uniform.

In a specific implementation, the exercise device further comprises: the first positioning sleeve 2 is fixedly connected to the base 5; and a gravity compensation assembly 6 connected to the base 5 and the moving member 1, respectively, for applying a force to the moving member 1 in a direction opposite to a gravity direction of the moving member 1 through the gravity compensation assembly 6. The moving part 1 is provided with a mounting hole 14, and at least part of the gravity compensation assembly 6 is arranged in the mounting hole 14; the number of the mounting holes 14 is multiple, the mounting holes 14 are arranged at intervals along the circumferential direction of the moving part 1, the gravity compensation assemblies 6 are multiple groups, and the multiple groups of gravity compensation assemblies 6 are arranged in one-to-one correspondence with the mounting holes 14. Through the multiple groups of gravity compensation assemblies 6, the moving part 1 is uniformly stressed, and the moving performance and the repeatability of the moving part 1 are improved.

The gravity compensation assembly 6 is respectively connected with the base 5 and the moving part 1, and acting force opposite to the gravity direction of the moving part 1 is applied to the moving part 1 through the gravity compensation assembly 6; as shown in fig. 12, the gravity compensation assembly 6 includes: the magnetic bearing comprises a first component and a second component, the first component comprises a first cylindrical magnetic steel 601, the first magnetic steel 601 is arranged on a first supporting piece, the second component comprises a second magnetic steel 602 and at least one end magnetic steel 603, the second magnetic steel 602 and the end magnetic steel 603 are both arranged on a second supporting piece, wherein the second magnetic steel 602 is cylindrical and arranged in the first magnetic steel 601, a gap is formed between the outer wall surface of the second magnetic steel 602 and the inner wall surface of the first magnetic steel 601, the end magnetic steel 603 is cylindrical, the end magnetic steel 603 is arranged at the axial end of the second magnetic steel 602 and has a gap with the second magnetic steel 602, when the end magnetic steel 603 is one, the end magnetic steel 603 is arranged at any one of two end parts of the second magnetic steel 602 along the axial direction, the central line of the end magnetic steel 603 is coincident with the central line of the second magnetic steel 602, further, the vertical distance between the outer wall surface and the inner wall surface of the end magnetic steel 603 is smaller than that between the outer wall surface and the inner wall surface of the second magnetic steel 602 Distance.

Preferably, the magnetizing direction of the first magnetic steel 601 is radial magnetizing, and the magnetizing directions of the second magnetic steel 602 and the end magnetic steel 603 are axial magnetizing; in specific implementation, when the first component is connected with the base 5 and the second component is connected with the moving component 1, the magnetizing direction of the first magnetic steel 601 is from the inner wall surface of the first magnetic steel 601 to the outer wall surface of the first magnetic steel 601, and the magnetizing directions of the second magnetic steel 602 and the end magnetic steel 603 are axially downward; or the magnetizing direction of the first magnetic steel 601 is the direction from the outer wall surface of the first magnetic steel 601 to the inner wall surface of the first magnetic steel 601, and the magnetizing directions of the second magnetic steel 602 and the end magnetic steel 603 are axial and upward; when the first component is connected with the moving component 1 and the second component is connected with the base 5, the magnetizing direction of the first magnetic steel 601 is the direction from the outer wall surface of the first magnetic steel 601 to the inner wall surface of the first magnetic steel 601, and the magnetizing directions of the second magnetic steel 602 and the end magnetic steel 603 are axial downward; or the magnetizing direction of the first magnetic steel 601 is the direction from the inner wall surface of the first magnetic steel 601 to the outer wall surface of the first magnetic steel 601, and the second magnetic steel 602 and the end magnetic steel 603 are axially upward. Therefore, the magnetic suspension force is provided for the moving part 1 through the first part or the second part, the falling buffer effect is given to the moving part 1, the load of the first driving part is further reduced, and the vertical motion performance of the moving part 1 is improved.

The prior art usually selects a spring as the gravity compensation component, and when the gravity compensation device is used, the motion device needs to be hung upside down to use the gravity compensation device. The gravity compensation assembly of the present embodiment can generate a vertically upward magnetic levitation force, so that the motion device of the present embodiment can be directly used without being hung upside down. The gravity compensation assembly of the embodiment can provide large-amplitude magnetic levitation force, and the magnetic levitation force fluctuation is small in large stroke. The motion device using the gravity compensation assembly has wider application range and is easier to control motion.

In the present embodiment, a step structure 101 is disposed in the mounting cavity 10, and the step structure 101 includes a first step end surface 1010 and a second step end surface 1011; the rotating member 3 is disposed on the first step end surface 1010, and the second positioning sleeve 4 is disposed on the second step end surface 1011. The overall structure that sets up like this is compacter reasonable, has guaranteed to all install rotary part 3 and second position sleeve 4 in installation cavity 10, has still reached the guide effect of second position sleeve 4 to rotary part 3 simultaneously.

As shown in fig. 3 to 5, the moving member 1 includes: the movable body 12 is movably arranged along the vertical direction, the installation cavity 10 is arranged on the movable body 12, and the first air layer gap is positioned between the movable body 12 and the first positioning sleeve 2; and the yielding groove 13 is arranged on the circumferential end surface of the moving body 12, and the yielding groove 13 is sunken towards the direction close to the middle part of the moving body 12 relative to the circumferential end surface. The receding groove is disposed opposite to the mounting space between two adjacent protrusions 22 on each sub-outlet end surface of the first sleeve 20, which facilitates the mounting of the grating ruler and the reading head, and the first and second limiting portions for limiting the position of the moving body 12. Meanwhile, the movable part 1 and the first positioning sleeve 2 are correspondingly arranged, so that the stress of the movable body 12 is more uniform.

As shown in fig. 1, in practical application, the first casing 20 is further provided with a suction cup air supply pipe 200, the suction cup air supply pipe 200 is communicated with the suction cup air supply hole 100, and negative pressure is supplied to the suction cup air supply hole 100 through the suction cup air supply pipe 200, so as to suck the workpiece to be loaded on the moving device.

From the above description, it can be seen that the above-described embodiments of the present invention achieve the following technical effects:

1. a vertical (vertical) air floatation guide rail is formed by the gas in the first gas layer gap, the moving part is vertically guided in the moving process of the moving part 1, meanwhile, due to the existence of the gas in the first gas layer gap, the moving part 1 and the first positioning sleeve 2 cannot be in direct contact, so that the friction force between the moving part 1 and the first positioning sleeve 2 is reduced, and the service life of the moving part and the first positioning sleeve 2 is prolonged; in the process that the moving part 1 drives the rotating assembly to reciprocate in the vertical direction, the rotating part 3 can rotate around a preset axis relative to the second positioning sleeve 4 at the same time, and because a second air layer gap is arranged between the second positioning sleeve 4 and the rotating part, and an Rz-direction air-floating guide rail is formed by gas in the second air layer gap, the second positioning sleeve and the rotating part cannot be in direct contact, but the Rz-direction guide is carried out by the gas in the second air layer gap, so that the moving device in the embodiment realizes vertical (vertical) high-precision guide and Rz-direction (circumferential) high-precision guide, and solves the problems of low repeatability and positioning precision of the moving device in the prior art when the moving device moves in the vertical direction and the Rz direction;

2. the space between the heights of the first thrust plates is effectively utilized, so that the flattening design of the rotating assembly is guaranteed, the flattening of the whole moving device is realized, and the whole volume is reduced;

3. uniform air buoyancy is provided for the first thrust plate 31 and the second thrust plate 32, so that the possibility of inclination of the first thrust plate and the second thrust plate caused by uneven stress is avoided, and the accuracy of the movement device is affected;

4. the moving part and the nested design of rotating assembly, the installation cavity is the cell body structure, and rotating assembly's whole height is not higher than the groove depth of installation cavity, and the design can be with rotating assembly integral erection in the installation cavity like this, and then with overall structure's high reduction, realizes telecontrol equipment's flat design.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. An exercise device, comprising: a moving assembly and a rotating assembly, wherein:

the moving assembly includes:

a moving part (1) on which a mounting cavity (10) is arranged;

the first positioning sleeve (2) is sleeved on the moving part (1), and a first air layer gap is formed between the moving part (1) and the first positioning sleeve (2); the moving part (1) is movably arranged relative to the first positioning sleeve (2) along the vertical direction;

the rotating assembly is arranged in the mounting cavity (10), and the moving part (1) can drive the rotating assembly to move along the vertical direction relative to the first positioning sleeve (2);

the rotating assembly includes: a rotating part (3) and a second positioning sleeve (4);

the second positioning sleeve (4) is sleeved on the rotating component (3) and fixedly connected to the moving component (1), and the rotating component (3) is rotatably arranged around a preset axis relative to the second positioning sleeve (4); and a second air layer gap is arranged between the second positioning sleeve (4) and the rotating component (3).

2. Vehicle according to claim 1, characterized in that said first positioning sleeve (2) comprises:

a first jacket body (20), the first jacket body (20) extending in a circumferential direction of the moving part (1);

first air outlet channel (21), set up in the first cover body (20), first air outlet channel (21) are followed the circumferential direction of the first cover body (20) extends, the end of giving vent to anger of first air outlet channel (21) with moving part (1) is relative, in order to pass through first air outlet channel (21) orientation first gas layer clearance air feed.

3. Vehicle according to claim 2, characterized in that said mobile element (1) is provided with an air intake channel (11), said second locating sleeve (4) comprising:

a second sleeve body (40);

the second air outlet channel (41) is arranged in the second sleeve body (40) and communicated with the air inlet channel (11), the air outlet end of the second air outlet channel (41) is opposite to the rotating part (3), and the second air outlet channel (41) faces the second air layer gap for air supply.

4. Vehicle according to claim 3, characterized in that said rotating means (3) comprise:

the rotating shaft (30) is rotatably arranged around the axis of the rotating shaft, and the second sleeve body (40) is sleeved on the rotating shaft (30);

the first thrust plate (31), the first thrust plate (31) comprises a first fixed end and a first free end, and the first fixed end of the first thrust plate (31) is fixedly connected with the first radial end face of the rotating shaft (30);

a second thrust plate (32), wherein the second thrust plate (32) comprises a second fixed end and a second free end, and the second fixed end of the second thrust plate (32) is fixedly connected with a second radial end face of the rotating shaft (30);

the first free end of the first thrust plate (31) and the second free end of the second thrust plate (32) both extend towards a direction away from the rotating shaft (30) so as to form an avoidance space between the first thrust plate (31), the rotating shaft (30) and the second thrust plate (32) for avoiding the second sleeve body (40).

5. The movement apparatus according to claim 4, characterized in that the second sleeve body (40) has a first guide surface and a second guide surface which are oppositely arranged along the vertical direction, the first guide surface and the second guide surface are connected through a third guide surface, and the second air outlet channel (41) comprises:

a radial flow channel (410), the radial flow channel (410) extending in a radial direction of the second jacket body (40), an air outlet of the radial flow channel (410) being opposite to a circumferential end surface of the rotary shaft (30);

-an axial flow channel (411) communicating with said radial flow channel (410), a first outlet of said axial flow channel (411) being arranged on said first guide surface and a second outlet of said axial flow channel (411) being arranged on said second guide surface;

the first guide surface is arranged corresponding to the first free end, and the second guide surface is arranged corresponding to the second free end.

6. The exercise device of claim 5, wherein the second air layer gap comprises:

a first branch gas layer gap provided between a circumferential end surface of the rotating shaft (30) and a third guide surface of the second sleeve body (40); the second branch air layer gap is arranged between the first guide surface of the second sleeve body (40) and the first thrust plate (31);

and a third branch gas layer gap is arranged between the second guide surface of the second sleeve body (40) and the second thrust plate (32).

7. Vehicle according to claim 4, characterized in that said second sheath (40) comprises:

the bearing comprises a first thrust bearing part (401) and a second thrust bearing part (402) which are sequentially connected along the vertical direction, wherein the first thrust bearing part (401) and the second thrust bearing part (402) are both annular, and the central axes of the first thrust bearing part and the second thrust bearing part are overlapped; the maximum diameter of the first thrust bearing portion (401) is smaller than the maximum diameter of the second thrust bearing portion (402);

the upper surface of the first thrust bearing portion (401) is disposed corresponding to the first thrust plate (31);

the inner side surface of the second thrust bearing portion (402) is arranged corresponding to the rotating shaft (30);

the lower surface of the second thrust bearing portion (402) is disposed corresponding to the second thrust plate (32).

8. Vehicle according to claim 7,

the moving assembly further comprises: the first driving component is used for driving the moving component (1) to move along the vertical direction relative to the first positioning sleeve (2);

the first driving component comprises a first stator part and a first rotor part, and the first stator part is connected with the first positioning sleeve (2); the first rotor part is connected with the moving component (1);

the rotating assembly further comprises: a second driving component for driving the rotating component (3) to rotate around a preset axis relative to the second positioning sleeve (4);

the second driving component comprises a second stator part (91) and a second rotor part (92), the second stator part (91) is connected with the second positioning sleeve (4), and the second rotor part (92) is connected with the rotating component (3);

the second stator portion (91) is provided on a mounting surface of the second thrust bearing portion (402) and is provided opposite to the second rotor portion (92); the second stator portion (91) is provided with a first end face attached to the mounting face of the second thrust bearing portion (402) and a second end face opposite to the first end face, and the vertical distance between the second end face and the mounting face of the second thrust bearing portion (402) is smaller than the vertical distance between the air outlet end face of the first thrust plate (31) and the mounting face of the second thrust bearing portion (402).

9. Vehicle according to claim 5, characterized in that said axial flow channels (411) extend in the axial direction of said second sheath (40), said axial flow channels (411) being a plurality;

the axial flow channels (411) are uniformly distributed along the circumferential direction of the second sleeve body (40), and the vertical distance from each axial flow channel (411) to the central axis of the second sleeve body (40) is equal.

10. Vehicle according to claim 1, characterized in that the height of the rotating assembly is not higher than the depth of the mounting cavity (10).

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