CN216901037U

CN216901037U - MEMS 1x2 reflective optical switch

Info

Publication number: CN216901037U
Application number: CN202123439600.2U
Authority: CN
Inventors: 肖盛哲
Original assignee: Guangxi Anjiexun Electronic Science & Technology Co ltd
Current assignee: Guangxi Anjiexun Electronic Science & Technology Co ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-07-05
Anticipated expiration: 2031-12-31

Abstract

The utility model discloses an MEMS 1x2 reflective optical switch, which comprises a box body, an incoming light collimator, a first outgoing light collimator, a second outgoing light collimator, a beam splitting crystal, a glass slide, a reflector and an MEMS chip, wherein the incoming light collimator, the first outgoing light collimator and the second outgoing light collimator are sequentially connected and installed on the same side outside the box body; a beam splitting crystal, a glass slide, a reflector, an MEMS chip and a beam splitting crystal are sequentially arranged between the light inlet collimator and the first light outlet collimator; and a reflector, a glass slide and a beam splitting crystal are sequentially arranged between the MEMS chip and the second outgoing light collimator. The optical switch has excellent insertion loss, polarization loss, crosstalk loss and return loss performance, high repeatability and high loss stability at high and low temperature. The product has small volume, quick channel switching time and short response time, and reaches microsecond level.

Description

MEMS 1x2 reflective optical switch

Technical Field

The utility model relates to the field of optical devices, in particular to a MEMS 1x2 reflective optical switch.

Background

The mechanical 1x2 fiber switch commonly used in the market today connects optical channels by directing incoming optical signals to selected output fibers. This is achieved by using wedges to effect a change in the beam path. This configuration is to select the output of the signal by controlling the relay. The relay latch operation maintains the selected optical path after the driver signal is removed. But there are also disadvantages to the technology: 1. the repeatability of using relays is not high enough. 2. The loss stability of the product at high and low temperatures is not accurate enough. 3. The product volume is bigger.

At present, the market has wide requirements, the conversion of 1 light inlet channel and 2 light outlet channels is realized, and higher requirements are made on response time. How to solve the above problems, a novel MEMS 1x2 reflective switch is developed to achieve miniaturization of the MEMS chip and the collimator, so that the whole product is smaller and more compact, and the MEMS chip is used to replace the relay to obtain better product performance, so as to meet the requirement of establishing a multi-channel system in the market, and have a wide market prospect.

Disclosure of Invention

The utility model aims to provide a MEMS 1x2 reflective optical switch, which realizes optical path transmission of two channels, and has small product volume and quick response time.

In order to achieve the above object, the MEMS 1x2 reflective optical switch of the present invention includes a box, an incoming light collimator, a first outgoing light collimator, a second outgoing light collimator, a beam splitter crystal, a glass slide, a mirror, and an MEMS chip, where the incoming light collimator, the first outgoing light collimator, and the second outgoing light collimator are sequentially connected and installed on the same side outside the box;

a beam splitting crystal, a glass slide, a reflector, an MEMS chip and a beam splitting crystal are sequentially arranged between the light inlet collimator and the first light outlet collimator;

and a reflector, a glass slide and a beam splitting crystal are sequentially arranged between the MEMS chip and the second outgoing light collimator.

Further, the mirror is a high reflection mirror.

Further, still include the pin header, the MEMS chip is through pin header intercommunication circuit.

Furthermore, the box cover is matched and sealed with the box body.

The substantive characteristics and the progress of the utility model are as follows:

the MEMS 1x2 reflective optical switch of the application has the following beneficial effects:

(1) a light source enters from the light inlet collimator, and a light path is directly reflected from the adjacent first light outlet collimator optical fiber under the condition that the MEMS chip is not powered; and applying voltage to the MEMS chip, so that the light path directly transmits through the MEMS chip and then is reflected by the high-reflectivity reflector to come out from the second outgoing light collimator. The MEMS chip is used for changing the light path of the light beam at the public end, so that the emergent light is reflected relative to the incident light, and the effect of changing the light path is achieved.

(2) The product has excellent insertion loss, polarization loss, crosstalk loss and return loss performance, high repeatability and high loss stability at high and low temperature.

(3) The product has small volume, fast channel switching time and response time reaching microsecond level.

Drawings

Fig. 1 is a schematic structural view of the present invention.

Part numbers and names in the figures:

the device comprises a light inlet collimator 1, a first light outlet collimator 2, a second light outlet collimator 3, a beam splitting crystal 4, a glass slide 5, a reflector 6, an MEMS chip 7, a pin header 8 and a box body 9.

Detailed Description

The structure and working principle of the utility model are described below with reference to the accompanying drawings:

as shown in fig. 1, the MEMS 1x2 reflective optical switch of the present invention includes a box 9, an incoming light collimator 1, a first outgoing light collimator 2, a second outgoing light collimator 3, a beam splitting crystal 4, a glass slide 5, a mirror 6, and an MEMS chip 7, where the incoming light collimator 1, the first outgoing light collimator 2, and the second outgoing light collimator 3 are sequentially connected to and mounted on the same side outside the box 9; a beam splitting crystal 4, a glass slide 5, a reflector 6, an MEMS chip 7 and a beam splitting crystal 4 are sequentially arranged between the light inlet collimator 1 and the first light outlet collimator 2; and a reflector 6, a glass slide 5 and a beam splitting crystal 4 are sequentially arranged between the MEMS chip 7 and the second outgoing light collimator 3.

The mirror 6 is a highly reflective mirror.

The MEMS chip 7 is communicated with a circuit through the pin header 8.

Also comprises a box cover which is matched and sealed with the box body 9.

The working principle of the utility model is as follows:

(1) the beam splitting crystal 4 is used for splitting the optical fiber; the function of the slide 5 is phase retardation (polarization direction rotation); the mirror 6 acts as a fiber deflection. The optical fiber light path travels according to a set design route through the matching of the beam splitting crystal 4, the glass slide 5, the reflecting mirror 6 and other optical crystals, so as to achieve the preset purpose.

(2) The MEMS chip 7 is communicated with the circuit through the pin header 8, and the light path passes through the MEMS chip 7 and then comes out of the first light-out collimator 2 under the condition that the MEMS chip 7 is not powered; when a voltage is applied to the MEMS chip 7, the light path transmits through the MEMS chip 7 and then reflects off the second outgoing light collimator 3 through the mirror 6.

(3) The position of the MEMS chip 7 is debugged and controlled by utilizing a high-precision five-dimensional adjusting frame, the position of the high-reflection mirror is adjusted by utilizing a three-dimensional adjusting frame, and the stability of the switch is effectively ensured.

(4) After the beam splitting crystal 4, the glass slide 5 and the MEMS chip 7 are debugged, glue with stable performance is used for fixing, and baking is carried out under proper conditions, so that the glue is fully cured, and firm bonding is realized. The switch has no movable parts, so that the reliability and the service life of the device are greatly improved.

(5) The utility model also comprises a box cover which is matched and sealed with the box body 9. The switch is effectively protected by the matching sealing of the box cover and the box body 9.

Example 1:

the light-in collimator 1 is an input end, and the first light-out collimator 2 and the second light-out collimator 3 are output ends. The MEMS chip 7 is, without power up: the light beam enters from the light inlet collimator 1, passes through the beam splitting crystal 4 and the glass slide 5, is refracted by the reflector 6, passes through the MEMS chip 7, and is reflected relative to the incident light because the MEMS chip 7 is not powered on, so that the light beam is directly emitted from the first light outlet collimator 2.

Example 2:

the light-in collimator 1 is an input end, and the first light-out collimator 2 and the second light-out collimator 3 are output ends. The MEMS chip 7, in case of power up: the light beam enters from the light inlet collimator 1, passes through the beam splitting crystal 4 and the glass slide 5, is refracted by the reflector 6, passes through the MEMS chip 7, is transmitted out from the MEMS chip 7 due to the electrification of the MEMS chip 7, is refracted by the reflector 6, and then is emitted out from the second light outlet collimator 3 through the beam splitting crystal 4.

The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that are not thought of through the inventive work should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope defined by the claims.

Claims

1. A MEMS 1x2 reflective optical switch, comprising: the device comprises a box body (9), a light inlet collimator (1), a first light outlet collimator (2), a second light outlet collimator (3), a beam splitting crystal (4), a glass slide (5), a reflector (6) and an MEMS chip (7), wherein the light inlet collimator (1), the first light outlet collimator (2) and the second light outlet collimator (3) are sequentially connected and installed on the same side of the outer part of the box body (9);

a beam splitting crystal (4), a glass slide (5), a reflector (6), an MEMS chip (7) and the beam splitting crystal (4) are sequentially arranged between the light inlet collimator (1) and the first light outlet collimator (2);

and a reflector (6), a glass slide (5) and a beam splitting crystal (4) are sequentially arranged between the MEMS chip (7) and the second outgoing light collimator (3).

2. A MEMS 1x2 reflective optical switch according to claim 1, wherein: the reflector (6) is a high-reflectivity reflector.

3. A MEMS 1x2 reflective optical switch according to claim 1, wherein: the MEMS chip (7) is communicated with a circuit through the pin header (8).

4. A MEMS 1x2 reflective optical switch according to claim 1, wherein: also comprises a box cover which is matched and sealed with the box body (9).