CN216849890U - Ceramic vacuum chuck - Google Patents
Ceramic vacuum chuck Download PDFInfo
- Publication number
- CN216849890U CN216849890U CN202220440306.9U CN202220440306U CN216849890U CN 216849890 U CN216849890 U CN 216849890U CN 202220440306 U CN202220440306 U CN 202220440306U CN 216849890 U CN216849890 U CN 216849890U
- Authority
- CN
- China
- Prior art keywords
- vacuum chuck
- ceramic
- ceramic vacuum
- sucking disc
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a vacuum chuck, especially a pottery vacuum chuck, including the sucking disc body that adopts the pottery to make, the adsorption plane of sucking disc body is equipped with a plurality of grooves of taking out air, the bottom in groove of taking out air is equipped with the intercommunicating pore, the one end of sucking disc body is equipped with the suction hole, the suction hole with the intercommunicating pore communicates with each other. The utility model provides a pair of ceramic vacuum chuck light in weight, wear-resisting and can not pollute silicon chip, long service life, need not frequent detection and maintenance.
Description
Technical Field
The utility model relates to a vacuum chuck, especially a pottery vacuum chuck.
Background
Solar photovoltaic power generation mainly utilizes a solar panel made of semiconductor materials such as silicon and the like to generate direct current by utilizing illumination, and the solar power generation mainly utilizes silicon wafers, so the production of the silicon wafers is particularly important, and the quality of the silicon wafers directly determines the amount of generated energy and the service life of the silicon wafers. The production of the silicon chip realizes full-automatic production, and the silicon chip is sucked by a vacuum chuck for automatic transfer in the transfer process of the silicon chip, so the quality of the chuck directly determines the production efficiency of the silicon chip. The existing vacuum chuck is generally made of metal materials, the metal chuck is heavy in weight and poor in wear resistance, metal scraps generated by abrasion can pollute a silicon wafer, production is abnormal, timing detection and replacement are needed, and the vacuum chuck made of metal is short in service life and frequent in maintenance.
SUMMERY OF THE UTILITY MODEL
In order to solve the above problem, the utility model provides a ceramic vacuum chuck that wearability is good, light in weight, long service life, concrete technical scheme is:
the utility model provides a ceramic vacuum chuck, includes the sucking disc body that adopts ceramic to make, the adsorption plane of sucking disc body is equipped with a plurality of grooves of taking out air, the bottom in groove of taking out air is equipped with the intercommunicating pore, the one end of sucking disc body is equipped with the suction hole, the suction hole with the intercommunicating pore communicates with each other.
Preferably, an adsorption platform is arranged on the adsorption surface of the sucker body, and the plurality of air exhaust grooves are formed in the adsorption platform.
Preferably, a plurality of the air exhaust grooves are concentrically arranged.
Further, the air exhaust groove is a kidney-shaped groove.
Preferably, one end of the sucker body is provided with a plurality of fixing holes.
Preferably, one end of the sucker body is provided with a plurality of positioning grooves.
Compared with the prior art the utility model discloses following beneficial effect has:
the utility model provides a pair of ceramic vacuum chuck light in weight, wear-resisting and can not pollute silicon chip, long service life, need not frequent detection and maintenance.
Drawings
Fig. 1 is a schematic structural view of a ceramic vacuum chuck.
Detailed Description
The present invention will now be further described with reference to the accompanying drawings.
As shown in fig. 1, a ceramic vacuum chuck comprises a chuck body 1 made of ceramic, an adsorption table 5 is arranged on an adsorption surface of the chuck body 1, a plurality of air pumping grooves 2 are arranged on the adsorption table 5, communication holes 3 are arranged at bottoms of the air pumping grooves 2, an air suction hole 4 is arranged at one end of the chuck body 1, and the air suction hole 4 is communicated with the communication holes 3. Wherein, the air extraction grooves 2 are kidney-shaped grooves, and a plurality of air extraction grooves 2 are arranged in a concentric array. One end of the sucker body 1 is symmetrically provided with two fixing holes 6 and a positioning groove 7.
The silicon chip adsorbs on adsorption platform 5, and adsorption platform 5 exceeds the adsorption plane, reduces the area of contact with the silicon chip, reduces the plane degree requirement to the adsorption plane, reduces the processing degree of difficulty, makes processing convenient. The suction hole 4 is used for sucking the air in the air suction groove 2 through the communication hole 3, and after the silicon wafer is contacted with the adsorption platform 5, the air suction groove 2 forms negative pressure to adsorb the silicon wafer on the adsorption platform 5.
Because the ceramic has high hardness and wear resistance, the service life is long. Because the ceramic is not conductive, even the scraps generated by abrasion are not conductive, the production of the silicon wafer is not influenced, and the detection and maintenance frequency of the vacuum chuck is reduced.
The positioning groove 7 is convenient for positioning, and the fixing hole 6 is used for fixing a ceramic vacuum chuck.
The ceramic vacuum chuck adopts high-purity microcrystalline alumina as a raw material, and the manufactured vacuum chuck has good flatness, large suction force, high alumina content, small specific gravity, light weight, high green body strength, wear resistance, no pollution to a photovoltaic silicon plate and long service life after being polished.
A preparation method of a ceramic vacuum chuck comprises the following steps:
1. putting the nonanonaocta-alumina dry pressing material into a dry pressing mold, and adopting a dry pressing molding process to keep the pressure of 1000-1300kg/cm2 for molding to obtain a ceramic sucker green body;
2. placing the ceramic vacuum sucker blank into a high-temperature furnace for biscuit firing at the biscuit firing temperature of 1000-1050 ℃ and the heat preservation time of 2-4 h;
3. according to the requirements of a drawing, a numerical control machine is used for roughly processing the ceramic blank after biscuit firing;
4. sintering the roughly processed ceramic blank in a high-temperature furnace at 1600-1640 ℃ for 2-4 hours to obtain a cooked blank of the ceramic sucker;
5. processing an exhaust groove 2 and a plane of a green blank of the ceramic vacuum chuck according to a drawing to ensure that the size completely accords with the drawing;
6. and cleaning the processed finished product, performing air leakage test, and warehousing after the finished product is qualified.
The technical principle of the present invention is described above with reference to specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without any inventive effort, which would fall within the scope of the claims of the present invention.
Claims (6)
1. The utility model provides a ceramic vacuum chuck, its characterized in that, includes sucking disc body (1) that adopts ceramic to make, the adsorption plane of sucking disc body (1) is equipped with a plurality of gas extraction grooves (2), the bottom of gas extraction groove (2) is equipped with intercommunicating pore (3), the one end of sucking disc body (1) is equipped with suction hole (4), suction hole (4) with intercommunicating pore (3) communicate with each other.
2. The ceramic vacuum chuck as claimed in claim 1, wherein the sucking surface of the chuck body (1) is provided with a sucking table (5), and the plurality of air exhaust grooves (2) are arranged on the sucking table (5).
3. A ceramic vacuum chuck according to claim 1, wherein a plurality of said evacuation grooves (2) are concentrically arranged.
4. A ceramic vacuum chuck according to any of claims 1 to 3, wherein the suction groove (2) is a kidney groove.
5. A ceramic vacuum chuck according to any one of claims 1 to 3, characterized in that the chuck body (1) is provided with a plurality of fixing holes (6) at one end.
6. A ceramic vacuum chuck according to any one of claims 1 to 3, characterized in that the chuck body (1) is provided with a plurality of positioning grooves (7) at one end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220440306.9U CN216849890U (en) | 2022-03-02 | 2022-03-02 | Ceramic vacuum chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220440306.9U CN216849890U (en) | 2022-03-02 | 2022-03-02 | Ceramic vacuum chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216849890U true CN216849890U (en) | 2022-06-28 |
Family
ID=82092586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220440306.9U Active CN216849890U (en) | 2022-03-02 | 2022-03-02 | Ceramic vacuum chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216849890U (en) |
-
2022
- 2022-03-02 CN CN202220440306.9U patent/CN216849890U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204732387U (en) | For the vacuum chuck device of mobile ultra-thin wafers | |
| CN216849890U (en) | Ceramic vacuum chuck | |
| CN104538333A (en) | Tray for eliminating warping of wafer | |
| CN212517147U (en) | Carrier-plate-free silicon wafer conveying mechanism of PECVD (plasma enhanced chemical vapor deposition) equipment and process chamber matched with conveying mechanism | |
| CN201893324U (en) | Transmission system and plasma processing equipment comprising same | |
| JP2023543370A (en) | Method for manufacturing silicon carbide tray for plasma etching and silicon carbide tray | |
| CN212810263U (en) | IGBT bonder DBC adsorbs fixing device | |
| CN112185879B (en) | DBC adsorption fixing device of IGBT bonding machine | |
| CN213381612U (en) | Electromagnetic control feeding and discharging gripper capable of adapting to various disc-shaped sizes on double sides | |
| CN201295973Y (en) | Vacuum chuck | |
| CN114161329B (en) | Preparation method of ceramic bond superhard grinding wheel | |
| CN215159060U (en) | Adsorption mechanism for ceramic disc | |
| CN113799481A (en) | Thick film special-shaped circuit connection piece printing device | |
| CN212631920U (en) | Novel ceramic filter plate | |
| CN111821738A (en) | Novel ceramic filter plate and preparation method thereof | |
| CN219652888U (en) | Clamping head mechanism of cake pressing type bubble blowing machine | |
| CN221327770U (en) | Processing device for metal bipolar plate of fuel cell | |
| CN214519254U (en) | Device for machining flatness of precise ceramic sheet | |
| CN220879632U (en) | Silicon wafer detecting and sorting machine | |
| CN216487954U (en) | Vacuum chamber device for ion etching machine | |
| CN221270061U (en) | Negative pressure sample placing table applied to diamond laser cutting | |
| CN201051493Y (en) | An industrial installation device for placing silicon slice | |
| CN217255613U (en) | High-efficiency K-loc abrasive disc production equipment | |
| CN214505523U (en) | Photovoltaic silicon chip sintering unloader | |
| CN213918337U (en) | Synchronous swing arm robot for processing battery side plates |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |