CN216849862U - Reaction chamber for semiconductor and semiconductor equipment - Google Patents
Reaction chamber for semiconductor and semiconductor equipment Download PDFInfo
- Publication number
- CN216849862U CN216849862U CN202220117231.0U CN202220117231U CN216849862U CN 216849862 U CN216849862 U CN 216849862U CN 202220117231 U CN202220117231 U CN 202220117231U CN 216849862 U CN216849862 U CN 216849862U
- Authority
- CN
- China
- Prior art keywords
- cavity
- connecting block
- chamber
- cavity body
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a reaction cavity and semiconductor device for semiconductor, reaction cavity include chamber lid and cavity body and switching device, and switching device connects between chamber lid and cavity body, and the chamber lid passes through switching device and rotationally opens or closed cavity body, and the chamber lid is opened or closed cavity body through predetermined rotation angle along switching device's circumference slope, and cavity body is in one side downward sloping that cavity body was kept away from to the chamber lid when opening the state. According to the utility model discloses a reaction cavity body for semiconductor, cavity lid opens cavity body or closed cavity body through predetermined rotation angle along switching device's circumference slope when opening and closing, and cavity body is in one side downward sloping that cavity body was kept away from to the cavity lid when opening the state, like this, because the action of gravity of cavity lid can make the cavity lid can stabilize and stop in opening the state, does not have the closed risk that drops suddenly downwards, can not cause the potential safety hazard to the operator.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor technology and specifically relates to a reaction cavity and semiconductor device for semiconductor are related to.
Background
With the continuous development of the semiconductor industry, in the process of using semiconductor equipment, a reaction cavity is one of indispensable structures in the semiconductor equipment, the reaction cavity provides a closed space for a wafer, and strong acid, strong base, plasma, toxic substances and toxic gas are introduced into the closed space for reaction after vacuum pumping.
The reaction cavity comprises a cavity cover, a cavity, a connecting mechanism, a handle and the like, and the reaction cavity mainly has the function of providing a space for wafer reaction. In the actual production process, the cavity cover must be opened to pick and place the wafer, and the internal parts of the cavity often need to be replaced, modified, debugged and the like, and the cavity also needs to be cleaned regularly, so the cavity cover needs to be frequently opened for maintenance, and the operation frequency is extremely high.
In the prior art, a connecting block or a hinge is generally adopted for opening and closing the cavity, the cavity and the cavity cover are connected up and down by mainly adopting a bolt, and a user needs to lift the cavity cover upwards to open the cavity in the use process. The cavity cover or the closed operation frequency is high, the volume and the mass of the cavity cover are large, the cavity cover can fall off instantly and close the cavity chamber if an operator carelessly happens, the potential safety hazard to the operator is large, and meanwhile, products inside the cavity cover can be damaged.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least.
Therefore, the utility model provides a reaction cavity body for semiconductor, reaction cavity body cavity lid opens cavity body or closed cavity body through predetermined rotation angle along switching device's circumference slope when opening and closing.
The utility model also provides a semiconductor equipment of the reaction cavity body that has above-mentioned and is used for the semiconductor.
According to the utility model discloses a reaction cavity body for semiconductor of first aspect, reaction cavity body include chamber lid and cavity body and switching device, switching device connects the chamber lid with between the cavity body, the chamber lid passes through switching device rotationally opens or closes the cavity body, the chamber lid is followed through predetermined rotation angle switching device's circumference slope is opened or is closed the cavity body, just when the cavity body is in the open mode the chamber lid is kept away from one side downward sloping of cavity body.
According to the utility model discloses a reaction cavity body for semiconductor, cavity lid opens cavity body or closed cavity body through predetermined rotation angle along switching device's circumference slope when opening and closing, and cavity body is in one side downward sloping that cavity body was kept away from to the cavity lid when opening the state, and like this, because the action of gravity of cavity lid can make the cavity lid can stabilize and stop in opening the state, compares with the upward open mode of lifting that prior art compares, does not have the closed risk that drops suddenly downwards, can not cause the potential safety hazard to the operator.
According to an embodiment of the present invention, the opening and closing device includes: establish first connecting block on the cavity body, establish second connecting block and the universal joint on the chamber lid, first connecting block with the second connecting block passes through the universal joint rotationally links to each other, just the upper surface of first connecting block and the lower surface contact and the sliding fit of second connecting block.
According to the utility model discloses an example, the circumference one end of first connecting block upper surface forms the backstop portion, backstop portion upwards extends and protrudes in the upper surface when the chamber lid is closed cavity body, the orientation of second connecting block one side of backstop portion is only supported on the backstop portion when the chamber lid is opened cavity body, keeping away from of second connecting block another side of chamber lid is only supported on the backstop portion.
According to another example of the present invention, the upper surface of the first connecting block extends upward from a side facing the stopping portion to a side away from the stopping portion, and the lower surface of the second connecting block is in contact with the upper surface of the first connecting block.
According to yet another example of the present invention, the first connecting block is provided with an escape portion circumferentially of the chamber body and at the other side of the blocking portion away from the blocking portion.
According to the utility model discloses a another embodiment be equipped with sliding groove on one of first connecting block upper surface or second connecting block lower surface be equipped with sliding block on the other of first connecting block upper surface or second connecting block lower surface, sliding block can cooperate the slip in sliding groove.
According to another embodiment of the present invention, the reaction chamber further comprises: and the sliding fitting piece is arranged on one of the upper surface of the first connecting block or the lower surface of the second connecting block in a penetrating manner, and can slide in the sliding groove in a matching manner.
According to yet another example of the present invention, the sliding groove is formed as an arc-shaped groove.
According to the utility model discloses a still another embodiment, the universal joint pass through bolted connection respectively with first connecting block with the second connecting block links to each other.
According to the second aspect of the present invention, a reaction chamber for a semiconductor is provided as in any one of the first aspect. The advantages of the semiconductor device and the reaction chamber for semiconductor are the same as the advantages of the prior art, and are not described in detail herein.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a front view of a reaction chamber according to an embodiment of the present invention in an open state;
fig. 2 is a top view of a reaction chamber according to an embodiment of the present invention in an open state;
fig. 3 is a perspective view of a reaction chamber according to an embodiment of the present invention in an open state;
FIG. 4 is an enlarged view of portion A of FIG. 3;
fig. 5 is a perspective view of the reaction chamber according to an embodiment of the present invention in an open state from another viewing angle;
fig. 6 is an exploded view of a reaction chamber according to an embodiment of the present invention in a closed state;
figure 7 is a perspective view of a reaction chamber according to an embodiment of the present invention in a closed state;
fig. 8 is an enlarged exploded view of part B of fig. 7.
Reference numerals:
a reaction chamber 100, a chamber body 10, a first connecting block 11, a stopper 111, an upper surface 112, a sliding groove 113, a clearance 114, a sliding fitting 115,
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like are used in the orientation or positional relationship indicated on the drawings, which are only for convenience of description and simplicity of description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the invention.
A reaction chamber 100 for a semiconductor according to an embodiment of the first aspect of the present invention is described below with reference to fig. 1 to 8.
As shown in fig. 1 to 3, according to a reaction chamber 100 for a semiconductor of an embodiment of the present invention, the reaction chamber 100 includes a chamber cover 20, a chamber body 10, and an opening and closing device.
Specifically, the opening and closing means is connected between the chamber cover 20 and the chamber body 10, the chamber cover 20 rotatably opens or closes the chamber body 10 by the opening and closing means, and the chamber cover 20 obliquely opens or closes the chamber body 10 in a circumferential direction of the opening and closing means by a predetermined rotation angle, and a side of the chamber cover 20 away from the chamber body 10 when the chamber body 10 is in an open state is inclined downward (in an oblique direction as shown in fig. 1).
As shown in fig. 2, the chamber cover 20 may rotate to open the chamber body 10 in a circumferential direction and in a clockwise direction from a top view.
It can be understood that, the chamber cover 20 rotates to open the chamber body 10 substantially in a horizontal plane along a circumferential direction, during the opening process, the chamber cover 20 gradually inclines relative to the horizontal plane, and finally, in an open state, one end of the chamber cover 20 away from the chamber body 10 inclines downwards, and one end of the chamber cover 20 inclines downwards towards the chamber body 10, that is, the chamber cover 20 forms a certain included angle with the horizontal plane, so that the chamber cover 20 can stably stay in the open state, and the chamber cover 20 is prevented from falling off to cause a safety hazard to an operator.
According to the utility model discloses a reaction cavity 100 for semiconductor, cavity lid 20 opens cavity body 10 or closed cavity body 10 through predetermined rotation angle along switching device's circumference slope when opening and closing, cavity body 10 is in one side downward sloping that cavity lid 20 kept away from cavity body 10 when the open mode, and like this, because the action of gravity of cavity lid 20 can make cavity lid 20 can stabilize and stop at the open mode, the open mode who upwards lifts that compares with prior art compares, do not have the closed risk that drops suddenly downwards, can not cause the potential safety hazard to the operator.
According to the utility model discloses an embodiment, switching device includes: establish first connecting block 11 on cavity body 10, establish second connecting block 21 and universal joint 30 on chamber lid 20, first connecting block 11 and second connecting block 21 rotationally link to each other through universal joint 30, through upper surface 112 of first connecting block 11 and the lower surface contact and the sliding fit of second connecting block 21, can make the motion process more steady when opening or closing cavity body 10 of chamber lid 20.
According to an example of the present invention, one circumferential end of the upper surface 112 of the first connecting block 11 is formed as a stopping portion 111, the stopping portion 111 extends upward and protrudes from the upper surface 112, when the chamber body 10 is closed by the chamber cover 20, one side b (side b shown in fig. 4) of the second connecting block 21 facing the stopping portion 111 abuts against the stopping portion 111, when the chamber body 10 is opened by the chamber cover 20, the other side a (side a shown in fig. 5) of the second connecting block 21 away from the chamber cover 20 abuts against the stopping portion 111, and the limiting positions of the chamber cover 20 in the closed state and the open state can be defined by the stopping portion 111.
As shown in fig. 6, according to another example of the present invention, the upper surface 112 of the first connecting block 11 is inclined upward from a side toward the stopping portion 111 to a side away from the stopping portion 111, the lower surface of the second connecting block 21 is in contact with the upper surface 112 of the first connecting block 11, and the cavity cover 20 does not sideslip according to the original trajectory due to its own gravity, thereby performing the safety protection function.
According to still another example of the present invention, the first connecting block 11 is provided with an avoiding portion 114 at the other side of the chamber body 10 in the circumferential direction and away from the stopping portion 111 to provide an avoiding space for the surrounding components of the first connecting block 11.
According to the utility model discloses a another embodiment is equipped with sliding groove 113 on one of first connecting block 11 upper surface 112 or second connecting block 21 lower surface, is equipped with the sliding block on the other of first connecting block 11 upper surface 112 or second connecting block 21 lower surface, and the sliding block can cooperate the slip in sliding groove 113. For example, a sliding groove 113 may be provided on an upper surface 112 of the first connecting block 11, and a sliding protrusion may be provided on a lower surface of the second connecting block 21.
According to another embodiment of the present invention, the reaction chamber 100 further comprises: and a sliding fit piece 115, wherein a sliding groove 113 is formed on one of the upper surface 112 of the first connecting block 11 or the lower surface of the second connecting block 21, the sliding fit piece 115 is arranged on the other one of the upper surface 112 of the first connecting block 11 or the lower surface of the second connecting block 21 in a penetrating way, and the sliding fit piece 115 can slide in the sliding groove 113 in a matching way. Wherein the sliding fit 115 may be a steel ball bolt. As shown in fig. 8, a sliding groove 113 is provided on the upper surface 112 of the first connecting block 11, and the steel ball is bolted to the second connecting block 21 and is slidably engaged with the sliding groove 113.
In this way, the sliding and rotational engagement between the chamber cover 20 and the chamber body 10 is achieved by the engagement of the sliding protrusion or the sliding engagement piece 115 with the sliding groove 113.
According to still another example of the present invention, the sliding groove 113 is formed as an arc-shaped groove. The steel ball bolt contacts with the arc-shaped groove of the chamber body 10 to form an arc-shaped sliding rail, sliding friction can be converted into rolling friction, the friction coefficient is reduced, and the operation process is labor-saving.
According to another embodiment of the present invention, the universal joint 30 is connected to the first connecting block 11 and the second connecting block 21 through the bolt connection 40, respectively. The connector may be a bolt.
As shown in fig. 7, a handle 22 is provided on the chamber cover 20, and the handle 22 is convenient for an operator to grasp to drive the chamber cover 20 to open the chamber body 10 or the chamber cover 20 to close the chamber body 10.
The embodiment of the utility model provides an in, fix universal joint 30 and chamber lid 20 with the bolt, reuse bolt is fixed with chamber lid 20 and the cavity body 10 of adorning universal joint 30, install the ball bolt at last, in the use, as long as it rotates chamber lid 20 along clockwise to grasp handle 22 and can open cavity body 10, wherein there is inclination poor in the junction between chamber lid 20 and the cavity body 10, can form inclination poor with cavity body 10 after clockwise rotation chamber lid 20 is opened, when rotatory extreme position when opening the state, when another side b butt of second connecting block 21 is on backstop 111 promptly, cavity body 10 plays limiting displacement to chamber lid 20, thereby it is fixed in opening position department to make chamber lid 20. As shown in fig. 1 and 2, which are front and top views of the chamber cover 20 in an open state sliding along the arc-shaped slot, the chamber cover 20 cannot slide along the original track due to its own weight, and plays a role of safety protection.
If the chamber body 10 is to be in the closed state, the chamber cover 20 can be closed by only holding the handle 22 to rotate the chamber cover 20 counterclockwise to the limit position in the closed state, that is, when the one side a of the second connecting block 21 abuts on the stopper 111, as shown in fig. 5, the chamber body 10 is closed. In the closed state (i.e. the extreme position), the chamber body 10 acts as a limit for the chamber cover 20, and in the extreme position, the accurate closed state between the chamber cover 20 and the chamber body 10 is obtained.
Other configurations and operations of the reaction chamber 100 for a semiconductor according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.
The utility model also provides a semiconductor device, this semiconductor device include foretell reaction chamber 100 that is used for the semiconductor to have advantages such as safety, structure simplification.
In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. The reaction cavity body for the semiconductor is characterized by comprising a cavity cover, a cavity body and an opening and closing device, wherein the opening and closing device is connected between the cavity cover and the cavity body, the cavity cover can be rotatably opened or closed through the opening and closing device, the cavity cover can be obliquely opened or closed along the circumferential direction of the opening and closing device through a preset rotating angle, and one side, far away from the cavity body, of the cavity cover is obliquely downwards and is provided with a downward slope when the cavity body is in an opened state.
2. The reaction chamber for semiconductors of claim 1, wherein the opening and closing means comprises: establish first connecting block on the cavity body, establish second connecting block and the universal joint on the chamber lid, first connecting block with the second connecting block passes through the universal joint rotationally links to each other, just the upper surface of first connecting block and the lower surface contact and the sliding fit of second connecting block.
3. The reaction chamber body for semiconductors as claimed in claim 2, wherein one circumferential end of the upper surface of the first connection block is formed as a stopper portion, the stopper portion extends upward and protrudes from the upper surface, one side surface of the second connection block facing the stopper portion abuts against the stopper portion when the chamber cover closes the chamber body, and the other side surface of the second connection block facing away from the chamber cover abuts against the stopper portion when the chamber cover opens the chamber body.
4. The reaction chamber according to claim 3, wherein the upper surface of the first connecting block extends obliquely upward from a side facing the stopping portion to a side away from the stopping portion, and the lower surface of the second connecting block is in contact with the upper surface of the first connecting block.
5. The reaction chamber as claimed in claim 3, wherein the first connecting block has an avoiding portion on the other side of the blocking portion in the circumferential direction of the chamber body.
6. The reaction chamber for semiconductors as claimed in claim 2, wherein a sliding groove is formed on one of the upper surface of the first connection block or the lower surface of the second connection block, and a sliding protrusion is formed on the other of the upper surface of the first connection block or the lower surface of the second connection block, the sliding protrusion being slidably fitted in the sliding groove.
7. The reaction chamber for semiconductors of claim 2, further comprising: and the sliding fitting piece is arranged on one of the upper surface of the first connecting block or the lower surface of the second connecting block in a penetrating manner and can slide in the sliding groove in a matching manner.
8. The reaction chamber for a semiconductor as claimed in claim 6 or 7, wherein the sliding groove is formed as an arc-shaped groove.
9. The reaction chamber for semiconductors as claimed in claim 2, wherein the universal joints are connected to the first connection block and the second connection block, respectively, by bolt connections.
10. A semiconductor device comprising a reaction chamber for a semiconductor according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220117231.0U CN216849862U (en) | 2022-01-17 | 2022-01-17 | Reaction chamber for semiconductor and semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220117231.0U CN216849862U (en) | 2022-01-17 | 2022-01-17 | Reaction chamber for semiconductor and semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216849862U true CN216849862U (en) | 2022-06-28 |
Family
ID=82084356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220117231.0U Active CN216849862U (en) | 2022-01-17 | 2022-01-17 | Reaction chamber for semiconductor and semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216849862U (en) |
-
2022
- 2022-01-17 CN CN202220117231.0U patent/CN216849862U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6390753B1 (en) | System for loading, processing and unloading substrates arranged on a carrier | |
| US3135432A (en) | Discharge apparatus for bins | |
| US4269519A (en) | Safety arrangement for a mixer catch | |
| EP3907118A1 (en) | Manway cover and related methods | |
| CN216849862U (en) | Reaction chamber for semiconductor and semiconductor equipment | |
| JP4008958B2 (en) | Device for conveying and mixing powdery bodies | |
| US9580946B2 (en) | Screw conveyor having linked latch closure | |
| CN211033871U (en) | Garbage bin bung with interlock upset function | |
| CN103189694B (en) | Refrigerator | |
| CN212625527U (en) | Cavity cover opening mechanism | |
| JP2593379Y2 (en) | Vertical container lid lifting device | |
| JP4043036B2 (en) | Two-stage open type hermetic lift handle device | |
| TWI577868B (en) | A hinge for vacuum opening and closing of vacuum chamber and its vacuum processing device | |
| KR200235304Y1 (en) | Opening and closing device for valve | |
| JP2593378Y2 (en) | Vertical container lid lifting device | |
| JPH07315773A (en) | Driving gear for vessel lift or the like | |
| US6036248A (en) | Load-supporting apparatus for loads provided with a pick-up eyelet | |
| CN112086390A (en) | Cavity cover opening mechanism | |
| JPH11502030A (en) | Double cover locking mechanism for closing two mutually connectable openings | |
| JPH07235545A (en) | Cap fixing structure of heat-treating furnace for semiconductor manufacture | |
| CN215502473U (en) | Cooking container | |
| JP4761604B2 (en) | Ceiling access door | |
| CN212386997U (en) | Discharging device | |
| JPS589197Y2 (en) | Lid opening/closing device | |
| CN214987334U (en) | Locking mechanism and containing box |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |