CN216846638U - Flexible sensor - Google Patents
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- CN216846638U CN216846638U CN202220549428.1U CN202220549428U CN216846638U CN 216846638 U CN216846638 U CN 216846638U CN 202220549428 U CN202220549428 U CN 202220549428U CN 216846638 U CN216846638 U CN 216846638U
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Abstract
The utility model relates to a flexible sensor, which comprises a first flexible film sheet and a second flexible film sheet which are oppositely arranged, wherein one side of the second flexible film sheet is provided with a lead part, and the upper end surface of the lead part is provided with a first lead and a second lead; a first electrode is arranged on the lower end face of the first flexible thin film sheet and is electrically connected with a first lead; a second electrode is arranged on the upper end face of the second flexible thin film sheet and is electrically connected with a second lead; a piezoelectric block is arranged between the first flexible thin film piece and the second flexible thin film piece, and the piezoelectric block is made of ion conductive hydrogel; the upper end face of the piezoelectric block is tightly attached to the first electrode, and the lower end face of the piezoelectric block is tightly attached to the second electrode. The utility model discloses in, adopt the electrically conductive hydrogel preparation piezoelectric block of ion, more sensitive to the detection of pressure, sensitivity is high, can the accurate size of measuring the pressure value of exerting on the sensor, and the practicality is strong, uses extensively.
Description
Technical Field
The utility model belongs to the technical field of pressure sensor, in particular to flexible sensor.
Background
With the development of the times, the pressure sensor is applied to the aspects of work and life of people, the requirement of people on pressure monitoring is higher and higher, the pressure sensor is not limited to pressure monitoring on a regular rigid surface, the pressure sensor has various forms, and the common rigid sensor cannot meet the actual requirements of people. The flexible sensor is an electronic device which is prepared by flexible materials and has super-strong environmental adaptability, and can be applied to various fields such as human health monitoring, human motion monitoring, human-computer interaction, soft robot technology and the like. However, the existing flexible sensor has low measurement accuracy, and is generally only used for measuring whether the pressure applied on the sensor changes, but cannot accurately measure the magnitude of the applied pressure.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing a flexible sensor that measurement accuracy is high.
In order to achieve the above purpose, the utility model provides a following technical scheme:
a flexible sensor comprises a first flexible thin film sheet and a second flexible thin film sheet which are oppositely arranged, wherein a lead part which is integrally formed with the second flexible thin film sheet is arranged on one side of the second flexible thin film sheet, and a first lead and a second lead are arranged on the upper end face of the lead part; a first electrode is arranged on the lower end face of the first flexible thin film sheet and is electrically connected with a first lead; a second electrode is arranged on the upper end face of the second flexible thin film sheet and is electrically connected with a second lead; a piezoelectric block is arranged between the first flexible thin film piece and the second flexible thin film piece, and the piezoelectric block is made of ion conductive hydrogel; the upper end face of the piezoelectric block is tightly attached to the first electrode, the lower end face of the piezoelectric block is tightly attached to the second electrode, and the resistance value of the piezoelectric block is fed back outwards through the first electrode and the first lead, and the second electrode and the second lead.
Further, the first electrode and the second electrode are both single-layer graphene or graphite. The single-layer graphene or graphite is used as an electrode, so that ions in the ion-conducting hydrogel can be prevented from reacting with the electrode to influence the measurement accuracy.
Further, the hardness of the first flexible thin film piece and the second flexible thin film piece is consistent with that of the piezoelectric block. Therefore, when the flexible sensor is extruded, the flexible thin film sheet and the piezoelectric block are deformed synchronously, and the measurement precision can be improved.
Furthermore, one end of the lead part is provided with two conductive insertion pieces; one end of the first lead and one end of the second lead are respectively electrically connected with a conductive insertion sheet.
Furthermore, one side of the first flexible thin film sheet is provided with a connecting part which is integrally formed with the first flexible thin film sheet, the lower end face of the connecting part is provided with a first connecting wire, and the first electrode is connected with the first lead wire through the first connecting wire.
Furthermore, the connecting part is positioned right above the lead part, and one end of the connecting part is fixedly bonded with the lead part; the first small pad is arranged at the position, corresponding to the bonding position of the connecting part and the lead part, of the connecting wire, the second small pad is arranged at the position, corresponding to the position right below the first small pad, of one end of the first lead, and the first small pad and the second small pad are fixedly bonded through welding or conductive adhesive;
a first insulating layer is arranged on the first flexible thin film sheet and the connecting part, covers the first connecting wire and exposes the first small bonding pad and the first electrode; and a second insulating layer is arranged on the second flexible thin film sheet and the leading part, covers the first lead and the second lead and exposes the second small bonding pad and the second electrode.
Furthermore, one end of the connecting part is fixedly connected with the second flexible thin film sheet in an integrally forming mode, and the connecting part is bent upwards for 180 degrees so that the first flexible thin film sheet is positioned right above the second flexible thin film sheet; a second connecting wire is arranged at the edge of one side of the second flexible thin film sheet, one end of the second connecting wire is connected with the first connecting wire, and the other end of the second connecting wire is connected with the first lead;
and a third insulating layer covers the first flexible thin film sheet, the connecting part, the second flexible thin film sheet and the leading part, covers the first connecting line, the second connecting line, the first lead and the second lead and exposes the first electrode and the second electrode.
The piezoelectric module comprises an upper cover, a lower cover and a piezoelectric element, wherein the upper cover and the lower cover are clamped in a sliding manner, and the first electrode, the piezoelectric element and the second electrode are all positioned in a cavity formed after the upper cover and the lower cover are clamped; the upper cover can move towards the lower cover under the action of pressure to apply pressure to the first electrode, the piezoelectric block and the second electrode, so that the resistance value of the piezoelectric block can be fed back outwards through the first lead and the second lead.
Furthermore, the lower cover comprises a bottom plate and a plurality of supporting claws which are annularly and uniformly distributed on one side of the bottom plate, guide convex blocks are vertically arranged on the inner side surfaces of the supporting claws, vertical through grooves are respectively formed in the positions, corresponding to the guide convex blocks, on the outer side surface of the upper cover, and the lower ends of the vertical through grooves extend along the bottom of the upper cover to form openings; and a backing plate is arranged between the root of each support claw and the bottom plate, and the shape enclosed by the inner side surface of each backing plate is matched with the peripheral shape of the first electrode so as to clamp the first electrode in the backing plate.
Further, a gap is formed between every two adjacent support claws, and the lead part penetrates out of the lower cover from one gap; the supporting claws extend inwards to form convex parts, and flanges which are in limit fit with the convex parts are formed in the positions, corresponding to the convex parts, of the upper cover in an outward extending mode; the inner side surface of the flange is an inclined surface which is inclined inwards and upwards gradually.
In the utility model, the piezoelectric block is made of ionic conductive hydrogel, which is more sensitive to pressure detection, has high sensitivity and can accurately measure the pressure value applied on the sensor; the hardness of the flexible thin film sheet is consistent with that of the piezoelectric block, so that the flexible thin film sheet and the piezoelectric block deform synchronously when the flexible sensor is extruded, and the measurement precision can be improved; the single-layer graphene or graphite is used as an electrode, so that ions in the ion-conducting hydrogel can be prevented from reacting with the electrode to influence the measurement accuracy. The practicability is strong and the application is wide.
Drawings
For the purposes of promoting a better understanding of the objects, features and advantages of the invention, reference will now be made to the following detailed description taken in conjunction with the accompanying drawings in which:
fig. 1 is a schematic structural diagram of a preferred embodiment of a flexible sensor according to the present invention.
Fig. 2 is an exploded view of fig. 1.
Fig. 3 is a schematic structural diagram of another preferred embodiment of the flexible sensor of the present invention.
Fig. 4 is an exploded view of fig. 3.
Fig. 5 is a schematic structural diagram of another preferred embodiment of the flexible sensor of the present invention.
FIG. 6 is a schematic structural view of the upper cover;
fig. 7 is a schematic structural view of the lower cover.
In the figure: 1. the flexible circuit board comprises a first flexible thin film sheet, 2, a second flexible thin film sheet, 3, a lead part, 4, a first lead, 5, a second lead, 6, a first electrode, 7, a second electrode, 8, a connecting part, 9, a conductive inserting sheet, 10, a piezoelectric block, 11, a first small bonding pad, 12, a second small bonding pad, 13, a first connecting wire, 14, a first insulating layer, 15, a second insulating layer, 16, a second connecting wire, 17, a third insulating layer, 20, an upper cover, 21, a vertical through groove, 22, an annular flange, 30, a lower cover, 31, a bottom plate, 32, a supporting claw, 33, a bulge, 34, a guide bump, 35, a notch, 36, a backing plate and 37.
Detailed Description
Embodiments of the invention are described below by way of specific examples, the illustrations provided in the following examples are merely schematic representations of the basic idea of the invention, and features from the following examples and examples may be combined with one another without conflict.
Example 1
As shown in fig. 1 and 2, a preferred embodiment of a flexible sensor of the present invention comprises a first flexible thin film sheet 1 and a second flexible thin film sheet 2 which are oppositely disposed, wherein the first flexible thin film sheet 1 and the second flexible thin film sheet 2 are preferably circular, but may have other shapes. A lead part 3 which is integrally formed with the second flexible thin film sheet 2 is arranged on one side of the second flexible thin film sheet 2, and a first lead 4 and a second lead 5 are arranged on the upper end face of the lead part 3; in order to connect the flexible sensor into a circuit, two conductive insertion pieces 9 can be arranged at one end of the lead part 3; one end of each of the first lead 4 and the second lead 5 is electrically connected with a conductive insert 9. After the corresponding end of the lead part 3 is led into the socket of the circuit board, the flexible sensor can be connected into the circuit through the two conductive insertion pieces 9.
As shown in fig. 2 (the conductive insertion sheet 9 is not shown in fig. 2), a first electrode 6 is arranged on the lower end surface of the first flexible thin film sheet 1, a connecting portion 8 integrally formed with the first flexible thin film sheet 1 is arranged on one side of the first flexible thin film sheet 1, the connecting portion 8 is located right above the lead portion 3, a first connecting line 13 is arranged on the lower end surface of the connecting portion 8, and the first electrode 6 is electrically connected with the first lead 4 through the first connecting line 13. One end of the connecting part 8 is fixedly bonded with the lead part 3; the first small pad 11 of position department that the connecting wire corresponds connecting portion 8 and bonds with lead wire portion 3 is provided with first small pad 11, the position department under the one end of first lead wire 4 corresponds first small pad 11 is equipped with second small pad 12, first small pad 11 and second small pad 12 are fixed through welding or conducting resin bonding, make first connecting wire 13 with first lead wire 4 electricity is connected.
A second electrode 7 is arranged on the upper end face of the second flexible thin film sheet 2, and the second electrode 7 is electrically connected with the second lead 5; a piezoelectric block 10 is arranged between the first flexible thin film sheet 1 and the second flexible thin film sheet 2, the piezoelectric block 10 is made of ion conductive hydrogel, and is preferably of a cylindrical structure, so that two end faces of the cylindrical structure are respectively attached to the first electrode 6 and the second electrode 7; the ion conductive hydrogel is a soft conductive material with contractive elasticity and corresponding resistance value and shape change, and the resistance value changes correspondingly after deformation under the action of pressure; and the deformation of the ion conductive hydrogel has stronger relevance with the change of the resistance value of the ion conductive hydrogel, and is convenient for accurately measuring the pressure value of the flexible sensor.
The upper end surface of the piezoelectric block 10 is tightly attached to the first electrode 6, and the lower end surface of the piezoelectric block is tightly attached to the second electrode 7; and feeds back the resistance value of the piezoelectric block 10 to the outside through the first electrode 6 and the first lead 4, and the second electrode 7 and the second lead 5; preferably, the end surfaces of the piezoelectric block 10 are respectively bonded and fixed to the first electrode 6 and the second electrode 7 by conductive adhesives. The first electrode 6 and the second electrode 7 are preferably single-layer graphene, and of course, graphite may also be used; so as to avoid the reaction between the ions in the ion conductive hydrogel and the electrode and influence the measurement precision. The hardness of the first flexible thin film sheet 1 and the second flexible thin film sheet 2 is consistent with that of the piezoelectric block 10, so that when the flexible sensor is extruded, the flexible thin film sheets and the piezoelectric block 10 deform synchronously, and the measurement accuracy is improved.
In order to protect the first connecting line 13, the first lead 4, the second lead 5 and other conductive connecting lines, a first insulating layer 14 is preferably arranged on the first flexible film sheet 1 and the connecting portion 8, the first insulating layer 14 covers the first connecting line 13, and the first small pad 11 and the first electrode 6 are exposed; and a second insulating layer 15 is arranged on the second flexible thin film sheet 2 and the lead part, and the second insulating layer 15 covers the first lead 4 and the second lead 5 and exposes the second small pad 12 and the second electrode 7.
In the embodiment, the piezoelectric block 10 is made of the ionic conductive hydrogel, so that the pressure detection is more sensitive, and the measurement sensitivity is high; the hardness of the flexible film sheet is consistent with that of the piezoelectric block 10, so that when the flexible sensor is extruded, the flexible film sheet and the piezoelectric block 10 deform synchronously, and the measurement precision can be improved; the single-layer graphene or graphite is used as an electrode, so that ions in the ion-conducting hydrogel can be prevented from reacting with the electrode to influence the measurement accuracy.
Example 2
As shown in fig. 3 and 4, a preferred embodiment of the flexible sensor of the present invention includes a first flexible thin film sheet 1 and a second flexible thin film sheet 2 which are oppositely disposed, a lead portion 3 integrally formed with the second flexible thin film sheet 2 is disposed on one side of the second flexible thin film sheet 2, and a first lead 4 and a second lead 5 are disposed on an upper end surface of the lead portion 3; in order to connect the flexible sensor into a circuit, two conductive insertion pieces 9 can be arranged at one end of the lead part 3; one end of each of the first lead 4 and the second lead 5 is electrically connected with a conductive insert 9. After the corresponding end of the lead part 3 is led into the socket, the flexible sensor can be connected into a circuit through the two conductive insertion pieces 9.
A first electrode 6 is arranged on the lower end face of the first flexible thin film sheet 1, a connecting part 8 which is integrally formed with the first flexible thin film sheet 1 is arranged on one side of the first flexible thin film sheet 1, one end of the connecting part 8 is fixedly connected with the second flexible thin film sheet 2 in an integrally formed mode, and the connecting part 8 is bent upwards by 180 degrees to enable the first flexible thin film sheet 1 to be located right above the second flexible thin film sheet 2; a first connecting line 13 is arranged on the lower end face of the connecting part 8, and the first electrode 6 is connected with the first connecting line 13. And a second connecting line 16 is arranged at the edge of one side of the second flexible thin film sheet 2, one end of the second connecting line 16 is connected with the first connecting line 13, and the other end of the second connecting line 16 is connected with the first lead 4.
A second electrode 7 is arranged on the upper end face of the second flexible thin film sheet 2, and the second electrode 7 is electrically connected with the second lead 5; a piezoelectric block 10 is arranged between the first flexible thin film sheet 1 and the second flexible thin film sheet 2, and the piezoelectric block 10 is made of ion conductive hydrogel. The upper end surface of the piezoelectric block 10 is closely attached to the first electrode 6, and the lower end surface is closely attached to the second electrode 7.
In order to protect the first connecting line 13, the second connecting line 16, the first lead 4, the second lead 5 and other conductive connecting lines, it is preferable that the first flexible film sheet 1, the connecting portion 8, the second flexible film sheet 2 and the lead portion are covered with a third insulating layer 17, and the third insulating layer 17 covers the first connecting line 13, the first lead 4 and the second lead 5 and exposes the first electrode 6 and the second electrode 7.
In this embodiment, two electrodes are manufactured on the same flexible thin film sheet in a bending manner, so that when the two electrodes are manufactured on the two flexible thin film sheets respectively, the upper flexible thin film sheet moves downward when the sensor bears pressure, and changes position with the lower flexible thin film sheet, thereby easily causing the problem that the connecting portion 8 and the lead portion 3 fall off, and facilitating the realization of the electrical connection between the first electrode 6 and the first lead 4.
Example 3
As shown in fig. 5, in this embodiment, an upper cover 20 and a lower cover 30 are added on the basis of embodiments 1 and 2, the upper cover 20 and the lower cover 30 are slidably clamped, and the first electrode 6, the piezoelectric block 10 and the second electrode 7 are all located in a cavity formed after the upper cover 20 and the lower cover 30 are clamped; the upper cover 20 can move towards the lower cover 30 under the action of pressure to apply pressure to the first electrode 6, the piezoelectric block 10 and the second electrode 7, so that the resistance value of the piezoelectric block 10 can be fed back outwards through the first lead 4 and the second lead 5, and the pressure value applied to the upper cover 20 can be judged according to the resistance value of the piezoelectric block 10. In the embodiment, the upper cover 20 and the lower cover 30 are both circular structures, and have simple structure, low cost and high sensitivity; of course, the upper cover 20 and the lower cover 30 may also be oval, rectangular, star-shaped, or irregular according to the implementation requirement, and the use effect is not affected. The upper cover 20 and the lower cover 30 can be made of hard plastics, so that the weight is light, and the burden is reduced.
As shown in fig. 6 and 7, the lower cover 30 includes a bottom plate 31 and a plurality of support claws 32 annularly and uniformly distributed on one side of the bottom plate 31, and a gap 35 is formed between two adjacent support claws 32, so as to facilitate leading out the first connection section 113 and the second connection section 123, and rapidly exhaust air when the upper cover 20 moves downward, thereby avoiding the influence of air resistance on measurement. The lead portion 3 and the second strip-shaped film 19 pass through the lower cover 30 from one of the notches 35, and the width of the second strip-shaped film 19 is adapted to the width of the notch 35 to prevent the second strip-shaped film 19 from bouncing. The supporting claws 32 extend inwards to form convex parts 33, and flanges 22 which are in limit fit with the convex parts 33 extend outwards at positions of the upper cover 20 corresponding to the convex parts 33. The support claws 32 are limited by the convex parts 33 and the flanges 22, so that the upper cover 20 is prevented from being separated from the lower cover 30 during use. The inner side of the flange 22 is preferably provided with an inwardly and gradually upwardly inclined surface 37 to facilitate the snap-fitting of the upper cap 20 into the lower cap 30 during installation. The inner side surface of the supporting claw 32 is vertically provided with a guiding convex block 34, and the outer side surface of the upper cover 20 is provided with a vertical through groove 21 corresponding to each guiding convex block 34. In the present embodiment, the length of the vertical through groove 21 is longer than that of the guide projection 34, so that the vertical through groove 21 can be slidably fitted with the guide projection 34; meanwhile, the vertical through groove 21 is arranged, so that air can be exhausted instantly through the vertical through groove 21 and the notch 35 when the upper cover 20 and the lower cover 30 are in sliding fit, and the influence of the compression resistance of the air on a measurement result is avoided.
The lower end of the vertical through groove 21 extends along the bottom of the upper cover 20 to form an opening, so that the upper cover 20 and the lower cover 30 are conveniently connected and matched, and the installation and the disassembly are more convenient. A backing plate 36 is respectively arranged between the root of each supporting claw 32 and the bottom plate 31, the thickness of the backing plate 36 is larger than that of the second flexible thin film sheet 2, and by arranging the backing plate 36, when the upper cover 20 is extruded, the end part of the upper cover 20 can be prevented from directly contacting with a circuit thin film through the isolation of the backing plate 36, so that the circuit thin film can be effectively protected. The shape enclosed by the inner side surface of each backing plate 36 is matched with the peripheral shape of the second flexible thin film sheet 2, so that the second flexible thin film sheet 2 is clamped in the backing plates, and the second flexible thin film sheet 2 is fixed conveniently.
This embodiment can evenly transmit pressure to piezoelectric block 10 through increase upper cover 20 and lower cover 30 on original flexible sensor's basis to can adopt flexible sensor to replace the pressure sensor of traditional metal material, reduce the cost of manufacture, improve measurement accuracy.
Finally, the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications or equivalent substitutions may be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all of them should be covered by the scope of the claims of the present invention.
Claims (10)
1. A flexible sensor is characterized by comprising a first flexible thin film sheet and a second flexible thin film sheet which are oppositely arranged, wherein one side of the second flexible thin film sheet is provided with a lead part which is integrally formed with the second flexible thin film sheet, and the upper end face of the lead part is provided with a first lead and a second lead; a first electrode is arranged on the lower end face of the first flexible thin film sheet and is electrically connected with a first lead; a second electrode is arranged on the upper end face of the second flexible thin film sheet and is electrically connected with a second lead; a piezoelectric block is arranged between the first flexible thin film piece and the second flexible thin film piece, and the piezoelectric block is made of ion conductive hydrogel; the upper end face of the piezoelectric block is tightly attached to the first electrode, the lower end face of the piezoelectric block is tightly attached to the second electrode, and the resistance value of the piezoelectric block is fed back outwards through the first electrode and the first lead, and the second electrode and the second lead.
2. A flexible sensor according to claim 1, wherein the first and second electrodes are each single layer graphene or graphite.
3. A flexible transducer according to claim 1, wherein the stiffness of the first and second flexible membrane sheets is substantially the same as the stiffness of the piezoelectric stack.
4. A flexible sensor according to claim 1, wherein one end of the lead portion is provided with two conductive tabs; one end of each of the first lead and the second lead is electrically connected with a conductive insert.
5. The flexible sensor according to claim 1, wherein a connecting portion integrally formed with the first flexible thin film sheet is provided at one side of the first flexible thin film sheet, a first connecting line is provided on a lower end surface of the connecting portion, and the first electrode is connected to the first lead through the first connecting line.
6. The flexible sensor according to claim 5, wherein the connecting portion is located directly above the lead portion, and one end of the connecting portion is fixed to the lead portion by adhesion; the first small pad is arranged at the position, corresponding to the bonding position of the connecting part and the lead part, of the connecting wire, the second small pad is arranged at the position, corresponding to the position right below the first small pad, of one end of the first lead, and the first small pad and the second small pad are fixedly bonded through welding or conductive adhesive;
a first insulating layer is arranged on the first flexible thin film sheet and the connecting part, covers the first connecting wire and exposes the first small bonding pad and the first electrode; and a second insulating layer is arranged on the second flexible thin film sheet and the leading part, covers the first lead and the second lead and exposes the second small bonding pad and the second electrode.
7. The flexible sensor according to claim 5, wherein one end of the connecting portion is fixedly connected to the second flexible thin film piece in an integrally formed manner, and the connecting portion is bent upward by 180 ° so that the first flexible thin film piece is located right above the second flexible thin film piece; a second connecting wire is arranged at the edge of one side of the second flexible thin film sheet, one end of the second connecting wire is connected with the first connecting wire, and the other end of the second connecting wire is connected with the first lead;
and a third insulating layer covers the first flexible thin film sheet, the connecting part, the second flexible thin film sheet and the leading part, covers the first connecting line, the second connecting line, the first lead and the second lead and exposes the first electrode and the second electrode.
8. The flexible sensor according to any one of claims 1 to 7, further comprising an upper cover and a lower cover, wherein the upper cover and the lower cover are slidably clamped, and the first electrode, the piezoelectric block and the second electrode are all located in a cavity formed after the upper cover and the lower cover are clamped; the upper cover can move towards the lower cover under the action of pressure to apply pressure to the first electrode, the piezoelectric block and the second electrode, so that the resistance value of the piezoelectric block can be fed back outwards through the first lead and the second lead.
9. The flexible sensor according to claim 8, wherein the lower cover comprises a bottom plate and a plurality of supporting claws annularly and uniformly distributed on one side of the bottom plate, guide convex blocks are vertically arranged on the inner side surfaces of the supporting claws, vertical through grooves are respectively formed in the positions, corresponding to each guide convex block, on the outer side surface of the upper cover, and the lower ends of the vertical through grooves extend along the bottom of the upper cover to form openings; and a base plate is arranged between the root part of each supporting claw and the bottom plate, and the shape formed by enclosing the inner side surface of each base plate is matched with the peripheral shape of the first electrode so as to clamp the first electrode in the base plate.
10. The flexible sensor of claim 9, wherein a gap is formed between two adjacent support claws, and the lead portion passes through the lower cover from one of the gaps; the supporting claws extend inwards to form convex parts, and flanges which are in limit fit with the convex parts are formed in the positions, corresponding to the convex parts, of the upper cover in an outward extending mode; the inner side surface of the flange is an inclined surface which is inclined inwards and upwards gradually.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220549428.1U CN216846638U (en) | 2022-03-14 | 2022-03-14 | Flexible sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220549428.1U CN216846638U (en) | 2022-03-14 | 2022-03-14 | Flexible sensor |
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| CN216846638U true CN216846638U (en) | 2022-06-28 |
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| CN202220549428.1U Active CN216846638U (en) | 2022-03-14 | 2022-03-14 | Flexible sensor |
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