CN216795303U

CN216795303U - Heating wire for improving temperature field of epitaxial furnace

Info

Publication number: CN216795303U
Application number: CN202123201196.5U
Authority: CN
Inventors: 刘雪辉
Original assignee: Shanghai Zhisheng Photoelectric Technology Co ltd
Current assignee: Shanghai Zhisheng Photoelectric Technology Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-06-21
Anticipated expiration: 2031-12-20

Abstract

The utility model relates to an improved temperature field heating wire of an epitaxial furnace, and belongs to the technical field of heating wires. The heating wire for the epitaxial furnace mainly aims at the problems that the height of the heating wire for the existing epitaxial furnace is limited, the heat distribution of a formed temperature field is uneven, the temperature of a low temperature field close to the heating wire is higher, and the temperature of a high temperature field far away from the heating wire is lower, and the following technical scheme is provided: including heating frame and installing the heating silk thread on heating frame, the upper surface of heating frame is provided with a plurality of heating frame strips that can height-adjusting, the draw-in groove that is used for blocking the heating silk thread is offered to heating frame strip upper surface, every the equal fixedly connected with in bottom of heating frame strip erects the axle, the bottom of heating frame and the equal spiral connection in below that is located every vertical axis have one to be used for heating the single spiral shell axle that pushes away that pushes up of frame strip. The utility model has the function of improving and adjusting the heating temperature field, can make the temperature of the temperature field more uniform in the height direction, and is mainly applied to heating of an epitaxial furnace.

Description

Heating wire for improving temperature field of epitaxial furnace

Technical Field

The utility model relates to the technical field of heating wires, in particular to a heating wire for improving a temperature field of an epitaxial furnace.

Background

The heating wire can be called as an electric heating wire, the heating wire is a heating device and can be installed in heating equipment such as an epitaxial furnace, a heating furnace and the like to play a heating role, and heat generated by electrifying and heating the heating wire forms a temperature field, which is called as a temperature field for short, around the heating wire.

The heating wire for the existing epitaxial furnace is directly and fixedly installed at the specific height position of the epitaxial furnace, so that the temperature field formed by heating the heating wire is fixed and unchanged, the temperature of the low temperature field close to the heating wire is higher, and the temperature of the high temperature field far away from the heating wire is lower, so that the heat distribution of the whole temperature field is uneven.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an improved temperature field heating wire of an epitaxial furnace, aiming at the problems in the background technology.

The technical scheme of the utility model is as follows: the utility model provides an epitaxial furnace improves temperature field heater strip, includes the heating frame and installs the heating silk thread on the heating frame, the upper surface of heating frame is provided with a plurality of heating frame strips that can height-adjusting, the draw-in groove that is used for blocking the heating silk thread is offered to heating frame strip upper surface, every the equal fixedly connected with in bottom of heating frame strip erects the axle, the bottom of heating frame and the equal screwed connection in below that is located every vertical axis have one to be used for with the heating frame strip single spiral shell axle that pushes away of top that makes progress.

Preferably, the outer surface of the bottom end of the vertical shaft is fixedly connected with a spring plate, and a spring is sleeved outside the vertical shaft above the spring plate.

Preferably, the heating frame is internally and slidably connected with a general push plate, and the general push plate is provided with a plurality of through holes for the single push screw shaft to movably penetrate through.

Preferably, the bottom of the total push plate is fixedly connected with a total push screw shaft, and a screw cylinder is arranged on a screw sleeve outside the total push screw shaft.

Preferably, the both ends of total push pedal all fixedly connected with slider, the inner wall of heating frame is seted up with slider assorted spout.

Compared with the prior art, the utility model has the beneficial effects that:

(1): the heating device has the advantages that the effect of adjusting the heating temperature field is improved, and the heat of the temperature field in the height direction is more uniform;

(2): the height of different parts of the heating silk thread can be adjusted, so that the heating silk thread is not only distributed in a wave shape in the horizontal direction, but also distributed in a wave shape in the vertical direction, the wave distribution mode enables high-temperature areas and low-temperature areas to be arranged at different height positions of the whole temperature field, the two temperature areas are mixed with each other, the temperature of the whole temperature field is more uniform, the heights of the different parts of the heating silk thread can be freely adjusted according to actual needs, namely the wave shape of the heating silk thread in the vertical direction has different patterns, and the combination mode is richer;

(3): this application can carry out altitude mixture control to heating wire's whole to change the temperature field height, with the heating needs that adapt to the difference.

Drawings

FIG. 1 is a schematic structural diagram of an epitaxial furnace with an improved temperature field heating wire in a top view;

FIG. 2 is a front view cross-sectional view of the heating rack bar and heating rack of FIG. 1;

fig. 3 is an enlarged schematic view of a point a in fig. 2.

Reference numerals: 1. a heating rack; 2. heating the rack bar; 3. heating the wire; 4. a vertical axis; 5. a spring; 6. a spring plate; 7. a single push screw shaft; 8. a total push plate; 9. a through hole; 10. a screw cylinder; 11. a total screw pushing shaft; 12. a chute; 13. a slide block.

Detailed Description

The technical solution of the present invention is further explained with reference to the accompanying drawings and specific embodiments.

Example one

As shown in fig. 1-3, the improved temperature field heating wire for the epitaxial furnace provided by the utility model comprises a heating frame 1 and heating wires 3 arranged on the heating frame 1 in a wave shape, wherein heat generated after the heating wires 3 are electrified and heated forms a temperature field, referred to as a temperature field for short, in the surrounding space, the temperature of the position of the temperature field close to the heating wires 3 is higher, and the temperature of the position far away from the heating wires 3 is relatively lower, so that the heat in the whole temperature field is uneven. The upper surface of the heating frame 1 is provided with a plurality of heating frame strips 2 with adjustable heights, the upper surfaces of the heating frame strips 2 are provided with clamping grooves for clamping heating wires 3, the joints of the heating wires 3 and the clamping grooves are fixed by glue solution, the bottom end of each heating frame strip 2 is fixedly connected with a vertical shaft 4, and the bottom of the heating frame 1 and the lower part of each vertical shaft 4 are in threaded connection with a single-push screw shaft 7 for pushing the heating frame strips 2 upwards;

in this embodiment, rotate and singly push away spiral shell axle 7, close the connection through the screw thread of singly pushing away between spiral shell axle 7 and the heating frame 1 inner wall soon and impel singly to push away spiral shell axle 7 and reciprocate, when singly pushing away spiral shell axle 7 rebound, singly push away the top of spiral shell axle 7 and the bottom contact of vertical axis 4 to can upwards push away the heating frame strip 2 that corresponds the position through vertical axis 4, thereby change the height of this heating frame strip 2, also can change the height of the part heating silk thread 3 of connection on this heating frame strip 2.

As shown in fig. 2-3, the outer surface of the bottom end of the vertical shaft 4 is fixedly connected with a spring plate 6, a spring 5 is sleeved outside the vertical shaft 4 above the spring plate 6, the top end of the spring 5 is fixedly connected with the inner wall of the top of the heating frame 1, and the bottom end of the spring 5 is fixedly connected with the upper surface of the spring plate 6;

in this embodiment, when the single push screw shaft 7 moves upwards, the spring 5 is compressed to generate elastic deformation, and when the single push screw shaft 7 moves downwards, the spring 5 pushes the spring plate 6 downwards through elastic force to drive the heating rack bar 2 to move downwards to reset.

In this embodiment, the height of the heating rack bars 2 at different positions can be adjusted by rotating different single-push screw shafts 7, so that the heights of different positions of the heating silk threads 3 are changed, the heating silk threads 3 are distributed in a wave shape in the horizontal direction and can be distributed in a wave shape in the vertical direction, the wave-shaped distribution mode enables high-temperature areas and low-temperature areas to be arranged at different height positions of the whole temperature field, the two temperature areas are mixed with each other, the temperature of the whole temperature field is enabled to be more uniform, the heights of different positions of the heating silk threads 3 can be freely adjusted according to actual needs, namely, the waves of the heating silk threads 3 in the vertical direction have different patterns, and the combination mode is richer.

Example two

As shown in fig. 1 to 3, compared with the first embodiment, the improved temperature field heating wire of the epitaxial furnace of the present invention further includes: heating frame 1 is inside can be had a total push pedal 8 from top to bottom sliding connection, the equal fixedly connected with slider 13 in both ends of total push pedal 8, heating frame 1's inner wall seted up with slider 13 assorted spout 12. The general push plate 8 is provided with a plurality of through holes 9 for the single push screw shafts 7 at corresponding positions to movably penetrate through. The bottom of the general push plate 8 is fixedly connected with a general push screw shaft 11, and the external thread of the general push screw shaft 11 is screwed with a screw cylinder 10.

In this embodiment, rotate barrel 10, barrel 10 through with always push away the screw thread between the spiral shell axle 11 and close the cup joint soon so that always push away spiral shell axle 11 and upwards move, always push away spiral shell axle 11 and drive always push pedal 8 rebound, always push pedal 8 can with the spring plate 6 contact of all vertical axis 4 bottoms to promote all heating frame strip 2 rebound simultaneously, with the high position of adjusting whole heating silk thread 3, thereby change whole temperature field height, with the heating needs that adapt to the difference.

The embodiments of the present invention have been described in detail with reference to the drawings, but the present invention is not limited thereto, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.

Claims

1. The utility model provides an epitaxial furnace improves temperature field heater strip, includes heating frame (1) and installs heating silk thread (3) on heating frame (1), its characterized in that: the upper surface of heating frame (1) is provided with a plurality of heating frame strips (2) that can height-adjusting, the draw-in groove that is used for blocking heating silk thread (3), every are offered to heating frame strip (2) upper surface the equal fixedly connected with in bottom of heating frame strip (2) erects axle (4), the equal screwed connection in below that the bottom of heating frame (1) just is located every vertical axis (4) has one to be used for heating frame strip (2) top push to singly push away spiral shell axle (7).

2. The heating wire for improving the temperature field of the epitaxial furnace according to claim 1, wherein a spring plate (6) is fixedly connected to the outer surface of the bottom end of the vertical shaft (4), and a spring (5) is sleeved outside the vertical shaft (4) above the spring plate (6).

3. The heating wire for improving the temperature field of the epitaxial furnace according to claim 1, wherein a general push plate (8) is slidably connected inside the heating frame (1), and a plurality of through holes (9) for the single push screw shaft (7) to movably penetrate are formed in the general push plate (8).

4. The heating wire for improving the temperature field of the epitaxial furnace according to claim 3, wherein a general pushing screw shaft (11) is fixedly connected to the bottom of the general pushing plate (8), and a screw cylinder (10) is spirally sleeved outside the general pushing screw shaft (11).

5. The heating wire for improving the temperature field of the epitaxial furnace according to claim 3, wherein two ends of the main push plate (8) are fixedly connected with sliding blocks (13), and a sliding groove (12) matched with the sliding blocks (13) is formed in the inner wall of the heating frame (1).