CN216759463U

CN216759463U - Fixing device for processing platinum target

Info

Publication number: CN216759463U
Application number: CN202122430068.1U
Authority: CN
Inventors: 王永超; 赵泽良; 贾时君; 尤青文
Original assignee: Shanghai Hedong Electronic Material Co ltd
Current assignee: Shanghai Hedong Electronic Material Co ltd
Priority date: 2021-10-09
Filing date: 2021-10-09
Publication date: 2022-06-17
Anticipated expiration: 2031-10-09

Abstract

The utility model relates to a fixing device for processing a platinum target. It includes that the upper surface sets up the workstation that has the fluting, the jacking subassembly that is used for placing the platinum target that sets up under the fluting, vertical fixed setting is at workstation mounting panel all around, install upset subassembly and the rotating assembly on the mounting panel, the upset subassembly includes that two horizontal symmetries set up the first cylinder on wherein two symmetrical mounting panels, the clamping jaw that sets up at first cylinder tailpiece of the piston rod end and be used for driving first cylinder pivoted drive assembly one, the tailpiece of the piston rod of two first cylinders removes in opposite directions, the clamping jaw is corresponding with the intermediate position of platinum target lateral wall, rotating assembly includes that two horizontal symmetries set up the second cylinder on two other symmetrical mounting panels, set up the splint at second cylinder tailpiece of the piston rod and be used for driving second cylinder pivoted drive assembly two. According to the utility model, the target can be circumferentially polished by arranging the turnover assembly and the rotating assembly, so that the target has stronger applicability.

Description

Fixing device for processing platinum target

Technical Field

The utility model relates to the technical field of platinum target processing, in particular to a fixing device for processing a platinum target.

Background

Sputtering target materials are widely used as film source materials in the industries related to electronic information, storage and recording, displays and the like, and the surface quality of the target materials directly influences the performance of the film. The surface quality of the target material is unqualified, the uniformity of the sputtered film is poor, and the film is invalid. The target processing method directly determines the surface quality, and the current common processing method comprises the following steps: lathes, planers, milling machines, grinders, buffing wheels, etc. In general, when a target material is processed, surface grinding is required. The traditional polishing mode generally adopts manual polishing, the surface roughness of the manual polishing is large, the uniformity is poor, the surface gloss is inconsistent, the use requirement cannot be met, and time and labor are wasted. The prior art adopts mechanical polishing, but the prior polishing technology can only polish the upper surface and the lower surface of the target material and cannot polish the circumference of the circular target material.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a fixing device for processing a platinum target, which can realize circumferential polishing of the target by arranging a turnover assembly and a rotating assembly and has stronger applicability.

The above object of the present invention is achieved by the following technical solutions:

a fixing device for processing a platinum target comprises a workbench, a jacking assembly, a vertical mounting plate, a turning assembly and a rotating assembly, wherein the upper surface of the jacking assembly is provided with a groove, the jacking assembly is arranged under the groove and used for placing the platinum target, the vertical mounting plate is fixedly arranged on the periphery of the workbench, the turning assembly is arranged on the mounting plate and comprises two first cylinders which are horizontally symmetrically arranged on two opposite mounting plates, clamping jaws arranged on the piston rod ends of the first cylinders and a first driving assembly used for driving the first cylinders to rotate, the piston rod ends of the two first cylinders move oppositely, the clamping jaws correspond to the middle position of the side wall of the platinum target, the rotating assembly comprises two second cylinders which are horizontally symmetrically arranged on the other two mounting plates, clamping plates arranged on the piston rod ends of the second cylinders and a second driving assembly used for driving the second cylinders to rotate, and the piston rod ends of the two second cylinders move oppositely, the clamping plate corresponds to the center positions of the upper surface and the lower surface of the platinum target.

Preferably, one driving assembly comprises a driving motor fixedly arranged on the mounting plate, a driving gear coaxially and fixedly connected to an output shaft of the driving motor, a connecting plate used for fixing the first air cylinder, a rotating shaft horizontally and fixedly arranged on the connecting plate and a driven gear coaxially and fixedly connected to the rotating shaft, one end, far away from the connecting plate, of the rotating shaft is rotatably connected to the mounting plate, the driving gear is meshed with the driven gear, and the first driving assembly and the second driving assembly are identical in structure.

Preferably, the jacking assembly comprises a vertically arranged jacking cylinder and a placing plate horizontally arranged at the piston rod end of the jacking cylinder and used for placing the platinum target, and the placing plate is matched with the slot.

Preferably, be provided with spacing subassembly on the workstation, spacing subassembly includes that the symmetry sets up the gag lever post at the workstation upper surface, the fixed slider that sets up in the gag lever post bottom surface, sets up and drive actuating cylinder on the mounting panel of workstation upper surface and slider matched with spout and fixed connection installation second cylinder, it is parallel with the moving direction of second cylinder to drive actuating cylinder, the piston rod end fixed connection who drives actuating cylinder is on the lateral wall of gag lever post.

Preferably, the driving motor, the first cylinder, the second cylinder and the driving cylinder are all in signal connection with a controller, and the specifications of the driving motor, the first cylinder, the second cylinder and the driving cylinder are the same.

In conclusion, the beneficial technical effects of the utility model are as follows:

by arranging the turnover assembly, the first cylinder and the driving motor connected with the first cylinder are opened, so that the upper surface and the lower surface of the target can be polished; through the combination of the turnover assembly and the rotating assembly, the platinum target is rotated to a vertical state, then the second cylinder and the driving motor connected with the second cylinder are opened, and the circumferential side face of the target can be polished.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic top view of the structure of FIG. 1;

FIG. 3 is a schematic view showing a structure of a slider;

fig. 4 is a schematic view of a state when the circumferential side wall of the platinum target is polished.

In the figure, 1, a workbench; 11. grooving; 12. a chute; 21. jacking a cylinder; 22. placing the plate; 3. mounting a plate; 41. a first cylinder; 42. a clamping jaw; 51. a second cylinder; 52. a splint; 61. a drive motor; 62. a driving gear; 63. a driven gear; 64. a connecting plate; 65. a rotating shaft; 71. a limiting rod; 72. a slider; 73. a driving cylinder; 8. a platinum target.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Referring to fig. 1-4, the fixing device for processing a platinum target disclosed by the utility model comprises a workbench 1 with supporting legs, wherein a slot 11 is formed in the center of the upper surface of the workbench 1. Be provided with the jacking subassembly that is used for placing platinum target 8 under fluting 11, the jacking subassembly includes that the jacking cylinder 21 and the level of vertical setting set up at the board 22 of placing of jacking cylinder 21 tailpiece of the piston rod, place board 22 and be used for placing platinum target 8, place board 22 and fluting 11 phase-matchs. The workbench 1 is vertically and fixedly provided with a mounting plate 3 all around, and the mounting plate 3 is provided with a turnover assembly and a rotating assembly. The upset subassembly is used for rotating platinum target 8, conveniently polishes two upper and lower faces of platinum target 8, can make platinum target 8 be in vertical state simultaneously, makes things convenient for the rotating assembly work. The rotating assembly facilitates grinding of the circumferential side of the platinum target 8.

The overturning assembly comprises two first air cylinders 41 horizontally and symmetrically arranged on two symmetrical mounting plates 3, a clamping jaw 42 arranged at the piston rod end of each first air cylinder 41 and a first driving assembly for driving the first air cylinders 41 to rotate, and the piston rod ends of the two first air cylinders 41 move oppositely. The clamping jaw 42 corresponds to the middle position of the side wall of the platinum target 8. The rotating assembly comprises two second air cylinders 51 horizontally and symmetrically arranged on the other two symmetrical mounting plates 3, clamping plates 52 arranged at the piston rod ends of the second air cylinders 51 and a second driving assembly for driving the second air cylinders 51 to rotate, the piston rod ends of the two second air cylinders 51 move oppositely, and the clamping plates 52 correspond to the central positions of the upper surface and the lower surface of the platinum target 8. The first driving assembly comprises a driving motor 61 fixedly arranged on the mounting plate 3, a driving gear 62 coaxially and fixedly connected to an output shaft of the driving motor 61, a connecting plate 64 for fixing the first cylinder 41, a rotating shaft 65 horizontally and fixedly arranged on the connecting plate 64 and a driven gear 63 coaxially and fixedly connected to the rotating shaft 65. One end of the rotating shaft 65, which is far away from the connecting plate 64, is rotatably connected to the mounting plate 3, the driving gear 62 is meshed with the driven gear 63, and the first driving assembly and the second driving assembly have the same structure.

The workbench 1 is further provided with a limiting assembly, and the limiting assembly comprises a limiting rod 71 symmetrically arranged on the upper surface of the workbench 1, a sliding block 72 fixedly arranged on the bottom surface of the limiting rod 71, a sliding groove 12 arranged on the upper surface of the workbench 1 and matched with the sliding block 72, and a driving cylinder 73 fixedly connected to the mounting plate 3 for mounting the second cylinder 51. The driving cylinder 73 is parallel to the moving direction of the second cylinder 51, and the piston rod end of the driving cylinder 73 is fixedly connected to the side wall of the limiting rod 71. The driving motor 61, the first cylinder 41, the second cylinder 51 and the driving cylinder 73 are all connected with a controller through signals, and the specifications of the driving motor 61, the first cylinder 41, the second cylinder 51 and the driving cylinder 73 are the same.

The implementation principle of the above embodiment is as follows: when it is necessary to polish the platinum target 8, the platinum target 8 is placed on the placing plate 22, and then the lift-up cylinder 21 is opened to move the placing plate 22 to a position flush with the table 1. Then, the driving cylinder 73 is opened through the controller, the driving cylinder 73 pushes the limiting rods 71 to move along the direction of the sliding chute 12, the platinum target 8 moves to the middle position of the workbench 1 under the action of the two limiting rods 71, then the first cylinder 41 is opened, the first cylinder 41 pushes the clamping jaw 42 to be clamped at the middle position of the side wall of the platinum target 8, and the upper surface of the platinum target 8 can be polished. When the lower surface of the platinum target 8 needs to be polished, the jacking cylinder 21 is firstly lowered, then the driving motor 61 connected with the first cylinder 41 is opened, the driving motor 61 drives the driving gear 62 and the driven gear 63 to rotate together, so that the first cylinder 41 rotates the platinum target 8 until the platinum target 8 rotates to be turned over, and then the lower surface of the platinum target 8 can be polished. When the circumferential side surface of the platinum target 8 needs to be polished, the driving motor 61 connected with the first cylinder 41 is turned on, the platinum target 8 is rotated to be in a vertical state, then the second cylinder 51 is driven, the clamping plate 52 abuts against the central position of the surface of the platinum target 8, the first cylinder 41 is retracted, then the driving motor 61 connected with the second cylinder 51 is driven, the platinum target 8 is driven to rotate around the axis of the platinum target, and the circumference of the target is polished.

It should be understood that the above examples are only for clearly illustrating the present invention and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And such obvious variations or modifications which fall within the spirit of the utility model are intended to be covered by the scope of the present invention.

Claims

1. A fixture for processing a platinum target, comprising: including workstation (1) that the upper surface offered fluting (11), set up and be used for placing jacking subassembly, vertical fixed setting at workstation (1) mounting panel (3) all around, install upset subassembly and the rotating assembly on mounting panel (3) under fluting (11), the upset subassembly includes that two horizontal symmetries set up first cylinder (41) on wherein two relative mounting panels (3), set up clamping jaw (42) at first cylinder (41) tailpiece of the piston rod and be used for driving first cylinder (41) pivoted drive assembly one, two the tailpiece of the piston rod of first cylinder (41) moves in opposite directions, clamping jaw (42) correspond with the intermediate position of platinum target (8) lateral wall, the rotating assembly includes that two horizontal symmetries set up second cylinder (51) on two other mounting panels (3), set up splint (52) at second cylinder (51) tailpiece of the piston rod and be used for driving second cylinder (51) and change And the piston rod ends of the two second air cylinders (51) move oppositely, and the clamping plates (52) correspond to the central positions of the upper surface and the lower surface of the platinum target (8).

2. A fixture for processing a platinum target according to claim 1, wherein: one driving assembly comprises a driving motor (61) fixedly arranged on the mounting plate (3), a driving gear (62) coaxially and fixedly connected to an output shaft of the driving motor (61), a connecting plate (64) used for fixing the first cylinder (41) and a driven gear (63) fixedly connected to the rotating shaft (65) and a rotating shaft (65) horizontally and fixedly arranged on the connecting plate (64), wherein one end, far away from the connecting plate (64), of the rotating shaft (65) is rotatably connected to the mounting plate (3), the driving gear (62) is meshed with the driven gear (63), and the first driving assembly and the second driving assembly are identical in structure.

3. A fixture for processing a platinum target according to claim 2, wherein: the jacking assembly comprises a vertically arranged jacking cylinder (21) and a placing plate (22) which is horizontally arranged at the piston rod end of the jacking cylinder (21) and used for placing the platinum target (8), and the placing plate (22) is matched with the slot (11).

4. A fixture for processing a platinum target according to claim 3, wherein: be provided with spacing subassembly on workstation (1), spacing subassembly includes that the symmetry sets up gag lever post (71) at workstation (1) upper surface, fixed slider (72) that set up in gag lever post (71) bottom surface, set up drive actuating cylinder (73) on workstation (1) upper surface and slider (72) matched with spout (12) and fixed connection mounting panel (3) of installation second cylinder (51), it is parallel with the moving direction of second cylinder (51) to drive actuating cylinder (73), the piston rod end fixed connection who drives actuating cylinder (73) is on the lateral wall of gag lever post (71).

5. The fixture for processing a platinum target according to claim 4, wherein: the driving motor (61), the first air cylinder (41), the second air cylinder (51) and the driving air cylinder (73) are all in signal connection with a controller, and the specifications of the driving motor (61), the first air cylinder (41), the second air cylinder (51) and the driving air cylinder (73) are the same.