CN216726094U - Separation device and separation system for separating chip waste and blue membrane - Google Patents

Abstract

The utility model discloses a separation device for separating chip waste from a blue membrane, aiming at improving the separation efficiency of the chip waste and the blue membrane, and the technical scheme is as follows: a separation device for separating chip waste and blue membranes comprises a kettle body, wherein a cover body is arranged on the kettle body, a bucket body is arranged in the kettle body, a detachable basket body with meshes is arranged in the bucket body, the basket body is used for loading the blue membranes outside the chip waste, and the bucket body is driven to rotate by a driving device; the barrel body rotates to enable the blue membrane with the chip waste in the basket body to do centrifugal motion, so that the chip waste is separated from the external blue membrane and penetrates through the meshes to enter the barrel body; the separation system can recover the peripheral reagents for assisting in separating the chip waste from the blue membrane, so that the production cost is reduced; belongs to the technical field of chip waste treatment.

Description

Separation device and separation system for separating chip waste and blue membrane

Technical Field

The utility model belongs to the technical field of chip waste treatment, and particularly relates to a separation device and a separation system for separating chip waste and a blue film.

Background

In the development and manufacturing process of semiconductor chips, a film material for protecting the surface circuit of a semiconductor wafer is commonly used in the processes of dicing or substrate cutting, chip cutting, back grinding and thinning of the semiconductor wafer, and the film material is commonly called a blue film or a UV film.

Chip waste materials adhered to a blue film and generated in the production and research and development processes are rich in high-grade valuable metals, in order to meet the requirements of recycling of the valuable metals and environmental protection, the valuable metals need to be separated and recovered, and the chip waste materials and the blue film need to be separated for separation and recovery of the valuable metals;

in the prior art, utility model patent publication No. CN206322674U discloses a scraping device of UV membrane upper chip, including scraping chip platform mechanism, scraping chip mechanism, moving platform mechanism and collecting box, the UV membrane that has the chip is placed scrape on the chip platform mechanism, it installs to scrape chip platform mechanism moving platform mechanism is last, moving platform mechanism can drive scrape chip platform mechanism with scrape chip mechanism and make relative motion, scrape chip mechanism and can jump the UV membrane tightly and make the chip peel off and scrape out, collecting box set up in moving platform mechanism's below and be used for collecting by scrape the chip that chip mechanism scraped out.

In the scheme, the UV film is tightly bounced to strip and scrape the chip through the relative motion of the chip scraping platform mechanism and the chip scraping mechanism;

the defect of above-mentioned scheme lies in, it needs the manual work to tile the UV membrane on the device when realizing the chip separation, and the device single handling capacity that should scrape simultaneously is few, the condition when unable handling capacity is great for the separation efficiency of this scraping device is low, is not suitable for the separation of chip waste material and blue membrane.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide a separating device for separating chip waste materials from a blue film, aiming at improving the separation efficiency of the chip waste materials from the blue film; the utility model also provides a separation system which can recover the peripheral reagents for assisting in separating the chip waste from the blue membrane and reduce the production cost.

According to the first aspect of the utility model, a separation device for separating chip waste from blue membranes is provided, which comprises a kettle body, wherein a cover body is arranged on the kettle body, a bucket body is arranged in the kettle body, a detachable basket body with meshes is arranged in the bucket body, the basket body is used for loading the blue membranes outside the chip waste, and the bucket body is driven to rotate by a driving device;

the barrel body rotates to enable the blue membrane with the chip waste in the basket body to do centrifugal motion, so that the chip waste is separated from the external blue membrane and penetrates through the meshes to enter the barrel body.

In a specific embodiment of the utility model, a vertically arranged fixing column is arranged in the barrel body; the middle part of the basket body is provided with a first mounting through hole which is vertically arranged, and the basket body is arranged on the fixing column in a penetrating way through the first mounting through hole to realize detachable connection in the barrel body; the fixing column is provided with a detachable limiting part used for limiting the basket body on the fixing column.

In a specific embodiment of the present invention, the basket further comprises a fixing frame detachably connected to the inside of the tub by a connecting structure, and the basket is disposed in the fixing frame.

In a specific embodiment of the present invention, the fixing frame includes an upper ring body, a lower ring body, and a plurality of limiting posts for connecting the upper ring body and the lower ring body, and the basket body is disposed in a space surrounded by the plurality of limiting posts.

In a specific embodiment of the utility model, the connecting structure comprises a plurality of connecting components, each connecting component comprises a connecting column arranged on the barrel body, a fixing part is arranged on each connecting column, and the sectional area of each fixing part on the horizontal plane is larger than the diameter of each connecting column;

the connecting assembly further comprises a first fixing hole and a second fixing hole which are arranged on the lower ring body, and the first fixing hole can be used for the fixing part to pass through; the second fixing hole is an arc waist-shaped hole, the width of the second fixing hole is matched with the diameter of the connecting column, the arc center of the second fixing hole is overlapped with the ring center of the lower ring body, and the first fixing hole is communicated with one end of the second fixing hole.

In a specific embodiment of the present invention, the fixing frame further includes a first cross bar, two ends of the first cross bar are both fixedly connected to the lower ring body, and the first cross bar is provided with a second mounting through hole for the fixing column to pass through;

the locating part is a second cross rod, the second cross rod is detachably connected to the fixed column, and two ends of the second cross rod are carried on the upper ring body.

In a specific embodiment of the present invention, the cover is made of a transparent material.

According to another aspect of the present invention, there is provided a separation system comprising the separation apparatus for separating chip waste from a blue film as described above; the condensation unit is used for recovering an external reagent for assisting in separating the chip waste from the blue film;

the condensing unit comprises a condensing pipe and a collecting bottle, the condensing pipe is connected with a refrigerating module, and the collecting bottle is used for collecting liquid output by the condensing pipe; the condenser pipe is communicated with the upper part of the kettle body through a flow guide pipe.

In a specific embodiment of the utility model, the collecting bottle is communicated with the upper part of the kettle body through a return pipe, and the output end of the return pipe extends to the upper part of the bucket body;

and valves are arranged on the flow guide pipe and the return pipe.

In a specific embodiment of the utility model, the refrigeration module comprises a circulating water refrigerator, and the circulating water refrigerator is connected with the condensation pipe through a water supply pipe and a water return pipe.

One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:

in practical application, the basket body is loaded with the external blue membrane with the chip waste, the barrel body rotates to enable the blue membrane with the chip waste in the basket body to do centrifugal motion, so that the chip waste is separated from the external blue membrane and penetrates through the meshes to enter the barrel body, the chip waste is separated from the external blue membrane, and the separation effect is good; meanwhile, the basket body has large accommodation capacity, can treat a large amount of external blue membranes at one time, and has high separation efficiency;

the basket body is detachably arranged in the barrel body, and the basket body can be directly replaced to carry out next separation after one separation is finished, so that the treatment efficiency of the external blue membrane with chip waste is further improved;

in practical application, some auxiliary separation reagents are generally added for separating the chip waste from the peripheral blue membrane, and the reagents are generally volatile.

Drawings

The utility model is further described below with reference to the accompanying drawings and examples;

FIG. 1 is a structural view of embodiment 1 of the present invention;

FIG. 2 is a view showing the structure of the barrel, basket and holder assembly of embodiment 1 of the present invention;

FIG. 3 is a structural view of a connecting structure of embodiment 1 of the utility model;

fig. 4 is another structural view of the connection structure of embodiment 1 of the utility model;

fig. 5 is a structural view of embodiment 2 of the present invention.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different aspects of the utility model.

Example 1

Referring to fig. 1 to 4, a separation device for separating chip waste from a blue membrane comprises a kettle body 1, wherein a cover body 2 is arranged on the kettle body 1, a bucket body 3 is arranged in the kettle body 1, a detachable basket body 4 with meshes is arranged in the bucket body 3, the basket body 4 is used for loading the blue membrane with the chip waste, and the bucket body 3 is driven to rotate by a driving device 5;

the barrel body 3 rotates to enable the blue membrane with the chip waste in the basket body 4 to do centrifugal motion, so that the chip waste is separated from the external blue membrane and enters the barrel body 3 through the meshes.

In practical application, the basket body 4 is used for loading the external blue film with the chip waste, the barrel body 3 rotates to enable the blue film with the chip waste in the basket body 4 to do centrifugal motion, so that the chip waste is separated from the external blue film and penetrates through meshes to enter the barrel body 3, the separation of the chip waste and the external blue film is finished, and the separation effect is good; meanwhile, the basket body 4 has large accommodation capacity, can treat a large amount of external blue membranes at one time and has high separation efficiency;

the basket body 4 is detachably arranged in the barrel body 3, and the basket body 4 can be directly replaced to perform next separation after one separation is completed, so that the treatment efficiency of the external blue membrane with chip waste is further improved.

In this embodiment, the cover 2 is made of a transparent material, such as glass, transparent plastic, etc., which is not limited in this embodiment, and facilitates observation of the separation condition between the chip waste and the external blue film.

A bucket cover capable of being opened and closed is arranged at the top of the bucket body 3, so that chip waste and an external blue film are separated in a closed space, and the chip waste is prevented from splashing out of the bucket body 3;

the basket body 4 is also provided with a basket cover which can be opened and closed, so that the normal operation of the separation work of the chip waste and the external blue membrane is ensured;

the driving device 5 comprises a motor, a speed reducer, a connecting shaft and the like, and the barrel body 3 is detachably connected to the connecting shaft through a bolt;

the kettle body 1 comprises a lower kettle body and an upper kettle cover which are detachably connected, and the cover body 2 is arranged at the top of the upper kettle cover; the upper kettle cover is convenient for the installation and the disassembly of the barrel body 3;

the barrel body 3 and the basket body 4 are coaxially arranged, and the rotating shaft of the barrel body 3 is superposed with the axis of the barrel body.

In this embodiment, the basket body 4 can be detachably connected to the barrel body 3 through a threaded connection, a snap connection, or the like, for example, by providing a threaded column at the bottom of the basket body 4, providing a threaded hole at the bottom of the barrel body 3, the threaded column and the threaded hole being matched with each other, the basket body 4 can be detachably connected; or the basket body 4 is provided with the female buckle, the barrel body 3 is provided with the male buckle matched with the female buckle to realize the detachable connection of the basket body 4, and the basket body 4 is fixed in the barrel body 3 by taking the clamping rod as the male buckle;

as a specific implementation of this embodiment, a fixing column 31 is vertically arranged in the barrel 3; a first mounting through hole (not shown) is vertically arranged in the middle of the basket body 4, and the basket body 4 is inserted into the fixing column 31 through the first mounting through hole to realize detachable connection in the barrel body 3; a detachable limiting piece 32 for limiting the basket body 4 on the fixing column 31 is arranged on the fixing column 31;

the installation process of the basket body 4 is as follows: the limiting part 32 is detached firstly, the basket body 4 is arranged on the fixing column 31 in a penetrating mode, and the limiting part 32 is installed back to the fixing column 31, so that the basket body 4 is fixed.

The limiting piece 32 can be detachably connected to the fixing column 31 in a threaded connection manner, and if a threaded hole is formed in the limiting piece 32, a limiting part and a thread matched with the threaded hole are formed in the fixing column 31; or the limiting member 32 is locked on the limiting portion of the fixing column 31 by a bolt, which is not limited in this embodiment.

Preferably, the device also comprises a fixing frame 6, the fixing frame 6 is detachably connected in the barrel body 3 through a connecting structure 7, the basket body 4 is arranged in the fixing frame 6, the basket body 4 is further limited, the fixing stability of the basket body 4 is ensured, and the normal operation of the separation work is ensured;

the fixed frame 6 can be disassembled, so that the subsequent cleaning of the chip waste in the barrel body 3 is convenient;

in this embodiment, the fixing frame 6 may also be detachable through a threaded connection, a snap connection, or the like, that is, the connecting structure 7 may use a threaded structure as a main body, or a snap structure as a main body, which is not limited in this embodiment;

specifically, the fixing frame 6 includes an upper ring body 61, a lower ring body 62, and a plurality of limiting columns 63 for connecting the upper ring body 61 and the lower ring body 62, and the basket body 4 is disposed in a space surrounded by the plurality of limiting columns 63;

the limiting columns 63 may be vertically arranged, may also be obliquely arranged, may also be arranged in a plurality of intersecting ways to form a grid structure, and the like, which is not limited in this embodiment; in this embodiment, the limiting columns 63 are vertically arranged.

As a specific implementation of this embodiment, the connection structure 7 includes a plurality of connection assemblies, each connection assembly includes a connection column 71 disposed on the barrel 3, a fixing portion 711 is disposed on the connection column 71, and a cross-sectional area of the fixing portion 711 on a horizontal plane is greater than a diameter of the connection column 71;

the connecting assembly further includes a first fixing hole 72 and a second fixing hole 73 disposed on the lower ring 62, and the first fixing hole 72 is for the fixing part 711 to pass through; the second fixing hole 73 is an arc-shaped kidney-shaped hole, the width of the second fixing hole 73 is matched with the diameter of the connecting column 71, the arc center of the second fixing hole 73 is overlapped with the ring center of the lower ring body 62, and the first fixing hole 72 is communicated with one end of the second fixing hole 73;

the first fixing hole 72, the second fixing hole 73, the connecting column 71 and the fixing part 711 form a knob type buckle structure, and the fixing frame 6 is fixed in the barrel body 3 by rotating the fixing frame 6, so that the structure is simple and the operation is convenient;

specifically, the second fixing hole 73 is in abutting contact with the connecting column 71, so that the stability of the installation of the fixing frame 6 is ensured.

Preferably, the fixing frame 6 further includes a first cross rod (not shown in the figure), two ends of the first cross rod are both fixedly connected to the lower ring body 62, the first cross rod is provided with a second mounting through hole for the fixing column 31 to pass through, when the fixing frame 6 is mounted, the first cross rod is firstly sleeved on the fixing column 31, and then the fixing frame is fixed through the connecting structure 7, so that the mounting stability of the fixing frame 6 is further improved.

In this embodiment, the limiting member 32 may be a rod or a block; preferably, in this embodiment, the limiting member 32 is a second cross rod, the second cross rod is detachably connected to the fixing column 31, and two ends of the second cross rod are mounted on the upper ring body 61, so as to further ensure the stability of the mounting of the fixing frame 6 and the stability of the mounting of the basket body 4.

Example 2

In practical application, reagents for assisting separation are generally added for separating chip waste from an external blue membrane, so that valuable metals can be conveniently recovered, wherein the reagents are ethyl acetate, acetone and the like, and the reagents are generally volatile;

in order to recycle the external reagent and reduce the production cost, referring to fig. 5, this embodiment provides a separation system, including the separation device a for separating the chip waste from the blue membrane as described in embodiment 1; the device also comprises a condensation unit 8 for recovering an external reagent for assisting in separating the chip waste from the blue film;

the condensing unit 8 comprises a condensing pipe 81 and a collecting bottle 82, the condensing pipe 81 is connected with a refrigerating module, and the collecting bottle 82 is used for collecting liquid output by the condensing pipe 81; the condensation pipe 81 is communicated with the upper part of the kettle body through a guide pipe A.

Preferably, the collecting bottle 82 is communicated with the upper part of the kettle body through a return pipe B, the output end of the return pipe B extends to the upper part of the barrel body, and the collected external reagent is directly introduced into the barrel body to realize cyclic utilization; and valves C are arranged on the flow guide pipe A and the return pipe B, and when condensation recovery or recycling of an external reagent is required, the valves C are opened correspondingly.

Specifically, the refrigeration module comprises a circulating water refrigerator 83, and the circulating water refrigerator 83 is connected with the condensation pipe 81 through a water supply pipe D and a water return pipe E;

the condensation pipe 81 comprises an inner pipe and an outer pipe, namely the outer pipe is connected and communicated with the water supply pipe D and the water return pipe E; the inner tube is communicated with the guide tube A and the collecting bottle 82.

In this embodiment, the kettle body is provided with a flow guide port and a return port, the flow guide port is connected with a flow guide pipe a, the return port is connected with a return pipe B, the flow guide pipe a and the return pipe B are soft polytetrafluoroethylene pipes, and the connection mode is a tower head and a quick-connection flange;

and a vent hole is also formed in the kettle body.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. A separation device for separating chip waste and a blue membrane comprises a kettle body (1), wherein a cover body (2) is arranged on the kettle body (1), and is characterized in that a bucket body (3) is arranged in the kettle body (1), a detachable basket body (4) with meshes is arranged in the bucket body (3), the basket body (4) is used for loading the blue membrane with the chip waste, and the bucket body (3) is driven to rotate by a driving device (5);

the barrel body (3) rotates to enable the blue membrane with the chip waste in the basket body (4) to do centrifugal motion, so that the chip waste is separated from the external blue membrane and penetrates through the meshes to enter the barrel body (3).

2. The apparatus for separating chip waste from blue film according to claim 1, wherein a vertically arranged fixing column (31) is provided in the tub (3); a first mounting through hole which is vertically arranged is formed in the middle of the basket body (4), and the basket body (4) is arranged on the fixing column (31) in a penetrating mode through the first mounting through hole to realize detachable connection in the barrel body (3); the fixing column (31) is provided with a detachable limiting piece (32) which is used for limiting the basket body (4) on the fixing column (31).

3. The device for separating chip waste from blue membrane according to claim 2, further comprising a holder (6), wherein said holder (6) is detachably connected in said barrel (3) by a connecting structure (7), and said basket body (4) is arranged in said holder (6).

4. The separation apparatus for separating chip waste from blue membrane according to claim 3, wherein the fixing frame (6) comprises an upper ring body (61), a lower ring body (62), and a plurality of limiting columns (63) for connecting the upper ring body (61) and the lower ring body (62), and the basket body (4) is disposed in a space surrounded by the plurality of limiting columns (63).

5. The device for separating chip waste from blue film according to claim 4, wherein the connecting structure (7) comprises a plurality of connecting assemblies, the connecting assemblies comprise connecting columns (71) arranged on the barrel body (3), fixing parts (711) are arranged on the connecting columns (71), and the sectional area of the fixing parts (711) in the horizontal plane is larger than the diameter of the connecting columns (71);

the connecting assembly further comprises a first fixing hole (72) and a second fixing hole (73) which are arranged on the lower ring body (62), and the first fixing hole (72) can be used for the fixing part (711) to pass through; the second fixing hole (73) is an arc waist-shaped hole, the width of the second fixing hole (73) is matched with the diameter of the connecting column (71), and the arc center of the second fixing hole (73) is superposed with the ring center of the lower ring body (62); the first fixing hole (72) is in communication with one end of the second fixing hole (73).

6. The device for separating chip waste from blue membranes according to claim 4, wherein the fixing frame (6) further comprises a first cross bar, both ends of the first cross bar are fixedly connected to the lower ring body (62), and the first cross bar is provided with a second mounting through hole for the fixing column (31) to pass through;

the limiting piece (32) is a second cross rod, the second cross rod is detachably connected to the fixing column (31), and two ends of the second cross rod are carried on the upper ring body (61).

7. The apparatus for separating chip waste from blue film according to claim 1, wherein the cover (2) is made of transparent material.

8. A separation system comprising the separation apparatus (a) for separating chip waste from a blue film according to any one of claims 1 to 7; the device also comprises a condensation unit (8) for recovering an external reagent for assisting in separating the chip waste from the blue film;

the condensing unit (8) comprises a condensing pipe (81) and a collecting bottle (82), the condensing pipe (81) is connected with a refrigerating module, and the collecting bottle (82) is used for collecting liquid output by the condensing pipe (81); the condensing pipe (81) is communicated with the upper part of the kettle body through a guide pipe (A).

9. The separation system according to claim 8, wherein the collecting bottle (82) is communicated with the upper part of the kettle body through a return pipe (B), and the output end of the return pipe (B) extends to the upper part of the kettle body;

and valves (C) are arranged on the flow guide pipe (A) and the return pipe (B).

10. The separation system according to claim 8, wherein the refrigeration module comprises a circulating water refrigerator (83), and the circulating water refrigerator (83) is connected with the condensation pipe (81) through a water supply pipe (D) and a water return pipe (E).

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