CN216721147U

CN216721147U - Side-hanging compact high-precision small module and optical detection assembly

Info

Publication number: CN216721147U
Application number: CN202123248999.6U
Authority: CN
Inventors: 商宇游; 张涛涛
Original assignee: Albert Suzhou Technology Co ltd
Current assignee: Albert Suzhou Technology Co ltd
Priority date: 2021-12-22
Filing date: 2021-12-22
Publication date: 2022-06-10
Anticipated expiration: 2031-12-22

Abstract

The utility model relates to a side-hung compact high-precision small module, which comprises a movable panel and a fixed bottom plate which move relatively, wherein a linear motor is arranged between the movable panel and the fixed bottom plate, and at least one group of guide rails is arranged between the movable panel and the fixed bottom plate; the linear motor comprises a coil and at least one section of magnetic track moving relative to the coil, and a straight line where a long edge of the magnetic track is located is parallel to a straight line where a long edge of the guide rail is located; the magnetic track is fixed on one side of the movable panel, and the coil is fixed on one side of the fixed bottom plate; the magnetic rail comprises a steel plate and permanent magnets, the steel plate is used for fixing the permanent magnets, and the permanent magnets comprise N-pole magnets and S-pole magnets which are arranged in an alternating sequence; thrust generated when the coil is energized reacts on the magnetic track to move the magnetic track relative to the coil. The utility model has the advantages that the structure is optimally designed in a compact manner to the greatest extent, and meanwhile, the high-precision movement is realized on the premise of ensuring small size.

Description

Side-hanging compact high-precision small module and optical detection assembly

Technical Field

The utility model relates to the technical field of optical detection instruments, in particular to a side-hung compact high-precision small module and an optical detection assembly.

Background

Currently, flat panel display technologies and devices are in the rapid development stage, and flat panel display technologies typified by TFT-LCDs are rapidly replacing conventional display technologies typified by color picture tubes (CRTs). The production process of the TFT-LCD liquid crystal flat plate mainly comprises the working procedures of deposition, exposure, etching, detection and the like. In the defect detection of the TFT-LCD glass substrate, a microscope needs to be moved back and forth to carry out local observation and defect detection on the TFT-LCD glass substrate, so that the detection of details is realized, and a high-power objective lens needs to be adopted.

However, the displacement of the conventional mobile device for driving the microscope is large and difficult to control, which results in poor precision of the displacement, and in addition, the conventional mobile device needs to utilize a drag chain and drag chain related components, which results in a large volume of the mobile device and occupies a large optical detection space.

SUMMERY OF THE UTILITY MODEL

Aiming at the defects of the prior art, the utility model discloses a side-hung compact high-precision small module and an optical detection assembly.

The technical scheme adopted by the utility model is as follows:

a side-hung compact high-precision small module comprises a movable panel and a fixed bottom plate which move relatively, a linear motor is arranged between the movable panel and the fixed bottom plate, and at least one group of guide rails is arranged between the movable panel and the fixed bottom plate;

the linear motor comprises a coil and at least one section of magnetic track moving relative to the coil, and the straight line where the long edge of the magnetic track is located and the straight line where the long edge of the guide rail is located are parallel to each other; the magnetic track is fixed on one side of the movable panel, and the coil is fixed on one side of the fixed bottom plate;

the magnetic track comprises a steel plate and permanent magnets, the steel plate is used for fixing the permanent magnets, and the permanent magnets comprise N-pole magnets and S-pole magnets which are arranged in an alternating sequence; thrust generated when the coil is energized reacts on the magnetic track to move the magnetic track relative to the coil.

The method is further technically characterized in that: the length of the movable panel is the same as that of the guide rail.

The method is further technically characterized in that: the length of the guide rail is the same as that of the magnetic track.

The method is further technically characterized in that: the linear motor is characterized in that a grating ruler is installed between the guide rail and the linear motor, the grating ruler is arranged along the length direction of the magnetic track, and a reading head is installed below the grating ruler.

The method is further technically characterized in that: photoelectric switches used for limiting the limit positions are installed on two sides of the grating ruler.

The method is further technically characterized in that: the reading head is fixed on the reading head support, and the reading head support is fixed on one side of the fixed bottom plate.

The method is further technically characterized in that: a hard limiting collision block is arranged between the guide rail and the linear motor.

The method is further technically characterized in that: and the fixed side of the coil is provided with a wire pressing block.

An optical detection assembly comprises the side-hung compact high-precision small module.

The method is further technically characterized in that: the side-hung compact high-precision small module is characterized by also comprising a module mounting seat and an objective lens mounting seat, wherein one side of the side-hung compact high-precision small module is fixed on the module mounting seat; the other side of the side-hung compact high-precision small module is connected with the objective lens mounting seat, and the objective lens mounting seat is provided with at least one micro lens.

Compared with the prior art, the technical scheme of the utility model has the following advantages:

1. the miniature linear motor and the crossed roller guide rail are adopted, the structure is optimally designed in a compact mode to the greatest extent, the miniature linear motor and the crossed roller guide rail are compared with an equivalent stroke module (stroke 275mm), the overall dimension is reduced to the greatest extent, the width of a small module body is 110mm, the thickness of the small module body is 30mm, the bearing capacity can reach 5kg, meanwhile, the high precision is achieved on the premise that the size is small, and the running repetition precision can reach 0.5 mu m.

2. Compared with the conventional linear motor, the linear motor has the advantages that the magnetic track is fixed, the coil is electrified to cut the magnetic induction line to generate thrust, and the coil moves relative to the magnetic track.

Drawings

In order that the present disclosure may be more readily and clearly understood, reference will now be made in detail to the present disclosure, examples of which are illustrated in the accompanying drawings.

Fig. 1 is a schematic structural diagram of a side-hung compact high-precision small module.

Fig. 2 is a schematic diagram of the internal structure of fig. 1 from a first perspective.

Fig. 3 is a schematic diagram of the internal structure of fig. 1 from a second perspective.

Fig. 4 is a schematic structural diagram of an optical detection assembly.

The specification reference numbers indicate: 1. moving the panel; 2. a guide rail; 3. a magnetic track; 4. a coil; 5. a hard limit bump block; 6. a line pressing block; 7. a grating scale; 8. photoelectric light-on; 9. a reading head; 10. a reading head support; 11. a cable platen; 12. fixing a bottom plate; 13. a fixing plate; 14. a module mounting base; 15. an objective lens mount; 16. and (4) a micro lens.

Detailed Description

The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.

The foregoing and other technical matters, features and effects of the present invention will be apparent from the following detailed description of the embodiments, which is to be read in connection with the accompanying drawings. Directional terms as referred to in the following examples, for example: up, down, left, right, front or rear, etc., are simply directions with reference to the drawings. Therefore, the directional terminology used is for the purpose of describing, but not limiting, the utility model, and moreover, like reference numerals designate like elements throughout the embodiments.

With reference to fig. 1-3, a side-hung compact high-precision small module comprises a movable panel 1 and a fixed bottom plate 12 which move relatively, a linear motor is arranged between the movable panel 1 and the fixed bottom plate 12, at least one set of guide rails 2 is arranged between the movable panel 1 and the fixed bottom plate 12, and the length of the movable panel 1 is the same as that of the guide rails 2. In this embodiment, two sets of guide rails 2 are installed between the movable panel 1 and the fixed base plate 12, and the two sets of guide rails 2 are symmetrically installed on two sides of the linear motor with respect to the center line of the movable panel 1. The guide rail 2 is a crossed roller guide rail which is composed of two guide rails with V-shaped roller paths and roller retainer cylindrical rollers, and the cylindrical rollers which are arranged in a crossed mode reciprocate on the V-shaped roller path surface which is precisely ground, so that the load in each direction can be borne, and high-precision and stable linear motion is realized.

The linear motor comprises a coil 4 and at least one section of magnetic track 3 moving relative to the coil 4, and the straight line of the long edge of the magnetic track 3 is parallel to the straight line of the long edge of the guide rail 2. The magnetic track 3 comprises a steel plate and permanent magnets, the steel plate is used for fixing the permanent magnets, and the permanent magnets comprise N-pole magnets and S-pole magnets which are arranged in an alternating sequence; the thrust generated when coil 4 is energized reacts on magnetic track 3 to move magnetic track 3 relative to coil 4.

In this embodiment, the linear motor includes a coil 4 and three magnetic tracks 3 moving relative to the coil 4, the side walls of two adjacent magnetic tracks 3 are abutted, and the total length of the three magnetic tracks 3 is the same as the length of the guide rail 2. The coil 4 is first mounted on the magnetic track 3 and then on an aluminum base.

The magnetic track 3 is fixed to one side of the moving panel 1, and the coil 4 is fixed to one side of the fixed base plate 12.

A hard limiting collision block 5 is arranged between the guide rail 2 and the linear motor.

A grating ruler 7 is arranged between the guide rail 2 and the linear motor, the grating ruler 7 is arranged along the length direction of the magnetic track 3, and a reading head 9 is arranged below the grating ruler 7. Photoelectric switches 8 for limiting the limit positions are arranged on two sides of the grating ruler 7. Specifically, the grating ruler 7 is fixed on the magnetic track 3, the grating ruler 7 is a measurement feedback device working by using the optical principle of a grating, and can be used for detecting the linear displacement of the magnetic track 3, and a signal output by measurement is a digital pulse. The reading head 9 is a direct-receiving reading head. Photoelectric switches 8 are mounted at two ends of the grating ruler 7, the photoelectric switches 8 are used for limiting the limit position of the operation stroke and are matched with hard limit collision blocks 5 arranged between the guide rail 2 and the linear motor for use, namely the photoelectric switches 8 are used for limiting photoelectric signals and are also called soft limit, and the hard limit collision blocks 5 are used for mechanical limit and are also called hard limit, so that the 'flying' accident caused by misoperation or other reasons during operation of the small-sized module and the collision of the small-sized module out of the stroke is avoided.

The fixed side of the coil 4 is provided with a wire pressing block 6. The cable of coil 4, the cable of reading head 9 and the cable of photoelectric switch 8 pass through line ball 6 to line ball 6 compresses tightly the cable, and line ball 6 guarantees that the cable does not hinder the motion of magnetic track 3, and the cable is drawn forth from between removal panel 1 and PMKD 12, and is connected with outside electricity, and the outside is for coil 4 power supply and signal transmission.

In addition, when the moving panel 1 and the fixed base plate 12 are relatively stationary, the moving panel 1 and the fixed base plate 12 may be fixed by the fixed plate 13, and specifically, one side of the fixed plate 13 is bolted to the moving panel 1 and the other side of the fixed plate 13 is bolted to the fixed base plate 12.

As shown in fig. 4, an optical inspection assembly includes a side-hung compact high-precision small module, a module mount 14, and an objective mount 15, one side of the side-hung compact high-precision small module being fixed to the module mount 14. The other side of the side-hung compact high-precision small module is connected with an objective lens mounting seat 15, and at least one micro lens 16 is mounted on the objective lens mounting seat 15. In this embodiment, the objective lens mount 15 mounts four microlenses 16, and multiples of the four microlenses 16 are different.

The working principle of the utility model is as follows:

thrust generated when the coil 4 is electrified is reacted on the magnetic track 3, so that the magnetic track 3 moves relative to the coil 4, the movable panel 2 is driven to move, meanwhile, the reading head 9 and the grating ruler 7 form a position feedback system, the actual position of the motion is fed back in real time, the actual position is analyzed, compared and compensated with a position instruction position sent by an upper computer, a closed loop is formed until the instruction position is reached, and horizontal reciprocating motion is realized by adjusting the phase of the current electrified by the coil 4 of the linear motor.

The horizontal reciprocating motion of the movable panel 2 drives the objective lens mounting seat 15 to horizontally reciprocate, so that the microscope lenses 16 with different multiples can detect the defects on the surface of the flat panel display screen.

In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed" and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of the utility model may be made without departing from the spirit or scope of the utility model.

Claims

1. The utility model provides a side hangs small-size module of compact high accuracy which characterized in that: the device comprises a moving panel (1) and a fixed bottom plate (12) which move relatively, a linear motor is arranged between the moving panel (1) and the fixed bottom plate (12), and at least one group of guide rails (2) is arranged between the moving panel (1) and the fixed bottom plate (12);

the linear motor comprises a coil (4) and at least one section of magnetic track (3) moving relative to the coil (4), and a straight line where a long edge of the magnetic track (3) is located is parallel to a straight line where a long edge of the guide rail (2) is located; the magnetic track (3) is fixed on one side of the movable panel (1), and the coil (4) is fixed on one side of the fixed bottom plate (12);

the magnetic track (3) comprises a steel plate and permanent magnets, the steel plate is used for fixing the permanent magnets, and the permanent magnets comprise N-pole magnets and S-pole magnets which are arranged in an alternating sequence; the thrust generated when the coil (4) is energized reacts on the magnetic track (3) to move the magnetic track (3) relative to the coil (4).

2. The side hung compact high precision miniature module set according to claim 1, characterized in that: the length of the movable panel (1) is the same as that of the guide rail (2).

3. The side hung compact high precision miniature module set according to claim 1, characterized in that: the length of the guide rail (2) is the same as that of the magnetic track (3).

4. The side hung compact high precision miniature module set according to claim 1, characterized in that: guide rail (2) with install grating chi (7) between the linear electric motor, grating chi (7) are followed the length direction of magnetic track (3) sets up, and, reading head (9) are installed to the below of grating chi (7).

5. The side hung compact high precision miniature module set according to claim 4, characterized in that: and photoelectric switches (8) used for limiting the limit positions are arranged on two sides of the grating ruler (7).

6. The side hung compact high precision miniature module set according to claim 4, characterized in that: the reading head (9) is fixed on a reading head support (10), and the reading head support (10) is fixed on one side of the fixed bottom plate (12).

7. The side hung compact high precision miniature module set according to claim 1, characterized in that: a hard limiting collision block (5) is arranged between the guide rail (2) and the linear motor.

8. The side hung compact high precision miniature module set according to claim 1, characterized in that: and a wire pressing block (6) is arranged on the fixed side of the coil (4).

9. An optical inspection assembly, comprising: the side-hung compact high-precision miniature module set comprises the side-hung compact high-precision miniature module set defined in any one of claims 1-8.

10. The optical inspection assembly of claim 9, wherein: the side-hung compact high-precision small module is characterized by further comprising a module mounting seat (14) and an objective lens mounting seat (15), wherein one side of the side-hung compact high-precision small module is fixed on the module mounting seat (14); the other side of the side-hung compact high-precision small module is connected with the objective lens mounting seat (15), and at least one micro lens (16) is mounted on the objective lens mounting seat (15).