CN216707968U - Stick frock suitable for semiconductor crystal bar crystal orientation is adjusted - Google Patents
Stick frock suitable for semiconductor crystal bar crystal orientation is adjusted Download PDFInfo
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- CN216707968U CN216707968U CN202123205702.8U CN202123205702U CN216707968U CN 216707968 U CN216707968 U CN 216707968U CN 202123205702 U CN202123205702 U CN 202123205702U CN 216707968 U CN216707968 U CN 216707968U
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- crystal
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- rod
- positioning
- crystal orientation
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- 239000013078 crystal Substances 0.000 title claims abstract description 90
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 239000011347 resin Substances 0.000 claims abstract description 7
- 229920005989 resin Polymers 0.000 claims abstract description 7
- 239000003292 glue Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 230000001737 promoting effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000036544 posture Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a stick sticking tool suitable for adjusting the crystal orientation of a semiconductor crystal stick, which comprises a base (1) for placing a crystal support (2), a resin plate (3) and a crystal stick (5) which are bonded into a whole, an end face limiting plate (4) which is arranged on the base and is used for simultaneously abutting against the end face of the crystal support and the end face of the crystal stick, a side bracket (9) arranged on the base, and a distance measuring device used for measuring the distance between the side bracket and a positioning baffle, wherein a plurality of positioning bolts (7) are arranged on the side bracket and are connected with the positioning baffle (6) used for pushing the crystal stick to move through a ball hinge. Stick excellent frock, not only simple structure, convenient operation improves stick efficiency greatly when accomplishing crystal bar crystal orientation and adjusting moreover.
Description
Technical Field
The utility model belongs to the technical field of semiconductor crystal bar bonding production, and particularly relates to a bar bonding tool suitable for adjusting the crystal orientation of a semiconductor crystal bar.
Background
The semiconductor crystal bar bonding process can be divided into two steps, namely bonding of the crystal bar and adjustment and control of crystal orientation. With the increasing requirements of the back-end chip on the wafer, the control of the crystal orientation of the crystal bar becomes an important link. At present, when a semiconductor crystal bar is manually bonded, a bar bonding tool is generally adopted to realize the adjustment of the crystal orientation of the semiconductor crystal bar. The crystal orientation adjusting device for the silicon rod disclosed by the utility model with the application number of 201520354404.0 is complex in use, and causes low rod sticking efficiency.
Disclosure of Invention
Aiming at the defects of the conventional sticking tool, the utility model aims to provide the sticking tool suitable for the manual bonding working condition of the semiconductor crystal bar, so that the crystal orientation of the crystal bar is adjusted and the sticking efficiency is improved.
The purpose of the utility model is realized by adopting the following technical scheme. According to the utility model, the stick bonding tool suitable for adjusting the crystal orientation of a semiconductor crystal bar comprises a base 1 used for placing a crystal support 2, a resin plate 3 and a crystal bar 5 which are bonded into a whole, an end face limiting plate 4 arranged on the base and used for simultaneously abutting against the end face of the crystal support and the end face of the crystal bar, a side support 9 arranged on the base, and a distance measuring device used for measuring the distance between the side support and a positioning baffle, wherein a plurality of positioning bolts 7 are arranged on the side support, and the positioning bolts are connected with the positioning baffle 6 used for pushing the crystal bar to move through a ball hinge.
Further, the base 1 is made of metal, and the upper surface of the base is subjected to anti-skid treatment.
Further, the base 1 and the side bracket 9 are of an integrated structure.
Furthermore, the included angle between the side bracket 9 and the base 1 is 80-90 degrees.
Furthermore, two positioning bolts 7 are arranged on the front side of the side bracket and are connected with the front side of the positioning baffle through a ball hinge; the rear side of the side bracket is symmetrically provided with another two positioning bolts 7 which are connected with the rear side of the positioning baffle through ball hinges.
Further, range unit is scale 8, sets up the bar hole that supplies the scale to pass back and 6 contacts of locating baffle on the collateral branch frame 9.
Furthermore, the distance measuring device is a dial indicator which is fixedly arranged on the side bracket, and a contact of the dial indicator is kept in contact with the positioning baffle 6.
By means of the technical scheme, the rod sticking tool provided by the utility model is simple in structure and convenient to operate, and the rod sticking efficiency is greatly improved while crystal orientation adjustment of a crystal rod is completed.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of a rod sticking tool suitable for adjusting a crystal orientation of a semiconductor crystal rod according to the present invention.
Detailed Description
To further illustrate the technical means and effects of the present invention for achieving the predetermined purpose, the following detailed description will be given to the structure, features and effects of a bar bonding tool for adjusting the crystal orientation of a semiconductor crystal bar according to the present invention with reference to the accompanying drawings and preferred embodiments.
Referring to fig. 1, in an embodiment of a rod sticking tool for adjusting a crystal orientation of a semiconductor crystal rod according to the present invention, a side of a base where an end-face limiting plate is disposed is defined as "front", and a side of the base away from the end-face limiting plate is defined as "back".
The embodiment comprises a base 1, wherein the base is used for placing a crystal support 2, a resin plate 3 and a crystal bar 5 which are bonded into a whole; the leading flank of base sets up terminal surface limiting plate 4, and the terminal surface limiting plate is used for the preceding terminal surface of the brilliant support of butt placing on the base and crystal bar simultaneously, is convenient for the maintenance of terminal surface limiting plate, can install the terminal surface limiting plate on the leading flank of base with detachable connected mode (for example the cooperation of screw and screw). Of course, in other embodiments of the present invention, the end surface limiting plate may be disposed on the front side of the base, for example, a groove is disposed on the front side of the base, a protrusion is disposed at the bottom of the end surface limiting plate, and the end surface limiting plate may be mounted on the front side of the base after the protrusion is inserted into the groove.
The embodiment also comprises a side support 9, the side support and the base are of an integrated structure, and an included angle between the base and the side support is optimally 80-90 degrees, so that a positioning baffle arranged on the side support is favorable for pushing a crystal bar placed on the base. Of course, in other embodiments of the present invention, the side stand and the base may be a split structure.
In the embodiment, two positioning bolts 7 are arranged on the front side of the side bracket, and the end parts of the two positioning bolts close to the end surface limiting plate are connected with the front side of the positioning baffle 6 through ball hinges; the other two positioning bolts 7 are symmetrically arranged on the rear side of the side support, the end parts of the two positioning bolts close to the end face limiting plate are connected with the rear side of the positioning baffle 6 through a ball hinge, and the included angles between the positioning baffle and the side support are changed by rotating the positioning bolts on the front side and the rear side, so that different postures are obtained, and the required crystal orientation value of the crystal bar is met. Of course, in other embodiments of the present invention, the position and number of the positioning bolts can be adjusted on the front side plate as required.
The utility model also comprises a distance measuring device for measuring the distance between the positioning baffle and the side bracket. Distance measuring device is scale 8 in this embodiment, set up on the collateral branch frame this moment and supply the scale to pass the bar hole of back and positioning baffle contact in order to measure the distance between the two, positioning baffle 6 promotes the crystal bar and removes the back, passes the bar hole through the scale, measures the distance between positioning baffle's front side and the collateral branch frame respectively, the distance between rear side and the collateral branch frame, and then obtains the adjustment distance deviation of front and back side, then can judge whether it satisfies the crystal orientation control requirement. In other embodiments of the present invention, the distance measuring device may be a dial indicator, and the dial indicator is fixed on the side bracket and the contact thereof is kept in contact with the positioning baffle.
The operation flow of the stick sticking tool in the embodiment is as follows: placing a crystal support 2 on a base 1, taking a resin plate 3 and a crystal bar 5 which are bonded into a whole, uniformly coating glue on an interface of the resin plate for contacting the crystal support, and placing the resin plate and the crystal bar on the crystal support 2; moving the crystal support and the crystal rod to enable the front end faces of the crystal support and the crystal rod to be in contact alignment with the end face limiting plate 4, adjusting the crystal rod to enable the crystal rod to be located in the middle of the crystal support, and then moving the crystal support to drive the crystal rod to approach the positioning baffle 6 until the crystal rod is in contact with the positioning baffle; then, rotating the positioning bolt 7 according to the measured crystal orientation value of the crystal bar, adjusting the posture of the positioning baffle 6, further pushing the crystal bar to move relative to the crystal support, then measuring the adjustment distance deviation of the front side and the rear side by using a distance measuring device, and judging whether the crystal orientation control requirement is met; and after the glue is solidified, taking down the whole crystal bar for the subsequent cutting process.
Furthermore, the upper surface of the base is subjected to anti-slip treatment, so that the friction force between the crystal support and the base is increased, and the phenomenon that the crystal support moves in the process that the positioning baffle plate pushes the crystal bar to move is avoided.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art can make any simple modification, equivalent change and modification to the above embodiments according to the technical essence of the present invention without departing from the scope of the present invention, and still fall within the scope of the present invention.
Claims (7)
1. The utility model provides a glue excellent frock suitable for semiconductor crystal bar crystal orientation is adjusted, characterized by is including being used for placing brilliant support (2), base (1) of resin board (3) and crystal bar (5) as an organic whole bonds, set up on the base and be used for simultaneously the brilliant terminal surface limiting plate (4) that holds in the palm terminal surface and crystal bar terminal surface of butt, set up collateral branch frame (9) on the base, a range unit for measuring the distance between collateral branch frame and the locating baffle, set up a plurality of positioning bolt (7) on the collateral branch frame, positioning bolt passes through the ball hinge and is connected with locating baffle (6) that are used for promoting the crystal bar removal.
2. The rod sticking tool suitable for adjusting the crystal orientation of the semiconductor crystal rod as claimed in claim 1, wherein the base (1) is made of metal, and the upper surface of the base is subjected to anti-skid treatment.
3. The rod sticking tool suitable for adjusting the crystal orientation of the semiconductor crystal rod as claimed in claim 1, wherein the base (1) and the side bracket (9) are of an integrated structure.
4. A rod sticking tool suitable for adjusting the crystal orientation of a semiconductor crystal rod according to claim 1 or 3, wherein the included angle between the side bracket (9) and the base (1) is 80-90 °.
5. The rod sticking tool suitable for adjusting the crystal orientation of the semiconductor crystal rod as claimed in claim 1, wherein two positioning bolts (7) are arranged on the front side of the side bracket and connected with the front side of the positioning baffle through a ball hinge; the rear side of the side bracket is symmetrically provided with two other positioning bolts (7), and the two positioning bolts are connected with the rear side of the positioning baffle through ball hinges.
6. The apparatus as claimed in claim 1, wherein the distance measuring device is a scale (8), and the side bracket (9) is provided with a strip-shaped hole for the scale to pass through and then to contact with the positioning baffle (6).
7. The sticking tool suitable for adjusting the crystal orientation of the semiconductor crystal bar according to claim 1, wherein the distance measuring device is a dial indicator, the dial indicator is fixedly arranged on the side support, and a contact of the dial indicator is kept in contact with the positioning baffle (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123205702.8U CN216707968U (en) | 2021-12-20 | 2021-12-20 | Stick frock suitable for semiconductor crystal bar crystal orientation is adjusted |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123205702.8U CN216707968U (en) | 2021-12-20 | 2021-12-20 | Stick frock suitable for semiconductor crystal bar crystal orientation is adjusted |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216707968U true CN216707968U (en) | 2022-06-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123205702.8U Active CN216707968U (en) | 2021-12-20 | 2021-12-20 | Stick frock suitable for semiconductor crystal bar crystal orientation is adjusted |
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| CN (1) | CN216707968U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116118021A (en) * | 2023-01-17 | 2023-05-16 | 丹东新东方晶体仪器有限公司 | Automatic bonding equipment for crystal bars |
-
2021
- 2021-12-20 CN CN202123205702.8U patent/CN216707968U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116118021A (en) * | 2023-01-17 | 2023-05-16 | 丹东新东方晶体仪器有限公司 | Automatic bonding equipment for crystal bars |
| CN116118021B (en) * | 2023-01-17 | 2023-10-17 | 丹东新东方晶体仪器有限公司 | Automatic bonding equipment for crystal bars |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Stick Tool Suitable for Adjusting the Crystal Direction of Semiconductor Crystals Effective date of registration: 20230607 Granted publication date: 20220610 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: LuoYang HongTai Semiconductor Co.,Ltd. Registration number: Y2023980043127 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20220610 Pledgee: Bank of China Limited by Share Ltd. Luoyang branch Pledgor: LuoYang HongTai Semiconductor Co.,Ltd. Registration number: Y2023980043127 |