CN216703355U - System of getting rid of nitrous oxide in nitrogen trifluoride crude - Google Patents
System of getting rid of nitrous oxide in nitrogen trifluoride crude Download PDFInfo
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- CN216703355U CN216703355U CN202123448340.5U CN202123448340U CN216703355U CN 216703355 U CN216703355 U CN 216703355U CN 202123448340 U CN202123448340 U CN 202123448340U CN 216703355 U CN216703355 U CN 216703355U
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Abstract
The utility model belongs to the technical field of tail gas treatment, and provides a system for removing nitrous oxide in a nitrogen trifluoride crude product. According to the removal system provided by the utility model, a gasifier is adopted to gasify a crude product of nitrogen trifluoride from a nitrogen trifluoride rectification system to obtain a mixed gas of nitrogen trifluoride and nitrous oxide; separating nitrous oxide and nitrogen trifluoride in the mixed gas by water washing; and releasing nitrous oxide from the aqueous solution through regeneration equipment, and cracking through a cracking furnace to obtain oxygen and nitrogen, so that the nitrous oxide is completely removed. The removal system provided by the utility model realizes the complete removal of nitrous oxide, has no special requirements on single equipment, can be directly connected on site, and has the advantages of simple operation and low cost.
Description
Technical Field
The utility model relates to the technical field of tail gas treatment, in particular to a system for removing nitrous oxide in a nitrogen trifluoride crude product.
Background
Nitrogen trifluoride (NF)3) Is a colorless and tasteless gas, is mainly used in the microelectronic industry, and is an excellent plasma etching agent and cleaning agent. At present, nitrogen trifluoride is prepared by an electrolytic method and a chemical synthesis method which are commonly adopted in industryThe nitrogen trifluoride crude gas contains a small amount of nitrous oxide (N)2O) impurities.
The crude gas containing nitrous oxide in the nitrogen trifluoride production process is subjected to a series of purification operations, such as: oxidizing, washing with water, alkali washing, adsorbing, rectifying and the like to remove a large amount of components such as acidic impurities, nitrogen, oxygen, hydrogen fluoride and the like, and finally obtain high-purity nitrogen trifluoride gas with the purity of more than 99.999 percent. However, nitrous oxide (N)2O) does not disappear in the operation, but is enriched in a heavy component removing tower kettle of the rectifying tower group, and after long-term enrichment, the volume content of nitrous oxide can reach 60-80%.
The method for removing nitrous oxide in a rectification and heavy tower by removing nitrogen trifluoride in the prior art comprises the following steps: the crude nitrogen trifluoride gas rich in nitrous oxide is intermittently discharged into an alkaline water washing system, so that nitrous oxide is dissolved in water or alkaline liquor and removed. The method utilizes the characteristic that nitrous oxide is dissolved in water, but the water solution or the alkali solution rich in nitrous oxide can release dissolved nitrous oxide gas under the heating condition, and further causes pollution to the environment.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention aims to provide a system for removing nitrous oxide from a crude nitrogen trifluoride product. The removal system provided by the utility model can thoroughly remove nitrous oxide in the nitrogen trifluoride crude product, and reduce the pollution of nitrous oxide to the environment.
In order to realize the purpose of the utility model, the utility model provides the following technical scheme:
the utility model provides a system for removing nitrous oxide in a crude product of nitrogen trifluoride, which comprises: a gasifier 1;
a first water scrubber 2 communicating with a gas phase outlet of the gasifier 1;
a second water scrubber 3 communicated with the gas phase outlet of the first water scrubber 2;
a third water scrubber 4 communicated with the gas phase outlet of the second water scrubber 3;
a first liquid storage container 21 communicated with the liquid phase outlet of the first water washing tower 2;
a regeneration device 5 communicating with the liquid phase outlet of the first reservoir 21;
a cracking furnace 6 communicated with a gas phase outlet of the regeneration device 5;
a second liquid storage container 31 communicated with the liquid phase outlet of the second water washing column 3;
the liquid phase outlet of the second liquid storage container 31 is communicated with the first liquid storage container 21;
a third liquid storage container 41 communicated with the liquid phase outlet of the third water washing tower 4;
the liquid phase outlet of the third reservoir 41 communicates with the second reservoir 31.
Preferably, a first heat exchanger 7 communicated with the cracking furnace 6 is further included;
the bottom in the regeneration equipment 5 is provided with a second heat exchanger 51;
the liquid phase outlet of the first heat exchanger 7 is communicated with the liquid phase inlet of the second heat exchanger 51;
the liquid phase outlet of the second heat exchanger 51 communicates with the liquid phase inlet of the first heat exchanger 7.
Preferably, a fourth liquid storage container 8 and a heat pump 9 are sequentially arranged on a pipeline through which the liquid phase outlet of the first heat exchanger 7 is communicated with the liquid phase inlet of the second heat exchanger 51 along the water flow direction.
Preferably, the method further comprises the following steps:
a third heat exchanger 10 communicating with the liquid phase outlet of said regeneration device 5;
the third heat exchanger 10 is communicated with an upper inlet of the third liquid storage tank 41.
Preferably, a vacuum pump 11 is arranged on a pipeline for communicating the regeneration device 5 and the cracking furnace 6.
The utility model provides a system for removing nitrous oxide in a crude product of nitrogen trifluoride, which comprises: a gasifier 1; a first water scrubber 2 communicating with a gas phase outlet of the gasifier 1; a second water scrubber 3 communicated with the gas phase outlet of the first water scrubber 2; a third water scrubber 4 communicated with the gas phase outlet of the second water scrubber 3; a first liquid storage container 21 communicated with the liquid phase outlet of the first water washing tower 2; a regeneration device 5 communicating with the liquid phase outlet of the first reservoir 21; a cracking furnace 6 communicated with a gas phase outlet of the regeneration device 5; a second liquid storage container 31 communicated with the liquid phase outlet of the second water washing column 3; the liquid phase outlet of the second liquid storage container 31 is communicated with the first liquid storage container 21; a third liquid storage container 41 communicated with the liquid phase outlet of the third water washing tower 4; the liquid phase outlet of the third reservoir 41 communicates with the second reservoir 31. According to the removal system provided by the utility model, a gasifier is adopted to gasify the crude product of nitrogen trifluoride to obtain mixed gas of nitrogen trifluoride and nitrous oxide; nitrous oxide and nitrogen trifluoride in the mixed gas are separated through water washing; and releasing nitrous oxide from the aqueous solution through regeneration equipment, and cracking through a cracking furnace to obtain oxygen and nitrogen, so that the nitrous oxide is completely removed. The utility model realizes the complete removal of nitrous oxide, has no special requirement on single equipment, can be directly connected on site, and has simple operation and low cost.
Further, the utility model also defines: the device also comprises a first heat exchanger 7 communicated with the cracking furnace 6; the bottom in the regeneration equipment 5 is provided with a second heat exchanger 51; the liquid phase outlet of the first heat exchanger 7 is communicated with the liquid phase inlet of the second heat exchanger 51; the liquid phase outlet of the second heat exchanger 51 is communicated with the liquid phase inlet of the first heat exchanger 7. The removal system can fully utilize the heat generated by the cracked gas for regeneration equipment, and realizes the reutilization of the heat.
Further, the utility model also defines: a third heat exchanger 10 communicating with the liquid phase outlet of said regeneration device 5; the third heat exchanger 10 is communicated with an upper inlet of the third liquid storage container 41; the liquid is recycled, and the water quantity is saved.
Drawings
Fig. 1 is a schematic view of a system for removing nitrous oxide from a crude nitrogen trifluoride product provided by the present invention, where 1 is a vaporizer, 2 is a first water scrubber, 21 is a first liquid storage container, 3 is a second water scrubber, 31 is a second liquid storage container, 4 is a third water scrubber, 41 is a third liquid storage container, 5 is a regeneration device, 51 is a second heat exchanger, 6 is a cracking furnace, 7 is a first heat exchanger, 8 is a fourth liquid storage container, 9 is a heat pump, 10 is a third heat exchanger, and 11 is a vacuum pump.
Detailed Description
The utility model also provides a system for removing nitrous oxide in a crude product of nitrogen trifluoride, which comprises: a gasifier 1;
a first water scrubber 2 communicating with a gas phase outlet of the gasifier 1;
a second water scrubber 3 communicated with the gas phase outlet of the first water scrubber 2;
a third water scrubber 4 communicated with the gas phase outlet of the second water scrubber 3;
a first liquid storage container 21 communicated with the liquid phase outlet of the first water washing tower 2;
a regeneration device 5 communicating with the liquid phase outlet of the first reservoir 21;
a cracking furnace 6 communicated with a gas phase outlet of the regeneration device 5;
a second liquid storage container 31 communicated with the liquid phase outlet of the second water washing column 3;
the liquid phase outlet of the second liquid storage container 31 is communicated with the first liquid storage container 21;
a third liquid storage container 41 communicated with the liquid phase outlet of the third water washing tower 4;
the liquid phase outlet of the third reservoir 41 communicates with the second reservoir 31.
Preferably, a first heat exchanger 7 communicated with the cracking furnace 6 is further included;
the bottom in the regeneration equipment 5 is provided with a second heat exchanger 51;
the liquid phase outlet of the first heat exchanger 7 communicates with the liquid phase inlet of the second heat exchanger 51.
Fig. 1 is a schematic diagram of a system for removing nitrous oxide from a crude nitrogen trifluoride product provided by the present invention, and the following describes the system for removing nitrous oxide provided by the present invention in detail with reference to fig. 1.
The system for removing nitrous oxide in the crude product of nitrogen trifluoride provided by the utility model comprises a gasifier 1. In the present invention, the gasifier preferably comprises a finned structure; the material of the fin-type structure preferably comprises aluminum alloy. In the present invention, the material of the inner tube of the vaporizer preferably includes stainless steel. In the present invention, the gasification medium of the gasifier is preferably normal temperature air.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model comprises a first water washing tower 2 communicated with a gas phase outlet of a gasifier 1. In the utility model, the material of the first water scrubber preferably comprises stainless steel or engineering plastics, and further preferably comprises engineering plastics; the engineering plastic preferably comprises polyvinyl chloride, ABS plastic, polypropylene or polybutylene, and further preferably comprises polyvinyl chloride, polypropylene or polybutylene. In the present invention, the first water washing column is preferably a spray column; the packing of the first water washing tower preferably comprises stainless steel, polypropylene or polybutylene, and further preferably comprises polypropylene; the packing is preferably in the form of a pall ring or a stepped ring.
The system for removing nitrous oxide in the crude nitrogen trifluoride provided by the utility model comprises a first liquid storage container 21 communicated with the liquid phase outlet of the first water washing tower 2. In the present invention, the liquid phase outlet of the first liquid storage container 21 is respectively communicated with the first water scrubber 2 and the regeneration device 5. In the present invention, the nitrous oxide solution in the first storage container 21 is preferably refluxed to the first water scrubber 2 for cyclic absorption of nitrous oxide before reaching saturation. In the present invention, the material of the first liquid storage container is preferably the same as that of the first water washing tower, and is not described herein again.
The system for removing nitrous oxide from the crude nitrogen trifluoride product comprises a second water washing tower 3 communicated with a gas phase outlet of the first water washing tower 2. In the present invention, the material or the type of the filler and the stacking manner of the second water scrubber are preferably the same as those of the first water scrubber, and will not be described herein again.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model comprises a second liquid storage container 31 communicated with the liquid phase outlet of the second water washing tower 3. In the present invention, the material of the second liquid storage container 31 is preferably the same as that of the first liquid storage container 21 in the above technical solution, and is not described herein again. In the present invention, the liquid phase outlet of the second liquid storage container 31 is respectively communicated with the second water scrubber 3 and the first liquid storage container 21, and the nitrous oxide solution in the second liquid storage container 31 is preferably refluxed to the second water scrubber 3 for cyclic absorption of nitrous oxide before being regenerated.
The system for removing nitrous oxide from the crude nitrogen trifluoride product comprises a third water washing tower 4 communicated with a gas phase outlet of the second water washing tower 3. In the present invention, the material or the type of the packing and the stacking manner of the third water scrubber are preferably the same as those of the first water scrubber, and are not described herein again.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model comprises a third liquid storage container 41 communicated with the liquid phase outlet of the third water washing tower 4. In the present invention, the material of the third liquid storage container 41 is preferably the same as that of the first liquid storage container 21 in the above technical solution, and is not described herein again. In the present invention, the liquid phase outlet of the third reservoir 41 is respectively communicated with the third water scrubber 4 and the second reservoir 31, and the nitrous oxide solution in the third reservoir 41 is preferably refluxed to the third water scrubber 3 for cyclic absorption of nitrous oxide before regeneration.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model comprises a regeneration device 5 communicated with the liquid phase outlet of the first liquid storage container 21. In the present invention, the material of the regeneration equipment preferably includes stainless steel or low carbon steel, and more preferably includes stainless steel. In the present invention, the regeneration apparatus is preferably a fully sealed structure. In the present invention, the inner bottom of the regeneration equipment is preferably provided with a second heat exchanger 51; the inner roof is preferably provided with an evacuation system.
The system for removing nitrous oxide in the crude nitrogen trifluoride product comprises a cracking furnace 6 communicated with a gas phase outlet of the regeneration device 5. In the present invention, the cracking furnace is preferably a vertical cracking furnace. In the present invention, the material of the cracking furnace preferably includes stainless steel, nickel or monel. In the utility model, the solid catalyst for cracking is filled in a catalyst filling frame in a furnace chamber of the cracking furnace. In the present invention, the pipeline connecting the regeneration device and the cracking furnace is preferably provided with a vacuum pump 11. In the utility model, the vacuum pump can provide power for a vacuum pumping system in the regeneration equipment. In the present invention, the degree of vacuum at the inlet of the vacuum pump is preferably-0.09 to-0.06 MPa.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model preferably further comprises a first heat exchanger 7 communicated with the cracking furnace 6. In the present invention, the liquid phase outlet of the first heat exchanger 7 communicates with the liquid phase inlet of the second heat exchanger 51; the liquid phase outlet of the second heat exchanger 51 is communicated with the liquid phase inlet of the first heat exchanger 7. In the present invention, a fourth liquid storage container 8 and a heat pump 9 are sequentially disposed along a water flow direction on a pipeline through which a liquid phase outlet of the first heat exchanger 7 is communicated with a liquid phase inlet of the second heat exchanger 51.
The system for removing nitrous oxide from crude nitrogen trifluoride provided by the utility model preferably further comprises: a third heat exchanger 10 communicating with the liquid phase outlet of said regeneration device 5; the third heat exchanger 10 is communicated with an upper inlet of the third liquid storage container 41. In the present invention, a centrifugal pump is preferably provided on a pipeline communicating the regeneration device 5 and the third heat exchanger 10.
In the present invention, the pipeline for communicating the devices is preferably provided with a valve and a pump.
The utility model also provides a use method of the removal system in the technical scheme, which comprises the following steps:
a nitrogen trifluoride crude product from a nitrogen trifluoride rectification system enters a gasifier 1 for gasification to obtain a mixed gas of nitrogen trifluoride and nitrous oxide;
introducing the mixed gas of nitrogen trifluoride and nitrous oxide into a first washing tower 2 for primary washing, introducing into a second washing tower 3 for secondary washing, and introducing into a third washing tower 4 for tertiary washing;
introducing nitrous oxide aqueous solutions in the first liquid storage container 21, the second liquid storage container 31 and the third liquid storage container 41 into a regeneration device 5 for regeneration to obtain nitrous oxide gas;
and introducing the nitrous oxide gas into a cracking furnace 6 for cracking to generate oxygen and nitrogen.
According to the utility model, a nitrogen trifluoride crude product from a nitrogen trifluoride rectification system enters a gasifier 1 for gasification, so as to obtain a mixed gas of nitrogen trifluoride and nitrous oxide.
In the utility model, the crude nitrogen trifluoride of the nitrogen trifluoride rectification system comes from a nitrogen trifluoride rectification de-heavy tower. In the utility model, when the volume concentration of nitrous oxide in the nitrogen trifluoride crude product of the nitrogen trifluoride rectification system is more than or equal to 50%.
In the utility model, the gasification mode is preferably air gasification, and the temperature of the air is preferably normal temperature; namely, the liquid nitrogen trifluoride crude product in the nitrogen trifluoride rectification system is gasified by taking normal temperature air as a medium and converted into a mixed gas of nitrogen trifluoride and nitrous oxide.
After the mixed gas of nitrogen trifluoride and nitrous oxide is obtained, the mixed gas of nitrogen trifluoride and nitrous oxide is introduced into a first water scrubber 2 for primary water scrubbing, then introduced into a second water scrubber 3 for secondary water scrubbing, and then introduced into a third water scrubber 4 for tertiary water scrubbing.
In the present invention, the washing liquids of the primary washing, the secondary washing and the tertiary washing independently comprise water or alkali liquor. In the present invention, the water preferably includes demineralized water. In the present invention, the alkaline substance in the lye preferably comprises one or more of sodium carbonate, sodium hydroxide and potassium hydroxide. In the utility model, the mass concentration of the alkali liquor is preferably 5-25%. In the utility model, the temperature of the washing liquid is preferably 0-50 ℃, more preferably 0-20 ℃, and even more preferably 0-10 ℃.
In the present invention, the nitrogen trifluoride gas is preferably returned to the crude nitrogen trifluoride process for recovery.
In the utility model, nitrous oxide can be dissolved in water, and nitrogen trifluoride is not dissolved in water, so after water washing is carried out on the mixed gas of nitrogen trifluoride and nitrous oxide, nitrogen trifluoride still exists in a gas phase form because of being insoluble in water, and the nitrogen trifluoride is discharged from the top of a water washing tower into a crude nitrogen trifluoride gas cabinet or a storage tank for recycling; and nitrous oxide is dissolved in water, so that separation of nitrous oxide and nitrogen trifluoride is realized.
The nitrous oxide aqueous solution in the first liquid storage container 21, the second liquid storage container 31 and the third liquid storage container 41 is introduced into the regeneration equipment 5 for regeneration, so as to obtain nitrous oxide gas.
In the utility model, the nitrous oxide aqueous solution is preferably saturated nitrous oxide aqueous solution, namely, after primary washing, secondary washing and tertiary washing, the obtained nitrous oxide aqueous solution is saturated with nitrous oxide and then is subjected to post-treatment, so that resources can be saved.
In the utility model, the regeneration temperature is preferably 80-150 ℃, and more preferably 85-95 ℃.
In the present invention, the regeneration enables nitrous oxide dissolved in water to be released in the form of gas.
After the nitrous oxide gas is obtained, the nitrous oxide gas is introduced into a cracking furnace 6 for cracking to generate oxygen and nitrogen. The utility model regenerates the nitrous oxide water solution to obtain nitrous oxide gas.
In the present invention, the cracking is preferably solid catalyst catalytic cracking; the active ingredients of the solid catalyst preferably include nickel, cobalt and zirconium. In the utility model, the cracking temperature is preferably 350-800 ℃, and more preferably 450-550 ℃.
In the utility model, the obtained oxygen and nitrogen can be directly discharged, thereby avoiding the pollution of nitrous oxide to air.
The following examples are provided to illustrate the system for removing nitrous oxide from crude nitrogen trifluoride according to the present invention, but they should not be construed as limiting the scope of the present invention.
Example 1
The removal system shown in fig. 1 is adopted to remove nitrous oxide in a nitrogen trifluoride crude product in a nitrogen trifluoride rectification and heavy gas removal tower, and specifically comprises the following steps:
the volume fraction of nitrous oxide in the nitrous oxide-rich liquid in the tower kettle of the nitrogen trifluoride rectification and purification process is 75 percent, the volume fraction of nitrogen trifluoride is 25 percent, and the temperature is-98 ℃.
Firstly, the gas is converted into normal temperature gas through a gasifier 1, and then enters a three-stage series water washing tower for washing. The temperature of the softened water in the water washing tower is controlled to be 5-10 ℃, and the solubility of the nitrous oxide is 0.8-1.2 (volume ratio mL/mL) at the temperature. And analyzing and detecting a gas phase outlet sample of the three-stage water washing tower 4, wherein the content of nitrogen trifluoride is 83 percent, and the content of nitrous oxide is 17 percent (volume ratio).
The total volume of the mixed solution of nitrogen trifluoride and nitrous oxide before water washing was assumed to be 100mL, wherein the nitrous oxide was 75mL and the nitrogen trifluoride was 25 mL.
In the washing process, the volume of nitrogen trifluoride is unchanged, most of nitrous oxide is dissolved in water, the total volume is reduced to 30L, 17% (volume ratio mL/mL) of nitrous oxide is 5mL, and the removal rate of nitrous oxide reaches 93.3%.
The content of nitrous oxide in the washing liquid (softened water) of the first water washing tower 2 reaches 0.86 (volume ratio mL/mL), and the washing liquid is transferred to the regeneration equipment 5. The temperature of the regeneration equipment 5 is raised to 90 ℃, a large amount of nitrous oxide is resolved out, the vacuum pump 11 is started for vacuumizing, and the gas at the outlet is discharged into the cracking furnace 6 for high-temperature cracking. The inside of the cracking furnace is filled with a solid catalyst containing metals or compounds such as nickel-cobalt-zirconium, and the cracking temperature is controlled at 480 ℃. Analyzing the top vent gas of the cracking furnace, wherein the content of nitrous oxide is 20ppm (volume ratio); the content of nitrous oxide in the recovered solution inside the regeneration equipment 5 was analyzed to be 0.32 (volume ratio mL/mL). The recovered liquid is cooled by the third heat exchanger 10 and then transferred to the third liquid storage container 41 by the centrifugal pump for reuse.
Various analysis data of the specific embodiment show that by the process disclosed by the utility model, nitrous oxide in nitrogen trifluoride gas is effectively removed, and meanwhile, nitrogen trifluoride in exhaust gas is recovered, so that material loss and environmental pollution are reduced, and the production cost is reduced.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A system for removing nitrous oxide in crude nitrogen trifluoride is characterized by comprising: a gasifier (1);
a first water scrubber (2) in communication with the gas phase outlet of the gasifier (1);
the second water washing tower (3) is communicated with the gas phase outlet of the first water washing tower (2);
a third water scrubber (4) communicated with the gas phase outlet of the second water scrubber (3);
a first liquid storage container (21) communicated with the liquid phase outlet of the first water washing tower (2);
a regeneration device (5) in communication with the liquid phase outlet of the first reservoir (21);
a cracking furnace (6) communicated with the gas phase outlet of the regeneration device (5);
a second liquid storage container (31) communicated with the liquid phase outlet of the second water washing tower (3);
the liquid phase outlet of the second liquid storage container (31) is communicated with the first liquid storage container (21);
a third liquid storage container (41) communicated with the liquid phase outlet of the third water washing tower (4);
the liquid phase outlet of the third liquid storage container (41) is communicated with the second liquid storage container (31).
2. The removal system according to claim 1, further comprising a first heat exchanger (7) in communication with the cracking furnace (6);
a second heat exchanger (51) is arranged at the bottom in the regeneration equipment (5);
the liquid phase outlet of the first heat exchanger (7) is communicated with the liquid phase inlet of the second heat exchanger (51);
the liquid phase outlet of the second heat exchanger (51) is communicated with the liquid phase inlet of the first heat exchanger (7).
3. A removing system according to claim 2, characterized in that a fourth liquid storage container (8) and a heat pump (9) are arranged in sequence along the water flow direction on a pipeline communicated with the liquid phase outlet of the first heat exchanger (7) and the liquid phase inlet of the second heat exchanger (51).
4. The removal system of claim 1, further comprising:
a third heat exchanger (10) in communication with a liquid phase outlet of the regeneration device (5);
the third heat exchanger (10) is communicated with an upper inlet of the third liquid storage container (41).
5. The removal system according to claim 1, wherein a vacuum pump (11) is provided in a line connecting the regeneration apparatus (5) and the cracking furnace (6).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202123448340.5U CN216703355U (en) | 2021-12-31 | 2021-12-31 | System of getting rid of nitrous oxide in nitrogen trifluoride crude |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202123448340.5U CN216703355U (en) | 2021-12-31 | 2021-12-31 | System of getting rid of nitrous oxide in nitrogen trifluoride crude |
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