CN216681678U - Polishing device - Google Patents
Polishing device Download PDFInfo
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- CN216681678U CN216681678U CN202123325977.5U CN202123325977U CN216681678U CN 216681678 U CN216681678 U CN 216681678U CN 202123325977 U CN202123325977 U CN 202123325977U CN 216681678 U CN216681678 U CN 216681678U
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Abstract
The utility model relates to the field of polishing equipment, and discloses a polishing device which comprises a polishing disk and a water inlet three-way pipe, wherein a water path is arranged in the polishing disk, the water path is provided with a water inlet and a water outlet, one end of the water inlet three-way pipe is connected with the water inlet, the other two ends of the water inlet three-way pipe are used for respectively introducing hot water and cold water into the water inlet three-way pipe, and a hot water inlet valve for controlling the flow rate of the hot water and a cold water inlet valve for controlling the flow rate of the cold water are correspondingly arranged, so that the hot water and the cold water are mixed in the water inlet three-way pipe and then enter the water path through the water inlet. Through above-mentioned technical scheme, hot water and cold water get into the water route in the tee bend intraductal mixture of intaking in, adjust hot water flow and cold water flow respectively through advancing hot water valve and advancing the cold water valve to adjust the temperature of liquid after mixing, and then realize the control to polishing dish temperature, avoid polishing dish to produce expend with heat and contract with cold and lead to face type value unstable, thereby promote the processing yields of polishing dish.
Description
Technical Field
The utility model relates to the field of polishing equipment, in particular to a polishing device.
Background
Sapphire is a main substrate material for manufacturing a blue LED, and is manufactured by high-purity alumina through processes of crystal pulling, slicing, grinding, chamfering, annealing, sorting, surface mounting, copper polishing, soft polishing and cleaning, wherein the copper polishing is used for removing defects generated on a sapphire wafer by an earlier process. The existing copper polishing is carried out by adopting a copper polishing machine, when a polishing disc of the copper polishing machine polishes a wafer, the temperature of the polishing disc is increased due to friction, so that a water cooling machine is adopted to be connected with the polishing disc in the prior art, and after the wafer is polished by the polishing disc, the water cooling machine is immediately used for cooling the polishing disc so as to polish the next wafer. But in the process of friction heating and cold water cooling, the polishing disc can cause unstable surface shape value due to expansion with heat and contraction with cold, so that the surface flatness of the wafer after copper polishing does not reach the standard, the total thickness deviation is large, and the yield of wafer production is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem that the polishing disc surface profile value is unstable due to expansion and contraction caused by cooling of a polishing disc by a water cooler in a copper polishing machine in the prior art.
In order to achieve the purpose, the utility model provides a polishing device which comprises a polishing disc and a water inlet three-way pipe, wherein a water path is arranged in the polishing disc, the water path is provided with a water inlet and a water outlet, one end of the water inlet three-way pipe is connected with the water inlet, the other two ends of the water inlet three-way pipe are used for respectively introducing hot water and cold water into the water inlet three-way pipe, and a hot water inlet valve for controlling the flow of the hot water and a cold water inlet valve for controlling the flow of the cold water are correspondingly arranged, so that the hot water and the cold water are mixed in the water inlet three-way pipe and then enter the water path through the water inlet.
Preferably, the polishing device further comprises a temperature measuring device and a controller, the temperature measuring device is used for obtaining the temperature of the polishing disc and sending a temperature signal, and the controller is used for receiving the temperature signal and controlling the opening and closing of the hot water inlet valve and/or the cold water inlet valve according to the temperature signal.
Preferably, the temperature measuring device is an infrared temperature detector, and a measuring line of the infrared temperature detector is suitable for irradiating on the polishing surface of the polishing disc.
Preferably, the water path comprises a plurality of branches, the plurality of branches are radially arranged from the center of the polishing disk to the outside in a radial direction, and the plurality of branches are all communicated with the water inlet and the water outlet.
Preferably, each branch is of a U-shaped structure, one end of the branch connected with the water inlet is close to the polishing surface of the polishing disk, and one end of the branch connected with the water outlet is far away from the polishing surface of the polishing disk.
Preferably, the waterway further comprises a diversion channel, the diversion channel is arranged in the center of the polishing disk along the axial extension of the polishing disk and is provided with an inner layer channel and an outer layer channel, the inner layer channel is provided with the water inlet, and the outer layer channel is provided with the water outlet.
Preferably, the polishing apparatus further comprises: the water cooler is connected with one end, used for introducing cold water, of the water inlet three-way pipe, and the water heater is connected with one end, used for introducing hot water, of the water inlet three-way pipe.
Preferably, the polishing device further comprises a water outlet three-way pipe, one end of the water outlet three-way pipe is connected with the water outlet, the other two ends of the water outlet three-way pipe are respectively connected with the water cooler and the water heater, and a hot water outlet valve and a cold water outlet valve are correspondingly arranged;
the controller is used for opening one of the hot water outlet valve and the cold water outlet valve according to the temperature signal.
Preferably, the water outlet three-way pipe and the water inlet three-way pipe are detachably connected with the polishing disc.
Preferably, one end of the water inlet three-way pipe connected with the water inlet is provided with a pressure regulating valve.
Through above-mentioned technical scheme, set up the water route in polishing dish to set up into the three-way pipe of intaking and be used for mixing hot water and cold water, then in liquid after will mixing lets in the water route, adjust hot water flow and cold water flow respectively through advancing the hot water valve and advancing the cold water valve, thereby adjust the temperature of liquid after mixing, and then realize the control to polishing dish temperature, avoid polishing dish to produce expend with heat and contract with cold and lead to face type value unstable, thereby promote the processing yields of polishing dish.
Drawings
FIG. 1 is a schematic structural view of one embodiment of a polishing apparatus of the present invention;
figure 2 is an enlarged schematic view of the polishing pad of figure 1.
Description of the reference numerals
1. A polishing disk; 2. a waterway; 3. a water inlet three-way pipe; 4. a hot water inlet valve; 5. a cold water inlet valve; 6. a branch circuit; 7. a flow dividing channel; 8. a water outlet three-way pipe; 9. a hot water outlet valve; 10. a cold water outlet valve; 11. a pressure regulating valve.
Detailed Description
The following detailed description of embodiments of the utility model refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
The utility model provides a polishing device which comprises a polishing disc 1 and a water inlet three-way pipe 3, wherein a water channel 2 is arranged in the polishing disc 1, the water channel 2 is provided with a water inlet and a water outlet, one end of the water inlet three-way pipe 3 is connected with the water inlet, the other two ends of the water inlet three-way pipe 3 are used for respectively introducing hot water and cold water into the water inlet three-way pipe 3, and a hot water inlet valve 4 for controlling the flow of the hot water and a cold water inlet valve 5 for controlling the flow of the cold water are correspondingly arranged, so that the hot water and the cold water are mixed in the water inlet three-way pipe 3 and then enter the water channel 2 through the water inlet.
Through above-mentioned technical scheme, set up water route 2 in polishing dish 1 to set up into three-way pipe 3 of intaking and be used for mixing hot water and cold water, then in liquid after will mixing lets in water route 2, adjust hot water flow and cold water flow respectively through advancing hot water valve 4 and advancing cold water valve 5, thereby adjust the temperature of liquid after mixing, and then realize the control to polishing dish 1 temperature, avoid polishing dish 1 to produce expend with heat and contract with cold and lead to face type value unstable, thereby promote the processing yields of polishing dish 1.
In order to timely obtain the temperature of the polishing disk 1 and adjust the water temperature in the water path 2 according to the real-time temperature and avoid the temperature difference between the water temperature in the water path 2 and the temperature of the polishing disk 1, thereby causing thermal expansion and cold contraction of the polishing disk 1, the polishing device further comprises a temperature measuring device and a controller, wherein the temperature measuring device is used for obtaining the temperature of the polishing disk 1 and sending a temperature signal, the controller is used for receiving the temperature signal and controlling the opening and closing of the hot water inlet valve 4 and/or the cold water inlet valve 5 according to the temperature signal, namely the controller can simultaneously adjust the opening and closing and the opening degree of the hot water inlet valve 4 and the cold water inlet valve 5 so as to adjust the flow of hot water and cold water; the hot water inlet valve 4 can be opened all the time, and the cold water inlet valve 5 is controlled to be opened and closed and opened only by the controller so as to be mixed, so that the temperature is adjusted; the cold and hot water inlet valve 5 can be opened all the time, and the opening and closing and the opening degree of the hot and hot water inlet valve 4 are controlled by the controller to perform mixing, so that the temperature is adjusted, and therefore, the hot and cold water inlet valves 4 and 5 can be adaptively set as an opening and closing valve or an adjusting valve according to different use modes. Of course, in other embodiments, the controller may not be provided, and the temperature measuring device is configured to obtain the temperature of the polishing disk 1 and display the temperature, and a user adjusts the opening and closing of the hot water inlet valve 4 and/or the cold water inlet valve 5 according to the displayed temperature.
The specific structure of the temperature measuring device is not limited, preferably, the temperature measuring device is an infrared temperature detector, and the measuring line of the infrared temperature detector is suitable for irradiating the polishing surface of the polishing disk 1. Of course, in other embodiments, the temperature measuring device may also be a temperature sensor disposed in the polishing disk 1 for acquiring the temperature of the polishing surface.
The specific structure of the waterway 2 is not limited in the present invention, and preferably, as in the embodiment shown in fig. 2, the waterway 2 comprises a plurality of branches 6, the plurality of branches 6 are radially arranged outwards along the radial direction from the center of the polishing disk 1, and a plurality of the branch circuits 6 are communicated with the water inlet and the water outlet, so that the radial directions of the polishing surface of the polishing disk 1 are subjected to the same temperature regulation, since the liquid in the water path 2 gradually changes in temperature as the moving path extends and the time period for temperature replacement with the polishing pad 1 increases, and the effect of temperature replacement itself is reduced, therefore compare in the shape that sets up along polishing dish 1's circumference, adopt radially to arrange and can reduce the influence that this kind of temperature replacement effect reduces gradually and brings, avoid polishing dish 1 different positions to form great difference in temperature to influence temperature regulation's effect. Of course, in other embodiments, the water path 2 may be an annular channel disposed along the circumference of the polishing disk 1, or a planar spiral channel parallel to the polishing surface.
The specific structure of the branch 6 is not limited in the present invention, preferably, as shown in fig. 2, in the embodiment, each branch 6 is a U-shaped structure, one end of the branch 6 connected to the water inlet is disposed close to the polishing surface of the polishing disk 1, and one end of the branch 6 connected to the water outlet is disposed far from the polishing surface of the polishing disk 1, because the liquid in the water path 2 has the phenomenon that the temperature displacement effect gradually decreases, one end of the branch 6 connected to the water inlet is disposed close to the polishing surface of the polishing disk 1, and after the liquid with a good displacement effect enters the branch 6, the temperature displacement is performed with the polishing surface at the first time, so as to achieve the temperature adjustment, and the liquid with the displaced temperature is discharged from one end far from the polishing surface of the branch 6, so as to achieve the optimal adjustment effect. Of course, in other embodiments, the branches 6 may also be reciprocating channels arranged side by side.
In order to enable the plurality of radially arranged branches 6 to be capable of communicating with the water inlet and the water outlet at the same time, preferably, in the embodiment shown in fig. 2, the water path 2 further includes a diversion channel 7, the diversion channel 7 is arranged in the center of the polishing disk 1 along the axial extension of the polishing disk 1 and has an inner layer channel and an outer layer channel, wherein the inner layer channel is provided with the water inlet, and the outer layer channel is provided with the water outlet. Of course, in other embodiments, when the water path 2 is provided along the circumferential direction of the polishing disk 1, the flow dividing channel 7 may not be provided.
In order to introduce hot water and cold water into the water inlet three-way pipe 3, the polishing device further comprises a water cooler and a water heater, wherein the water cooler is connected with one end of the water inlet three-way pipe 3, which is used for introducing cold water, and the water heater is connected with one end of the water inlet three-way pipe 3, which is used for introducing hot water.
In order to realize that the liquid in the water path 2 can be recycled, further, as shown in the embodiment shown in fig. 1, the polishing device further comprises a water outlet three-way pipe 8, wherein one end of the water outlet three-way pipe 8 is connected with the water outlet, the other two ends of the water outlet three-way pipe are respectively connected with the water cooler and the water heater, and a hot water outlet valve 9 and a cold water outlet valve 10 are correspondingly arranged; the controller is used for opening one of the hot water outlet valve 9 and the cold water outlet valve 10 according to the temperature signal, namely the controller can compare the temperature signal with a preset temperature value, when the temperature signal is lower than the preset temperature value, the temperature of liquid flowing out of the water channel 2 is closer to that of cold water, so that the hot water outlet valve 9 is closed, the cold water outlet valve 10 is opened, the liquid flowing out of the water channel 2 enters the cold water device to be cooled, when the temperature signal is higher than the preset temperature value, the hot water outlet valve 10 is closed, the hot water outlet valve 9 is opened, the liquid flowing out of the water channel 2 enters the water heater to be heated, and therefore cyclic utilization is achieved.
Preferably, as shown in the embodiment shown in fig. 1, the water outlet three-way pipe 8 and the water inlet three-way pipe 3 are both detachably connected to the polishing disk 1, and preferably, the water inlet and the water outlet are both interfaces disposed on the diversion channel 7, which are respectively connected to the corresponding water outlet three-way pipe 8 and the corresponding water inlet three-way pipe 3 through a connection nut and a connection pipe. Of course, in other embodiments, the three-way water outlet pipe 8 and the three-way water inlet pipe 3 may also be fixedly connected with the polishing disk 1, for example, welded.
Further, in order to control the flow rate and pressure of the liquid introduced into the water path 2, as shown in the embodiment shown in fig. 1, a pressure regulating valve 11 is disposed at one end of the water inlet three-way pipe 3 connected to the water inlet, so as to prevent the mixed water flow from being too large to affect the temperature regulating effect, or prevent the polishing disc 1 from being damaged due to the large pressure.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Within the scope of the technical idea of the utility model, numerous simple modifications can be made to the technical solution of the utility model, including combinations of the specific features in any suitable way, and the utility model will not be further described in relation to the various possible combinations in order to avoid unnecessary repetition. Such simple modifications and combinations should be considered within the scope of the present disclosure as well.
Claims (10)
1. A polishing apparatus, comprising:
the polishing device comprises a polishing disc (1), wherein a water channel (2) is arranged in the polishing disc (1), and the water channel (2) is provided with a water inlet and a water outlet; and
and one end of the water inlet three-way pipe (3) is connected with the water inlet, the other two ends of the water inlet three-way pipe are used for introducing hot water and cold water into the water inlet three-way pipe (3) respectively, and a hot water inlet valve (4) for controlling the flow rate of the hot water and a cold water inlet valve (5) for controlling the flow rate of the cold water are correspondingly arranged, so that the hot water and the cold water are mixed in the water inlet three-way pipe (3) and then enter the water channel (2) through the water inlet.
2. The polishing apparatus according to claim 1, further comprising:
the temperature measuring device is used for acquiring the temperature of the polishing disc (1) and sending a temperature signal; and
and the controller is used for receiving the temperature signal and controlling the opening and closing of the hot water inlet valve (4) and/or the cold water inlet valve (5) according to the temperature signal.
3. The polishing apparatus according to claim 2, wherein the temperature measuring device is an infrared temperature detector, and a line of the infrared temperature detector is adapted to irradiate on the polishing surface of the polishing platen (1).
4. The polishing apparatus according to claim 1, wherein the water path (2) comprises a plurality of branches (6), the plurality of branches (6) are radially arranged from the center of the polishing disk (1) to the outside in a radial direction, and the plurality of branches (6) are communicated with the water inlet and the water outlet.
5. The polishing device according to claim 4, wherein each branch (6) is of a U-shaped structure, one end of the branch connected with the water inlet is arranged close to the polishing surface of the polishing disk (1), and one end of the branch (6) connected with the water outlet is arranged far away from the polishing surface of the polishing disk (1).
6. The polishing apparatus according to claim 4, wherein the water channel (2) further comprises a flow dividing channel (7), the flow dividing channel (7) is disposed in the center of the polishing disk (1) along the axial extension of the polishing disk (1) and has an inner channel and an outer channel, the inner channel is provided with the water inlet, and the outer channel is provided with the water outlet.
7. The polishing device according to claim 2, further comprising a water cooler connected to one end of the water inlet tee pipe (3) for introducing cold water, and a water heater connected to one end of the water inlet tee pipe (3) for introducing hot water.
8. The polishing device according to claim 7, further comprising a water outlet three-way pipe (8), wherein one end of the water outlet three-way pipe (8) is connected with the water outlet, the other two ends of the water outlet three-way pipe are respectively connected with the water cooler and the water heater, and a hot water outlet valve (9) and a cold water outlet valve (10) are correspondingly arranged;
the controller is used for opening one of the hot water outlet valve (9) and the cold water outlet valve (10) according to the temperature signal.
9. A polishing device as claimed in claim 8, characterized in that the outlet tee (8) and the inlet tee (3) are each detachably connected to the polishing disc (1).
10. The polishing device according to claim 1, wherein a pressure regulating valve (11) is arranged at one end of the water inlet three-way pipe (3) connected with the water inlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123325977.5U CN216681678U (en) | 2021-12-27 | 2021-12-27 | Polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123325977.5U CN216681678U (en) | 2021-12-27 | 2021-12-27 | Polishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216681678U true CN216681678U (en) | 2022-06-07 |
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ID=81845150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123325977.5U Active CN216681678U (en) | 2021-12-27 | 2021-12-27 | Polishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216681678U (en) |
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2021
- 2021-12-27 CN CN202123325977.5U patent/CN216681678U/en active Active
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