CN216680262U - High accuracy cutting quality nickel base wheel hub type jig for scribing cutter - Google Patents
High accuracy cutting quality nickel base wheel hub type jig for scribing cutter Download PDFInfo
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- CN216680262U CN216680262U CN202123377077.5U CN202123377077U CN216680262U CN 216680262 U CN216680262 U CN 216680262U CN 202123377077 U CN202123377077 U CN 202123377077U CN 216680262 U CN216680262 U CN 216680262U
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Abstract
The utility model discloses a manufacturing tool for a high-precision cutting quality nickel-based hub type scribing cutter, which comprises a base, a central column, a pressing block, a copper cap, a titanium alloy gasket, a small shielding bowl and a small gasket, wherein the central column is arranged on the base; the central column is positioned on the base; the small gasket is positioned in the small shielding bowl; the copper cap is of a sleeve structure and is positioned at the top end of the central column; the pressing block is positioned at the lower end of the copper cap; the titanium alloy gasket is located on the upper surface of the base, so that the nickel-based hub scribing with high-precision cutting quality can be simultaneously prepared, the working efficiency is improved, the front side of the blade is polished and shielded by adopting a current shielding process, a good cutting effect is achieved, the processing quality of the blade is effectively improved, and the nickel-based hub scribing cutter is prevented from being damaged.
Description
Technical Field
The utility model belongs to the technical field of hub type scribing cutters, and particularly relates to a jig for a nickel-based hub type scribing cutter with high-precision cutting quality.
Background
With the rapid development of semiconductor materials in recent years, the requirement for the cutting quality of the semiconductor materials is improved year by year, and the hub-type scribing cutter is widely applied to the precise fine cutting and grooving of hard and brittle precious materials such as silicon wafers, integrated circuits, computer magnetic heads, electronic components and the like in the field of electronic information in the semiconductor industry; the cutting layer is in a circular ring shape, is arranged on the periphery of the first surface and is partially exposed; a groove is formed in the area, in contact with the cutting layer, of the surface of the first layer, and the groove is filled with the cutting layer; in the prior art, an electrochemical machining tool for an ultrathin hub type diamond scribing cutter is disclosed, which comprises a conductive metal rod, wherein at least one group of pictographic clamps for fixing a hub type aluminum alloy matrix and sealing the middle part of the hub type aluminum alloy matrix are sleeved on the conductive metal rod, a conductive metal network is laid in the middle of the pictographic clamps, and the conductive metal network is simultaneously contacted with the conductive metal rod and the hub type aluminum alloy matrix; the upper part of the conductive metal rod is provided with a fastener for pressing the pictographic clamp, and the bottom of the conductive metal rod is provided with a base; the nickel-based hub type scribing cutter prepared by the conventional method has the problem that the diamond leakage of the blade is inconsistent, so that the phenomenon of cutting and chipping of the fragile material of the processed part is caused.
Disclosure of Invention
Aiming at the defects of the existing problems, the utility model aims to provide a jig for a nickel-based hub type scribing cutter with high-precision cutting quality, which adopts a unique polishing and shielding technology, effectively improves the processing quality of a blade, ensures that the nickel-based hub scribing cutter is not damaged, and meets the processing requirements of the existing special semiconductor materials. In order to achieve the purpose, the utility model provides the following technical scheme: a manufacturing tool for a nickel-based hub type scribing cutter with high cutting quality comprises a base, a central column, a pressing block, a copper cap, a titanium alloy gasket, a small shielding bowl and a small gasket; the central column is positioned on the base; the small gasket is positioned in the small shielding bowl; the copper cap is of a sleeve structure and is positioned at the top end of the central column; the pressing block is positioned at the lower end of the copper cap; the titanium alloy gasket is positioned on the upper surface of the base.
According to the technical scheme, 1-3 small gaskets are arranged in the small shielding bowl, 1-2 small gaskets are arranged at the bottom of the small shielding bowl, the diameter of each small gasket is smaller than that of the scribing cutter, the nickel-based hub scribing cutter is positioned between the two small gaskets, the thickness of the nickel-based hub scribing cutter is dozens of micrometers, the base surface of the nickel-based hub scribing cutter faces the bottom of the small shielding bowl, diamond on the electroplated back surface is fully leaked out, polishing and shielding can be achieved, the electric conduction can be fully achieved, meanwhile, the nickel-based hub scribing cutter is fully fixed in the small shielding bowl through the two small gaskets, and the small shielding bowl is protected from being damaged.
Among the above-mentioned technical scheme, the little bowl of shielding is arranged in proper order on the center post, the little bowl of shielding is a plurality of, can satisfy a plurality of high accuracy cutting quality nickel base wheel hub scribing sword preparation simultaneously, has improved machining efficiency greatly, and the little bowl of shielding bottom is the stair structure, and among the electrochemical polishing process, can not receive the interference between the little bowl of shielding, electrochemical polishing is abundant.
Among the above-mentioned technical scheme, the copper cap bottom is equipped with horizontal limit, and the copper cap contacts with the briquetting, and the briquetting is located shielding little bowl top, zonulae occludens between center post, copper cap and the briquetting, and center post and base threaded connection can fully electrically conduct, and the effectual electrochemical polishing in-process electric current of having guaranteed is abundant, makes the electrochemical polishing abundant.
The utility model adopts the unique polishing shielding technical problem to effectively prevent the diamond on the front side from falling off on the premise of effectively ensuring the diamond on the back side of the blade to leak, effectively improves the processing quality of the blade, ensures that the nickel-based hub scribing cutter is not damaged, and meets the processing requirements of the current special semiconductor material.
Compared with the prior art, the utility model has the following advantages:
the method can meet the requirement of simultaneously preparing a plurality of high-precision cutting quality nickel-based hub scribes, and improves the working efficiency; the front side of the blade is polished and shielded by adopting a current shielding process, and when the diamond on the back side of the blade is fully leaked out, the diamond on the front side does not fall off due to shielding, so that the diamond on the front side and the diamond on the back side of the blade are exposed uniformly, and a good cutting effect is achieved; the processing quality of the blade is effectively improved, and the nickel-based hub scribing cutter is guaranteed not to be damaged.
Drawings
FIG. 1 is a schematic structural diagram of a high-precision cutting quality nickel-based hub-type scribing cutter jig according to the present invention;
FIG. 2 is a cross-sectional view of a small mold shielding bowl for a high-precision cutting quality nickel-based hub type dicing blade according to the present invention;
FIG. 3 is a scanning photograph of a high-precision cutting quality nickel-based hub type scribing knife fixture of the present invention after polishing with a small shielding bowl;
FIG. 4 is a schematic diagram of a wafer surface chipping without using a small shielding bowl in the manufacturing tool for a high-precision cutting quality nickel-based hub-type dicing blade according to the present invention;
FIG. 5 is a schematic diagram of a high-precision cutting quality nickel-based hub-type scribing cutter according to the present invention, in which a small shielding bowl is used to cut the surface of a wafer;
in the figure, a base 1, a titanium alloy gasket 2, a small gasket 3, a small shielding bowl 4, a pressing block 5, a copper cap 6, a transverse edge 7 and a central column 8.
Detailed Description
The technical solutions in the embodiments will be described clearly and completely with reference to the drawings in the present disclosure, and it should be understood that the described embodiments are only a part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments obtained by the ordinary skilled in the art without any inventive work based on the embodiments of the present invention belong to the protection scope of the present invention, and the central column 8 is not marked in fig. 1 and is marked in fig. 2 because it is shielded, and does not affect the understanding of the skilled in the art.
Example one
Referring to fig. 1-2, a high-precision cutting quality nickel-based hub type scraper tool comprises a base 1, a central column 8, a pressing block 5, a copper cap 6, a titanium alloy gasket 2, a small shielding bowl 4 and a small gasket 3; the central column 8 is positioned on the base 1 and is in threaded connection with the base; the copper cap 6 is of a sleeve structure and is positioned at the top end of the central column, the pressing block 5 is positioned at the lower end of the copper cap 6, and the bottom end of the copper cap is provided with a transverse edge 7 which is in contact with the pressing block 5; the titanium alloy gasket 2 is positioned on the upper surface of the base 1 and below all the lowermost small shielding bowls 4; the bottom of the small shielding bowl is of a step structure and is provided with an opening, the central column 8 penetrates through the opening, so that the small shielding bowls are arranged up and down, 2 small gaskets are arranged in the small shielding bowls, 1 small gasket is arranged at the bottom of the small shielding bowl, the diameter of each small gasket is smaller than that of the nickel-based hub-type scribing cutter, the nickel-based hub-type scribing cutter is located between the two small gaskets during application, and the basal surface of the nickel-based hub-type scribing cutter faces the bottom of the small shielding bowl.
When the method is specifically applied, a conventional preparation process is adopted, and the method comprises the following steps:
(1) the aluminum alloy matrix raw material is sequentially treated by a sodium hydroxide solution, a nitric acid solution and a zinc precipitation solution to obtain a surface-treated aluminum alloy matrix;
(2) adding diamond into the composite ion electroplating solution, electroplating the substrate, and obtaining a blank after electroplating; grinding the excircle of the electroplated blank by using a 800# grinding wheel until the excircle is flat, then carrying out turning edge machining on a numerical control lathe, and then chemically cutting an edge in 200g/L sodium hydroxide solution at 95 ℃ to expose an electroplated nickel layer to obtain a nickel-based hub-type scribing knife after chemical cutting, wherein the thickness of the scribing knife is dozens of microns;
(3) adding the nickel-based hub-type scribing cutter subjected to chemical edge cutting into a mixed solution of sulfuric acid and phosphoric acid for electrochemical polishing; by adopting the manufacturing tool, the small gasket is placed in the small shielding bowl, the base body surface of the nickel-based hub type scribing knife is placed towards the bottom of the small shielding bowl, diamond on the electroplating back surface of the nickel-based hub type scribing knife is fully leaked out, the second layer of small gasket is placed on the electroplating back surface of the nickel-based hub type scribing knife, the small shielding bowls are vertically arranged on the central column, the copper cap is sleeved on the central column, the pressing block is arranged at the lower end of the copper cap, and after the manufacturing tool is installed, the mixed liquid of sulfuric acid and phosphoric acid is added for electrochemical polishing, specifically, the conventional technology is adopted.
Observing the nickel-based hub-type scribing cutter after electrochemical polishing, wherein diamond does not fall off as shown in figure 3; the nickel-based hub-type scribing cutter is used for cutting the wafer, the wafer after cutting is detected, and as shown in figure 5, the wafer is complete in surface, has no crack and is good in blade cutting quality.
Example two
Adopting the first embodiment of the manufacturing tool except the small shielding bowl, comprising a base, a central column, a pressing block, a copper cap, a titanium alloy gasket and a small gasket, and carrying out electrochemical polishing by using the hanger according to the first embodiment of the manufacturing process; and (3) cutting the wafer by the nickel-based hub-type scribing cutter after electrochemical polishing, detecting the cut wafer, and detecting that the surface is broken and the cutting quality of the blade is poor as shown in figure 4.
EXAMPLE III
Adopting the first manufacturing tool except the copper cap of the embodiment to perform electrochemical polishing by using the hanger according to the first manufacturing process of the first embodiment, wherein the first manufacturing tool comprises a base, a central column, a pressing block, a titanium alloy gasket, a small shielding bowl and a small gasket; and (3) cutting the wafer by the nickel-based hub-type scribing cutter after electrochemical polishing, and detecting the cut wafer, wherein the cutting quality of the blade is slightly poorer than that of the embodiment.
Claims (10)
1. The utility model provides a high accuracy cutting quality nickel base wheel hub type jig for scribing cutter which characterized in that: the device comprises a base, a central column, a pressing block, a copper cap, a titanium alloy gasket, a small shielding bowl and a small gasket; the central column is positioned on the base; the small gasket is positioned in the small shielding bowl; the copper cap is of a sleeve structure and is positioned at the top end of the central column; the pressing block is positioned at the lower end of the copper cap; the titanium alloy gasket is positioned on the upper surface of the base.
2. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the pressing block is positioned above the small shielding bowl.
3. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the shielding small bowls are plural and are arranged on the central column from top to bottom.
4. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the bottom of the small shielding bowl is of a step structure.
5. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: and a transverse edge is arranged at the bottom end of the copper cap.
6. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the copper cap is in contact with the pressing block.
7. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: and 1-3 small gaskets are arranged in the small shielding bowl.
8. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the bottom of the small shielding bowl is provided with 1-2 small gaskets.
9. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the base is in threaded connection with the central column.
10. The tooling for a high precision cutting quality nickel based hub type saw blade of claim 1 wherein: the diameter of the small washer is smaller than that of the nickel-based hub type scribing cutter.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123377077.5U CN216680262U (en) | 2021-12-29 | 2021-12-29 | High accuracy cutting quality nickel base wheel hub type jig for scribing cutter |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202123377077.5U CN216680262U (en) | 2021-12-29 | 2021-12-29 | High accuracy cutting quality nickel base wheel hub type jig for scribing cutter |
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| CN216680262U true CN216680262U (en) | 2022-06-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117507162A (en) * | 2024-01-02 | 2024-02-06 | 江苏中科智芯集成科技有限公司 | Multi-cutter scribing device and control method thereof |
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2021
- 2021-12-29 CN CN202123377077.5U patent/CN216680262U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117507162A (en) * | 2024-01-02 | 2024-02-06 | 江苏中科智芯集成科技有限公司 | Multi-cutter scribing device and control method thereof |
| CN117507162B (en) * | 2024-01-02 | 2024-03-15 | 江苏中科智芯集成科技有限公司 | Multi-cutter scribing device and control method thereof |
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