CN216677763U - Ozone water preparation facilities - Google Patents
Ozone water preparation facilities Download PDFInfo
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- CN216677763U CN216677763U CN202123158259.3U CN202123158259U CN216677763U CN 216677763 U CN216677763 U CN 216677763U CN 202123158259 U CN202123158259 U CN 202123158259U CN 216677763 U CN216677763 U CN 216677763U
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Abstract
The utility model provides an ozone water preparation device which comprises a water tank, an ozone generator and a vibration stirring device, wherein a first air inlet, a water inlet and a water outlet are formed in the water tank, the first air inlet is connected with the ozone generator, the vibration stirring device is used for vibrating and stirring liquid in the water tank, and the distance between the water outlet and the bottom of the water tank is larger than the distance between the first air inlet and the bottom of the water tank. The embodiment of the utility model is beneficial to improving the solubility of ozone in water.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to an ozone water preparation device.
Background
In a semiconductor processing process, for example, in a wafer wet cleaning process, it is generally necessary to clean a wafer with ozone water, so that organic stains on the surface of the wafer can be oxidized and removed, and the wafer can be cleaned with the ozone water, and a dense oxide film can be formed on the surface of the wafer to protect the wafer. Since the dissolution of ozone in water is relatively unstable, the preparation of ozone water is generally performed at the time of use, and in the related art, the dissolution efficiency of ozone in ozone water is relatively low, causing the waste of ozone.
Disclosure of Invention
The embodiment of the utility model provides an ozone water preparation device, which aims to solve the problem of ozone waste caused by low ozone dissolving efficiency in the existing ozone water preparation equipment process.
The embodiment of the utility model provides an ozone water preparation device which comprises a water tank, an ozone generator and a vibration stirring device, wherein a first air inlet, a water inlet and a water outlet are formed in the water tank, the first air inlet is connected with the ozone generator, the vibration stirring device is used for vibrating and stirring liquid in the water tank, and the distance between the water outlet and the bottom of the water tank is larger than the distance between the first air inlet and the bottom of the water tank.
In some embodiments, the water tank is further provided with a second air inlet, and the second air inlet is connected with a carbon dioxide generation device.
In some embodiments, the water tank is further provided with an air outlet, and the air outlet is provided with a pressure relief valve, and the pressure relief valve is configured to open in a direction from the inside to the outside of the water tank when the pressure in the water tank is greater than a preset pressure threshold.
In some embodiments, the oscillating stirring device is disposed inside the water tank, and the oscillating stirring device is located between the first air inlet and the water outlet; or
The vibration stirring device is attached to the outer side of the bottom of the water tank.
In some embodiments, a distance between the water inlet and the top of the water tank is smaller than a distance between the water outlet and the top of the water tank, a flow stabilizing plate is further disposed in the water tank, the flow stabilizing plate is disposed between the water inlet and the water outlet, a plurality of openings are formed in the flow stabilizing plate, and the water inlet is disposed toward the flow stabilizing plate.
In some embodiments, the water tank further comprises a diffusion plate disposed inside the water tank between the first air inlet and the water outlet, wherein the first air inlet is disposed toward the diffusion plate.
In some embodiments, the diffuser plate has an inverted conical shape, and the first air inlet is disposed toward an apex of the diffuser plate extending from a center to an edge of the tank in a direction from a bottom to a top of the tank.
In some embodiments, the water outlet is connected with an output control assembly, the output control assembly comprises a concentration meter, a three-way valve, a circulation pipeline and an output pipeline, the three-way valve is respectively connected with the water outlet, the circulation pipeline and the output pipeline, and the concentration meter is connected between the water outlet and the three-way valve;
the three-way valve is configured to control the output pipeline to be communicated with the water outlet when the concentration of ozone detected by the concentration meter is greater than a preset concentration threshold value, and control the circulating pipeline to be communicated with the water outlet when the concentration of ozone detected by the concentration meter is not greater than the preset concentration threshold value, wherein the output end of the circulating pipeline is connected with the water tank.
In some embodiments, the water supply system further comprises a cooling assembly through which the water inlet is connected to the water supply line.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings may be obtained according to the drawings without inventive labor.
Fig. 1 is a schematic structural view of an ozone water producing apparatus according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the utility model provides an ozone water preparation device.
In one embodiment, the ozonated water preparation apparatus comprises a water tank 101, an ozone generator 102, and an oscillating agitation apparatus 103.
The water tank 101 is provided with a first air inlet 1011, a water inlet 1012 and a water outlet 1013.
The first gas inlet 1011 is connected to the ozone generator 102, and during operation, ozone is generated by the ozone generator 102, and the generated ozone is supplied into the water tank 101 through the first gas inlet 1011 to be mixed with water in the water tank 101 to obtain ozone water, and in some embodiments, an ozone filter 1021 may be provided between the first gas inlet 1011 and the ozone generator 102 to filter impurities in the gas, which may help to improve the purity of the obtained ozone water.
The water inlet 1012 is used to provide water into the water tank 101, and in some preferred embodiments, the provided water is deionized water, which can improve the purity of the ozone water and reduce pollution. In some embodiments, a turbulator may be disposed at the water inlet 1012, and the turbulator may be an existing turbulator, in this embodiment, the structure of the turbulator is not further limited, and by disposing the turbulator, the water flow can be dispersed, so that the water injected into the water tank 101 and the ozone water in the water tank 101 are mixed more sufficiently and uniformly.
In some embodiments, a cooling assembly is further included, and the water inlet 1012 is connected to the water supply line through the cooling assembly, which helps to reduce the temperature of the water entering the water tank 101, thereby helping to increase the solubility of ozone and helping to reduce the waste of ozone.
Vibrate agitating unit 103 and be used for vibrating the liquid in stirring water tank 101, it is concrete for stir ozone and water in ozone and water mixing process, this vibrate agitating unit 103 can select the vibration agitating unit 103 that has higher vibration frequency to break up ozone for the micelle bubble, thereby help increasing the area of contact of ozone and water, make ozone and water fully contact, in order to improve the solubility of ozone in aquatic.
The water outlet 1013 is used to output the prepared ozone water, and in some embodiments, the water outlet 1013 may be provided with an ozone water filter 10131 to filter the prepared ozone water, so as to help remove impurities in the ozone water and improve the purity of the prepared ozone water.
The distance between the water outlet 1013 and the bottom of the water tank 101 is greater than the distance between the first air inlet 1011 and the bottom of the water tank 101, in other words, the water outlet 1013 is located above the first air inlet 1011. It is understood that since the solubility of ozone in water is constant, the amount of ozone input into the water tank 101 is generally excessive, and by setting the height of the water outlet 1013 higher than the first air inlet 1011, the contact time of water and ozone can be increased, thereby contributing to the increase in the solubility of ozone in water.
In some embodiments, a second air inlet 1014 is also provided on the water tank 101, and the second air inlet 1014 is connected to a carbon dioxide generating device.
The second air inlet 1014 is used for injecting carbon dioxide into the water tank 101, and by injecting carbon dioxide into the water tank 101, water in the water tank 101 can be made slightly acidic, which contributes to suppression of decomposition of ozone and to improvement of concentration of produced ozone water.
In some embodiments, the water tank 101 is further provided with a gas outlet 1015, in this embodiment, the gas outlet 1015 is used for removing the excess carbon dioxide and ozone, and the gas outlet 1015 is connected to a tail gas recovery and treatment device to recover and treat the excess carbon dioxide and ozone, so as to avoid environmental pollution.
A relief valve is provided at the exhaust port 1015, and the relief valve is configured to open in a direction from the inside to the outside of the water tank 101 when the pressure in the water tank 101 is greater than a preset pressure threshold value. It should be understood that the structure of the pressure relief valve itself that opens at different pressures is conventional, and in practice, pressure relief valves with different elasticity or weights may be selected to adjust the above-mentioned preset pressure threshold.
By providing the relief valve, the air pressure in the water tank 101 can be increased under the condition of ensuring safety, thereby contributing to the improvement of the solubility of ozone in water, i.e., the improvement of the concentration of the produced ozone water.
In some embodiments, the oscillation stirring device 103 is disposed inside the water tank 101, and the oscillation stirring device 103 is located between the first air inlet 1011 and the water outlet 1013, so that the ozone can be sufficiently oscillated after entering the water tank 101, thereby forming small particle bubbles in the ozone, and improving the solubility of the ozone in water.
In other embodiments, the oscillating stirring device 103 is attached to the outside of the bottom of the water tank 101, so as to avoid direct contact with the ozone water, which helps to reduce the possibility of ozone water contamination.
In some embodiments, the distance between the water inlet 1012 and the top of the water tank 101 is less than the distance between the water outlet 1013 and the top of the water tank 101, a flow stabilizer 1016 is further disposed in the water tank 101, the flow stabilizer 1016 is disposed between the water inlet 1012 and the water outlet 1013, a plurality of openings are formed in the flow stabilizer 1016, and the water inlet 1012 is disposed toward the flow stabilizer 1016.
In this embodiment, after entering the water tank 101 through the water inlet 1012, the water flows to the flow stabilizing plate 1016, and further, the water is diffused along the flow stabilizing plate 1016 and flows into the water tank 101 more uniformly through the openings of the flow stabilizing plate 1016, thereby improving the distribution uniformity of the water entering the water tank 101 and improving the dissolving effect of the ozone in the water.
In some embodiments, a diffusion plate 1017 is further included, the diffusion plate 1017 is disposed inside the water tank 101 between the first air inlet 1011 and the water outlet 1013, and the first air inlet 1011 is disposed toward the diffusion plate 1017. Illustratively, in one embodiment, the diffuser plate 1017 is in the shape of an inverted cone, and the first air inlet 1011 is disposed toward the apex of the diffuser plate 1017, and extends from the center of the tank 101 to the edge along the direction from the bottom to the top of the tank 101.
By providing the diffusion plate 1017, ozone flows to the diffusion plate 1017 in the ozone water after entering the water tank 101 through the first air inlet 1011, and further diffuses under the blocking of the diffusion plate 1017, instead of directly rising and separating from water, thereby contributing to making the distribution of ozone in water more uniform, and contributing to improving the solubility of ozone in water.
In some embodiments, the water outlet 1013 is connected to an output control assembly, the output control assembly includes a concentration meter, a three-way valve, a circulation pipeline and an output pipeline, the three-way valve is respectively connected to the water outlet 1013, the circulation pipeline and the output pipeline, and the concentration meter is connected between the water outlet 1013 and the three-way valve.
The three-way valve is configured to control the output pipeline to be communicated with the water outlet 1013 when the concentration of ozone detected by the concentration meter is greater than a preset concentration threshold, and control the circulating pipeline to be communicated with the water outlet 1013 when the concentration of ozone detected by the concentration meter is not greater than the preset concentration threshold, wherein the output end of the circulating pipeline is connected with the water tank 101.
This working process can understand that, when the ozone concentration in the ozone water does not reach the user demand, the ozone water is reintroduced into the water tank 101 to dissolve more ozone, and if the ozone concentration in the ozone water reaches a certain concentration requirement, the prepared ozone water is output through an output pipeline, specifically, the prepared ozone water can be output to a specific device, and also can be a specific station, so as to be used for actual production.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. The ozone water preparation device is characterized by comprising a water tank, an ozone generator and a vibration stirring device, wherein a first air inlet, a water inlet and a water outlet are formed in the water tank, the first air inlet is connected with the ozone generator, the vibration stirring device is used for vibrating and stirring liquid in the water tank, and the distance between the water outlet and the bottom of the water tank is larger than the distance between the first air inlet and the bottom of the water tank.
2. The ozone water production apparatus according to claim 1, wherein the water tank is further provided with a second inlet port, and the second inlet port is connected to a carbon dioxide generation device.
3. The ozonated water production apparatus according to claim 1, wherein the water tank is further provided with an exhaust port, and a relief valve is provided on the exhaust port, the relief valve being configured to open in a direction from inside to outside of the water tank when the pressure in the water tank is greater than a preset pressure threshold.
4. The ozone water production apparatus according to claim 1, wherein the oscillating agitator is disposed inside the water tank and between the first gas inlet and the water outlet; or
The vibration stirring device is attached to the outer side of the bottom of the water tank.
5. The apparatus of claim 1, wherein a distance between the water inlet and the top of the water tank is smaller than a distance between the water outlet and the top of the water tank, a flow stabilizer is further disposed in the water tank, the flow stabilizer is disposed between the water inlet and the water outlet, a plurality of openings are formed in the flow stabilizer, and the water inlet is disposed toward the flow stabilizer.
6. The apparatus for producing ozonated water according to claim 1 or 5, further comprising a diffusion plate disposed inside the water tank between the first gas inlet and the water outlet, the first gas inlet being disposed toward the diffusion plate.
7. The ozone water producing apparatus according to claim 6, wherein the diffusion plate has an inverted conical shape, and the first gas inlet is provided toward an apex of the diffusion plate, and the diffusion plate extends from a center of the water tank to an edge in a direction from a bottom to a top of the water tank.
8. The ozone water production apparatus according to claim 1, wherein the water outlet is connected to an output control module, the output control module includes a concentration meter, a three-way valve, a circulation line, and an output line, the three-way valve is connected to the water outlet, the circulation line, and the output line, respectively, and the concentration meter is connected between the water outlet and the three-way valve;
the three-way valve is configured to control the output pipeline to be communicated with the water outlet when the concentration of ozone detected by the concentration meter is greater than a preset concentration threshold value, and control the circulating pipeline to be communicated with the water outlet when the concentration of ozone detected by the concentration meter is not greater than the preset concentration threshold value, wherein the output end of the circulating pipeline is connected with the water tank.
9. The ozone water production apparatus according to claim 1, further comprising a cooling module through which the water inlet is connected to a water supply line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123158259.3U CN216677763U (en) | 2021-12-15 | 2021-12-15 | Ozone water preparation facilities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123158259.3U CN216677763U (en) | 2021-12-15 | 2021-12-15 | Ozone water preparation facilities |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216677763U true CN216677763U (en) | 2022-06-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202123158259.3U Active CN216677763U (en) | 2021-12-15 | 2021-12-15 | Ozone water preparation facilities |
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| CN (1) | CN216677763U (en) |
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2021
- 2021-12-15 CN CN202123158259.3U patent/CN216677763U/en active Active
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |