CN216666944U - Shockproof foot for mounting semiconductor production equipment - Google Patents
Shockproof foot for mounting semiconductor production equipment Download PDFInfo
- Publication number
- CN216666944U CN216666944U CN202220222530.0U CN202220222530U CN216666944U CN 216666944 U CN216666944 U CN 216666944U CN 202220222530 U CN202220222530 U CN 202220222530U CN 216666944 U CN216666944 U CN 216666944U
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- China
- Prior art keywords
- foot
- shockproof
- reinforcing rib
- precautions against
- against earthquakes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000004065 semiconductor Substances 0.000 title claims abstract description 14
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 23
- 238000009434 installation Methods 0.000 claims abstract description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 238000013016 damping Methods 0.000 claims 2
- 238000005452 bending Methods 0.000 abstract description 6
- 230000001133 acceleration Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Vibration Prevention Devices (AREA)
Abstract
The utility model provides a shockproof pin for mounting semiconductor production equipment, which comprises a U-shaped clamping groove and two mounting holes, wherein the shockproof pin is integrally of a Z-shaped structure, the U-shaped clamping groove is formed in the middle of the upper part of the shockproof pin Z-shaped structure, the two mounting holes are formed and are arranged at the lower part of the shockproof pin Z-shaped structure in parallel, an outer reinforcing rib plate is welded on the outer side of the middle part of the shockproof pin Z-shaped structure, and inner reinforcing rib plates are welded at two ends of the inner side of the middle part of the shockproof pin Z-shaped structure respectively. According to the utility model, the strength of the shockproof foot is effectively improved by designing the three reinforcing rib plates, particularly, the design of the two reinforcing rib plates at the inner side greatly improves the bending strength of the upper part of the shockproof foot, avoids the problems of bending of the shockproof foot and the like, greatly improves the shockproof capability of the shockproof foot, and the shockproof foot has the advantages of simple structure, low cost and convenience in installation.
Description
Technical Field
The utility model relates to the technical field of shockproof pins, in particular to a shockproof pin for mounting semiconductor production equipment.
Background
The semiconductor manufacturing generally has higher requirements on the environment, particularly on the vibration caused by earthquake; the device can generate acceleration in the horizontal direction and the vertical direction due to the earthquake vibration; since the equipment is generally directly installed on the floor without corresponding fixing measures for the feet of the equipment, when an earthquake occurs, the equipment is subjected to earthquake acceleration in the horizontal direction and the vertical direction, so that the equipment moves in the horizontal direction and the vertical direction, the equipment is damaged, and the quality of products produced by the equipment is affected.
The traditional fixing mode is a Z-shaped fixing sheet, but only through an integrally formed Z-shaped structure, the strength of the fixing sheet is insufficient, reinforcing ribs are added on the inner side and the outer side of the fixing sheet in some cases, and the strength of the fixing sheet is not greatly improved due to the unreasonable design of the reinforcing ribs.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a foot that takes precautions against earthquakes for installation of semiconductor production equipment is used to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized as follows:
the utility model provides a foot that takes precautions against earthquakes for installation of semiconductor production facility usefulness, includes U type draw-in groove and mounting hole, the foot that takes precautions against earthquakes wholly is Z type structure, U type draw-in groove sets up the upper portion intermediate position in foot Z type structure that takes precautions against earthquakes, the mounting hole is two, sets up the lower part position in foot Z type structure that takes precautions against earthquakes side by side, the outside welding of the middle part of foot Z type structure that takes precautions against earthquakes has outside deep floor, inboard both ends of the middle part of foot Z type structure that takes precautions against earthquakes have welded inboard deep floor respectively.
Further, the vibration-proof feet are integrally machined into a Z-shaped structure from a stainless steel plate.
Furthermore, the outer reinforcing rib plate is triangular and is positioned between the two mounting holes.
Furthermore, the inner side reinforcing rib plate is triangular, and the length of the upper edge of the inner side reinforcing rib plate is consistent with that of the upper part of the Z-shaped structure of the shockproof foot.
The beneficial effects of the utility model are as follows:
according to the utility model, the strength of the shockproof foot is effectively improved by designing the three reinforcing rib plates, particularly, the design of the two reinforcing rib plates at the inner side greatly improves the bending strength of the upper part of the shockproof foot, avoids the problems of bending of the shockproof foot and the like, greatly improves the shockproof capability of the shockproof foot, and the shockproof foot has the advantages of simple structure, low cost and convenience in installation.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a schematic view of the laid-down structure of the present invention.
Fig. 3 is a schematic view of the mounting structure of the present invention.
In the figure, 1-U-shaped clamping groove, 2-outer side reinforcing rib plate, 3-mounting hole, 4-inner side reinforcing rib plate, 5-bolt, 6-semiconductor production equipment, 7-base and 8-base.
Detailed Description
The technical solution of the present invention will be described in detail and fully with reference to the following examples, and it should be understood that the described examples are only a part of the examples of the present invention, and not all of the examples. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 3, the shockproof pin for semiconductor production equipment installation comprises a U-shaped clamping groove 1 and two installation holes 3, the shockproof pin is integrally of a Z-shaped structure, the U-shaped clamping groove 1 is arranged at the middle position of the upper part of the shockproof pin Z-shaped structure, the two installation holes 3 are arranged in parallel at the lower position of the shockproof pin Z-shaped structure, an outer reinforcing rib plate 2 is welded at the outer side of the middle part of the shockproof pin Z-shaped structure, and inner reinforcing rib plates 4 are welded at the two inner ends of the middle part of the shockproof pin Z-shaped structure respectively.
The vibration-proof feet are integrally processed into a Z-shaped structure by stainless steel plates.
The outer side reinforcing rib plate 2 is triangular and is positioned between the two mounting holes 3.
The inner side reinforcing rib plate 4 is triangular, and the length of the upper edge of the inner side reinforcing rib plate 4 is consistent with that of the upper part of the Z-shaped structure of the shockproof foot.
When the shockproof foot is installed, the semiconductor production equipment 6 is installed on the upper portion of the base 8, the U-shaped clamping groove 1 of the shockproof foot is fixedly connected with the base 7, and the bolt 5 penetrates through the installation hole 3 of the shockproof foot and is fixedly bolted with the base 8.
According to the utility model, the strength of the shockproof foot is effectively improved by designing the three reinforcing rib plates, particularly, the design of the two reinforcing rib plates at the inner side greatly improves the bending strength of the upper part of the shockproof foot, avoids the problems of bending of the shockproof foot and the like, greatly improves the shockproof capability of the shockproof foot, and the shockproof foot has the advantages of simple structure, low cost and convenience in installation.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (4)
1. The utility model provides a foot takes precautions against earthquakes for semiconductor production facility installation usefulness, includes U type draw-in groove and mounting hole, its characterized in that, the whole Z type structure that is of foot takes precautions against earthquakes, U type draw-in groove is seted up in the upper portion intermediate position of taking precautions against earthquakes foot Z type structure, the mounting hole is two, sets up in the lower part position of taking precautions against earthquakes foot Z type structure side by side, the outside welding of the middle part of taking precautions against earthquakes foot Z type structure has outside deep floor, the inboard both ends of the middle part of taking precautions against earthquakes foot Z type structure have inside deep floor welded respectively.
2. The vibration damping mount for semiconductor manufacturing equipment according to claim 1, wherein said vibration damping mount is integrally formed of a stainless steel plate in a Z-shaped configuration.
3. The shock-proof foot for mounting semiconductor production equipment according to claim 1, wherein the outer reinforcing rib plate is triangular and is located between the two mounting holes.
4. The shockproof foot for mounting semiconductor production equipment according to claim 1, wherein the inner reinforcing rib plate is triangular, and the length of the upper edge of the inner reinforcing rib plate is consistent with the length of the upper part of the Z-shaped structure of the shockproof foot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220222530.0U CN216666944U (en) | 2022-01-27 | 2022-01-27 | Shockproof foot for mounting semiconductor production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220222530.0U CN216666944U (en) | 2022-01-27 | 2022-01-27 | Shockproof foot for mounting semiconductor production equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216666944U true CN216666944U (en) | 2022-06-03 |
Family
ID=81764649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220222530.0U Active CN216666944U (en) | 2022-01-27 | 2022-01-27 | Shockproof foot for mounting semiconductor production equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216666944U (en) |
-
2022
- 2022-01-27 CN CN202220222530.0U patent/CN216666944U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |