CN216646395U

CN216646395U - Liquid supporting device

Info

Publication number: CN216646395U
Application number: CN202121869948.2U
Authority: CN
Inventors: 孟庆国; 程实然; 石小丽; 朱小庆; 崔虎山; 胡冬冬; 许开东
Original assignee: Jiangsu Leuven Instruments Co Ltd
Current assignee: Jiangsu Leuven Instruments Co Ltd
Priority date: 2021-08-10
Filing date: 2021-08-10
Publication date: 2022-05-31
Anticipated expiration: 2031-08-10

Abstract

The utility model discloses a liquid supporting device which comprises a device body and a supporting arm, wherein the supporting arm is arranged on the device body, and is provided with a concave part for supporting scanning liquid drops. By adopting the scheme, the bracket arm of the liquid supporting device provided by the utility model is provided with the sunken part, so that scanned liquid drops can be received, and the scanned liquid drops can be prevented from falling to a greater extent; therefore, when the liquid holding device is matched with other parts in the vapor phase decomposition metal contamination collecting system for use, the scanning and sampling of the edge part of the sample to be detected can be well completed, so that the sampling detection of the edge part of the sample to be detected becomes possible.

Description

Liquid supporting device

Technical Field

The utility model relates to the technical field of sampling and scanning components, in particular to a liquid supporting device.

Background

A large amount of new chemical elements are required to be introduced in the preparation process of the high-performance and low-power consumption chip, and the introduction of different chemical elements can cause the increase of the metal contamination control difficulty in the chip manufacturing process. At present, the most common metal contamination detection devices are a gas phase decomposition metal contamination collection system and an inductively coupled plasma mass spectrometer, but the detection of the wafer to be detected by these detection devices is mainly concentrated on the central area of the wafer to be detected. Taking the vapor phase decomposition metal contamination collection system as an example, the scanning liquid drop is usually adopted to scan and sample the surface of the wafer to be tested, and if the scanning and sampling are performed on the edge portion of the wafer to be tested, the scanning liquid drop is easy to drop, so that the edge portion cannot be effectively sampled.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a liquid supporting device, wherein a supporting arm of the liquid supporting device can support scanning liquid drops, the scanning liquid drops can be prevented from falling to a greater extent, and the scanning and sampling of the edge part of a sample to be detected can be assisted.

In order to solve the technical problem, the utility model provides a liquid supporting device which comprises a device body and a supporting arm, wherein the supporting arm is arranged on the device body, and is provided with a concave part for supporting scanning liquid drops.

By adopting the scheme, the bracket arm of the liquid supporting device provided by the utility model is provided with the sunken part, so that the scanning liquid drops can be received, and the falling of the scanning liquid drops can be avoided to a greater extent. Therefore, when the liquid holding device is matched with other parts in the vapor phase decomposition metal contamination collecting system for use, the scanning and sampling of the edge part of the sample to be detected can be well completed, so that the sampling detection of the edge part of the sample to be detected becomes possible.

Optionally, the supporting arm includes an arm portion and a flexible film, the flexible film is mounted on the arm portion, and the flexible film is in a concave state in a normal state to form the concave portion.

Optionally, the flexible film blowing and sucking device further comprises a blowing and sucking part, a fluid channel is arranged in the arm part, one end of the fluid channel is connected with the blowing and sucking part, and the other end of the fluid channel is communicated with the lower side of the flexible film; the blowing and sucking component is used for conveying fluid into the fluid channel or sucking the fluid so as to switch the flexible membrane between the bulging state and the concave state.

Optionally, the arm portion is provided with a groove, and the flexible membrane is attached to a groove inner wall surface of the groove in a normal state.

Optionally, the flexible film is made of a corrosion-resistant material.

Optionally, the device body includes a driving mechanism, and the driving mechanism is in transmission connection with the supporting arm and is used for driving the supporting arm to displace.

Optionally, the driving mechanism is a driving mechanism, the driving mechanism includes a rotating shaft, and the rotating shaft is in transmission connection with the supporting arm and is used for driving the supporting arm to perform rotational displacement.

Optionally, the device further comprises a transfer arm, and the rotating shaft is connected with the support arm through the transfer arm.

Optionally, the device body is further configured with a height adjusting component for adjusting the installation height of the supporting arm.

Optionally, among the components of the liquid supporting device, at least the supporting arm is made of a corrosion-resistant material, or at least the supporting arm is coated with a corrosion-resistant coating.

Drawings

FIG. 1 is a schematic structural diagram of one embodiment of a solution holding device provided in the present invention;

FIG. 2 is a cross-sectional view of the trailing arm with the flexible membrane in a bulged condition;

FIG. 3 is a schematic diagram of an edge scanning system.

The reference numerals in fig. 1-3 are illustrated as follows:

1 device body, 11 driving mechanism, 111 rotating shaft, 112 driving motor, 113 motor support,

114 coupler, 115 bearing, 116 fixing plate, 117 fixing screw, 118 positioning pin, 119 connecting key, 12 transfer arm and 13 adjusting screw;

2 bracket arm, 21 arm part, 211 fluid channel, 212 groove, 22 flexible membrane;

3, a platform plate;

4, a spray head;

5 cleaning the device;

6, covering a housing;

a, a sample to be tested.

Detailed Description

In order to make the technical solutions of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1-3, fig. 1 is a schematic structural diagram of an embodiment of a liquid supporting device provided in the present invention, fig. 2 is a cross-sectional view of a supporting arm when a flexible film is in a swelling state, and fig. 3 is a schematic structural diagram of an edge scanning system.

As shown in fig. 1, the present invention provides a liquid supporting device, which includes a device body 1 and a supporting arm 2, wherein the supporting arm 2 is installed on the device body 1, and the supporting arm 2 is provided with a concave portion for supporting a scanning liquid drop.

By adopting the scheme, the bracket arm 2 of the liquid supporting device provided by the utility model is provided with the sunken part, so that scanned liquid drops can be received, and the scanned liquid drops can be prevented from falling to a greater extent. Therefore, when the liquid holding device is matched with other parts in the vapor phase decomposition metal contamination collecting system for use, the scanning and sampling of the edge part of the sample A to be detected can be well completed, and the sampling detection of the edge part of the sample A to be detected is possible.

The recess may be a groove 212 formed in the bracket 2.

Alternatively, specifically in the embodiment of the present invention, the supporting arm 2 may include an arm portion 21 and a flexible film 22, the flexible film 22 may be mounted on the arm portion 21, and the flexible film 22 may be in a concave state in a normal state to form a concave portion. That is, the trailing arm 2 will primarily contact the scanning droplet through the flexible membrane 22.

In fact, the groove 212 and the flexible film 22 may be present at the same time, so that, in a normal state, the flexible film 22 may be attached to the inner wall surface of the groove 212, the inner wall surface of the groove 212 may support the flexible film 22, and a situation that a connection portion between the flexible film 22 and the holder 21 is broken due to being pulled by gravity of the scanning liquid droplet can be greatly avoided, and thus reliable connection between the flexible film 22 and the holder 21 can be greatly ensured.

Further, a blowing and sucking member (not shown) may be further included, a fluid passage 211 may be provided in the arm 21, one end of the fluid passage 211 may be connected to the blowing and sucking member, and the other end of the fluid passage 211 may communicate with the lower side of the flexible film 22.

In specific operation, the blowing and sucking component is used for conveying fluid into the fluid channel 211 or sucking the fluid so as to switch the flexible membrane 22 between the bulging state and the concave state; when the flexible film 22 is in a concave state, the flexible film 22 may form a concave portion to receive the scanning liquid drop; after the scanning liquid drop finishes sampling and scanning the edge part of the sample A to be detected, the blowing and sucking component can convey fluid to the lower part of the flexible film 22 through the flow channel 211 so as to drive the flexible film 22 to be in a swelling state, the scanning liquid drop can be better recovered by matching with the spray head 4 (see the following description), and the scanning liquid drop can be better prevented from remaining in the concave part because the flexible film 22 is in the swelling state, so that the recovery amount of the scanning liquid drop can be ensured.

The specific type of the blow-and-suck member is not limited herein as long as the above-described function can be achieved, and the blow-and-suck member may be, for example, a syringe pump. The fluid in the fluid channel 211 may be gas or liquid, and the types of gas and liquid are not limited.

In sampling and scanning metal contamination, the scanning liquid drop used is usually corrosive, and in order to ensure the service life of the device in a long time and the possible influence on the composition of the scanning liquid drop, the embodiment of the present invention may set the material of the flexible film 22 to be a corrosion-resistant material. The specific type of the corrosion-resistant material is not limited herein, and in practical applications, those skilled in the art can determine the type of the corrosive material in a specific use environment.

The bracket arm 2 can be in a static state relative to the device body 1, namely, the bracket arm 2 can not be displaced in actual use. Or, the trailing arm 2 also can produce the displacement relatively to device body 1, at this moment, trailing arm 2 can switch to different stations according to the working requirement of difference, when needs are accepted the scanning liquid drop, trailing arm 2 can remove to the bearing station that can accept the scanning liquid drop, and when need not accept the scanning liquid drop, trailing arm 2 can remove to other stations, for example, clean station, in order conveniently to carry out cleaning to trailing arm 2, and then can avoid the cross contamination between the different experiments betterly. It should be noted that the other stations are not limited to the cleaning station, and may be a maintenance station or the like.

In the embodiment of the present invention, the latter solution is preferably adopted, and in this case, a driving mechanism may be further configured to drive the supporting arm 2 to switch between the supporting station and the other stations. The displacement form output by the driving mechanism can be linear displacement or rotary displacement as long as the technical effect of station switching can be realized; the structural form of the driving mechanism can also be different for different displacement forms.

For example, if the displacement output by the driving mechanism is a linear displacement, the driving mechanism may be a driving element capable of directly outputting the linear displacement, such as an air cylinder, a hydraulic cylinder, or the like, or the driving mechanism may also be a motor, and in this case, a transmission structural member capable of converting a rotational displacement into a linear displacement, such as a rack and pinion structure, a lead screw structure, or the like, needs to be collocated therewith; if the displacement output by the driving mechanism is rotational displacement, the driving mechanism may be a driving element such as a motor capable of directly outputting rotational displacement, and a structure such as a speed reducer may be provided if necessary.

In the scheme of the drawings, as shown in fig. 1, the driving mechanism may be a driving mechanism 11, the driving mechanism 11 may include a driving motor 112, and a rotating shaft of the driving motor 112 may be connected to the rotating shaft 111 through a coupling 114; the driving motor 112 may be mounted on the fixing plate 116 through the motor bracket 113, the fixing plate 116 may be fixedly mounted through a connecting member in the form of a fixing screw 117, and the fixing plate 116 may further be configured with a positioning member in the form of a positioning pin 118, and the like, so as to determine the mounting position of the driving mechanism 11, in a specific practice, the positioning may be performed through the positioning pin 118 first, so that the mounting of the fixing screw 117 may be relatively convenient; the fixing plate 116 may be provided with a bearing 115 for enabling the relative rotation of the rotating shaft 111 and the fixing plate 116; the rotating shaft 111 can be directly connected with the supporting arm 2, or can be configured with a transfer arm 12, the rotating shaft 111 can be connected with the supporting arm 2 through the transfer arm 12, the transfer arm 12 can be connected with the supporting arm 2 through a connecting piece in the form of a screw or the like, the transfer arm 12 can be connected with the rotating shaft 111 through a connecting key 119 to ensure that the transfer arm 12 and the rotating shaft 111 can synchronously rotate, and it can be known that the supporting arm 2 is directly used for contacting with a scanning liquid drop, and the material performance requirement is relatively high, in the embodiment of the utility model, the preferable requirement is an antistatic material such as PEEK (polyetheretherketone) or at least coated with an antistatic coating, the supporting arm 2 and the transfer arm 12 are arranged in sections, only the material of the supporting arm 2 needs to be controlled, the cost can be effectively controlled, and the supporting arms 2 of different materials can be conveniently selected for use according to needs, meanwhile, the requirement of the installation position of the bracket arm 2 can be met.

It should be noted that the above description of the specific structure of the driving mechanism 11 is only an exemplary illustration of the embodiment of the present invention, and is not intended to limit the scope of the edge scanning apparatus provided by the present invention, and the driving mechanism 11 may also adopt other structural forms if the function is satisfied. For example, referring to fig. 1, the driving motor 112 may be provided with a speed reducer, and may be connected to the rotating shaft 111 through an output shaft of the speed reducer, or of course, a rotating shaft of the driving motor 112 or an output shaft of the speed reducer may be directly used as the rotating shaft 111; the motor bracket 113 and the fixing plate 116 may be integrally provided, that is, they may be one component to reduce the number of parts.

Further, can also dispose and increase the component for the mounting height of adjustment trailing arm 2, so that trailing arm 2 is located the bearing station, and trailing arm 2 and shower nozzle 4 cooperate and can hold the scanning liquid droplet better, and the scanning liquid droplet still articulates in shower nozzle 4.

The structural form of the height-adjusting component can also have more choices, such as the arrangement of an adjusting screw rod and the like. In the embodiment of the drawings, as shown in fig. 1, the connecting end portion of the transfer arm 12 and the rotating shaft 111 may include two abutting portions disposed opposite to each other, the distance between the two abutting portions may be adjusted by disposing the adjusting screw 13 so that the two abutting portions can clamp the rotating shaft 111 or release the rotating shaft 111, when the two abutting portions do not clamp the rotating shaft 111, the transfer arm 12 may be displaced in the axial direction of the rotating shaft 111 to conveniently adjust the installation positions of the transfer arm 12 and the rotating shaft 111, thereby changing the installation height of the bracket arm 2, and when the installation height of the bracket arm 2 is determined, the adjusting screw 13 may be tightened to fix the installation height of the bracket arm 2.

The liquid supporting device provided by the embodiment of the utility model does not actually limit the material of each part. However, considering that the scanning liquid drop with corrosiveness is involved in practical application, the embodiment of the utility model provides that at least the material of the bracket arm 2 in each part of the liquid bracket device is preferably a corrosion-resistant material, or at least the bracket arm 2 is coated with a corrosion-resistant coating, so that the service life of the whole device under the corrosive environment can be ensured. The type of the corrosion-resistant material is not limited, and is specifically related to the type of the corrosive material in the actual use process.

Referring to FIG. 3, the following embodiment of the present invention will be described in conjunction with a specific edge scanning system to illustrate the operation of the present invention.

In detail, the edge scanning system may include a platen 3, a nozzle 4, a cleaning device 5, a rotating device (not shown in the figure) and a liquid supporting device provided by the present invention, and the rotating device, the cleaning device 5 and the liquid supporting device may be installed on the platen 3; the rotating device is used for bearing a sample A to be tested, the sample A to be tested can be a wafer or other similar sample pieces, and the rotating device is also used for providing a rotating driving force to drive the sample A to be tested to rotate; the ejection head 4 is used for ejecting or recovering scanning liquid droplets; the liquid supporting device is used for supporting the scanning liquid drops so as to limit the scanning liquid drops between the spray head 4 and the supporting arm 2, the scanning liquid drops can not fall off, and the scanning liquid drops can wrap the edge part of the sample A to be detected.

During specific work, firstly, a sample A to be tested can be placed on a bearing part of a rotating device; then, the nozzle 4 can eject the scanning liquid drop, but it should be noted that the upper end of the scanning liquid drop is still hung on the nozzle 4, that is, the scanning liquid drop is not separated from the nozzle 4, the lower end of the scanning liquid drop can be supported on the concave part of the supporting arm 2 to avoid the dropping of the scanning liquid drop, and meanwhile, the scanning liquid drop can wrap the edge part of the sample a to be tested; then, the rotating device can be started to drive the sample A to be detected to rotate for at least one circle, so that the scanning liquid drop can sample each position of the edge part of the sample A to be detected; then, the scanning liquid supply and recovery unit can recover the scanning liquid droplets by the head 4, that is, can complete scanning and sampling of the edge portion of the sample a to provide conditions for sampling and detecting the edge portion of the sample a.

The platform plate 3 can be further provided with a cover shell 6, the cover shell 6 can be enclosed with the platform plate 3 to form an installation cavity, and a sample A to be tested can be arranged in the installation cavity.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.

Claims

1. The liquid supporting device is characterized by comprising a device body (1) and a supporting arm (2), wherein the supporting arm (2) is installed on the device body (1), and the supporting arm (2) is provided with a concave part for carrying scanning liquid drops.

2. Device according to claim 1, characterized in that said arm (2) comprises an arm portion (21) and a flexible membrane (22), said flexible membrane (22) being mounted to said arm portion (21), said flexible membrane (22) being normally in a concave state for forming said recess.

3. The liquid holding device according to claim 2, further comprising a blowing and sucking component, wherein a fluid channel (211) is arranged in the arm part (21), one end of the fluid channel (211) is connected with the blowing and sucking component, and the other end of the fluid channel (211) is communicated with the lower side of the flexible membrane (22);

the blowing and sucking component is used for conveying fluid into the fluid channel (211) or sucking the fluid so as to switch the flexible membrane (22) between a bulging state and a concave state.

4. The mop of claim 2, wherein the arm (21) is provided with a groove (212), and the flexible membrane (22) is normally attached to an inner wall surface of the groove (212).

5. The mop of claim 2, wherein the flexible membrane (22) is made of a corrosion-resistant material.

6. A liquid holding device according to any one of claims 1-5, characterized in that the device body (1) comprises a driving mechanism, which is in transmission connection with the holding arm (2) for driving the holding arm (2) to displace.

7. The liquid supporting device according to claim 6, wherein the driving mechanism is a driving mechanism (11), the driving mechanism (11) comprises a rotating shaft (111), and the rotating shaft (111) is in transmission connection with the supporting arm (2) and is used for driving the supporting arm (2) to perform rotary displacement.

8. The trailing arm device according to claim 7, further comprising a transfer arm (12), wherein the rotary shaft (111) is connected to the trailing arm (2) through the transfer arm (12).

9. A liquid holding device according to any one of claims 1-5, characterized in that the device body (1) is further provided with a height adjustment means for adjusting the mounting height of the holding arm (2).

10. A liquid entrapping device according to any one of claims 1 to 5, wherein at least the arms (2) of the various parts of the device are made of a corrosion-resistant material, or at least the arms (2) are coated with a corrosion-resistant coating.

11. The device according to claim 6, characterized in that at least the arm (2) of the parts of the device is made of a corrosion-resistant material, or at least the arm (2) is coated with a corrosion-resistant coating.

12. The liquid holding device as claimed in claim 7, characterized in that at least the holding arm (2) of the parts of the liquid holding device is made of a corrosion-resistant material, or at least the holding arm (2) is coated with a corrosion-resistant coating.

13. The liquid holding device as claimed in claim 8, characterized in that at least the holding arm (2) of the parts of the liquid holding device is made of a corrosion-resistant material, or at least the holding arm (2) is coated with a corrosion-resistant coating.

14. The device of claim 9, characterized in that at least the arms (2) of the parts of the device are made of a corrosion-resistant material or at least the arms (2) are coated with a corrosion-resistant coating.