CN216631805U - Shower nozzle calibration instrument - Google Patents

Abstract

The utility model provides a spray head calibration tool, which comprises a fixing part and an extension part, wherein the fixing part is used for being fixed on a spray head; one end of the extension part is connected with the fixing part, and the other end of the extension part extends towards the direction far away from the fixing part; the distance between the other end of the extension part and the wafer is d, and d is more than or equal to 0 and less than or equal to 1 cm; the center line of the extension coincides with the center line of the spray head when the spray head calibration tool is mounted on the spray head. The other end of the extension part can be attached to or closely spaced from the upper surface of the wafer, and the center line of the extension part is superposed with the center line of the sprayer, so that the position of the center line of the sprayer can be poured by utilizing the position of the center line of the extension part, the position of the center line of the extension part relative to the upper surface of the wafer is convenient to observe, and the calibration efficiency of the sprayer is improved.

Description

Spray nozzle calibration tool

Technical Field

The utility model relates to the technical field of semiconductor wet etching equipment, in particular to a spray head calibration tool.

Background

A single wafer cleaning machine is needed in the wet etching process of a semiconductor, as shown in fig. 1 and 2, model number DV38 of LAM company includes a spray pipe 1, a spray head 2 and a wafer tray 3, the spray head 2 is installed at the tail end of the spray pipe 1, and the spray pipe 1 can drive the spray head 2 to swing back and forth; the wafer 4 is fixed on the wafer tray 3 through a tray bolt 5, and a distance of about 3cm is reserved between the wafer 4 and the spray head 2; the wafer tray 3 can rotate with the wafer 4, and the wafer 4 needs to cover the whole area of the wafer 4 by the spray head 2 during the rotation process, so that the chemical liquid sprayed from the spray head 2 can be uniformly sprayed on the surface of the wafer 4.

When the single wafer cleaning machine is maintained, the position of the nozzle 2 needs to be calibrated, so that the nozzle 2 can be over against the center of the wafer 4 and can move to the edge of the wafer 4. However, at present, the position of the nozzle 1 is adjusted mainly by experience and visual inspection of a maintenance worker, so as to adjust the position of the nozzle 2, and then the wafer monitor wafer is used for running and collecting data to verify whether the calibration of the nozzle 2 is completed. Through current calibration mode, need carry out the position of adjustment shower nozzle 2 many times and run goods usually and just can accomplish shower nozzle 2 calibration, the calibration efficiency of shower nozzle 2 is lower.

SUMMERY OF THE UTILITY MODEL

The utility model provides a spray head calibration tool, which aims to solve the technical problem of low calibration efficiency of spray heads.

In order to solve the above technical problem, the present invention provides a nozzle calibration tool, including a fixing portion and an extending portion, wherein the fixing portion is used for fixing on a nozzle; one end of the extension part is connected with the fixing part, and the other end of the extension part extends towards the direction far away from the fixing part; the distance between the other end of the extension part and the wafer is d, and d is more than or equal to 0 and less than or equal to 1 cm; the center line of the extension coincides with the center line of the spray head when the spray head calibration tool is mounted on the spray head.

Optionally, the fixing portion is semi-cylindrical, and one end of the fixing portion is connected with one end of the extending portion; one end of the fixing part is provided with a bottom surface, and the other end of the fixing part is not provided with a bottom surface.

Optionally, a gap is arranged between one end and the other end of the fixing part.

Optionally, the notch includes a first notch and a second notch, and the first notch and the second notch are symmetrically arranged about a center line of the fixing portion.

Optionally, the first notch and the second notch are both fan-shaped.

Optionally, the extension is semi-cylindrical in shape.

Optionally, a linear protrusion is disposed at a position where a center line of the extending portion is located.

Optionally, a centerline of the extension coincides with a centerline of the bottom surface.

Optionally, the diameter of the extension is equal to the diameter of the spray head.

According to the sprayer calibration tool provided by the utility model, the other end of the extension part can be attached to or closely spaced from the upper surface of the wafer, and the center line of the extension part is superposed with the center line of the sprayer, so that the position of the center line of the sprayer can be poured by utilizing the position of the center line of the extension part, the position of the center line of the extension part relative to the upper surface of the wafer can be conveniently observed, and the calibration efficiency of the sprayer is improved.

Drawings

FIG. 1 is a schematic diagram of a single wafer cleaning machine in the prior art.

Fig. 2 is a schematic view showing a connection relationship between the spout and the spray head of fig. 1.

Fig. 3 is a schematic structural diagram of a nozzle calibration tool according to an embodiment of the present invention.

Fig. 4 is a left side schematic view corresponding to fig. 3.

Fig. 5 is a top view schematic diagram corresponding to fig. 3.

[ reference numerals are described below ]:

the spray pipe-1, the spray head-2, the wafer tray-3, the wafer-4 and the tray bolt-5;

a fixed part-6 and an extending part-7;

a first notch-61, a second notch-62, and a protrusion-71.

Detailed Description

To further clarify the objects, advantages and features of the present invention, a showerhead calibration tool according to the present invention will be described in detail with reference to the accompanying drawings. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

In the description of the present invention, the terms "first", "second", etc. are used for convenience of description and reference, but are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined by a qualifier such as "first," "second," etc., may explicitly or implicitly include one or more of that feature.

As shown in fig. 2 to 5, the present embodiment provides a nozzle calibration tool, which includes a fixing portion 6 and an extending portion 7, wherein the fixing portion 6 is used for fixing on the nozzle 2; one end of the extension part 7 is connected with the fixing part 6, and the other end extends in the direction far away from the fixing part 6; the distance between the other end of the extension part 7 and the wafer 4 is d, and d is more than or equal to 0 and less than or equal to 1 cm; when the spray head 2 calibration tool is mounted on the spray head 2, the centre line of the extension 7 coincides with the centre line of the spray head 2.

The use method of the spray head calibration tool comprises the following steps:

1. moving the spray head 2 to be above the central position of the wafer 4;

2. sleeving a spray head calibration tool on the spray head 2;

3. checking whether the central line of the calibration tool is aligned with the center of the wafer 4, so as to judge whether the center of the spray head 2 is aligned with the center of the wafer 4;

4. if the deviation exists, the position of the spray pipe 1 is adjusted to enable the center of the calibration tool to be aligned to the center of the wafer 4, and then the adjusted position of the spray pipe 1 is written into a control module of the machine;

5. the calibration process of the edge positions of the nozzle 2 and the wafer 4 is similar to the step of calibrating the center position of the wafer 4, and whether the center of the nozzle 2 is aligned with the edge of the wafer 4 is checked with reference to the steps 1-4;

6. after the adjustment is finished, the spray head calibration tool is detached, and then the wafer control wafer for testing is used for run verification;

7. if the test data is normal, the calibration operation is finished; and if the test data are abnormal, re-executing the steps 1-7.

In the nozzle calibration tool provided by this embodiment, the other end of the extension portion 7 may be attached to or closely spaced from the upper surface of the wafer 4, and the center line of the extension portion 7 coincides with the center line of the nozzle 2, so that the position of the center line of the nozzle 2 may be poured by using the position of the center line of the extension portion 7, which facilitates observation of the position of the center line of the extension portion 7 relative to the upper surface of the wafer 4, and improves the calibration efficiency of the nozzle 2.

Optionally, as shown in fig. 2 to 5, the fixing portion 6 is shaped like a semi-cylinder, and one end of the fixing portion 6 is connected to one end of the extending portion 7; one end of the fixing part 6 is provided with a bottom surface, and the other end has no bottom surface. Therefore, the fixing part 6 can be conveniently clamped on the spray head 2, or the fixing part 6 can be conveniently detached from the spray head 2. The shape of the spray head 2 is generally cylindrical, the collision head is fixed at one end of the spray pipe 1, the other end of the spray pipe 1 is fixed on the table top of the machine table, and the spray pipe 1 can swing back and forth relative to the table top. In other embodiments, the shape of the fixing portion 6 may be a shape slightly larger than a semi-cylindrical shape or other shapes as long as the fixing portion 6 can be fixed to the head 2 and detached from the head 2.

Optionally, as shown in fig. 2 to 5, a gap is provided between one end and the other end of the fixing portion 6. Set up the breach and can conveniently observe the inner wall of fixed part 6 with whether laminating completely of the outer wall of shower nozzle 2 works as the inner wall of fixed part 6 with when laminating completely of the outer wall of shower nozzle 2, can improve calibration efficiency.

Optionally, as shown in fig. 2 to 3, the notch includes a first notch 61 and a second notch 62, and the first notch 61 and the second notch 62 are symmetrically disposed about a center line of the fixing portion 6. Thus, the first notch 61 and the second notch 62 are conveniently machined, and whether the inner wall of the fixing part 6 and the outer wall of the spray head 2 are completely attached or not is conveniently observed. The spray head 2 calibration tool may be made of plastic or elastomeric material.

Alternatively, as shown in fig. 2 to 3, the first notch 61 and the second notch 62 are both fan-shaped. Thus, the first notch 61 and the second notch 62 are conveniently machined, and whether the inner wall of the fixing part 6 and the outer wall of the spray head 2 are completely attached or not is conveniently observed.

Alternatively, as shown in fig. 2 to 5, the extension 7 may have a semi-cylindrical shape. Therefore, the extension part 7 is convenient to process, the position relation between the extension part 7 and the wafer 4 is convenient to observe, and the position of the spray head 2 is convenient to calibrate.

Alternatively, as shown in fig. 2 to 5, a linear protrusion 71 may be provided at a position where the center line of the extension portion 7 is located. This facilitates observation of whether the center line of the extension 7, the center line of the showerhead 2, the center line of the wafer 4, or the edge of the wafer 4 is on a vertical line. When the extension part 7 is semi-cylindrical, the central line of the extension part 7 is coincident with the central line of the whole cylinder where the extension part 7 is located, that is, the central line of the extension part 7 is a connecting line between the circle center of the bottom surface and the circle center of the top surface of the semi-cylindrical. In other embodiments, the linear protrusions 71 may be painted graduation marks.

Alternatively, as shown in fig. 3 to 5, the center line of the extension portion 7 coincides with the center line of the bottom surface. This facilitates the machining of the extension portion 7 and the fixing portion 6.

Alternatively, as shown in fig. 2 to 3, the diameter of the extension 7 is equal to the diameter of the nozzle head 2. In this way the extension 7 corresponds to a half projection of the spray head 2, which facilitates the calibration of the position of the spray head 2. In other embodiments, the extension 7 may be cylindrical.

In summary, according to the nozzle calibration tool provided by the present invention, the other end of the extension portion 7 and the upper surface of the wafer 4 may be attached or closely spaced, and the center line of the extension portion 7 coincides with the center line of the nozzle 2, so that the position of the center line of the nozzle 2 may be poured by using the position of the center line of the extension portion 7, which facilitates observation of the position of the center line of the extension portion 7 relative to the upper surface of the wafer 4, and improves the calibration efficiency of the nozzle 2.

The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the present invention.

Claims (9)

1. The spray head calibration tool is characterized by comprising a fixing part and an extension part, wherein the fixing part is used for being fixed on a spray head; one end of the extension part is connected with the fixing part, and the other end of the extension part extends towards the direction far away from the fixing part; the distance between the other end of the extension part and the wafer is d, and d is more than or equal to 0 and less than or equal to 1 cm; the center line of the extension coincides with the center line of the spray head when the spray head calibration tool is mounted on the spray head.

2. The nozzle tip calibration tool of claim 1, wherein said retainer portion is semi-cylindrical in shape, one end of said retainer portion being connected to one end of said extension portion; one end of the fixing part is provided with a bottom surface, and the other end of the fixing part is not provided with a bottom surface.

3. The nozzle tip calibration tool of claim 2, wherein a gap is provided between one end and the other end of the securing portion.

4. The nozzle tip calibration tool of claim 3, wherein the notch comprises a first notch and a second notch, the first notch and the second notch being symmetrically disposed about a centerline of the fixed portion.

5. The nozzle tip calibration tool of claim 4, wherein the first notch and the second notch are each sector-ring shaped.

6. The spray head calibration tool of claim 2 wherein the extension is semi-cylindrical in shape.

7. The nozzle tip calibration tool of claim 6 wherein the centerline of the extension is provided with a linear projection.

8. The nozzle tip calibration tool of claim 6 wherein the centerline of said extension is coincident with the centerline of said bottom surface.

9. The spray head calibration tool of claim 6 wherein the diameter of the extension is equal to the diameter of the spray head.

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