CN216626500U

CN216626500U - Novel ion gun water cooling device

Info

Publication number: CN216626500U
Application number: CN202123376653.4U
Authority: CN
Inventors: 廖占武
Original assignee: Beijing Jingheng Industrial Control Technology Co ltd
Current assignee: Beijing Jingheng Industrial Control Technology Co ltd
Priority date: 2021-12-30
Filing date: 2021-12-30
Publication date: 2022-05-27
Anticipated expiration: 2031-12-30

Abstract

The utility model belongs to the technical field of ion guns, and particularly discloses a novel water cooling device of an ion gun, which comprises a vacuum chamber, a cooling water tank, a temperature probe, a temperature controller, a circulating water pump, a filter, a heat exchanger and a refrigerating machine, an ion gun cooling seat is arranged in the vacuum chamber, an ion gun body is arranged on the ion gun, the cooling water outlet of the ion gun cooling seat is connected with the water inlet of a circulating filter through a circulating pipe, the water outlet of the filter is connected with the water inlet of a circulating water pump through a circulating pipe, the utility model realizes double cooling circulation, and ensures that heat generated during the operation of the ion gun is exchanged with low-temperature cooling water externally connected with the equipment through the cooling loop heat exchanger in time so as to ensure the continuous operation of the ion gun.

Description

Novel ion gun water cooling device

Technical Field

The utility model relates to the technical field of ion guns, in particular to a novel water cooling device for an ion gun.

Background

The ion gun can produce a large amount of heats in the course of the work, and the ion gun during operation is difficult to the heat dissipation under the vacuum under being in the high vacuum simultaneously, if can not in time dispel the heat, can not produce high-speed ion flow because overheated and lead to equipment stop work, and the high temperature also can lead to melting to fall ion gun insulating mechanism, and the vacuum chamber internal negative pressure can be inhaled profit etc. in the vacuum chamber.

The heat dissipation technology of the existing ion gun during working: the semiconductor heat dissipation device on the mounting seat mainly dissipates heat, and the whole mechanism is arranged in the vacuum chamber, so that the heat conduction efficiency is low, the long-time continuous work of the ion gun can cause the temperature of the ion gun to rise and stop working due to slow heat dissipation, the working efficiency is influenced, and equipment operation faults are caused in severe cases.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a novel ion gun water cooling device to solve the above problems.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides a novel ion gun water cooling device, includes real empty room, cooling water tank, temperature probe, temperature controller, circulating water pump, filter, heat exchanger and refrigerator, be provided with ion gun cooling seat in the real empty room, be provided with the ion gun body on the ion gun, the cooling water export of ion gun cooling seat has the circulating filter water inlet through the circulating pipe connection, the filter delivery port has the circulating water pump water inlet through the circulating pipe connection, the circulating water pump delivery port has heat exchanger's water inlet through the circulating pipe connection, heat exchanger's delivery port has ion gun cooling seat to form a circulation circuit through the circulating pipe connection.

Preferably, a flow sensor is arranged on the circulating pipe close to the cooling water outlet of the ion gun cooling seat.

Preferably, a circulating pipe arranged at a cooling water outlet of the ion gun cooling seat is connected with a cooling water tank through a circulating branch pipe.

Preferably, the hot gas outlet of the heat exchanger is connected with the hot gas inlet of the refrigerator, and the cold gas outlet of the refrigerator is connected with the cold gas inlet of the heat exchanger.

Preferably, a temperature probe is arranged in the cooling water tank, the temperature probe is connected with a temperature controller, the temperature probe and the temperature controller are electrically connected, the temperature controller is connected with a motor speed regulation module, the temperature controller and the motor speed regulation module are electrically connected, the motor speed regulation module is connected with a circulating water pump, and the motor speed regulation module and the circulating water pump are in control connection.

Compared with the prior art, the utility model has the beneficial effects that: a cooling liquid circulating pipe is designed in the ion gun cooling seat, when the ion gun cooling seat works, cooling liquid in a loop takes away heat generated when the ion gun works from the ion gun base, the ion gun is always in the optimal working temperature, meanwhile, a flow sensor is arranged on the pipeline to detect the flow of the cooling liquid in real time, and if blockage occurs, an alarm is given timely.

Drawings

FIG. 1 is a schematic view of a cooling water circulation structure according to the present invention.

In the figure: 1. a vacuum chamber; 2. an ion gun cooling base; 3. an ion gun body; 4. a flow sensor; 5. a cooling water tank; 6. a temperature probe; 7. a temperature controller; 8. a motor speed regulation module; 9. a water circulating pump; 10. a heat exchanger; 11. a refrigerator; 12. and (3) a filter.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

Referring to fig. 1, the present invention provides a technical solution: a novel ion gun water cooling device comprises a vacuum chamber 1, a cooling water tank 5, a temperature probe 6, a temperature controller 7, a circulating water pump 9, a filter 12, a heat exchanger 10 and a refrigerating machine 11, wherein an ion gun cooling seat 2 is arranged in the vacuum chamber 1, an ion gun body 3 is arranged on the ion gun cooling seat 2, a cooling water outlet of the ion gun cooling seat 2 is connected with a water inlet of the filter 12 through a circulating pipe, a water outlet of the filter 12 is connected with a water inlet of the circulating water pump 9 through a circulating pipe, a water outlet of the circulating water pump 9 is connected with a water inlet of the heat exchanger 10 through a circulating pipe, a water outlet of the heat exchanger 10 is connected with the ion gun cooling seat 2 through a circulating pipe to form a circulating loop, and heat generated when the ion gun body 3 works is taken away to cool the ion gun body 3 through cooling water pumped into the ion gun cooling seat 2, the heat exchanger 10 may cool the cooling water.

Furthermore, a flow sensor 4 is arranged on a circulating pipe close to a cooling water outlet of the ion gun cooling seat 2, the flow sensor 4 detects the flow of cooling water in real time, and timely alarms if blockage occurs.

Further, a circulating pipe arranged at a cooling water outlet of the ion gun cooling seat 2 is connected with a cooling water tank 5 through a circulating branch pipe, cooling water in the cooling water tank 5 is pumped into the ion gun cooling seat 2 for heat exchange, and primary heat exchange is carried out on the heated cooling water in the circulating process.

Further, a hot gas outlet of the heat exchanger 10 is connected to a hot gas inlet of a refrigerator 11, a cold gas outlet of the refrigerator 11 is connected to a cold gas inlet of the heat exchanger 10, the heat exchanger 10 absorbs heat of the heated cooling water, hot gas exhausted by the heat exchanger 10 in the heat exchange process is absorbed by the refrigerator 11, the refrigerator 11 conveys the cold gas to the heat exchanger 10, and the heat exchanger 10 cools the cooling water with heat by using the cold gas to complete secondary heat exchange.

Further, be provided with temperature probe 6 in the cooling water tank 5, temperature probe 6 is connected with temperature controller 7, adopt electric connection between temperature probe 6 and the temperature controller 7, temperature controller 7 is connected with motor speed governing module 8, adopt electric connection between temperature controller 7 and the motor speed governing module 8, motor speed governing module 8 is connected with circulating water pump 9, adopt control connection between motor speed governing module 8 and the circulating water pump 9, temperature probe 6 detects the temperature in the cooling water tank 5, temperature that temperature probe 6 detected is received to temperature controller 7, motor speed governing module is given back to the temperature that temperature controller 7 will detect again, motor speed governing module 8 adjusts the rotational speed control cooling water flow of circulating pump according to the feedback result.

The working principle is as follows: before use, the cooling water tank 5 is filled with cooling water, the temperature controller 7 is set to the optimal ion working temperature, the circulating motor is started to pump the cooling water into the ion gun cooling seat 2 to carry away heat generated during the operation of the ion gun, the flow sensor 4 detects the flow rate of the cooling water in real time during the circulation process, if blockage occurs, an alarm is given in time, when the cooling water with heat passes through a circulation branch pipe arranged on the cooling water tank 5, the cooling water in the cooling water tank 5 enters the circulation pipe to carry out primary heat exchange on the cooling water with heat, since the cooling water is recycled, fungi are likely to be bred in the cooling water, so that the filter 12 is filtered when the cooling water passes through, the quality of the cooling water is kept, then the circulating water pump 9 pumps hot water into the heat exchanger 10, and the heat exchanger 10 absorbs heat, the hot air exhausted by the heat exchanger 10 in the heat exchange process is absorbed by the refrigerator 11, at this time, the refrigerator 11 conveys the cold air to the heat exchanger 10, the heat exchanger 10 cools the cooling water with heat by using the cold air to complete secondary heat exchange, the cooled cooling water enters the ion gun cooling seat 2 again for heat exchange, the cooling water keeps the optimal cooling state to cool the ion gun body 3 in the working process, the ion gun body 3 is always in the optimal working state, the temperature probe 6 detects the temperature of the cooling water in the cooling water tank 5, at this time, the temperature probe 6 sends a signal to the temperature controller 7, the temperature controller 7 receives the temperature detected by the temperature probe 6, then the temperature controller 7 feeds the detected temperature back to the motor speed regulation module, and the motor speed regulation module 8 receives a feedback result, at this moment, motor speed regulation module 8 adjusts the rotational speed of circulating pump according to the feedback result to this flow of adjusting the ion gun cooling water, flow sensor 4 also can detect whether the cooling water reaches the flow value simultaneously, and the coolant in this return circuit is the heat conductivity strong, and corrosivity is low, is difficult to breed the fungus class or the scale deposit and blocks up the cooling pipeline, makes the sustainable work of ion gun.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a novel ion gun water-cooling device which characterized in that: including vacuum chamber (1), cooling water tank (5), temperature probe (6), temperature controller (7), circulating water pump (9), filter (12), heat exchanger (10) and refrigerator (11), be provided with ion gun cooling seat (2) in vacuum chamber (1), be provided with ion gun body (3) on ion gun cooling seat (2), the cooling water export of ion gun cooling seat (2) is connected with filter (12) water inlet through the circulating pipe, filter (12) delivery port has circulating water pump (9) water inlet through circulating pipe connection, circulating water pump (9) delivery port has the water inlet of heat exchanger (10) through circulating pipe connection, the delivery port of heat exchanger (10) has ion gun cooling seat (2) to form a circulation circuit through circulating pipe connection.

2. The novel ion gun water cooling device according to claim 1, characterized in that: and a flow sensor (4) is arranged on a circulating pipe close to a cooling water outlet of the ion gun cooling seat (2).

3. The novel ion gun water cooling device according to claim 1, characterized in that: and a circulating pipe arranged at a cooling water outlet of the ion gun cooling seat (2) is connected with a cooling water tank (5) through a circulating branch pipe.

4. The novel ion gun water cooling device according to claim 1, characterized in that: the hot gas outlet of the heat exchanger (10) is connected with the hot gas inlet of the refrigerator (11), and the cold gas outlet of the refrigerator (11) is connected with the cold gas inlet of the heat exchanger (10).

5. The novel ion gun water cooling device according to claim 1, characterized in that: be provided with temperature probe (6) in cooling water tank (5), temperature probe (6) are connected with temperature controller (7), adopt electric connection between temperature probe (6) and temperature controller (7), temperature controller (7) are connected with motor speed governing module (8), adopt electric connection between temperature controller (7) and motor speed governing module (8), motor speed governing module (8) are connected with circulating water pump (9), adopt control connection between motor speed governing module (8) and circulating water pump (9).