CN216624865U - 266nm pulse solid laser with high energy, high repetition frequency and high beam quality - Google Patents
266nm pulse solid laser with high energy, high repetition frequency and high beam quality Download PDFInfo
- Publication number
- CN216624865U CN216624865U CN202122764947.8U CN202122764947U CN216624865U CN 216624865 U CN216624865 U CN 216624865U CN 202122764947 U CN202122764947 U CN 202122764947U CN 216624865 U CN216624865 U CN 216624865U
- Authority
- CN
- China
- Prior art keywords
- laser
- crystal
- dichroic mirror
- frequency
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Lasers (AREA)
Abstract
The 266nm pulse solid laser with high energy, high repetition frequency and high beam quality provided by the utility model adopts a double-end-face pulse pumping mode, effectively improves the absorption of a laser crystal to pumping light, and obtains fundamental frequency light with high single pulse energy by utilizing the Q regulation of voltage reduction work under the condition of no amplification stage, so that the volume of the laser with high single pulse energy is reduced, and the efficiency is higher; the external cavity frequency doubling technology is adopted, the fundamental frequency beam waist is converted into the double-frequency crystal through the imaging design, the double-frequency conversion efficiency is greatly improved, the quality of a 266nm laser beam is greatly improved by adopting a noncritical phase matching high-temperature working design for the quadruple frequency crystal, the deliquescence of the CLBO crystal is effectively prevented, and the service life of a laser can be effectively prolonged by adopting a two-dimensional point shifting design for the quadruple frequency crystal.
Description
Technical Field
The utility model relates to the technical field of solid lasers, in particular to a 266nm pulse solid laser with high energy, high repetition frequency and high beam quality.
Background
The 266nm laser has short wavelength and high single photon energy, can realize smaller focusing light spots, and is widely applied to the fields of biological detection, spectral analysis, medical treatment, precise micromachining, aviation and the like. The high-energy high-repetition-frequency 266nm laser is mainly generated by modulating Q to generate a pulse fundamental frequency 1064nm laser, then amplifying the fundamental frequency light through an amplifier, and generating through continuous twice frequency multiplication.
The existing high-energy high-repetition-frequency 266nm laser generates nanosecond 1064nm fundamental frequency light by single-end pumping and combining an active Q-switching technology, then amplifies the fundamental frequency light by an amplifier, and generates 266nm laser by continuous twice frequency multiplication.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is desirable to provide a 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality, which is compact, low in cost and highly reliable.
In order to solve the problems, the utility model adopts the following technical scheme:
a high energy high frequency high beam quality 266nm pulsed solid state laser comprising: a first LD pumping source (1), a first collimating lens (2), a first focusing lens (3), a first dichroic mirror (4), a laser crystal Nd, YAG (5), a resonant cavity front end mirror (6), a second focusing lens (7), a second collimating lens (8), a second LD pumping source (9), a resonant cavity rear end mirror (14), a Q-switched crystal BBO (15), a 1064nm 1/4 wave plate (16), a polarization beam splitter prism (17), a third focusing lens (18), an LBO crystal (19), a second dichroic mirror (21), a third collimating lens (22), a 532nm 1/4 wave plate (23), a third dichroic mirror (24), a four-dimensional translation stage (25), a high-temperature oven (26) and a CLBO crystal (27), wherein the resonant cavity front end mirror (6) and the resonant cavity rear end mirror (14) form a resonant cavity, and the high-temperature oven (26) is arranged on the four-dimensional translation stage (25), the CLBO crystal (27) is placed inside the high temperature oven (26), wherein:
when 1/4-wave voltage is not applied to the Q-switched crystal BBO (15), pulsed light emitted by the first LD pumping source (1) sequentially passes through the first collimating lens (2), the first focusing lens (3) and the first dichroic mirror (4) and is converged into the laser crystal Nd: YAG (5); meanwhile, pulsed light emitted by the second LD pump source (9) sequentially passes through the second collimating lens (8), the second focusing lens (7) and the resonant cavity front end mirror (6) and is converged into the laser crystal Nd: YAG (5), the first LD pump source (1) and the second LD pump source (9) are synchronously pulse-pumped, the laser crystal Nd: YAG (5) absorbs the pump light to form the reversal of the number of particles, and laser energy is stored in the laser crystal Nd: YAG (5);
YAG (5) to the resonant cavity, and when the voltage on the Q-switched crystal BBO (15) is reduced, under the combined action of the 1064nm 1/4 wave plate (16) and the polarization beam splitter prism (17), laser is released from the position of the polarization beam splitter prism (17) to form a fundamental frequency 1064nm laser giant pulse;
the fundamental frequency 1064nm laser giant pulse passes through the third focusing lens (18), then falls into the LBO crystal (19) through the beam waist, 532nm laser is generated by the LBO crystal (19) due to a frequency doubling mechanism, the residual 1064nm laser (20) which is not converted into 532nm is reflected by the second dichroic mirror (21), the 532nm laser is collimated by the third collimating lens (22) and then sequentially passes through the 532nm 1/4 wave plate (23) and the third dichroic mirror (24) to enter the CLB0 crystal (27), the CLB0 crystal (27) generates 266nm laser, the residual 532nm laser which is not converted into 266nm is filtered by the dichroic mirror, and finally the 266nm laser (30) is obtained.
In some embodiments, the first LD pump source (1) and the second LD pump source (9) have the same model, the maximum power is 40-100W, and the fiber core diameter is 400um or 105um or 200 um.
In some embodiments, the first collimating lens (2) and the second collimating lens (8) are the same in type, and the focal length is 25-100 mm; the first focusing lens (3) and the second focusing lens (7) are the same in type, and the focal length is 50-100 mm.
In some of these embodiments, the first dichroic mirror (4) is 45 ° incident, coated with AR @808nm and HR @1064nm films, with a 1064nm reflectance of greater than 99.5%, and a 808nm transmittance of greater than 95%; the second dichroic mirror (21) is incident at 45 degrees, HR @1064nm and AR @532nm are plated, the reflectivity of 1064nm is greater than 99.5%, and the transmissivity of 532nm is greater than 95%.
In some of these embodiments, the laser crystal Nd: YAG (5) is 4 × 40mm3 in size, with AR @808&1064nm films on both ends, and with 808nm and 1064nm reflectivities of less than 0.2%.
In some of these embodiments, the resonator front mirror (6) and the resonator back mirror (14) are flat mirrors, coated with an HR @1064nm film, with a 1064nm reflectivity of greater than 99.5%.
In some of these embodiments, the third collimating lens (18) has a focal length of 30mm and the third collimating lens (22) has a focal length of 50 mm.
In some of these embodiments, the LBO crystals (19) have a size of 3 x 15mm3The cutting angle is Theta 90 degrees, Phi 11.2 degrees, and two end faces are plated with AR @1064&532 nm; the size of the CLB0 crystals (27) is 11 x 11mm3The cutting angle is theta62 degrees and phi45 degrees.
In some embodiments, part of laser light (29) in the residual 532nm laser light which is not converted into 266nm is filtered by the fourth dichroic mirror (28), the other part of laser light (10) is filtered by the fifth dichroic mirror (11), and the rest of laser light (13) is filtered by the sixth dichroic mirror (12) after passing through the fifth dichroic mirror (11), so that pure 266nm laser light (30) is finally obtained.
In some of these embodiments, the third dichroic mirror (24), fourth dichroic mirror (28), fifth dichroic mirror (11), and sixth dichroic mirror (12) are of the same model, are 45 ° incident, are coated with HR @266nm and AR @532nm films, have a 266nm reflectance of greater than 99.5%, and have a 532nm transmittance of greater than 95%.
By adopting the technical scheme, the utility model has the following technical effects:
the 266nm pulse solid laser with high energy, high repetition frequency and high beam quality provided by the utility model adopts a double-end-face pulse pumping mode, effectively improves the absorption of a laser crystal to pumping light, and obtains fundamental frequency light with high single pulse energy by utilizing the Q-switching of voltage reduction under the condition of no amplification stage, so that the volume of the laser with high single pulse energy is reduced, and the efficiency is higher; the external cavity frequency doubling technology is adopted, the fundamental frequency beam waist is converted into the double-frequency crystal through the imaging design, the double-frequency conversion efficiency is greatly improved, the quality of a 266nm laser beam is greatly improved by adopting a noncritical phase matching high-temperature working design for the quadruple frequency crystal, the deliquescence of a CLBO crystal is effectively prevented, and the service life of a laser can be effectively prolonged by adopting the two-dimensional point shifting design for the quadruple frequency crystal.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention or in the description of the prior art will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the utility model and are not to be construed as limiting the utility model.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "horizontal", "inside", "outside", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments.
Referring to fig. 1, a schematic structural diagram of a 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality according to an embodiment of the present invention includes: a first LD pumping source (1), a first collimating lens (2), a first focusing lens (3), a first dichroic mirror (4), a laser crystal Nd, YAG (5), a resonant cavity front end mirror (6), a second focusing lens (7), a second collimating lens (8), a second LD pumping source (9), a resonant cavity rear end mirror (14), a Q-switched crystal BBO (15), a 1064nm 1/4 wave plate (16), a polarization beam splitter prism (17), a third focusing lens (18), an LBO crystal (19), a second dichroic mirror (21), a third collimating lens (22), a 532nm 1/4 wave plate (23), a third dichroic mirror (24), a four-dimensional translation stage (25), a high-temperature oven (26) and a CLBO crystal (27), wherein the resonant cavity front end mirror (6) and the resonant cavity rear end mirror (14) form a resonant cavity, and the high-temperature oven (26) is arranged on the four-dimensional translation stage (25), the CLBO crystal (27) is placed in the high-temperature constant-temperature furnace (26).
In some embodiments, the first LD pump source (1) and the second LD pump source (9) have the same model, the maximum power is 40-100W, and the fiber core diameter is 400um or 105um or 200 um.
It can be understood that the double-end pumping adopted by the laser has high efficiency, no amplification stage and weak thermal lens effect, and is beneficial to improving the laser output energy.
In some embodiments, the first collimating lens (2) and the second collimating lens (8) are the same in type, and the focal length is 25-100 mm; the first focusing lens (3) and the second focusing lens (7) are the same in type, and the focal length is 50-100 mm.
In some of these embodiments, the first dichroic mirror (4) is 45 ° incident, coated with AR @808nm and HR @1064nm films, with a 1064nm reflectance of greater than 99.5%, and a 808nm transmittance of greater than 95%; the second dichroic mirror (21) is incident at 45 degrees, HR @1064nm and AR @532nm are plated, the reflectivity of 1064nm is greater than 99.5%, and the transmissivity of 532nm is greater than 95%.
In some of these embodiments, the laser crystal Nd: YAG (5) has a size of 4 x 40mm3Two end faces are coated with AR @808&The reflectivity of the 1064nm film is less than 0.2% at 808nm and 1064 nm.
In some of these embodiments, the resonator front mirror (6) and the resonator back mirror (14) are flat mirrors, coated with an HR @1064nm film, with a 1064nm reflectivity of greater than 99.5%.
In some of these embodiments, the third collimating lens (18) has a focal length of 30mm and the third collimating lens (22) has a focal length of 50 mm.
In some of these embodiments, the LBO crystals (19) have a size of 3 x 15mm3The cutting angle is Theta 90 degrees, Phi 11.2 degrees, and two end faces are plated with AR @1064&532 nm; the size of the CLB0 crystals (27) is 11 x 11mm3The cutting angle is theta62 degrees and phi45 degrees.
It can be understood that because the acceptance angle of the LBO crystal (19) is large, the acceptance angle of the CLB0 crystal (27) is small, and the frequency doubling efficiency is effectively improved by adopting the mode that fundamental frequency light is focused into the LBO crystal 19 and double frequency light is collimated into the CLBO crystal 27.
It can be understood that because the CLBO crystal (27) is designed to be noncritical phase matching, the cutting angle is theta62 degrees, phi45 degrees and no discrete angle, the fundamental frequency light and the frequency doubling light are overlapped and not separated, the frequency doubling efficiency is high, and the light beam quality is good; the service life of a single point of the CLBO crystal (27) is short, and the service life of the CLBO crystal (27) can be prolonged by moving the CLBO crystal (27) up and down, left and right in cooperation with the four-dimensional translation stage 25.
Furthermore, 532nn laser single pulse energy is high, and the CLBO crystal (27) is not coated with an antireflection film, so that the CLBO crystal (27) is effectively prevented from being damaged.
The operation of the 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality provided by this embodiment is described in detail as follows:
when 1/4-wave voltage is not applied to the Q-switched crystal BBO (15), pulsed light emitted by the first LD pump source (1) sequentially passes through the first collimating lens (2), the first focusing lens (3) and the first dichroic mirror (4) to be converged into the laser crystal Nd: YAG (5), and simultaneously pulsed light emitted by the second LD pump source (9) sequentially passes through the second collimating lens (8), the second focusing lens (7) and the resonant cavity front end mirror (6) to be converged into the laser crystal Nd: YAG (5), the first LD pump source (1) and the second LD pump source (9) are synchronously pulse-pumped, the number of particles of the laser crystal Nd: YAG (5) absorbing the pumped light is reversed, and laser energy is stored in the laser crystal Nd: YAG (5).
As can be understood, because two pump sources are synchronously pulse-pumped, the pulse width is 200us, the laser crystal Nd: YAG (5) absorbs the pump light to form the inversion of the number of particles, and at the moment, because of the existence of a 1064nm 1/4 wave plate (16) and a polarization beam splitter Prism (PBS)17, the loss in a resonant cavity formed by a resonant cavity front end mirror (6) and a resonant cavity rear end mirror (14) is large, no laser oscillation exists in the resonant cavity, and the laser energy is stored in the laser crystal Nd: YAG 5.
When 1/4 wave voltage is applied to the Q-switched crystal BBO (15), laser in a resonant cavity formed by a resonant cavity front end mirror (6) and a resonant cavity rear end mirror (14) oscillates in a cavity due to the combined action of a 1064nm 1/4 wave plate (16) and a polarization beam splitter Prism (PBS) (17), laser energy is released from the laser crystal Nd: YAG (5) to the resonant cavity, and when the voltage on the Q-switched crystal BBO (15) is reduced, laser is released from the position of the polarization beam splitter prism (17) under the combined action of the 1064nm 1/4 wave plate (16) and the polarization beam splitter prism (17), and a fundamental 1064nm laser giant pulse is formed.
It can be understood that when the signals of the first LD pump source (1), the second LD pump source (9) and the Q-switched crystal BBO (15) are given periodic signals, periodic 1064nm laser giant pulses can be formed.
The fundamental frequency 1064nm laser giant pulse passes through the third focusing lens (18), then falls into the LBO crystal (19) through the beam waist, 532nm laser is generated by the LBO crystal (19) due to a frequency doubling mechanism, the residual 1064nm laser (20) which is not converted into 532nm is reflected by the second dichroic mirror (21), the 532nm laser is collimated by the third collimating lens (22) and then sequentially passes through the 532nm 1/4 wave plate (23) and the third dichroic mirror (24) to enter the CLB0 crystal (27), the CLB0 crystal (27) generates 266nm laser, the residual 532nm laser which is not converted into 266nm is filtered by the dichroic mirror, and finally the 266nm laser (30) is obtained.
In some embodiments, part of laser light (29) in the residual 532nm laser light which is not converted into 266nm is filtered by the fourth dichroic mirror (28), the other part of laser light (10) is filtered by the fifth dichroic mirror (11), and the rest of laser light (13) is filtered by the sixth dichroic mirror (12) after passing through the fifth dichroic mirror (11), so that pure 266nm laser light (30) is finally obtained.
It can be understood that pure 266nm laser light is obtained by three-time reflecting 266nm laser light successively and transmitting 532nm laser light by using the fourth dichroic mirror (28), the fifth dichroic mirror (11) and the sixth dichroic mirror (12) which have high reflectivity to 266nm, and the loss of the light splitting mode is small for the 266nm laser light. Furthermore, the third dichroic mirror (24), the fourth dichroic mirror (28), the fifth dichroic mirror (11) and the sixth dichroic mirror (12) are of the same model, are incident at 45 degrees and are coated with films of HR @266nm and AR @532nm, the reflectivity of 266nm is greater than 99.5%, and the transmissivity of 532nm is greater than 95%.
The 266nm pulse solid laser with high energy, high repetition frequency and high beam quality provided by the utility model adopts a double-end-face pulse pumping mode, effectively improves the absorption of a laser crystal to pumping light, and obtains fundamental frequency light with high single pulse energy by utilizing the Q-switching of voltage reduction under the condition of no amplification stage, so that the volume of the laser with high single pulse energy is reduced, and the efficiency is higher; the external cavity frequency doubling technology is adopted, the fundamental frequency beam waist is converted into the double-frequency crystal through the imaging design, the double-frequency conversion efficiency is greatly improved, the quality of a 266nm laser beam is greatly improved by adopting a noncritical phase matching high-temperature working design for the quadruple frequency crystal, the deliquescence of a CLBO crystal is effectively prevented, and the service life of a laser can be effectively prolonged by adopting the two-dimensional point shifting design for the quadruple frequency crystal.
The foregoing is considered as illustrative only of the preferred embodiments of the utility model, and is presented merely for purposes of illustration and description of the principles of the utility model and is not intended to limit the scope of the utility model in any way. Any modifications, equivalents and improvements made within the spirit and principles of the utility model and other embodiments of the utility model without the creative effort of those skilled in the art are included in the protection scope of the utility model based on the explanation here.
Claims (10)
1. A high energy, high frequency, high beam quality 266nm pulsed solid state laser comprising: a first LD pumping source (1), a first collimating lens (2), a first focusing lens (3), a first dichroic mirror (4), a laser crystal Nd, YAG (5), a resonant cavity front end mirror (6), a second focusing lens (7), a second collimating lens (8), a second LD pumping source (9), a resonant cavity rear end mirror (14), a Q-switched crystal BBO (15), a 1064nm 1/4 wave plate (16), a polarization beam splitter prism (17), a third focusing lens (18), an LBO crystal (19), a second dichroic mirror (21), a third collimating lens (22), a 532nm 1/4 wave plate (23), a third dichroic mirror (24), a four-dimensional translation stage (25), a high-temperature oven (26) and a CLBO crystal (27), wherein the resonant cavity front end mirror (6) and the resonant cavity rear end mirror (14) form a resonant cavity, and the high-temperature oven (26) is arranged on the four-dimensional translation stage (25), the CLBO crystal (27) is placed inside the high temperature oven (26), wherein:
when 1/4-wave voltage is not applied to the Q-switched crystal BBO (15), pulsed light emitted by the first LD pumping source (1) sequentially passes through the first collimating lens (2), the first focusing lens (3) and the first dichroic mirror (4) and is converged into the laser crystal Nd: YAG (5); meanwhile, pulsed light emitted by the second LD pump source (9) sequentially passes through the second collimating lens (8), the second focusing lens (7) and the resonant cavity front end mirror (6) and is converged into the laser crystal Nd: YAG (5), the first LD pump source (1) and the second LD pump source (9) are synchronously pulse-pumped, the laser crystal Nd: YAG (5) absorbs the pump light to form the reversal of the number of particles, and laser energy is stored in the laser crystal Nd: YAG (5);
YAG (5) to the resonant cavity, and when the voltage on the Q-switched crystal BBO (15) is reduced, under the combined action of the 1064nm 1/4 wave plate (16) and the polarization beam splitter prism (17), laser is released from the position of the polarization beam splitter prism (17) to form a fundamental frequency 1064nm laser giant pulse;
the fundamental frequency 1064nm laser giant pulse passes through the third focusing lens (18), then falls into the LBO crystal (19) through the beam waist, 532nm laser is generated by the LBO crystal (19) due to a frequency doubling mechanism, the residual 1064nm laser (20) which is not converted into 532nm is reflected by the second dichroic mirror (21), the 532nm laser is collimated by the third collimating lens (22) and then sequentially passes through the 532nm 1/4 wave plate (23) and the third dichroic mirror (24) to enter the CLB0 crystal (27), the CLB0 crystal (27) generates 266nm laser, the residual 532nm laser which is not converted into 266nm is filtered by the dichroic mirror, and finally pure 266nm laser (30) is obtained.
2. The 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality as claimed in claim 1, wherein the first LD pump source (1) and the second LD pump source (9) are the same type, have 40-100W of maximum power, and have a fiber core diameter of 400um or 105um or 200um for fiber coupling output.
3. The 266nm pulse solid-state laser with high energy, high repetition frequency and high beam quality as claimed in claim 1, wherein the first collimating lens (2) and the second collimating lens (8) are of the same type and have a focal length of 25-100 mm; the first focusing lens (3) and the second focusing lens (7) are the same in type, and the focal length is 50-100 mm.
4. The high energy high repetition frequency high beam quality 266nm pulsed solid state laser of claim 1, characterized by said first dichroic mirror (4) being 45 ° incident, AR @808nm and HR @1064nm coated, 1064nm reflectivity greater than 99.5% at 1064nm, and 808nm transmittance greater than 95%; the second dichroic mirror (21) is incident at 45 degrees, HR @1064nm and AR @532nm are plated, the reflectivity of 1064nm is greater than 99.5%, and the transmissivity of 532nm is greater than 95%.
5. The high energy high repetition frequency high beam quality 266nm pulsed solid state laser of claim 1, wherein said laser crystal Nd: YAG (5) has a size of 4 x 40mm3, is coated with AR @808&1064nm film on both ends, and has reflectivities of 808nm and 1064nm of less than 0.2%.
6. The high energy high repetition frequency high beam quality 266nm pulsed solid state laser of claim 1, characterized by said resonator front end mirror (6) and said resonator back end mirror (14) both being flat mirrors, HR @1064nm coated, 1064nm reflectivity greater than 99.5%.
7. A high energy high frequency high beam quality 266nm pulsed solid state laser as claimed in claim 1 wherein said third focusing lens (18) has a focal length of 30mm and said third collimating lens (22) has a focal length of 50 mm.
8. A high energy high frequency high beam quality 266nm pulsed solid state laser as claimed in claim 1 wherein said LBO crystal (19) is 3 x 15mm in size3The cutting angle is Theta 90 degrees, Phi 11.2 degrees, and two end faces are plated with AR @1064&532 nm; the size of the CLB0 crystals (27) is 11 x 11mm3The cutting angle is theta62 degrees and phi45 degrees.
9. The high-energy high-repetition-frequency high-beam-quality 266nm pulse solid-state laser according to claim 1, wherein a part of laser light (29) in the residual 532nm laser light that is not converted into 266nm is filtered by a fourth dichroic mirror (28), another part of laser light (10) is filtered by a fifth dichroic mirror (11), and the remaining laser light (13) is filtered by the fifth dichroic mirror (11) and then by a sixth dichroic mirror (12) to finally obtain pure 266nm laser light (30).
10. A high energy high frequency repetition high beam quality 266nm pulsed solid state laser as claimed in claim 9 wherein said third dichroic mirror (24), fourth dichroic mirror (28), fifth dichroic mirror (11) and sixth dichroic mirror (12) are of the same type, 45 ° incident, HR @266nm and AR @532nm coated films, 266nm reflectance greater than 99.5%, 532nm transmittance greater than 95%.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2021219625359 | 2021-08-19 | ||
| CN202121962535 | 2021-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216624865U true CN216624865U (en) | 2022-05-27 |
Family
ID=81694554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122764947.8U Active CN216624865U (en) | 2021-08-19 | 2021-11-11 | 266nm pulse solid laser with high energy, high repetition frequency and high beam quality |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216624865U (en) |
-
2021
- 2021-11-11 CN CN202122764947.8U patent/CN216624865U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4984104B2 (en) | Passive mode-locked picosecond laser | |
| CN112003118B (en) | 222nm wavelength deep ultraviolet pulse laser source | |
| CN113629482B (en) | Subnanosecond green laser | |
| CN102437502A (en) | Thin disk 515nm all-solid-state green laser | |
| CN109586153B (en) | Neodymium-doped lithium yttrium fluoride nanosecond pulse blue laser | |
| CN211879768U (en) | Dual-wavelength pumping ultraviolet laser generating device | |
| CN112615238A (en) | Large-energy high-efficiency all-solid-state green laser | |
| CN210379761U (en) | Laser with high beam quality | |
| CN210779491U (en) | Electro-optically Q-switched intracavity frequency doubling subnanosecond pulse green laser | |
| CN216624865U (en) | 266nm pulse solid laser with high energy, high repetition frequency and high beam quality | |
| CN112186478A (en) | Laser with adjustable power proportion and pulse interval and method | |
| CN113872030A (en) | 266nm pulse solid laser | |
| CN107946891B (en) | A kind of high-power ultraviolet solid-state laser | |
| CN113872033A (en) | 266nm pulse solid laser with high energy, high repetition frequency and high beam quality | |
| CN107069414B (en) | Small hundred picosecond laser beauty instrument | |
| CN112636146B (en) | High-power mode-locked disc laser | |
| CN113948949A (en) | Picosecond laser emitting device | |
| CN216390021U (en) | 266nm pulse solid laser | |
| CN111916987A (en) | High efficiency solid state UV laser | |
| CN108054627B (en) | Smooth time waveform narrow linewidth 1319nm pulse laser | |
| CN111725698A (en) | All-solid-state Raman frequency-doubling deep red laser and laser generation method | |
| CN116722429B (en) | High-beam-quality long-pulse-width green laser | |
| CN216390015U (en) | Picosecond laser emitting device | |
| CN212485790U (en) | All-solid-state Raman frequency doubling deep red laser | |
| CN115832837A (en) | Laser device for realizing single longitudinal mode based on intracavity light feedback |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |