CN216620618U

CN216620618U - Wafer drier

Info

Publication number: CN216620618U
Application number: CN202123455766.3U
Authority: CN
Inventors: 李春阳; 高局; 彭祎; 任超
Original assignee: Ningbo Chipex Semiconductor Co ltd
Current assignee: Ningbo Chipex Semiconductor Co ltd
Priority date: 2021-12-31
Filing date: 2021-12-31
Publication date: 2022-05-27
Anticipated expiration: 2031-12-31

Abstract

The application relates to the technical field of spin dryers, in particular to a wafer spin dryer, which comprises a roller, a limiting assembly and a spin dryer main body, wherein a rotating groove is formed in the spin dryer main body, the roller is in transmission connection with the spin dryer main body and rotates in the rotating groove, and the limiting assembly is arranged on the roller; spacing subassembly includes slip rail, level rail, go-between and carousel, and go-between and carousel be fixed connection respectively in the both ends of cylinder, and the go-between is located the notch one end that is close to the rotation groove, and the both ends of slip rail slide respectively to be connected on the lateral wall in opposite directions of go-between and carousel, and the both ends of level rail respectively with the lateral wall fixed connection in opposite directions of go-between and carousel, slide and be the interval setting between rail and the level rail. This application has the relative position adaptation through adjusting upper limit guide rail and carries out spacingly to the different holding box of two kinds of sizes, and then a drier can supply the different holding box of two kinds of sizes to put into, need not carry out the processing of spin-drying through the drier that uses two kinds of different specifications, convenient to use's effect.

Description

Wafer drier

Technical Field

The application relates to the technical field of spin dryers, in particular to a wafer spin dryer.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, the wafer is produced and processed according to six-inch and eight-inch sizes according to requirements during production, cleaning and spin-drying treatment are needed after the wafer is processed, and a specific wafer spin-drying machine is used for spin-drying in the spin-drying treatment process.

Need place six cun and eight cun wafers in the different holding box of two kinds of sizes before spin-drying, two kinds of holding box divide as shown in fig. 1, six cun wafers are placed in the less holding box of size, eight cun wafers are placed in the great holding box of size, be provided with the stopper on four diagonal angles of holding box, stopper on the same level is parallel to each other, the distance that two kinds of different holding box of size are located between two stoppers of bottom is the same, be equipped with on the drier and supply the holding box to insert and spacing cylinder, be equipped with the joint piece on the all side walls of cylinder, the groove of sliding has been seted up on the joint piece, when the joint stopper is located the cylinder, four stoppers of joint stopper insert and spacing in the inslot that slides that corresponds. At present, a spin dryer of one specification can only correspond to a containing box of one specification, and when wafers of different sizes need to be dried, the wafers can only be dried by using a spin dryer of another corresponding specification.

In view of the above-mentioned related technologies, the inventor believes that the spin dryer cannot accommodate two accommodating boxes with different sizes to be put in and spin-dried at the same time, and has inconvenient use and room for improvement.

SUMMERY OF THE UTILITY MODEL

In order to facilitate that the same spin dryer can supply two kinds of different sizes of holding boxes to put into and carry out the processing of spin-drying to different holding boxes, the application provides a wafer spin dryer.

The application provides a wafer drier adopts following technical scheme:

a wafer spin dryer comprises a connecting assembly, a limiting assembly and a spin dryer body, wherein the connecting assembly comprises a roller, a connecting ring and a rotary disc, the connecting ring and the rotary disc are respectively and fixedly connected to two ends of the roller, the limiting assembly comprises a sliding rail and a fixed rail, two ends of the fixed rail are respectively and fixedly connected to opposite side walls of the connecting ring and the rotary disc, two ends of the sliding rail are respectively and slidably connected to opposite side walls of the connecting ring and the rotary disc, sliding grooves are formed in one sides of the sliding rail and the fixed rail, which face a containing box, respectively, and the sliding rail is provided with a first station and a second station;

when the sliding rail slides to the first station, the small-size containing box is placed in the sliding rail, and four limiting blocks on the peripheral side of the containing box are respectively inserted into and slide in the corresponding sliding grooves;

when the sliding rail slides to the second station, the large-size containing box is placed, and the four limiting blocks of the containing box are respectively inserted into and slide in the corresponding sliding grooves.

Through adopting above-mentioned technical scheme, will slide the rail and adjust between first station and second station as required for when two kinds of different holding boxes of size are placed in the cylinder, the groove that slides on slide rail and the fixed rail can supply the stopper on the holding box to insert and slide, and spacing to the stopper butt, and then a drier can supply the different holding boxes of two kinds of sizes to put into, need not carry out the processing of spin-drying through the drier that uses two kinds of different specifications, convenient to use.

Optionally, the go-between is followed first spout has been seted up to the axis direction of cylinder, first spout runs through the go-between, be equipped with clamp bolt on the rail that slides, first spout supplies clamp bolt's screw rod wears to establish and slides, clamp bolt's bolt head compress tightly in on the go-between, the carousel orientation the second spout has been seted up to one side of go-between, the second spout supplies the slide rail is kept away from the one end of go-between inserts and slides.

Through adopting above-mentioned technical scheme, the setting of first spout and second spout to in the upside stopper of not unidimensional holding box inserts the sliding groove that corresponds last limit guide rail from the position of the less holding box of adaptation size of sliding rail to the position of the great holding box of adaptation size, sliding rail only need in the accommodation process along the inner wall of first sliding groove slide can, improved sliding rail's regulation efficiency.

Optionally, the rail that slides is close to the one end fixedly connected with connecting axle of carousel, the connecting axle is kept away from the one end of rail that slides is provided with the sliding block, the size of sliding block is greater than the diameter of connecting axle, the spacing groove has been seted up on the inner wall of second spout, spacing groove and the mutual intercommunication of second spout, the spacing groove supplies the sliding block inserts and slides, the inner wall of spacing groove is right the sliding block is spacing.

Through adopting above-mentioned technical scheme, make the slip rail at the in-process that slides through setting up connecting axle and sliding block, the inner wall of spacing groove is spacing to the sliding block for the connecting axle is close to the difficult emergence skew of the one end of carousel and is difficult for breaking away from in the second spout of following of adjusting the in-process that slides, has increased the stability of sliding that the connecting axle is located the second spout.

Optionally, a plurality of perforations have all been seted up on the inner wall in groove that slides, the perforation runs through the inner wall in groove that slides, it is a plurality of be the interval setting between the perforation.

Through adopting above-mentioned technical scheme, fenestrate setting has reduced the whole weight of slip rail and fixed rail, and then has reduced the consumptive material of spacing pole, lower spacing pole, has reduced the processing cost.

Optionally, a spring plunger is arranged on the fixed rail, the spring plunger is fixedly connected to the bottom of the sliding groove, a plunger head of the spring plunger extends into the sliding groove, and one side of the accommodating box, which is close to the connecting ring, is abutted against the plunger head of the spring plunger.

Through adopting above-mentioned technical scheme, carry on spacingly through spring plunger's plunger head to the holding box, and then the holding box is in the in-process that spin-dries, and difficult emergence is slided on the axis direction of cylinder, and then the in-process that spin-dries, has increased the stability of holding box in the cylinder.

Optionally, the spacing subassembly still includes the butt axle, the butt axle is equipped with two at least, two at least butt axle fixed connection in the carousel orientation one side of connecting the annular, the guide way has been seted up on the carousel, the guide way supplies the close one end of butt axle is inserted and is slided, work piece butt in the holding box in on the circumference lateral wall of butt axle.

Through adopting above-mentioned technical scheme, the butt axle carries out the butt spacing to the wafer in the holding box, and then the wafer has better firm in connection nature with the holding box at the in-process that spin-dries, is difficult for breaking away from in the holding box, plays the guard action to the wafer.

Optionally, the side wall of the circumferential side of the butt joint shaft is sleeved with a buffer sleeve.

By adopting the technical scheme, when the wafer in the accommodating box is abutted against the side wall of the circumferential side of the abutting shaft due to the arrangement of the buffer sleeve, the wafer is not easy to generate relative friction with the abutting shaft, and the probability of abrasion of the wafer due to the relative friction with the abutting shaft is reduced.

Optionally, a pressing block is arranged at one end, far away from the turntable, of the abutting shaft, a threaded column is arranged on one side, facing the abutting shaft, of the pressing block, the pressing block is in threaded connection with the abutting shaft, and the buffer sleeve is in abutting connection with the opposite side wall of the abutting shaft.

Through adopting above-mentioned technical scheme, the compact heap compresses tightly spacingly to the one end that the carousel was kept away from to the cushion collar, has increased the firm in connection nature of cushion collar and butt axle, and then the cushion collar is difficult for breaking away from the butt axle from the rotation in-process that spin-dries.

Optionally, an abutting rod is further disposed on an inner wall of the connecting ring, one end of the abutting rod is fixedly connected to one side of the turntable, which faces the connecting ring, the other end of the connecting ring is fixedly connected to the circumferential inner wall of the connecting ring, an axis of the abutting rod and an axis of the drum are arranged in parallel, and the abutting rod abuts against two opposite side walls of the large-size accommodating box.

Through adopting above-mentioned technical scheme, the setting up of butt pole makes the great holding box of size at the in-process that spin-dries, and the butt pole carries out the butt spacing to the double-phase relative lateral wall of holding box, and then the difficult emergence of the great holding box of weight relatively rocks at the rotation in-process, and stability is better.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the sliding rail is adjusted between the first station and the second station as required, so that when two accommodating boxes with different sizes are placed in the roller, the sliding grooves on the sliding rail and the fixed rail can be used for the insertion and sliding of the limiting blocks on the accommodating boxes, and the limiting blocks are abutted and limited, so that one spin dryer can be used for placing two accommodating boxes with different sizes, and spin-drying treatment is not required to be carried out by using two spin dryers with different specifications, and the use is convenient;

2. the connecting shaft and the sliding block are arranged, so that the sliding block is limited by the inner wall of the limiting groove in the sliding process of the sliding rail, one end, close to the rotary table, of the connecting shaft is not prone to deviation in the sliding adjusting process and is not prone to being separated from the second sliding groove, and the sliding stability of the connecting shaft in the second sliding groove is improved;

3. the setting of butt link pole makes the great holding box of size at the in-process that spin-dries, and the butt link carries out the butt to the double-phase lateral wall of holding box spacing, and then the difficult emergence of the great holding box of weight relatively rocks at the rotation in-process, and stability is better.

Drawings

Fig. 1 is a schematic diagram showing a side view structure of two different sizes of stoppers in the related art.

Fig. 2 is a schematic view of the overall structure of a wafer dryer according to the present application.

Fig. 3 is an exploded view of the dryer body and the sealing cover in the present application.

Fig. 4 is a schematic view of the overall structure of the limiting assembly, the connecting assembly and the abutting rod in the application.

Fig. 5 is an enlarged view at a in fig. 4.

Fig. 6 is a partial structural schematic view of the roller and the limiting assembly in the present application.

Fig. 7 is an exploded view of the barrel and plunger spring of the present application.

Fig. 8 is an enlarged view at B in fig. 7.

Fig. 9 is a side view of the structure of the shaft side part of the drum and the turntable in the present application.

Fig. 10 is a partial exploded view of the drum, turntable and sliding rail of the present application.

Fig. 11 is an exploded view of the abutment shaft and drum, turntable, of the present application.

Fig. 12 is an exploded view of the abutment shaft and the cushion collar, slip nut, and compact block of the present application.

Description of reference numerals: 1. a connecting assembly; 11. a drum; 110. a rotating groove; 12. a connecting ring; 120. a first chute; 13. a turntable; 130. a second chute; 131. a limiting groove; 132. a first regulating groove; 133. a second regulating groove; 134. a guide groove; 135. a sliding nut; 136. a communicating groove; 2. a limiting component; 21. sliding the rail; 210. a hold-down bolt; 211. a connecting shaft; 212. a sliding block; 22. fixing a rail; 23. a sliding groove; 230. perforating; 3. a drier body; 31. a sealing cover; 310. hinging a shaft; 32. a hinged block; 320. a hinge hole; 4. a spring plunger; 41. a plunger head; 5. a butt joint shaft; 51. an externally threaded shaft; 52. a buffer sleeve; 53. a compression block; 530. a threaded post; 6. a butting rod; 61. a bending part.

Detailed Description

The present application is described in further detail below with reference to figures 1-12. In this embodiment, the direction indicated by the z-axis of the coordinate axes is upward, the direction opposite to the z-axis is downward, the direction indicated by the x-axis is left, the direction opposite to the x-axis is right, the direction indicated by the y-axis is forward, and the direction opposite to the y-axis is backward.

Referring to fig. 1, in the present application, the accommodating boxes have two sizes, one is a first accommodating box 1a for accommodating six-inch wafers, the other is a second accommodating box 2a for accommodating eight-inch wafers, the size of the first accommodating box 1a is smaller than that of the second accommodating box 2a, the peripheral sides of the first accommodating box 1a and the second accommodating box 2a are respectively provided with two limiting blocks 3a, the limiting blocks 3a located above are provided with two limiting blocks, and the limiting blocks 3a located below are provided with two limiting blocks. The two accommodating boxes on the first accommodating box 1a have the same distance and shape between the two limiting blocks 3a below. The distance between the limiting blocks 3a located above is different in the horizontal direction and the vertical direction, the height of the limiting blocks 3a located above the first containing box in the vertical direction is higher, and the relative distance between the limiting blocks 3a on the second containing box 2a is larger than that of the first containing box 1a in the horizontal direction.

The embodiment of the application discloses a wafer drier. Referring to fig. 2, the wafer spin dryer comprises a connecting assembly 1, a limiting assembly 2 and a spin dryer body 3, wherein the connecting assembly 1 comprises a drum 11, a connecting ring 12 and a rotating disc 13, the connecting ring 12 and the rotating disc 13 are fixedly connected to two ends of the drum 11, the limiting assembly 2 is connected to the connecting ring 12 and the rotating disc 13 in a sliding mode and used for limiting a containing box, and the drum 11 is connected to the spin dryer body 3 in a transmission mode and used for containing and drying.

Referring to fig. 3, a rotating groove 110 is formed in the spin dryer body 3, the rotating groove 110 is formed toward the front side, a motor for driving the spin dryer body 3 to rotate is arranged on the spin dryer body 3, an output shaft of the motor is in transmission connection with the drum 11, and the drum 11 rotates in the rotating groove 110.

Referring to fig. 3, the spin dryer body 3 is further provided with a sealing cover 31 for covering the opening of the rotating groove 110, a hinge shaft 310 is arranged on the side wall of the edge of the sealing cover 31, a hinge block 32 is fixedly connected to the side wall of the spin dryer body 3 close to the front side, the number of the hinge blocks 32 is two, the two hinge blocks 32 are arranged at intervals, and hinge holes 320 for the hinge shaft 310 to be inserted and changed are formed in the two hinge blocks 32.

Referring to fig. 4, a butt-joint rod 6 is arranged on the front side wall of the rotary table 13, the rear end of the butt-joint rod 6 is fixedly connected to the rotary table 13, a bending portion 61 is integrally arranged at the front end of the butt-joint rod 6, and the butt-joint rod 6 and the bending portion 61 are arranged perpendicular to each other. The bending portion 61 is fixedly connected to the rear side wall of the connecting ring 12, the axis of the abutting rod 6 and the axis of the rotary disc 13 are arranged in parallel, and the abutting rod 6 is pressed against the two opposite outer walls of the two sides of the second accommodating box, so that the second accommodating box with relatively large weight is not easy to slide in the circumferential direction in the rotating process.

Referring to fig. 4 and 5, the connection ring 12 is welded to the front side wall of the drum 11, and the turntable 13 is fixedly connected to the rear side wall of the drum 11, the turntable 13 and the connection ring 12 being concentrically arranged. Spacing subassembly 2 includes slip rail 21 and fixed rail 22, first spout 120 has been seted up on the go-between 12, first spout 120 runs through the front and back lateral wall of go-between 12, the front end of slip rail 21 is equipped with clamp bolt 210, clamp bolt 210's screw rod passes first spout 120 threaded connection on slip rail 21, second spout 130 has been seted up on carousel 13, second spout 130 has both sides opening, one side opening is towards the lateral wall of carousel 13 week side, the opposite side opening is seted up towards the front side, the opening towards the front side supplies the rear end of slip rail 21 to insert and slide. The number of the sliding rails 21 and the number of the fixed rails 22 are two, and the sliding rails 21 and the fixed rails 22 are arranged at intervals.

Referring to fig. 6, the sliding groove 23 has been all seted up to sliding rail 21 and fixed rail 22, and the limiting block that the groove 23 that slides on sliding rail 21 supplies the holding box to be located the top inserts and slides, and the groove 23 that slides on fixed rail 22 supplies the holding box to be located the below to insert and slide, and when the limiting block was located the corresponding groove 23 that slides, the lateral wall of limiting block and the double-phase perpendicular lateral wall of the groove 23 that slides pasted and spacing each other.

Referring to fig. 6-8, the sliding grooves 23 are all provided with a plurality of through holes 230, the through holes 230 are vertically formed, and the through holes 230 are uniformly spaced. The fixed rail 22 is provided with a spring plunger 4, the spring plunger 4 is fixedly connected in the through hole 230, and a plunger head 41 of the spring plunger 4 extends into the sliding groove 23. When the accommodating box is inserted into the roller 11 and the limiting block is inserted into the sliding groove 23, the plunger head 41 of the spring plunger 4 contacts and contracts with the limiting block, when the accommodating box completely enters the roller 11, the plunger head 41 of the spring plunger 4 is not abutted by the limiting block, and the plunger head 41 pops out to stretch into the sliding groove 23 and is abutted with the front side of the accommodating box for limitation.

Referring to fig. 9, the second sliding chute 130 includes a first adjusting groove 132 and a second adjusting groove 133, the second adjusting groove 133 and the first adjusting groove 132 are communicated with each other, the second adjusting groove 133 is arc-shaped, when the sliding block 212 is connected to the end of the first adjusting groove 132 connected to the second adjusting groove 133 in a sliding manner, the sliding rail 21 is located at the first station, and when the sliding rail 21 slides to the end of the second adjusting groove 133 far from the first adjusting groove 132, the sliding rail 21 is located at the second station. When the sliding rail 21 is located at the first station, the sliding groove 23 on the sliding rail 21 is used for the first accommodating box to be inserted, and the sliding groove 23 on the sliding rail 21 limits the limiting block located above the accommodating box. When the sliding rail 21 is located at the second station, the sliding groove 23 limits the accommodating box above the second accommodating box.

Referring to fig. 9 and 10, a limiting groove 131 is formed in an inner wall of the second sliding groove 130 facing the rear side, the limiting groove 131 penetrates through a rear side wall of the rotary table 13, the limiting groove 131 is communicated with the second sliding groove 130, a connecting shaft 211 coaxially arranged is welded at one end of the sliding rail 21 facing the rear side, a sliding block 212 is fixedly connected to the rear end of the connecting shaft 211, the sliding block 212 is square, the size of the sliding block 212 is larger than the diameter of the connecting shaft 211, the limiting groove 131 allows the sliding block 212 to be inserted and slid, the connecting shaft 211 is penetrated by the second sliding groove 130, when the sliding block 212 is located in the limiting groove 131, a peripheral side wall of the connecting shaft 211 is abutted against the inner wall of the second sliding groove 130, a front side wall of the sliding block 212 is attached to a groove bottom of the limiting groove 131, and a rear side wall of the sliding rail 21 is attached to the front side of the rotary table 13.

Referring to fig. 11 and 12, at least two abutting shafts 5 for limiting the position of the wafer in the accommodating box are further arranged on the rotary table 13, the two abutting shafts 5 are arranged at intervals, a guide groove 134 is formed in the rear side wall of the rotary table 13, the number of the guide groove 134 corresponds to that of the abutting shafts 5, the corresponding guide groove 134 has two side notches, one side notch of the guide groove 134 is formed towards the side wall of the periphery of the rotary table 13, the other side notch of the guide groove 134 is formed towards the rear side wall of the rotary table 13, a sliding nut 135 is arranged on the rotary table 13, the guide groove 134 is provided for the sliding nut 135 to be embedded and slide, and two opposite inner walls of the guide groove 134 are attached to two opposite outer side walls of the sliding nut 135. The rear end fixedly connected with of butt axle 5 is the external screw thread axle 51 of concentric setting, the guide way 134 is opened towards the front side and is equipped with the intercommunication groove 136, intercommunication groove 136 supplies external screw thread axle 51 to wear to establish, the distance between the double-phase opposite lateral wall of intercommunication groove 136 is greater than the diameter of external screw thread axle 51 and is less than the size of the nut 135 that slides, threaded connection is on the nut 135 that slides after external screw thread axle 51 passes guide way 134, the rear end lateral wall of butt axle 5 compresses tightly on carousel 13, make butt axle 5 difficult emergence not hard up at the in-process that spin-dries.

Referring to fig. 11 and 12, in order to reduce the probability of the wafer being worn when it contacts the contact shafts 5, the buffer sleeves 52 are sleeved on the circumferential side walls of the two contact shafts 5, and the buffer sleeves 52 are rubber sleeves. The threaded hole is seted up to the front end of butt axle 5, is equipped with the compact heap 53 that is circular setting on the connecting axle 211, and the rear end an organic whole of compact heap 53 is equipped with screw thread post 530, and screw thread post 530 threaded connection is in the threaded hole, and the rear side butt of compact heap 53 is in front end one side of cushion collar 52, and compact heap 53 is spacing to cushion collar 52, has increased the fastness of being connected between cushion collar 52 and the butt axle 5.

The implementation principle of a wafer drier in the embodiment of the application is as follows: when putting into the small-size holding box, earlier slide rail 21 is adjusted and is slided to first station along first adjustment tank 132 on, when the holding box was put into cylinder 11, the stopper inserted corresponding sliding groove 23 in, the front side of holding box and the plunger head 41 butt of spring plunger 4 on the fixed rail 22, then slide butt axle 5 to suitable position through loosening butt axle 5 soon, screw up butt axle 5 again for butt axle 5 is difficult for taking place gliding simultaneously, cushion collar 52 and wafer butt joint. When the second accommodating box needs to be placed, the abutting shaft 5 is adjusted to one side close to the inner wall of the abutting ring, the sliding rod rail slides to one end far away from the first adjusting groove 132 along the second adjusting groove 133, so that the sliding rail 21 is positioned on the second station, and the limiting block above the large-size accommodating box is suitable for being inserted into the sliding groove 23. Through the relative position regulation to rail 21 and butt axle 5 that slides for same spin-dryer can adapt to two kinds of different holding boxes of size and put into, in order to carry out the processing of spin-drying, convenient to use.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A wafer drier is characterized in that: the novel spin dryer comprises a connecting assembly (1), a limiting assembly (2) and a spin dryer body (3), wherein the connecting assembly (1) comprises a roller (11), a connecting ring (12) and a rotating disc (13), the connecting ring (12) and the rotating disc (13) are respectively and fixedly connected to two ends of the roller (11), the limiting assembly (2) comprises a sliding rail (21) and a fixed rail (22), two ends of the fixed rail (22) are respectively and fixedly connected to opposite side walls of the connecting ring (12) and the rotating disc (13), two ends of the sliding rail (21) are respectively and slidably connected to opposite side walls of the connecting ring (12) and the rotating disc (13), sliding grooves (23) are respectively formed in one sides, facing a containing box, of the sliding rail (21) and the fixed rail (22), of the sliding rail (21) is provided with a first station and a second station;

when the sliding rail (21) slides to a first station, a small-size containing box is placed in the sliding rail, and four limiting blocks on the peripheral side of the containing box are respectively inserted into and slide in the corresponding sliding grooves (23);

when the sliding rail (21) slides to the second station, a large-size containing box is placed, and four limiting blocks of the containing box are respectively inserted into and slide in the corresponding sliding grooves (23).

2. A wafer dryer according to claim 1 wherein: the utility model discloses a roller, including cylinder (11), connecting ring (12), first spout (120) have been seted up to the axis direction of cylinder (11), first spout (120) run through connecting ring (12), be equipped with compression bolt (210) on slip rail (21), first spout (120) supply compression bolt (210)'s screw rod is worn to establish and slides, compression bolt (210) the bolt head compress tightly in on connecting ring (12), carousel (13) orientation second spout (130) have been seted up to one side of connecting ring (12), second spout (130) supply slip rail (21) are kept away from the one end of connecting ring (12) is inserted and is slided.

3. A wafer dryer according to claim 2 wherein: sliding rail (21) are close to the one end fixedly connected with connecting axle (211) of carousel (13), connecting axle (211) are kept away from the one end of sliding rail (21) is provided with sliding block (212), sliding block (212)'s size is greater than the diameter of connecting axle (211), spacing groove (131) have been seted up on the inner wall of second spout (130), spacing groove (131) and second spout (130) communicate each other, spacing groove (131) supply sliding block (212) insert and slide, the inner wall of spacing groove (131) is right sliding block (212) are spacing.

4. A wafer dryer according to claim 1 wherein: all seted up a plurality of perforation (230) on the inner wall in groove (23) slides, perforation (230) run through the inner wall in groove (23) slides, it is a plurality of be the interval setting between perforation (230).

5. The wafer dryer of claim 4, wherein: the spring plunger (4) is arranged on the fixed rail (22), the spring plunger (4) is fixedly connected to the bottom of the sliding groove (23), a plunger head (41) of the spring plunger (4) extends into the sliding groove (23), and one side, close to the connecting ring (12), of the containing box is abutted to the plunger head (41) of the spring plunger (4).

6. A wafer dryer according to claim 1 wherein: spacing subassembly (2) still include butt axle (5), butt axle (5) are equipped with two at least, two at least butt axle (5) fixed connection in carousel (13) orientation one side in go-between (12) groove, guide way (134) have been seted up on carousel (13), guide way (134) confession the close one end of butt axle (5) is inserted and is slided, work piece butt in the holding box in the circumference lateral wall of butt axle (5).

7. The wafer dryer of claim 6, wherein: the side wall of the circumferential side of the butt joint shaft (5) is sleeved with a buffer sleeve (52).

8. A wafer dryer according to claim 7 wherein: one end, far away from carousel (13), of butt joint axle (5) sets up compact heap (53), compact heap (53) orientation one side of butt joint axle (5) is equipped with screw thread post (530), compact heap (53) and butt joint axle (5) threaded connection, cushion collar (52) with the lateral wall looks butt in opposite directions of butt joint axle (5).

9. A wafer dryer according to claim 1 wherein: the inner wall of the connecting ring (12) is further provided with a butt joint rod (6), one end of the butt joint rod (6) is fixedly connected to one side, facing the connecting ring (12), of the rotating disc (13), the other end of the butt joint rod (6) is fixedly connected to the circumferential inner wall of the connecting ring (12), the axis of the butt joint rod (6) and the axis of the roller (11) are arranged in parallel, and the butt joint rod (6) is abutted to two opposite side walls of the large-size containing box.