CN216606440U

CN216606440U - Semiconductor part cleaning device based on online monitoring technology

Info

Publication number: CN216606440U
Application number: CN202123287231.XU
Authority: CN
Inventors: 辛长林; 阚云峰; 刘洪刚
Original assignee: Anhui Gaoxin Zhongke Semiconductor Co ltd
Current assignee: Anhui Gaoxin Zhongke Semiconductor Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-05-27
Anticipated expiration: 2031-12-24

Abstract

The utility model discloses a semiconductor part cleaning device based on an online monitoring technology, which comprises a box body, the outer side wall of the box body is fixedly provided with a stepping motor, the right end of a motor shaft of the stepping motor penetrates through the side wall of the box body and is fixedly connected with an installation frame, a cleaning net box is arranged on the bottom surface in the installation frame, a net box cover plate is arranged on the upper surface of the cleaning net box, positioning plates are symmetrically arranged on the left and right of the upper surface of the installation frame, the positioning plate is propped against the upper surface of the net box cover plate, mounting holes are respectively arranged at the positions of the positioning plate and the mounting frame close to the front end, and a fastening bolt is arranged in the mounting hole, a limiting sleeve is sleeved outside the screw head of the fastening bolt, and the limit sleeve is fixedly arranged on the upper surface of the locating plate, and by arranging the mounting frame and the cleaning net box, and then will wash the net box and install in the inside of installation frame, and then realize quick material loading and unloading to semiconductor parts.

Description

Semiconductor part cleaning device based on online monitoring technology

Technical Field

The utility model belongs to the technical field of cleaning devices, and particularly relates to a semiconductor part cleaning device based on an online monitoring technology.

Background

On-line monitoring techniques are used to continuously or periodically monitor the condition of the device under test, usually automatically, while the device is in operation. The tester can synchronously monitor the monitored equipment through the equipment, and the traditional cleaning is organic chemical solvent or reagent for dissolving and post-processing organic residues; or auxiliary high-pressure water sand blasting cleaning and the like. But the former causes environmental pollution and the latter damages the surface coating of the component itself. At present, special cleaning methods such as high-pressure water washing, dry ice cleaning and the like exist, but at present, the methods are rarely adopted for semiconductor parts, and tests show that organic pollutants on the surface of a semiconductor can fall off after high-temperature and low-temperature alternate action, so that solvent-free green cleaning is realized.

The existing semiconductor part cleaning device based on the online monitoring technology is inconvenient to feed and unload semiconductor parts when in use, a plurality of semiconductor parts are cooled unevenly in the cooling process, and the organic pollutant part peeled off from the surfaces of the semiconductor parts is attached to the lee side of the semiconductor parts and is difficult to collect, so that the cleaning quality of the semiconductor parts is poor.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a semiconductor part cleaning device based on an online monitoring technology, so as to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: a semiconductor part cleaning device based on an online monitoring technology comprises a box body, wherein a stepping motor is fixedly mounted on the outer side wall of the box body, the right end of a motor shaft of the stepping motor penetrates through the side wall of the box body and is fixedly connected with an installation frame, the right end of the installation frame is rotatably connected with the inner side wall of the box body, a cleaning net box is arranged on the bottom surface in the installation frame, a net box cover plate is arranged on the upper surface of the cleaning net box, positioning plates are symmetrically arranged on the left and right sides of the upper surface of the installation frame and abut against the upper surface of the net box cover plate, mounting holes are formed in the positions, close to the front end, of the positioning plates and the installation frame, fastening bolts are arranged in the mounting holes, a limiting sleeve is sleeved on the outer side of a bolt head of each fastening bolt, the limiting sleeve is fixedly mounted on the upper surface of the positioning plates, a threaded sleeve is sleeved on the outer side of the bolt body of each fastening bolt, and abuts against the lower surface of the installation frame, the installation frame upper surface is close to the position bilateral symmetry fixedly connected with T type fixture block of rear end, two the bottom of locating plate is established respectively in the outside of two T type fixture blocks.

Preferably, the outside of box is equipped with the handle, and the handle is equipped with two, two the equal fixedly connected with limiting plate of handle right-hand member, two the box is placed to the right side wall difference fixedly connected with garbage collection box and dry ice of limiting plate, and the box was placed to garbage collection box and dry ice the right-hand member all runs through the box lateral wall and extends to the inside of box, the lower surface of garbage collection box is equipped with dust exhausting fan, and dust exhausting fan fixed mounting is in the bottom surface of box, the wind groove of just airing exhaust has been seted up to the bottom of box, and the trench of airing exhaust is located dust exhausting fan under.

Preferably, the upper surface that the box was placed to the dry ice is equipped with cooling fan, and cooling fan fixed mounting is at the top surface in the box, the air inlet window has been seted up at the top of box, and the inside wall of air inlet window installs the dust screen.

Preferably, the front and back symmetrical sleeves of the lower surface of the dry ice placing box are provided with guide slide rails, the guide slide rails are fixedly connected with the inner side wall of the box body, the front and back symmetrical outer side wall of the garbage collecting box is provided with guide plates, the guide plates are fixedly connected with the bottom surface in the box body, and the bottoms of the dry ice placing box and the garbage collecting box are provided with ventilation meshes.

Preferably, the bottom surface in the washing net box is provided with an isolation grid, the upper surface of the isolation grid is abutted to the net box cover plate, the upper end of the fastening bolt is fixedly connected with a connecting rope, and the rear end of the connecting rope is fixedly connected with the positioning plate.

Preferably, the lower surface of the box body is fixedly connected with support legs in a bilateral symmetry mode, and the two support legs are respectively located on the left side and the right side under the exhaust duct.

Preferably, the outer side wall of the box body is hinged with a sealing door, and the outer side wall of the sealing door is fixedly provided with a handle, a control panel and an online monitoring device.

Compared with the prior art, the utility model has the beneficial effects that:

(1) this semiconductor parts belt cleaning device based on-line monitoring technique, through setting up the installation frame and wasing the net box, can place semiconductor parts inside the back at wasing the net box, will wash the net box and place on the bottom surface in the installation frame, establish the outside at two T type fixture blocks with two locating plates from preceding cover backward successively, go into the inside of mounting hole with fastening bolt, move to the inside of stop collar until fastening bolt's spiral shell head, with the thread bush in fastening bolt's the outside of upwards screwing down, the upper surface and the installation frame that until the thread bush offset, and then will wash the inside at the installation frame of net box installation, and then realize quick material loading and the unloading to semiconductor parts.

(2) This semiconductor parts belt cleaning device based on-line monitoring technique, through setting up step motor, can drive the installation frame when rotating at step motor's motor shaft, wash net box synchronous rotation, and then make and wash the inside semiconductor parts of net box uniform cooling under the effect of cold air current, the in-process of taking out downwards at the inside air of dust exhausting fan with wasing net box simultaneously, the rubbish that semiconductor parts surface peeled off can mix in the air current fast when semiconductor parts rotate, and then improve cleaning quality.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a side sectional perspective view of the present invention;

FIG. 3 is a perspective exploded view of the present invention;

fig. 4 is an enlarged view of the structure at a in fig. 3 according to the present invention.

In the figure: 1. a box body; 2. a stepping motor; 3. a mounting frame; 4. cleaning the net box; 5. a net box cover plate; 6. positioning a plate; 7. mounting holes; 8. fastening a bolt; 9. a limiting sleeve; 10. a threaded sleeve; 11. a T-shaped fixture block; 12. a limiting plate; 13. a handle; 14. a waste collection box; 15. a dust removal fan; 16. an exhaust duct; 17. a dry ice placing box; 18. a cooling fan; 19. a dust filter screen; 20. an isolation grid; 21. connecting ropes; 22. a sealing door; 23. a support leg; 24. a guide plate; 25. and a guide slide rail.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, the utility model provides a semiconductor component cleaning device based on an online monitoring technology, which comprises a box body 1, a stepping motor 2 is fixedly installed on the outer side wall of the box body 1, the right end of a motor shaft of the stepping motor 2 penetrates through the side wall of the box body 1 and is fixedly connected with an installation frame 3, the right end of the installation frame 3 is rotatably connected with the inner side wall of the box body 1, a cleaning net box 4 is arranged on the bottom surface in the installation frame 3, a net box cover plate 5 is arranged on the upper surface of the cleaning net box 4, positioning plates 6 are symmetrically arranged on the left and right of the upper surface of the installation frame 3, the positioning plates 6 are abutted against the upper surface of the net box cover plate 5, mounting holes 7 are respectively formed in the positions close to the front ends of the positioning plates 6 and the installation frame 3, fastening bolts 8 are arranged in the mounting holes 7, a limiting sleeve 9 is sleeved on the outer side of the heads of the fastening bolts 8, and the limiting sleeve 9 is fixedly installed on the upper surface of the positioning plate 6, the threaded sleeve 10 is sleeved outside the body of the fastening bolt 8, the threaded sleeve 10 abuts against the lower surface of the mounting frame 3, the T-shaped clamping blocks 11 are fixedly connected to the upper surface of the mounting frame 3 in a bilateral symmetry mode at positions close to the rear end, and the bottoms of the two positioning plates 6 are respectively sleeved outside the two T-shaped clamping blocks 11.

In this embodiment, preferably, the outer side of the box body 1 is provided with two handles 13, the right ends of the two handles 13 are fixedly connected with two limit plates 12, the right side walls of the two limit plates 12 are fixedly connected with a garbage collection box 14 and a dry ice placement box 17 respectively, the right ends of the garbage collection box 14 and the dry ice placement box 17 penetrate through the side walls of the box body 1 and extend into the box body 1, the lower surface of the garbage collection box 14 is provided with a dust removal fan 15, the dust removal fan 15 is fixedly installed at the bottom surface in the box body 1, the bottom of the box body 1 is provided with an air exhaust groove 16, the air exhaust groove 16 is positioned right below the dust removal fan 15, the dust removal fan 15 extracts air inside the cleaning net box 4 downwards, during the process, garbage on the surface of the semiconductor parts is peeled off and mixed in the air flow to enter the interior of the garbage collection box 14, the air flow passes through the ventilation mesh holes at the bottom of the garbage collection box 14 and then is exhausted out of the box body 1 through the air exhaust groove 16, the waste is retained inside the waste collection box 14.

In this embodiment, it is preferred, the upper surface that box 17 was placed to the dry ice is equipped with cooling fan 18, and cooling fan 18 fixed mounting is at the top surface in box 1, the air inlet window has been seted up at the top of box 1, and the inside wall of air inlet window installs dust filter net 19, cooling fan 18 takes out outside air to place box 17 to the dry ice after removing dust through dust filter net 19, the air after the dry ice sublimation heat absorption cooling is placed the ventilation mesh hole of box 17 bottom through the dry ice and is blown to wasing net box 4, carry out rapid cooling to the semiconductor spare part who washs net box 4.

In this embodiment, it is preferred, the symmetrical cover is equipped with direction slide rail 25 around the lower surface that box 17 was placed to the dry ice, two direction slide rails 25 all with the inside wall fixed connection of box 1, the symmetry is equipped with deflector 24 around the lateral wall of garbage collection box 14, two deflector 24 all with bottom surface fixed connection in the box 1, the bottom that box 17 and garbage collection box 14 were placed to the dry ice has all seted up the ventilation mesh, through setting up direction slide rail 25, can place box 17 to the dry ice and play the direction supporting role, make the dry ice place box 17 can stably place the inside at box 1, through setting up deflector 24, can play the effect of guiding orientation to garbage collection box 14, prevent that garbage collection box 14 and dust exhausting fan 15 from misplacing from top to bottom, lead to partial rubbish to reveal to the outside of garbage collection box 14.

In this embodiment, it is preferred, the bottom surface in the washing net box 4 is equipped with isolation grid 20, and the upper surface of isolation grid 20 offsets with net box apron 5, fastening bolt 8's upper end fixedly connected with connects rope 21, and connect the rear end and the locating plate 6 fixed connection of rope 21, keep apart grid 20 through setting up, can separate out a plurality of cavities with the inside of washing net box 4, be used for placing a plurality of semiconductor spare parts, prevent to rotate the in-process at washing net box 4, collision each other leads to damaging between a plurality of semiconductor spare parts, connect rope 21 through setting up, prevent that fastening bolt 8 from dropping after 7 inside shifts out of mounting hole, increase and lose the risk.

In this embodiment, preferably, the support legs 23 are fixedly connected to the lower surface of the box 1 in a bilateral symmetry manner, the two support legs 23 are respectively located at the left side and the right side under the exhaust duct 16, and by arranging the support legs 23, a certain space can be formed below the box 1, so that the air in the box 1 is exhausted out of the box 1 through the exhaust duct 16.

In this embodiment, it is preferable, the lateral wall of box 1 articulates there is sealing door 22, sealing door 22's lateral wall fixed mounting has the handle, control panel and on-line monitoring equipment, hold the handle and close sealing door 22 after, prevent that the cold air current from revealing to the outside of box 1 through the box 1 opening, lead to the cooling efficiency to semiconductor parts to descend, prevent simultaneously that outside dust from getting into inside the box 1, reduce the cleaning quality of the device to semiconductor parts, control panel and on-line monitoring equipment electric connection, on-line monitoring equipment can the inside temperature of box 1 in real time, can make corresponding control to the inside fan equipment of box 1 according to the temperature data that on-line monitoring equipment sent through control panel.

The working principle and the using process of the utility model are as follows: when the device is used, semiconductor parts are placed in a plurality of chambers which are separated by an isolation grid 20 in a cleaning net box 4 one by one, then a net box cover plate 5 is covered on the upper surface of the cleaning net box 4, the lower surface of the net box cover plate 5 is abutted against the isolation grid 20, then the cleaning net box 4 is placed on the bottom surface in an installation frame 3, two positioning plates 6 are sleeved on the outer sides of two T-shaped clamping blocks 11 from front to back in sequence, the positioning plates 6 are abutted against the upper surface of the net box cover plate 5, the positioning plates 6 are vertically abutted against installation holes 7 on the installation frame 3, fastening bolts 8 are inserted into the installation holes 7 from top to bottom until the screw heads of the fastening bolts 8 move to the inside of a limiting sleeve 9, a threaded sleeve 10 is screwed on the outer sides of the fastening bolts 8 from bottom to top until the upper surface of the threaded sleeve 10 is abutted against the installation frame 3, and then the cleaning net box 4 is installed in the installation frame 3, dry ice is placed in a dry ice placing box 17, then the dry ice placing box 17 and a garbage collecting box 14 are successively inserted into the box body 1 rightwards until a limiting plate 12 is abutted against the outer side wall of the box body 1, a cooling fan 18 is started, the cooling fan 18 removes dust from outside air through a dust filtering net 19 and pumps the air to the dry ice placing box 17, the air after sublimation, heat absorption and cooling of the dry ice is blown to a cleaning net box 4 through ventilation meshes at the bottom of the dry ice placing box 17, semiconductor parts of the cleaning net box 4 are rapidly cooled, the semiconductor parts shrink in volume when encountering cold, so that garbage attached to the surfaces of the semiconductor parts is peeled off, a stepping motor 2 is started, a motor shaft drives a mounting frame 3 to rotate, the cleaning net box 4 is further synchronously rotated, a plurality of semiconductor parts are further uniformly cooled, a dust removing fan 15 is started, and the dust removing fan 15 draws the air in the cleaning net box 4 downwards, in the process, the garbage peeled off from the surface of the semiconductor part is mixed in the airflow and enters the garbage collection box 14, the airflow is discharged out of the box body 1 through the air exhaust groove 16 after passing through the ventilation mesh at the bottom of the garbage collection box 14, the garbage is retained in the garbage collection box 14, after the dry ice sublimation is finished, the stepping motor 2 is closed and the installation frame 3 is reset, the cleaning net box 4 is taken out from the inside of the installation frame 3 through reverse operation, and then the rapid feeding and discharging of the semiconductor part are realized, the garbage collection box 14 is taken out from the inside of the box body 1, and the garbage of the garbage collection box 14 is subjected to centralized treatment.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a semiconductor parts belt cleaning device based on-line monitoring technique, includes box (1), its characterized in that: the outer side wall of the box body (1) is fixedly provided with a stepping motor (2), the right end of a motor shaft of the stepping motor (2) penetrates through the side wall of the box body (1) and is fixedly connected with an installation frame (3), the right end of the installation frame (3) is rotatably connected with the inner side wall of the box body (1), a net box cleaning box (4) is arranged on the bottom surface in the installation frame (3), a net box cover plate (5) is arranged on the upper surface of the net box cleaning box (4), positioning plates (6) are symmetrically arranged on the left and right sides of the upper surface of the installation frame (3), the positioning plates (6) are abutted against the upper surface of the net box cover plate (5), mounting holes (7) are formed in positions, close to the front ends, of the positioning plates (6) and the installation frame (3), fastening bolts (8) are arranged inside the mounting holes (7), and limiting sleeves (9) are sleeved outside screw heads of the fastening bolts (8), and stop collar (9) fixed mounting is at the upper surface of locating plate (6), the spiral shell body outside cover of fastening bolt (8) is equipped with thread bush (10), and thread bush (10) offsets with the lower surface of installation frame (3), the position bilateral symmetry fixedly connected with T type fixture block (11), two that installation frame (3) upper surface is close to the rear end the outside at two T type fixture blocks (11) is established respectively to the bottom of locating plate (6).

2. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 1, wherein: the outside of box (1) is equipped with handle (13), and handle (13) are equipped with two, two the equal fixedly connected with limiting plate (12) of handle (13) right-hand member, two the right side wall difference fixedly connected with garbage collection box (14) of limiting plate (12) and dry ice place box (17), and garbage collection box (14) and dry ice place the right-hand member of box (17) and all run through box (1) lateral wall and extend to the inside of box (1), the lower surface of garbage collection box (14) is equipped with dust exhausting fan (15), and dust exhausting fan (15) fixed mounting is in the bottom surface of box (1), exhaust groove (16) have been seted up to the bottom of box (1), and exhaust groove (16) are located dust exhausting fan (15) under.

3. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 2, wherein: the upper surface that box (17) was placed to the dry ice is equipped with cooling fan (18), and cooling fan (18) fixed mounting is at the top surface in box (1), the air inlet window has been seted up at the top of box (1), and the inside wall of air inlet window installs dust screen (19).

4. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 2, wherein: the dry ice placing box is characterized in that guide sliding rails (25) are symmetrically arranged on the front and back of the lower surface of the dry ice placing box (17) in a sleeved mode and are two, the guide sliding rails (25) are fixedly connected with the inner side wall of the box body (1), guide plates (24) are symmetrically arranged on the front and back of the outer side wall of the garbage collecting box (14) and are two, the guide plates (24) are fixedly connected with the inner bottom surface of the box body (1), and ventilation meshes are formed in the bottom of the dry ice placing box (17) and the bottom of the garbage collecting box (14).

5. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 1, wherein: the bottom surface in the cleaning net box (4) is provided with an isolation grid (20), the upper surface of the isolation grid (20) is abutted to the net box cover plate (5), the upper end of the fastening bolt (8) is fixedly connected with a connecting rope (21), and the rear end of the connecting rope (21) is fixedly connected with the positioning plate (6).

6. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 2, wherein: the lower surface bilateral symmetry fixedly connected with stabilizer blade (23) of box (1), two stabilizer blade (23) are located the left and right sides under exhaust duct (16) respectively.

7. The semiconductor part cleaning device based on the on-line monitoring technology as claimed in claim 1, wherein: the outer side wall of the box body (1) is hinged with a sealing door (22), and a handle, a control panel and online monitoring equipment are fixedly mounted on the outer side wall of the sealing door (22).