CN216542673U

CN216542673U - Machining tool and machining device for grinding vacuum chuck

Info

Publication number: CN216542673U
Application number: CN202122242189.3U
Authority: CN
Inventors: 朴元日; 曹进才
Original assignee: Shanghai Jinsheng Electronic Technology Co ltd
Current assignee: Shanghai Jinsheng Electronic Technology Co ltd
Priority date: 2021-09-15
Filing date: 2021-09-15
Publication date: 2022-05-17
Anticipated expiration: 2031-09-15

Abstract

The utility model provides a processing tool and a processing device for grinding a vacuum chuck, relates to the technical field of wafer processing, and solves the technical problem that a processing tool special for processing a sealing ring surface on a multi-salient-point vacuum chuck is absent in the prior art. The device includes grinding the main part, wherein, grind the main part and be used for grinding the piece of treating on the vacuum chuck, the tip of grinding the main part is provided with dodges the hole, the middle part of treating to grind the piece can stretch into dodge in the hole.

Description

Machining tool and machining device for grinding vacuum chuck

Technical Field

The utility model relates to the technical field of wafer processing, in particular to a processing tool and a processing device for grinding a vacuum chuck.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions. The vacuum chuck is an essential important component in the wafer manufacturing process, and the wafer needs to be fixed, transported and the like in the manufacturing process so as to support the wafer to complete the detection, etching and other works.

At present, a processing tool specially used for processing a sealing ring surface on a vacuum chuck is lacked in the prior art.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a processing tool and a processing device for grinding a vacuum chuck, and aims to solve the technical problem that a processing tool specially used for processing a sealing ring surface on a multi-salient-point vacuum chuck is absent in the prior art. The technical effects that can be produced by the preferred technical scheme in the technical schemes provided by the utility model are described in detail in the following.

In order to achieve the purpose, the utility model provides the following technical scheme:

the utility model provides a machining tool for grinding a vacuum chuck, which comprises a grinding main body, wherein the grinding main body is used for grinding a to-be-ground piece on the vacuum chuck, the end part of the grinding main body is provided with an avoidance hole, and the middle part of the to-be-ground piece can extend into the avoidance hole.

Optionally, the grinding body includes an annular grinding layer and a grinding column, the annular grinding layer is connected to an end face of the grinding column, the avoiding hole is formed in the grinding column, and the inside of the annular grinding layer is communicated with the avoiding hole.

Optionally, a clamping portion is further arranged on the grinding main body, and the clamping portion can be connected with a driving device.

Optionally, treat that grinding member includes annular lug and projection, annular lug with both's of projection one end is all connected on vacuum chuck's the terminal surface, the projection is located annular lug's middle part, the length of projection is greater than annular lug's thickness, the projection can stretch into in the hole of dodging just the diameter of projection is less than dodge the diameter of hole, the grinding main part can grind annular lug's sealed anchor ring.

Optionally, the number of the annular bumps and the number of the convex pillars are multiple.

A processing device comprises a driving device and a processing tool for grinding a vacuum chuck, wherein an output shaft of the driving device can be connected with a grinding main body, and the driving device can drive the grinding main body to rotate.

Optionally, the vacuum chuck device further comprises a support and a placing platform, the vacuum chuck device can be placed on the placing platform, the placing platform is connected with the driving device through the support, and the driving device is located above the vacuum chuck device.

Optionally, the vacuum chuck further comprises a lifting structure, the lifting structure is mounted on the support and connected with the driving device, and the lifting structure can push the driving device to move towards or away from the vacuum chuck.

According to the processing tool for grinding the vacuum chuck, the avoidance hole is formed in the grinding main body, so that the middle of a to-be-ground piece on the vacuum chuck is prevented from being ground, when the to-be-ground piece is ground, the end face of the grinding main body is in contact with the sealing ring surface of the to-be-ground piece, meanwhile, the middle of the to-be-ground piece can extend into the avoidance hole, the grinding main body is rotated through driving equipment, the sealing ring surface of the to-be-ground piece can be ground, meanwhile, the middle of the to-be-ground piece cannot be ground, and the technical problem that a processing tool specially used for processing the sealing ring surface on the multi-salient-point vacuum chuck is absent in the prior art is solved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic diagram of a polishing body of a processing tool for polishing a vacuum chuck according to an embodiment of the present invention;

FIG. 2 is a bottom view of a grinding body of a processing tool for grinding vacuum chucks in accordance with an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of a grinding body and a workpiece to be ground of a processing tool for grinding a vacuum chuck according to an embodiment of the present invention;

FIG. 4 is a schematic diagram of a portion of a vacuum chuck of a processing tool for polishing the vacuum chuck according to an embodiment of the present invention;

FIG. 1, abrasive body; 11. avoiding holes; 12. an annular polishing layer; 13. grinding the column;

2. a vacuum chuck; 21. a member to be ground; 211. an annular projection; 212. a convex column.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be described in detail below. It should be apparent that the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the examples given herein without any inventive step, are within the scope of the present invention.

In the description of the present invention, it is to be noted that "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing and simplifying the description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus are not to be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as appropriate to those of ordinary skill in the art.

Example 1:

the utility model provides a processing tool for grinding a vacuum chuck, which comprises a grinding main body 1, wherein the grinding main body 1 is used for grinding a piece 21 to be ground on a vacuum chuck 2, an avoiding hole 11 is formed in the end part of the grinding main body 1, and the middle part of the piece 21 to be ground can extend into the avoiding hole 11. According to the processing tool for grinding the vacuum chuck, the grinding main body 1 is provided with the avoidance hole 11, so that the middle of the to-be-ground piece 21 on the vacuum chuck 2 is prevented from being ground, when the to-be-ground piece 21 is ground, the end face of the grinding main body 1 is in contact with the sealing ring surface of the to-be-ground piece 21, meanwhile, the middle of the to-be-ground piece 21 can extend into the avoidance hole 11, the grinding main body 1 is rotated through driving equipment, the sealing ring surface of the to-be-ground piece 21 can be ground, meanwhile, the middle of the to-be-ground piece 21 cannot be ground, and the technical problem that the processing tool specially used for processing the sealing ring surface on the multi-salient-point vacuum chuck is absent in the prior art is solved.

Example 2:

as an alternative embodiment, the polishing main body 1 includes an annular polishing layer 12 and a polishing column 13, the annular polishing layer 12 is of an annular structure, the annular polishing layer 12 is connected to an end surface of the polishing column 13, the avoiding hole 11 is disposed on the polishing column 13, an inner portion of the annular polishing layer 12 is communicated with the avoiding hole 11, and the end surface of the annular polishing layer 12 may contact with the sealing ring surface of the member to be polished 21 to polish the sealing ring surface of the member to be polished 21.

Example 3:

as an optional embodiment, the polishing main body 1 is further provided with a clamping portion, the clamping portion is connected to the polishing column 13, the clamping portion can be connected to a driving device, the polishing main body 1 can be detachably connected to the driving device through the clamping portion, the driving device is for driving the polishing main body 1 to rotate, and the clamping portion and the annular polishing layer 12 are respectively located at two ends of the polishing column 13.

Example 4:

as an optional implementation manner, the to-be-polished piece 21 includes an annular protrusion 211 and a protrusion 212, one end of both the annular protrusion 211 and the protrusion 212 is connected to the end surface of the vacuum chuck 2, the protrusion 212 is located in the middle of the annular protrusion 211, an interval exists between an outer sidewall of the protrusion 212 and an inner sidewall of the annular protrusion 211, a length of the protrusion 212 is greater than a thickness of the annular protrusion 211, the protrusion 212 is higher than the annular protrusion 211, the protrusion 212 can extend into the avoiding hole 11, a diameter of the protrusion 212 is smaller than a diameter of the avoiding hole 11, and the polishing main body 1 can polish the sealing annular surface of the annular protrusion 211. When grinding, the terminal surface of annular grinding layer 12 contacts with the sealed anchor ring of annular lug 211, the width of annular grinding layer 12 is greater than the width of annular lug 211, that is to say the sealed anchor ring of annular lug 211 can be contacted by the terminal surface of annular grinding layer 12, annular grinding layer 12 can grind the sealed anchor ring of annular lug 211, the part that projection 212 is higher than annular lug 211 can stretch into dodge hole 11, avoid influencing the grinding of annular grinding layer 12 to the sealed anchor ring of annular lug 211.

As an alternative embodiment, the number of the annular protrusions 211 and the convex pillars 212 is plural, one annular protrusion 211 and one convex pillar 212 constitute one member to be ground 21, and a plurality of members to be ground 21 may be provided on one vacuum chuck 2.

Example 5:

the utility model provides a processing device which comprises a driving device and a processing tool for grinding a vacuum chuck, wherein an output shaft of the driving device can be connected with a grinding main body 1, and the driving device can drive the grinding main body 1 to rotate.

As an optional implementation mode, the vacuum chuck device further comprises a support and a placing platform, the vacuum chuck 2 can be placed on the placing platform, the placing platform is connected with a driving device through the support, and the driving device is located above the vacuum chuck 2. Still include elevation structure, elevation structure installs on the support, and elevation structure is connected with drive device, and elevation structure can promote drive device to move to the direction of being close to or keeping away from vacuum chuck 2. When grinding is carried out, the vacuum chuck 2 is placed on the placing platform and fixed, the driving device is started to enable the grinding main body 1 to rotate, then the lifting structure is adjusted, the grinding main body 1 is moved towards the direction close to the piece 21 to be ground until the grinding main body 1 is contacted with the piece 21 to be ground, and grinding is carried out; after the grinding is finished, the lifting structure is adjusted, the grinding main body 1 is moved in the direction away from the piece 21 to be ground, the driving device is closed, and the vacuum chuck 2 is taken down from the placing platform.

The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims

1. A processing tool for grinding vacuum chucks, characterized by comprising a grinding body (1), wherein,

grind main part (1) and be used for grinding on the vacuum chuck (2) and wait to grind piece (21), the tip of grinding main part (1) is provided with dodges hole (11), the middle part of waiting to grind piece (21) can stretch into dodge in the hole (11).

2. The processing tool for grinding a vacuum chuck according to claim 1, wherein the grinding body (1) comprises an annular grinding layer (12) and a grinding column (13), the annular grinding layer (12) is connected with an end surface of the grinding column (13), the avoiding hole (11) is provided on the grinding column (13) and an inside of the annular grinding layer (12) is communicated with the avoiding hole (11).

3. The processing tool for grinding vacuum chuck according to claim 1 or 2, characterized in that the grinding body (1) is further provided with a clamping portion, and the clamping portion can be connected with a driving device.

4. The processing tool for grinding vacuum chuck according to claim 1, wherein the member to be ground (21) comprises an annular projection (211) and a convex column (212), both ends of the annular projection (211) and the convex column (212) are connected to the end surface of the vacuum chuck (2), the convex column (212) is located in the middle of the annular projection (211), the length of the convex column (212) is greater than the thickness of the annular projection (211), the convex column (212) can extend into the avoiding hole (11) and the diameter of the convex column (212) is less than the diameter of the avoiding hole (11), and the grinding body (1) can grind the sealing ring surface of the annular projection (211).

5. The processing tool for grinding vacuum chuck according to claim 4, wherein the number of the annular protrusion (211) and the convex column (212) is plural.

6. A processing apparatus, characterized in that it comprises a driving device and a processing tool for grinding vacuum chucks as claimed in any of claims 1 to 5, the output shaft of the driving device being connectable to the grinding body (1) and the driving device being capable of driving the grinding body (1) in rotation.

7. The processing device according to claim 6, characterized in that it further comprises a support on which the vacuum chuck (2) can be placed and a placement platform connected to the drive means via the support, the drive means being located above the vacuum chuck (2).

8. The processing device according to claim 7, further comprising a lifting structure mounted on the support, the lifting structure being connected to the driving device, the lifting structure being capable of pushing the driving device to move towards or away from the vacuum chuck (2).