CN216511101U - Vibration plate - Google Patents

Abstract

The application provides a vibrating disk, which comprises a disk body, an annular wall and a conveying track, wherein the conveying track is spiral, a feeding end of the conveying track is connected with the disk body, a height limiting block used for limiting the height of a device is convexly arranged in the annular wall, and the height limiting block is positioned at a discharging end of the conveying track; the vibratory pan further comprises: the sorting seat is arranged on the annular wall, the feeding end of the sorting seat is connected with the discharging end of the conveying track, the feeding end of the sorting seat is provided with an adsorption hole, and the discharging end of the sorting seat is provided with an air blowing hole; a first sensor mounted on the annular wall; and the second sensor is arranged at the position, adjacent to the air blowing hole, of the discharge end of the sorting seat. The application provides a vibration dish through adopting limit for height piece and absorption hole cooperation, can prevent that the device from range upon range of or crossing, can control the interval of device material loading through first sensor, and the detection of the device direction of being convenient for can control the material loading direction of device unanimously through the second sensor.

Description

Vibration plate

Technical Field

The application belongs to the technical field of semiconductor processing equipment, and more particularly relates to a vibration disc.

Background

When the vibration dish material loading, generally need arrange the device interval in proper order and export, current vibration dish is in order to make the device even interval arrange, adopts the fixed mode of vacuum adsorption to control the interval of device usually. The vacuum suction method is to fix the device by suction through the suction hole, so that the downstream device is separated from the device fixed by suction, thereby controlling the distance between the adjacent devices.

Referring to fig. 1, a conventional device 50 includes a base 51 and a package block 52, a positive electrode 53 and a negative electrode 54 are respectively disposed at two ends of the base 51, the width of the device 50 is small, the length and the height of the device 50 are relatively large, and generally the device 50 is stable when in a side-standing state, a color block 55 for identifying the direction of the device 50 is disposed on the bottom surface of the base 51, the color block 55 is disposed at one end of the base 51 close to the positive electrode 53 or the negative electrode 54, and the color block 55 can be used for distinguishing the directions of the positive electrode 53 and the negative electrode 54 of the device 50. When such a device 50 is fed by a vibrating tray, because the width of the device 50 is small, when the device 50 is fixedly attached by adsorption, the upstream adjacent device 50 is likely to jump and climb onto the fixedly attached device 50 along with the vibration of the vibrating tray, and then move forward beyond the fixedly attached device 50, so that the distance between the downstream adjacent devices 50 is too small, the detection of the downstream on the direction of the device 50 is interfered, and the feeding distance and direction of the device 50 are affected.

SUMMERY OF THE UTILITY MODEL

An object of the embodiment of this application is to provide a vibration dish to when the device is adsorbed fixedly, the adjacent device of upstream is along with the vibration of vibration dish, crosses the device that is adsorbed fixedly and moves forward easily, influences the technical problem of device material loading among the solution prior art.

In order to achieve the purpose, the technical scheme adopted by the application is as follows: the vibration disc comprises a disc body, an annular wall arranged around the edge of the disc body and a conveying track arranged on the inner side of the annular wall, wherein the conveying track is spiral, a feeding end of the conveying track is connected with the disc body, a height limiting block used for limiting the height of a device is arranged in the annular wall in a protruding mode, and the height limiting block is located at a discharging end of the conveying track; the vibration disk further includes:

the sorting seat is arranged on the annular wall, the feeding end of the sorting seat is connected with the discharging end of the conveying track, the feeding end of the sorting seat is provided with an adsorption hole, and the discharging end of the sorting seat is provided with an air blowing hole;

a first sensor for detecting the release of the means for attracting the pores, the first sensor being mounted on the annular wall; and the number of the first and second groups,

and the second sensor is used for detecting the direction of the device and is arranged at the position, adjacent to the air blowing hole, of the discharge end of the sorting seat.

The height limiting block can prevent the devices from being stacked when entering the sorting seat, and the upstream devices are prevented from crossing the downstream devices; the device entering the sorting seat can be adsorbed and fixed by adopting the adsorption holes, so that the movement of the device can be limited, the first sensor is adopted to control the device to be released one by one to the downstream, so that the distance between the adjacent devices is pulled, the subsequent detection of the direction of the device is prevented from being interfered, and the feeding interval of the device is ensured; the direction of the device can be detected by adopting the second sensor, and the direction of feeding of the device is ensured to be consistent.

In one embodiment, the sorting seat comprises a mounting seat embedded and mounted on the annular wall and a supporting plate mounted on one side of the mounting seat close to the axis of the disc body, and the supporting plate is connected with the conveying track; the supporting plate is provided with a first strip-shaped groove; the mounting seat and the support plate enclose the adsorption hole at the position of the first strip-shaped groove, and an air outlet end is formed at one end of the first strip-shaped groove; and the mounting seat is provided with a first air exhaust hole connected with the air outlet end of the first strip-shaped groove.

By adopting the technical means, the processing of the adsorption holes is convenient.

In one embodiment, the number of the first strip-shaped grooves is multiple, a second strip-shaped groove connected with the air outlet end of each first strip-shaped groove is formed in the support plate, the first strip-shaped grooves are distributed along the length direction of the support plate, and the first air exhaust holes are communicated with the second strip-shaped grooves.

By adopting the technical means, a plurality of devices between the first sensor and the height limiting block can be simultaneously adsorbed and fixed.

In one embodiment, the mounting seat comprises a mounting block connected with the annular wall and a side plate mounted on one side of the mounting block close to the supporting plate, the supporting plate is connected with the side plate, the air blowing hole is formed in the side plate, a third strip-shaped groove with one end communicated with the air blowing hole is formed in one end of the side plate close to the mounting block, and an air inlet hole communicated with the other end of the third strip-shaped groove is formed in the mounting block.

By adopting the technical means, the processing of the air blowing holes and the layout of the air inlet position are facilitated.

In one embodiment, the mounting block is provided with a second air suction hole communicated with one end of the first air suction hole far away from the first strip-shaped groove.

Through adopting above-mentioned technical means, be convenient for first aspirating hole and outside vacuum line connection.

In one embodiment, the second sensor is embedded and mounted on the mounting block, and the side plate is provided with an embedding hole into which the sensing end of the second sensor is inserted.

Through adopting above-mentioned technical means, can avoid the curb plate to shelter from the second sensor.

In one embodiment, the first sensor is a correlation optical fiber sensor, and the sorting seat is provided with a light hole, and the light hole is located on one side of the adsorption hole away from the discharge end of the conveying track.

By adopting the technical means, the device can be detected to pass through the light hole.

In one embodiment, a chute is formed in one side of the sorting seat close to the axis of the tray body, the light-transmitting hole is formed in the bottom of the chute, and the depth of the chute is gradually reduced towards the direction close to the second sensor; or, one end of the light hole close to the axis of the tray body is provided with a chamfer.

By adopting the technical means, burrs of the device can be prevented from being scraped with the light transmission holes.

In one embodiment, the second sensor is a color detecting fiber optic sensor.

By adopting the technical means, the color blocks on the devices can be identified, so that the devices with different directions can be blown out of the sorting seat conveniently.

In one embodiment, the air blowing hole is positioned on one side of the second sensor close to the adsorption hole, and along the length direction of the sorting seat: the ratio range of the distance between the air blowing hole and the second sensor to the distance between the light transmitting hole and the adsorption hole is 0.4-0.8.

By adopting the technical means, the direction of the device can be prevented from being interfered by the blowing delay.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic perspective view of a device;

fig. 2 is a schematic perspective view of a vibration plate according to an embodiment of the present disclosure;

FIG. 3 is an enlarged view taken at A in FIG. 2;

FIG. 4 is a schematic perspective view of the sorting seat, the first sensor and the second sensor of FIG. 2;

FIG. 5 is a perspective view of the sort seat and second sensor of FIG. 4;

FIG. 6 is a perspective view of the support plate of FIG. 2;

FIG. 7 is a perspective view of the side panel of FIG. 2;

fig. 8 is a perspective view of the mounting block and the second sensor of fig. 2.

Wherein, in the figures, the respective reference numerals:

11-a tray body; 12-an annular wall; 13-a conveying track; 14-height limiting block;

20-sorting seat; 21-a mounting seat; 211-mounting blocks; 2111-a through-hole; 2112-inlet of air; 2113-second extraction hole; 212-side plate; 2121-air blowing holes; 2122-light-transmitting hole; 2123-an insertion hole; 2124-first air extraction hole; 2125-chute; 2126-a third strip groove; 22-a support plate; 2201-adsorption holes; 2202-communicating hole; 2203-first bar-shaped groove; 2204-a second strip groove;

30-a first sensor; 31-a transmitting end; 32-a receiving end; 33-a scaffold;

40-a second sensor;

50-a device; 51-a substrate; 52-a package block; 53-positive electrode; 54-a negative electrode; and 5, 55-color blocks.

Detailed Description

In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

Referring to fig. 1 to 3 together, a description will now be given of a vibration plate according to an embodiment of the present application. The vibrating disc comprises a disc body 11, an annular wall 12 and a conveying track 13, wherein the annular wall 12 is arranged around the edge of the disc body 11, the conveying track 13 is arranged on the inner side of the annular wall 12, the conveying track 13 is spiral, a feeding end of the conveying track 13 is connected with the disc body 11, a height limiting block 14 is arranged in the annular wall 12 in a protruding mode, the height limiting block 14 is located at a discharging end of the conveying track 13, and the height limiting block 14 is used for limiting the height of a device 50 passing through the output end of the conveying track 13, so that the device 50 can be prevented from being stacked at the position of the height limiting block 14; the vibrating disk further comprises a sorting seat 20, a first sensor 30 and a second sensor 40, the sorting seat 20 is mounted on the annular wall 12, a feeding end of the sorting seat 20 is connected with a discharging end of the conveying rail 13, please refer to fig. 4, the feeding end of the sorting seat 20 is provided with an adsorption hole 2201, the adsorption hole 2201 is used for adsorbing and fixing the device 50 released by the height limiting block 14 so as to limit the movement of the device 50 released by the height limiting block 14, after the device 50 is adsorbed and fixed by the adsorption hole 2201, the adsorbed device 50 obstructs the output of the device 50 below the height limiting block 14, and the height limiting block 14 obstructs the upward movement of the device 50 below the height limiting block 14 so as to prevent the device 50 below the height limiting block 14 from crossing the device 50 adsorbed and fixed by the adsorption hole 2201; the discharge end of the sorting seat 20 is provided with a gas blowing hole 2121, and the gas blowing hole 2121 is used for blowing out the device 50 with the direction detected by the second sensor 40 opposite to the preset output direction, so that the direction consistency of each device 50 is ensured when the vibrating disc discharges materials; the first sensor 30 is used for detecting the device 50 released from the suction hole 2201, the first sensor 30 is mounted on the annular wall 12, when the vacuum in the suction hole 2201 is released, the device 50 sucked and fixed by the suction hole 2201 is released and moves towards the discharge end of the sorting seat 20, and when the device 50 is just separated from the suction hole 2201 (the device 50 is separated from the position opposite to the suction hole 2201), the device 50 triggers the first sensor 30, so that the vacuum loading in the suction hole 2201 can be controlled, the next device 50 passing through the suction hole 2201 is sucked and fixed, so that two adjacent devices 50 are separated, the distance between two adjacent devices 50 is ensured, and the direction detection of the downstream second sensor 40 is facilitated; the second sensor 40 is used for detecting the direction of the device 50, the second sensor 40 is installed at the position, adjacent to the air blowing hole 2121, of the discharging end of the sorting seat 20, and when the second sensor 40 detects that the direction of the device 50 is opposite to the preset output direction of the device 50, the air blowing hole 2121 blows out the device 50, so that the direction of each device 50 can be ensured to be consistent when the vibrating tray discharges the material. Thus, the feeding interval of the devices 50 is guaranteed, the situation that the devices 50 are stacked or crossed to interfere the detection of the directions of the devices 50 is avoided, and the direction consistency is guaranteed when the devices 50 are fed.

In one embodiment, the height-limiting blocks 14 are arranged along the length direction of the conveying track 13, so that a strip-shaped groove can be formed on the height-limiting blocks 14 and the conveying track 13 so as to control one row of devices 50 to be output one by one.

In an embodiment of the present application, referring to fig. 4 to 6, the sorting seat 20 includes a mounting seat 21 and a supporting plate 22, the mounting seat 21 is embedded and mounted on the annular wall 12, the supporting plate 22 is mounted on one side of the mounting seat 21 close to the axis of the tray body 11, and the supporting plate 22 is connected to the conveying rail 13, so that the device 50 output by the conveying rail 13 can smoothly slide onto the supporting plate 22; referring to fig. 7, a first strip-shaped groove 2203 is formed in the supporting plate 22, an absorption hole 2201 is defined by the mounting base 21 and the supporting plate 22 at the position of the first strip-shaped groove 2203, an air inlet end is formed at the upper end of the first strip-shaped groove 2203, and an air outlet end is formed at the lower end of the first strip-shaped groove 2203, wherein a first air exhaust hole 2124 is formed in the mounting base 21, and the first air exhaust hole 2124 is communicated with the air outlet end of the first strip-shaped groove 2203. This can facilitate the processing and maintenance of the suction hole 2201, which is advantageous for reducing the processing and maintenance costs. Specifically, the top surface of the supporting plate 22 is smoothly connected with the top surface of the discharge end of the conveying rail 13, and the side surface of the mounting seat 21 close to the supporting plate 22 is smoothly connected with the surface of the annular wall 12 adjacent to the discharge end of the conveying rail 13, so that the device 50 can be ensured to smoothly slide from the conveying rail 13 to the sorting seat 20.

In an embodiment of the present application, referring to fig. 4 to 6, the number of the suction holes 2201 is multiple, the multiple suction holes 2201 are disposed along the length direction of the sorting seat 20, a communication hole 2202 is formed in the sorting seat 20, and the communication hole 2202 communicates with the air outlet end of each suction hole 2201. This allows a plurality of devices 50 to be simultaneously attached so as not to overlap or flip over the downstream device 50 due to the excessive distance between the attachment hole 2201 and the height limiting block 14. Moreover, by using the plurality of suction holes 2201 to simultaneously suck the plurality of devices 50, the upstream devices 50 can be prevented from pushing the suction-fixed devices 50 to move in the vibration process of the vibration plate, and the devices 50 sucked and fixed by the suction holes 2201 can be prevented from being pushed away from the suction holes 2201 by the upstream devices 50. Alternatively, the number of the suction holes 2201 may be 2, 3, 5, or the like, and may be set according to the distance between the detection position of the first sensor 30 and the height limit block 14. Alternatively, the distance between two adjacent suction holes 2201 is equal to the length of one device 50, so that simultaneous suction fixing of a plurality of devices 50 arranged in series can be realized.

Optionally, the number of the first strip-shaped grooves 2203 is multiple, the support plate 22 is provided with a second strip-shaped groove 2204, the second strip-shaped groove 2204 is connected to the air outlet end of each first strip-shaped groove 2203, the multiple first strip-shaped grooves 2203 are distributed along the length direction of the support plate 22, and the first suction holes 2124 are communicated with the second strip-shaped grooves 2204. Specifically, the distance between two adjacent first bar-shaped grooves 2203 is equal to the length of one device 50, the connecting hole 2202 is defined by the mounting seat 21 and the support plate 22 at the position of the second bar-shaped groove 2204, and one end of the first suction hole 2124 close to the suction hole 2201 is located at the position on the mounting seat 21 corresponding to the second bar-shaped groove 2204. The plurality of first linear grooves 2203 are used to form a plurality of suction holes 2201, so that a plurality of devices 50 on the support plate 22 can be sucked, unfixed devices 50 between the suction holes 2201 and the height limiting blocks 14 are avoided, and the unfixed devices 50 are prevented from being stacked on the suction-fixed devices 50. Furthermore, this enables the plurality of suction holes 2201 to simultaneously suck the adjacent plurality of devices 50, ensures the synchronism of the movement or suction fixation of the plurality of devices 50, and prevents the upstream devices 50 from stacking or turning over the sucked and fixed devices 50.

In an embodiment of the present application, please refer to fig. 4, fig. 7, and fig. 8, the mounting seat 21 includes a mounting block 211 and a side plate 212, the mounting block 211 is embedded and mounted on the annular wall 12, the side plate 212 is mounted on one side of the mounting block 211 close to the supporting plate 22, the supporting plate 22 is connected to the side plate 212, the air blowing hole 2121 is disposed on the side plate 212, one end of the side plate 212 close to the mounting block 211 is provided with a third strip groove 2126, one end of the third strip groove 2126 is communicated with the air blowing hole 2121, the mounting block 211 is provided with an air inlet 2112, and the air inlet 2112 is communicated with the other end of the third strip groove 2126. On one hand, the arrangement of the position of the blowing holes 2121 is convenient, the arrangement of the blowing holes 2121 along the thickness direction of the side plate 212 can be ensured, so that the devices 50 passing through the blowing holes 2121 can be opposite to the blowing holes 2121, the corresponding devices 50 can be blown out, and the interference of the adjacent devices 50 when the blowing holes 2121 blow air is prevented; on the other hand, the third strip-shaped groove 2126 can be conveniently machined, and the machining cost is favorably reduced.

In an embodiment of the present application, referring to fig. 4, 7 and 8, the mounting block 211 is provided with a second pumping hole 2113, and the second pumping hole 2113 is communicated with an end of the first pumping hole 2124 away from the first linear groove 2203. This can be adjacent to the external vacuum line through the second pumping holes 2113, so that the thickness of the side plate 212 can be reduced and the connection of the external vacuum line can be facilitated.

In an embodiment of the present application, referring to fig. 4, 7 and 8, the second sensor 40 is embedded and mounted on the mounting block 211, the side plate 212 is provided with an insertion hole 2123, and the insertion hole 2123 is for inserting the sensing end of the second sensor 40. This can facilitate the installation of the second sensor 40 and can prevent the side plate 212 from shielding the second sensor 40.

In an embodiment of the present application, referring to fig. 4, 7 and 8, the first sensor 30 is a correlation fiber sensor, the sorting seat 20 is provided with a light hole 2122, and the light hole 2122 is located on a side of the suction hole 2201 away from the discharging end of the conveying track 13. With the correlation optical fiber sensor, when the device 50 passes through the light hole 2122, the device 50 can cut off the light beam of the correlation optical fiber sensor, so as to trigger the in-place signal of the device 50, so as to control the absorption hole 2201 to continuously absorb the next device 50. Alternatively, the distance between the light-transmitting hole 2122 and the adjacent suction hole 2201 is equal to the length of one device 50, so that the correlation optical fiber sensor can be triggered just when the device 50 released from the suction hole 2201 leaves the suction hole 2201.

In one embodiment, referring to fig. 2 and 3, the annular wall 12 is provided with a bracket 33, two ends of the bracket 33 respectively extend to two ends of the light hole 2122 in the axial direction, the transmitting end 31 and the receiving end 32 of the correlation fiber sensor are respectively arranged at two ends of the bracket 33, and the transmitting end 31 and the receiving end 32 of the correlation fiber sensor are oppositely arranged. This facilitates the installation of the correlation fiber sensor and the control of the optical axis of the correlation fiber sensor passing through the light-transmitting hole 2122. Specifically, the light-transmitting hole 2122 is opened on the side plate 212, and the mounting block 211 is opened with a through hole 2111, wherein the through hole 2111 is communicated with the light-transmitting hole 2122, so that the light beam passes through the light-transmitting hole 2122 and is received by the receiving end 32.

In an embodiment of the present application, referring to fig. 1, fig. 4 and fig. 5, the sorting seat 20 is provided with a chute 2125, the chute 2125 is located at a side of the sorting seat 20 close to the axis of the tray 11, that is, the chute 2125 is located at a side of the sorting seat 20 close to the supporting plate 22, the light hole 2122 is provided at a bottom of the chute 2125, and a depth of the chute 2125 gradually decreases toward a direction close to the second sensor 40. This can prevent burrs at the edge of the device 50 (the positive electrode 53 or the negative electrode 54) from scratching the light transmission hole 2122 when the device 50 passes through the light transmission hole 2122, thereby preventing dust from being generated or affecting the transmission direction of the device 50.

In another embodiment of the present application, the end of the light-transmitting hole 2122 near the axis of the tray 11 is provided with a chamfer (not shown). That is, one end of the light transmission hole 2122 adjacent to the support plate 22 is chamfered. This can prevent burrs at the edge of the device 50 (the positive electrode 53 or the negative electrode 54) from scratching the light transmission hole 2122 when the device 50 passes through the light transmission hole 2122, thereby preventing dust from being generated or affecting the transmission direction of the device 50.

In one embodiment of the present application, referring to fig. 1 to 3, the second sensor 40 is a color detection optical fiber sensor. The color block 55 on the device 50 can be detected, and the air blowing holes 2121 can be controlled to blow air after the second sensor 40 detects the color block 55, so that the device 50 opposite to the preset direction can be blown out by using the difference between the distances from the color block 55 to the two ends of the device 50.

In an embodiment of the present application, referring to fig. 1, fig. 4 and fig. 7, the air blowing hole 2121 is located on a side of the second sensor 40 close to the suction hole 2201, along a length direction of the sorting seat 20: the ratio of the distance of the air blowing hole 2121 from the second sensor 40 to the distance of the light transmitting hole 2122 from the suction hole 2201 ranges from 0.4 to 0.8, i.e., the ratio of the distance of the air blowing hole 2121 from the axis of the insertion hole 2123 to the length of the device 50 ranges from 0.4 to 0.8. Thus, the blowing hole 2121 is arranged at the upstream of the second sensor 40, when the color block 55 is located at one end of the substrate 51 close to the output direction of the device 50, the blowing hole 2121 can blow the device 50, and when the color block 55 is located at one end of the substrate 51 away from the output direction of the device 50, the blowing hole 2121 blows air which cannot blow the device 50, so that the device 50 is prevented from being blown, furthermore, the influence caused by time delay and the like of the blowing hole 2121 can be avoided, and the deflection of the device 50 is avoided.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A vibration disc comprises a disc body, an annular wall arranged around the edge of the disc body and a conveying track arranged on the inner side of the annular wall, wherein the conveying track is spiral, and the feeding end of the conveying track is connected with the disc body; the vibration disk further includes:

the sorting seat is arranged on the annular wall, the feeding end of the sorting seat is connected with the discharging end of the conveying track, the feeding end of the sorting seat is provided with an adsorption hole, and the discharging end of the sorting seat is provided with an air blowing hole;

a first sensor for detecting the release of the means for attracting the pores, the first sensor being mounted on the annular wall; and the number of the first and second groups,

and the second sensor is used for detecting the direction of the device and is arranged at the position, adjacent to the air blowing hole, of the discharge end of the sorting seat.

2. A vibratory pan as set forth in claim 1, wherein: the sorting seat comprises a mounting seat embedded and mounted on the annular wall and a supporting plate mounted on one side, close to the axis of the disc body, of the mounting seat, and the supporting plate is connected with the conveying track; the supporting plate is provided with a first strip-shaped groove; the mounting seat and the support plate enclose the adsorption hole at the position of the first strip-shaped groove, and an air outlet end is formed at one end of the first strip-shaped groove; and the mounting seat is provided with a first air exhaust hole connected with the air outlet end of the first strip-shaped groove.

3. A vibratory pan as set forth in claim 2, wherein: the number of the first strip-shaped grooves is multiple, second strip-shaped grooves which are connected with the air outlet ends of the first strip-shaped grooves are formed in the supporting plate, the first strip-shaped grooves are distributed along the length direction of the supporting plate, and the first air exhaust holes are communicated with the second strip-shaped grooves.

4. A vibratory pan as set forth in claim 2, wherein: the mounting seat comprises a mounting block connected with the annular wall and a side plate mounted on one side of the mounting block close to the supporting plate, the supporting plate is connected with the side plate, the air blowing hole is formed in the side plate, one end of the side plate close to the mounting block is provided with a third strip-shaped groove, one end of the third strip-shaped groove is communicated with the air blowing hole, and the mounting block is provided with an air inlet hole communicated with the other end of the third strip-shaped groove.

5. The vibratory pan of claim 4, wherein: and a second air exhaust hole communicated with one end of the first air exhaust hole far away from the first strip-shaped groove is formed in the mounting block.

6. The vibratory pan of claim 4, wherein: the second sensor is embedded and installed on the installation block, and an embedding hole for inserting the sensing end of the second sensor is formed in the side plate.

7. A vibrating disk according to any one of claims 1 to 6, wherein: the first sensor is a correlation optical fiber sensor, a light hole is formed in the sorting seat, and the light hole is located on one side, away from the discharge end of the conveying track, of the adsorption hole.

8. A vibratory pan as set forth in claim 7, wherein: a chute is formed in one side, close to the axis of the tray body, of the sorting seat, the light-transmitting hole is formed in the bottom of the chute, and the depth of the chute is gradually reduced towards the direction close to the second sensor; or, one end of the light hole close to the axis of the tray body is provided with a chamfer.

9. A vibratory pan as set forth in claim 7, wherein: the second sensor is a color detection optical fiber sensor.

10. A vibratory pan as set forth in claim 7, wherein: the air blowing hole is positioned on one side of the second sensor close to the adsorption hole; along the length direction of the sorting seat: the ratio range of the distance between the air blowing hole and the second sensor to the distance between the light transmitting hole and the adsorption hole is 0.4-0.8.

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