CN216501157U - Belt cleaning device is used in chip production - Google Patents

Belt cleaning device is used in chip production Download PDF

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Publication number
CN216501157U
CN216501157U CN202122460130.1U CN202122460130U CN216501157U CN 216501157 U CN216501157 U CN 216501157U CN 202122460130 U CN202122460130 U CN 202122460130U CN 216501157 U CN216501157 U CN 216501157U
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China
Prior art keywords
machine body
cleaning device
sides
fixedly connected
chip
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CN202122460130.1U
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Chinese (zh)
Inventor
蔡华文
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Hubei Kerui Semiconductor Technology Co ltd
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Hubei Kerui Semiconductor Technology Co ltd
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Priority to CN202122460130.1U priority Critical patent/CN216501157U/en
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Abstract

The utility model discloses a cleaning device for chip production, which comprises a machine body, a chip and a base, and is characterized in that the bottom end of the machine body is fixedly connected with the top end of the base, the periphery of the bottom end of the base is fixedly connected with the top end of a cushion block respectively, two sides of the machine body are fixedly connected with one end of an exhaust fan respectively, the other end of the exhaust fan is connected with a filter screen in a buckling manner respectively, screw rods are arranged on the other two sides of the machine body respectively, two sides of the inner wall of the machine body are movably connected with one side of a clamping moving plate respectively, first grooves are arranged on the other side of the clamping moving plate at equal intervals, the first grooves are respectively connected with two ends of the chip in an embedding manner, two sides of the inner wall of the machine body are fixedly connected with one end of an ultrasonic cleaning device respectively, cleaning liquid is filled in the inner bottom end of the machine body, two ends of the other side of the clamping moving plate are respectively provided with second grooves, and the top end of the machine body is connected with the bottom end of a machine cover in a buckling manner, the bottom of the exhaust fan is respectively provided with a glass window. The utility model has simple structure and convenient operation.

Description

Belt cleaning device is used in chip production
Technical Field
The utility model relates to the technical field of chip production, in particular to a cleaning device for chip production.
Background
The chip is a short name of integrated circuit, or called microcircuit, microchip, chip, etc., the chip is a way of miniaturizing the circuit in electronics, and is often manufactured on the surface of semiconductor wafer, the chip needs to be cleaned by ultrasonic cleaner, etc. in the production process, the ultrasonic cleaning is to utilize the cavitation action, acceleration action and direct current action of ultrasonic wave in liquid to directly and indirectly act on liquid and dirt, so that the dirt layer is dispersed, emulsified and stripped to achieve the purpose of cleaning. When an existing cleaning device for chip production such as an ultrasonic cleaning machine is used for cleaning a chip wafer, residual water on the chip wafer is not easy to rapidly clear, the chip wafer is not easy to classify and limit in the cleaning machine, the chip wafer is large in contact area with a placing device, and the cleaning efficiency of the chip wafer is also influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a cleaning device for chip production, which is used for solving the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: a cleaning device for chip production comprises a machine body, a chip and a base, and is characterized in that the bottom end of the machine body is fixedly connected with the top end of the base, the periphery of the bottom end of the base is fixedly connected with the top end of a cushion block respectively, two sides of the machine body are fixedly connected with one end of an air exhauster respectively, the other end of the air exhauster is connected with a filter screen in a buckling mode respectively, screw rods are mounted on the other two sides of the machine body respectively, two sides of the inner wall of the machine body are movably connected with one side of a clamping movable plate respectively, first grooves are mounted on the other side of the clamping movable plate at equal intervals, the first grooves are connected with two ends of the chip in an embedding mode respectively, two sides of the inner wall of the machine body are fixedly connected with one end of an ultrasonic cleaning device respectively, cleaning liquid is filled in the bottom end of the machine body, second grooves are arranged at two ends of the other side of the clamping movable plate respectively, the top of organism is connected with the bottom buckle of cover, the air outlet is installed respectively to the top both sides of cover, the glass window is installed respectively to the bottom of air exhauster, one side and the switch fixed connection of base, power source is installed to the bottom of switch, the louvre is installed respectively to the both sides of base.
Furthermore, the second groove is provided with threads, and the threads are in threaded connection with one side of the screw rod.
Furthermore, scale marks are equidistantly arranged on the glass window.
Furthermore, driving motors are respectively installed around the inside of the base, and the driving motors are fixedly connected with the bottom ends of the screws.
Furthermore, the power interface is fixedly connected with an external power line.
Furthermore, dustproof filter screens are respectively installed at the top ends of the air outlets.
Furthermore, the ultrasonic cleaning device is electrically connected with a power supply.
Compared with the prior art, the utility model has the following beneficial effects:
the utility model cleans the chip by the ultrasonic cleaning device and the cleaning liquid, and simultaneously clamps the moving plate to fix the two ends of the chip, and drives the clamping moving plate to move up and down by the screw. After the cleaning is finished, when the clamping moving plate ascends to the upper part of the interior of the machine body, the air extractor drives the air flow to dry the chip, and the filter screen filters dust in the air to prevent the dust from entering and causing secondary pollution.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic sectional top view of a cleaning apparatus for chip production;
fig. 2 is a schematic side view of the whole cleaning apparatus for chip production.
Reference numerals:
1. a body; 2. a chip; 3. a first groove; 4. a screw; 5. clamping the moving plate; 6. cleaning fluid; 7. an ultrasonic cleaning device; 8. an exhaust fan; 9. a filter screen; 10. a second groove; 11. an air outlet; 12. a machine cover; 13. a glass window; 14. a switch; 15. a power interface; 16. heat dissipation holes; 17. cushion blocks; 18. a base.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts based on the embodiments of the present invention belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "top", "bottom", "one side", "the other side", "front", "back", "middle part", "inside", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1-2, a cleaning device for chip production according to an embodiment of the present invention includes a machine body 1, a chip 2, and a base 18, and is characterized in that a bottom end of the machine body 1 is fixedly connected to a top end of the base 18, a periphery of a bottom end of the base 18 is fixedly connected to a top end of a pad 17, two sides of the machine body 1 are fixedly connected to one end of an exhaust fan 8, respectively, another end of the exhaust fan 8 is connected to a filter screen 9, respectively, screws 4 are mounted on another two sides of the machine body 1, two sides of an inner wall of the machine body 1 are movably connected to one side of a clamping moving plate 5, first grooves 3 are mounted on another side of the clamping moving plate 5 at equal intervals, the first grooves 3 are respectively connected to two ends of the chip 2 in an embedded manner, two sides of an inner wall of the machine body 1 are fixedly connected to one end of an ultrasonic cleaning device 7, cleaning fluid 6 is filled in the inside bottom of organism 1, the opposite side both ends of centre gripping movable plate 5 are equipped with second recess 10 respectively, the top of organism 1 is connected with the bottom buckle of cover 12, air outlet 11 is installed respectively to the top both sides of cover 12, glass window 13 is installed respectively to the bottom of air exhauster 8, one side and the switch 14 fixed connection of base 18, power source 15 is installed to the bottom of switch 14, louvre 16 is installed respectively to the both sides of base 18.
According to the scheme of the utility model, the second groove 10 is provided with threads, the threads are in threaded connection with one side of the screw rod 4, the glass window 13 is equidistantly provided with scale marks, the periphery inside the base 18 is respectively provided with the driving motor, the driving motor is fixedly connected with the bottom end of the screw rod 4, the power supply interface 15 is fixedly connected with an external power supply line, the top end of the air outlet 11 is respectively provided with the dustproof filter screen, and the ultrasonic cleaning device 7 is electrically connected with the power supply.
The working principle is as follows: the cover 12 is opened, the chips 2 are respectively inserted into the first grooves 3 of the clamping moving plate 5, the switch 14 is started after the cover 12 is closed, the screw 4 rotates to drive the clamping moving plate 5 to move towards the bottom end of the interior of the machine body 1 until the chips 2 are immersed in the cleaning liquid 6, and then the ultrasonic cleaning device 7 is started to clean the chips 2. After the breath is finished, the screw rod 4 drives the clamping moving plate 5 to move upwards to positions on two sides of the exhaust fan 8, and the exhaust fan 8 is started to accelerate the drying of the chip 2.
In summary, the following steps: the utility model cleans the chip by the ultrasonic cleaning device and the cleaning liquid, and simultaneously clamps the moving plate to fix the two ends of the chip, and drives the clamping moving plate to move up and down by the screw. After the cleaning is finished, when the clamping moving plate ascends to the upper part of the interior of the machine body, the air extractor drives the air flow to dry the chip, and the filter screen filters dust in the air to prevent the dust from entering and causing secondary pollution.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that various changes, modifications and substitutions can be made without departing from the spirit and scope of the utility model as defined by the appended claims. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A cleaning device for chip production comprises a machine body (1), a chip (2) and a base (18), and is characterized in that the bottom end of the machine body (1) is fixedly connected with the top end of the base (18), the periphery of the bottom end of the base (18) is fixedly connected with the top end of a cushion block (17) respectively, two sides of the machine body (1) are fixedly connected with one end of an exhaust fan (8) respectively, the other end of the exhaust fan (8) is connected with a filter screen (9) in a buckling manner respectively, screw rods (4) are installed on the other two sides of the machine body (1) respectively, two sides of the inner wall of the machine body (1) are movably connected with one side of a clamping moving plate (5) respectively, first grooves (3) are installed on the other side of the clamping moving plate (5) in an equidistance manner, the first grooves (3) are connected with two ends of the chip (2) in an embedding manner respectively, two sides of the inner wall of the machine body (1) are fixedly connected with one end of an ultrasonic cleaning device (7) respectively, the inside bottom of organism (1) is filled with washing liquid (6), the opposite side both ends of centre gripping movable plate (5) are equipped with second recess (10) respectively, the top of organism (1) is connected with the bottom buckle of cover (12), air outlet (11) are installed respectively to the top both sides of cover (12), glass window (13) are installed respectively to the bottom of air exhauster (8), one side and switch (14) fixed connection of base (18), power source (15) are installed to the bottom of switch (14), louvre (16) are installed respectively to the both sides of base (18).
2. A cleaning device for chip production according to claim 1, wherein the second groove (10) is provided with a thread, and the thread is in threaded connection with one side of the screw (4).
3. A cleaning device for chip production according to claim 1, wherein the glass window (13) is equidistantly provided with graduation marks.
4. The cleaning device for chip production according to claim 1, wherein the driving motors are respectively installed around the inside of the base (18), and the driving motors are fixedly connected with the bottom ends of the screws (4).
5. The cleaning device for chip production according to claim 1, wherein the power interface (15) is fixedly connected with an external power line.
6. The cleaning device for chip production according to claim 1, wherein the top ends of the air outlets (11) are respectively provided with a dustproof filter screen.
7. The cleaning device for chip production according to claim 1, wherein the ultrasonic cleaning device (7) is electrically connected with a power supply.
CN202122460130.1U 2021-10-08 2021-10-08 Belt cleaning device is used in chip production Active CN216501157U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122460130.1U CN216501157U (en) 2021-10-08 2021-10-08 Belt cleaning device is used in chip production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122460130.1U CN216501157U (en) 2021-10-08 2021-10-08 Belt cleaning device is used in chip production

Publications (1)

Publication Number Publication Date
CN216501157U true CN216501157U (en) 2022-05-13

Family

ID=81522888

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122460130.1U Active CN216501157U (en) 2021-10-08 2021-10-08 Belt cleaning device is used in chip production

Country Status (1)

Country Link
CN (1) CN216501157U (en)

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