CN216484717U - Sample box convenient to scanning electron microscope sample sweeps - Google Patents

Sample box convenient to scanning electron microscope sample sweeps Download PDF

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Publication number
CN216484717U
CN216484717U CN202122865635.6U CN202122865635U CN216484717U CN 216484717 U CN216484717 U CN 216484717U CN 202122865635 U CN202122865635 U CN 202122865635U CN 216484717 U CN216484717 U CN 216484717U
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sample
push
pull frame
shaped
scanning electron
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CN202122865635.6U
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李攀
孙月娜
王献玲
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Hebei University
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Hebei University
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Abstract

The utility model provides a sample box convenient for sweeping a scanning electron microscope sample. The structure of the device comprises a plurality of sample unit cells arranged side by side, wherein a push-pull frame is arranged in each sample unit cell; the push-pull frame and the sample cell form a drawer type structure; a strip-shaped opening is formed in the bottom plate of the sample cell, and a guide pipe opposite to the strip-shaped opening is arranged below the bottom plate of the push-pull frame; the nail-shaped sample stage for pasting the scanning electron microscope sample can be arranged on the bottom plate of the push-pull frame, and the nail legs of the nail-shaped sample stage can extend into the guide pipe. Closed cells are arranged at two ends of the sample cells arranged side by side; the closed unit cell is clamped by the clamping mechanism, so that the sample unit cell can be fixed. By adopting the sample box, a sample table does not need to be held by hands during purging, two hands are liberated, the situation that the sample accidentally drops during purging can be effectively avoided, and the purging efficiency is greatly improved. The sample after purging is stored in a closed way and cannot be polluted by the environment.

Description

Sample box convenient to scanning electron microscope sample sweeps
Technical Field
The utility model relates to the technical field of test of a scanning electron microscope sample, in particular to a sample box convenient for sweeping the scanning electron microscope sample.
Background
Scanning electron microscopy is a common instrument used for analyzing the morphology and composition of a material sample. The electron gun is characterized in that a filament is heated in a high-vacuum electron gun to emit electrons, the electrons are accelerated at high pressure and focused into fine electron beams through a magnetic lens, and are subjected to regular raster scanning movement on the surface of a sample under the action of a deflection coil and interact with the sample to excite various information (such as backscattered electrons, secondary electrons, Auger electrons, X rays and the like), and signals excited from the sample are collected by different detectors to realize morphology analysis and component analysis.
When a scanning electron microscope is used for testing a sample, in order to avoid the situation that sample scraps or loose powder flies to pollute a lens cylinder in the vacuumizing process, the sample must be blown before testing so as to blow away powder samples which are not firmly adhered or scraps on the surface of the sample. At present, when an operator sweeps a sample, the operator needs to wear disposable gloves and then hold sample tables to sweep one by one. Because sample platform size is less (mesa diameter is less than 13mm), not being convenient for hold between fingers during sweeping, the interference of disposable gloves in addition drops easily, has increased the degree of difficulty among the intangible, is not convenient for test rapidly.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a sample box convenient for sweeping a sample of a scanning electron microscope, and the sample box is used for solving the problem that the sample is easy to drop when an operator holds a sample table to sweep the sample.
The utility model is realized by the following steps: a sample box convenient for sweeping a sample of a scanning electron microscope comprises a plurality of sample cells arranged side by side, wherein each sample cell is a hollow cuboid box-shaped structure with an opening at the front end; the front end of the push-pull frame is provided with a front plate for plugging the front end opening of the sample cell; a strip-shaped opening is formed in the bottom plate of the sample cell from front to back, a through hole is formed in the bottom plate of the push-pull frame, a guide pipe is connected below the through hole and is arranged opposite to the strip-shaped opening, and after the push-pull frame is arranged in the sample cell, the guide pipe just extends into the strip-shaped opening; a nail type sample platform for pasting scanning electron microscope sample can be arranged on the bottom plate of push-and-pull frame, and the nail leg of nail type sample platform bottom can stretch into the stand, can carry out spacing fixed to nail type sample platform through the stand. The inner diameter of the guide pipe is about 3.5mm, and the size of the guide pipe meets the diameter of the nail leg of most nail-type sample tables.
Preferably, closed cells are arranged at two ends of the sample cells arranged side by side; the two closed cells and each sample cell are integrally formed; the closed cells are clamped through the clamping mechanism, and then the sample cells can be fixed.
Preferably, the clamping mechanism comprises a first C-clip and a second C-clip; the first C-shaped clamp is arranged on the experiment table, and the opening faces the outer side of the experiment table; the upper arm of the second C-shaped clamp is crossly superposed on the lower arm of the first C-shaped clamp, and the lower arm of the second C-shaped clamp is positioned below the table surface of the experiment table; the second C-shaped clamp is fixed on the experiment table through a first screw rod penetrating through a lower arm of the second C-shaped clamp; a second screw rod is arranged on the lower arm penetrating through the first C-shaped clamp and the upper arm penetrating through the second C-shaped clamp, and a third screw rod is arranged on the upper arm penetrating through the first C-shaped clamp; and the opposite ends of the second screw and the third screw are respectively provided with a clamping table, and the two clamping tables are used for clamping and fixing the closed cells.
Preferably, the push-pull frame comprises a front plate, a rear plate and a bottom plate; and the top of the sample cell is provided with a limiting rod, the limiting rod extends into the sample cell and is positioned between the front plate and the rear plate of the push-pull frame, and the limiting rod is used for limiting outward movement of the push-pull frame.
Preferably, a pull rod is arranged on the outer side surface of the front plate of the push-pull frame.
Preferably, the number of sample cells is 4 to 8.
Compared with the prior art, the utility model has the following beneficial effects:
(1) the operation is convenient and fast: and after the scanning electron microscope sample is pasted on the sample table, placing the sample in the sample cell. And during purging, the push-pull frame is pulled out to the maximum extent, so that the sample is completely exposed. The sample table is not required to be held by hand, and the air gun is aligned to the sample table on the bottom plate of the push-pull frame, so that the purging operation can be performed.
(2) Is convenient to clean: when the sample box needs to be cleaned, the push-pull frame can be completely pulled out for cleaning only by taking off the limiting rods at the tops of the sample unit grids. After cleaning, the push-pull frame is pushed back into the sample cell to reset the limiting rod.
(3) Pollution prevention: debris or powder that comes off during purging does not contaminate other samples. After the purging is finished, the sample is pushed back into the sample cell, so that the sample is effectively prevented from being polluted.
(4) The sample management is convenient: and the samples are orderly placed in the sample cells and are tested in sequence, so that the samples are prevented from being mixed up, and the taking mistakes are avoided.
(5) The application range is wide: the size of the guide pipe at the bottom of the push-pull frame is suitable for nail legs of most nail-type sample tables on the market, so the sample box is suitable for nail-type sample tables of various models such as a plane table, an angle table, a clamping table and the like.
Drawings
FIG. 1 is a schematic view of the structure of a sample cartridge according to the present invention.
Fig. 2 is a schematic structural view of the push-pull frame of the present invention.
Fig. 3 is a schematic structural view of the push-pull rack and the sample cell assembled according to the present invention.
Fig. 4 is a schematic structural view of the clamping mechanism of the present invention.
In the figure: 1. a sample cell; 2. closing the cells; 3. a strip-shaped opening; 4. a limiting rod; 5. a push-pull frame bottom plate; 6. a back plate; 7. a guide tube; 8. a pull rod; 9. a front plate; 10. a nail-shaped sample stage; 11. a first C-clip; 12. a second C-clip; 13. a first screw; 14. a second screw; 15. a third screw; 16. a clamping table; 17. and (4) a test bench.
Detailed Description
As shown in fig. 1, the sample box convenient for sweeping the sample of the scanning electron microscope provided by the utility model comprises a plurality of sample cells 1 arranged side by side, each sample cell 1 is a hollow cuboid box-shaped structure with an opening at the front end, and the length, the width and the height of the sample cells 1 are correspondingly equal. Specifically, each sample cell 1 includes two side plates, a bottom plate, a top plate, and a back plate. Two adjacent sample cells 1 may share a side panel. A strip-shaped notch 3 is formed in the bottom plate of each sample cell 1 along the extending direction of the bottom plate to the back plate, and the opening of the strip-shaped notch 3 is located at the opening of the front end of the sample cell 1. The strip-shaped opening 3 is positioned on the central axis of the bottom plate, and the length of the strip-shaped opening 3 can be equal to that of the bottom plate or slightly smaller than that of the bottom plate. If the length of the strip-shaped gap 3 is equal to that of the bottom plate, the bottom plate is divided into two parts by the strip-shaped gap 3.
With reference to fig. 2 and 3, a push-pull rack adapted to the inner cavity of the sample cell 1 is provided in each sample cell 1. The push-pull frame comprises a push-pull frame bottom plate 5, and a front plate 9 and a rear plate 6 which are arranged at the front end and the rear end of the push-pull frame bottom plate 5. The bottom plate 5 of the push-pull frame is parallel to the bottom plate of the sample cell 1, and the front plate 9 and the rear plate 6 of the push-pull frame are parallel to the back plate of the sample cell 1. The push-pull frame can move back and forth relative to the sample cell 1 along the side plate direction from the opening at the front end of the sample cell 1, namely: the sample cell 1 and the push-pull frame form a drawer type structure, and the push-pull frame can be pushed into the sample cell 1 or pulled out of the sample cell 1. A through hole is arranged at the position, close to the front plate 9, on the push-pull frame bottom plate 5, a vertical upright guide pipe 7 is connected below the through hole, the guide pipe 7 and the push-pull frame bottom plate 5 are integrally formed, and the guide pipe 7 is vertically opposite to the strip-shaped openings 3 on the bottom plate of the sample cell 1. After the push-pull frame is pushed into the sample cell 1, the guide pipe 7 below the bottom plate 5 of the push-pull frame is just arranged in the strip-shaped opening 3 on the bottom plate of the sample cell 1, and the guide pipe 7 can move along the strip-shaped opening 3 along with the movement of the push-pull frame in the sample cell 1.
The utility model is suitable for purging and storing the nail-shaped sample table. As shown in fig. 3, the nail type sample stage 10 includes an upper stage surface and a lower nail leg. The table top can take many forms, for example: a flat table, an angle table, a clamping table, etc. The legs are typically in the form of bar-shaped posts. The diameter of the nail leg of the nail-type sample table on the market is about 2.9mm-3.3 mm. According to the nail-shaped sample table, the through holes in the push-pull frame bottom plate 5 and the diameter of the guide pipe 7 are 3.5mm, so that when the nail-shaped sample table 10 is placed on the push-pull frame bottom plate 5, the nail legs of the nail-shaped sample table 10 can just stretch into the guide pipe 7, and therefore the nail-shaped sample table 10 is fixed, and the nail-shaped sample table 10 is convenient to fix during later purging. The length of the guide tube 7 is generally greater than the length of the nail leg of the nail type sample table 10. Of course, the bottom of the guide tube 7 is open-ended, and the legs can be fixed even if the length of the guide tube 7 is smaller than the length of the legs.
In order to prevent the push-pull frame from being pulled out of the sample unit grid 1 excessively, the top plate of the sample unit grid 1 is provided with a through hole, and a limiting rod 4 penetrates through the through hole. After the push-pull frame is arranged in the sample cell 1, the limiting rod 4 is positioned between the front plate 9 and the rear plate 6 of the push-pull frame. Due to the existence of the limiting rod 4, the rear plate 6 cannot move outwards without limit, and the push-pull frame is prevented from falling off due to excessive pulling.
In order to facilitate the drawing of the push-pull frame, a pull rod 8 is arranged on the outer side surface of the front plate 9.
The utility model is provided with closed cells 2 at two ends of a plurality of sample cells 1 arranged side by side. The shape and the size of the closed cell 2 are similar to those of the sample cell 1, and the difference is that the front end of the closed cell 2 is not provided with an opening, and a bottom plate of the closed cell is also not provided with a strip-shaped gap, and the closed cell is of a closed shell structure, can be of a solid structure and can also be of a hollow structure. The closed cell 2 is in a closed cuboid structure. The closed cells 2 are integrated with the sample cells 1. In this way, the closed unit cells 2 at the two ends can be clamped by the clamping mechanism, namely, the whole sample box is fixed.
The structure of the clamping mechanism is schematically shown in fig. 4. The clamping mechanisms have two sets, only one of which is shown in fig. 4. Fixture specifically includes: a first C-clip 11, a second C-clip 12. Each C-clip includes an upper arm, a lower arm, and a side arm. The first C-clip 11 is placed on the table 17 with the lower arm of the first C-clip 11 in contact with the table top of the table 17. The open end of the first C-clip 11 is flush with the edge of the laboratory bench 17 and faces outside the laboratory bench 17. The opening direction of the second C-shaped clamp 12 is opposite to the opening direction of the first C-shaped clamp 11, the upper arm of the second C-shaped clamp 12 is placed on the lower arm of the first C-shaped clamp 11, and the lower arm of the second C-shaped clamp 12 is placed under the table surface of the experiment table 17. In this way, the second C-clip 12 and the first C-clip 11 are hooked back together. A first screw 13 is threaded on the lower arm of the second C-clip 12, and the end face of the first screw 13 is pressed against the bottom face of the experiment table 17 by screwing the first screw 13, so that the second C-clip 12 is fixed on the experiment table 17. Since the upper arm of the second C-clip 12 presses the lower arm of the first C-clip 11, the first C-clip 11 is also fixed to the test table 17.
A second threaded rod 14 is provided through the lower arm of the first C-clip 11 and the upper arm of the second C-clip 12, and a third threaded rod 15 is provided through the upper arm of the first C-clip 11. Opposite ends of the second screw 14 and the third screw 15 are respectively provided with a clamping table 16, and opposite free end surfaces of the two clamping tables 16 are clamping surfaces. The area of the clamping surface is larger than the cross section of the screw.
When clamping the sample cartridge, the distance between the two sets of clamping mechanisms is first adjusted, which is approximately the distance between the two closed cells 2. Thus, during clamping, each group of clamping mechanisms clamps one closed cell 2, so that the whole sample box can be fixed. After the distance between the two groups of clamping mechanisms is adjusted, the two closed cells 2 are respectively arranged on the table surfaces of the clamping tables 16 at the ends of the second screws 14 on the corresponding clamping mechanisms, the second screws 14 are generally not adjusted, and the third screws 15 are adjusted to enable the clamping tables 16 at the ends of the third screws 15 to tightly press the top surfaces of the closed cells 2, so that the closed cells 2 are clamped by the corresponding clamping mechanisms. The sample cell 1, which is located between the two closed cells 2, is suspended above the laboratory table 17.
More specifically, all the cells (including the plurality of sample cells 1 and the two closed cells 2) are connected together and integrally molded in the present invention. The material is plastic, the height of the box body (namely the height of the unit grid) is not limited, and a block-shaped sample can be placed. The length and the width of the unit cell are not limited so as to be convenient for containing nail-shaped sample tables with different sizes. The number of sample cells 1 is not limited, but is preferably 4 to 8. As shown in fig. 1, fig. 1 shows that the number of sample cells 1 is 6. The bottom plate of the sample cell 1 is used to support a push-pull rack. The width of the strip-shaped gap 3 on the bottom plate of the sample cell 1 is matched with the guide pipe 7 at the bottom of the push-pull frame bottom plate 5.
The limiting rod 4 is arranged in a through hole on the top plate of the sample cell 1, is made of plastic and has the diameter of 3-5 mm. The height of the limiting rod 4 protruding out of the top plate of the sample cell 1 is not limited, so that the sample cell is convenient to hold. The position of the limiting rod 4 on the top plate of the sample cell 1 is not limited, so that the nail-type sample table 10 can be completely pulled out, and the push-pull frame cannot fall off due to excessive pulling.
The push-pull frame is made of plastic. The length, width and height of the sample cell are matched with those of the sample cell 1.
The length and the shape of the pull rod 8 are not limited, and the pull rod is convenient to pull. After the nail-type sample table 10 is placed on the push-pull frame, the nail legs of the nail-type sample table 10 extend into the guide tube 7 below the bottom plate 5 of the push-pull frame, and the outer edge of the nail-type sample table 10 is close to the front plate 9.
The specific operation mode of the utility model is as follows:
(1) two sets of clamping mechanisms are arranged on the experiment table 17, and the sample box is clamped and fixed by the clamping mechanisms.
(2) A scanning electron microscope sample is pasted on a nail-shaped sample table 10 through conductive adhesive, a pull rod 8 is pulled, a push-pull frame is pulled out to the maximum extent, the nail-shaped sample table 10 is placed on a bottom plate 5 of the push-pull frame, nail legs of the nail-shaped sample table 10 extend into a guide pipe 7 below the bottom plate 5 of the push-pull frame, the pull rod 8 is pushed, the push-pull frame enters an inner cavity of a sample cell 1, and a front plate 9 of the push-pull frame just plugs an opening end of the sample cell 1. Thus, the pin specimen mount 10 is placed in the specimen cell 1. By repeating this operation, the sem samples can be placed in all the sample cells 1.
(3) The gas cylinder is opened and the air gun is ready. The push-pull frame in the first sample cell 1 is pulled out from any end of the sample box until the table surface of the nail-shaped sample table 10 is completely exposed, the push-pull frame is pushed back into the sample cell 1 after the nail-shaped sample table is continuously swept by the hand-held air gun in multiple angles for several seconds, and the swept sample can be kept clean and pollution-free in the sample cell 1. This operation was repeated, purging the samples one by one until all samples were purged.
(4) And (4) unloading the sample box from the clamping mechanism, and taking the whole sample box to the side of the scanning electron microscope for testing.
By adopting the sample box, a sample table does not need to be held by hands during purging, two hands are liberated, the situation that the sample accidentally drops during purging can be effectively avoided, and the purging efficiency is greatly improved. The sample after purging is stored in a closed way and cannot be polluted by the environment.

Claims (6)

1. A sample box convenient for sweeping a sample of a scanning electron microscope is characterized by comprising a plurality of sample cells arranged side by side, wherein each sample cell is a hollow cuboid box-shaped structure with an opening at the front end; the front end of the push-pull frame is provided with a front plate for plugging the front end opening of the sample cell; a strip-shaped opening is formed in the bottom plate of the sample cell from front to back, a through hole is formed in the bottom plate of the push-pull frame, and a guide pipe which is opposite to the strip-shaped opening and can extend into the strip-shaped opening is connected below the through hole; the nail-shaped sample stage for pasting the scanning electron microscope sample can be arranged on the bottom plate of the push-pull frame, and the nail legs at the bottom of the nail-shaped sample stage can extend into the guide pipe below the bottom plate of the push-pull frame.
2. The sample box convenient for purging the sample for the scanning electron microscope as claimed in claim 1, wherein closed cells are arranged at two ends of the sample cells arranged side by side; the two closed cells and each sample cell are integrally formed; the closed cells are clamped through the clamping mechanism, and then the whole sample box can be fixed.
3. The sample box for facilitating purging of a scanning electron microscope sample according to claim 2, wherein the clamping mechanism comprises a first C-shaped clamp and a second C-shaped clamp; the first C-shaped clamp is arranged on the experiment table, and the opening faces the outer side of the experiment table; the upper arm of the second C-shaped clamp is crossly superposed on the lower arm of the first C-shaped clamp, and the lower arm of the second C-shaped clamp is positioned below the table surface of the experiment table; the second C-shaped clamp is fixed on the experiment table through a first screw rod penetrating through a lower arm of the second C-shaped clamp; a second screw rod is arranged on the lower arm penetrating through the first C-shaped clamp and the upper arm penetrating through the second C-shaped clamp, and a third screw rod is arranged on the upper arm penetrating through the first C-shaped clamp; and the opposite ends of the second screw and the third screw are respectively provided with a clamping table, and the two clamping tables are used for clamping and fixing the closed cells.
4. The sample box convenient for purging a scanning electron microscope sample according to claim 1, wherein the push-pull frame comprises a front plate, a rear plate and a bottom plate; and the top of the sample cell is provided with a limiting rod, the limiting rod extends into the sample cell and is positioned between the front plate and the rear plate of the push-pull frame, and the limiting rod is used for limiting outward movement of the push-pull frame.
5. The sample box convenient for purging a scanning electron microscope sample according to claim 1, wherein a pull rod is arranged on the outer side face of the front plate of the push-pull frame.
6. The sample box for facilitating purging of a scanning electron microscope sample according to claim 1, wherein the number of the sample cells is 4-8.
CN202122865635.6U 2021-11-22 2021-11-22 Sample box convenient to scanning electron microscope sample sweeps Active CN216484717U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122865635.6U CN216484717U (en) 2021-11-22 2021-11-22 Sample box convenient to scanning electron microscope sample sweeps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122865635.6U CN216484717U (en) 2021-11-22 2021-11-22 Sample box convenient to scanning electron microscope sample sweeps

Publications (1)

Publication Number Publication Date
CN216484717U true CN216484717U (en) 2022-05-10

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CN202122865635.6U Active CN216484717U (en) 2021-11-22 2021-11-22 Sample box convenient to scanning electron microscope sample sweeps

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115144306A (en) * 2022-08-31 2022-10-04 季华实验室 Device for assisting powder sample detection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115144306A (en) * 2022-08-31 2022-10-04 季华实验室 Device for assisting powder sample detection
CN115144306B (en) * 2022-08-31 2022-11-11 季华实验室 Device for assisting powder sample detection

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