CN216440286U - Equipment for recovering hydrogen fluoride in tail gas of nitrogen trifluoride electrolytic cell - Google Patents
Equipment for recovering hydrogen fluoride in tail gas of nitrogen trifluoride electrolytic cell Download PDFInfo
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- CN216440286U CN216440286U CN202122592640.4U CN202122592640U CN216440286U CN 216440286 U CN216440286 U CN 216440286U CN 202122592640 U CN202122592640 U CN 202122592640U CN 216440286 U CN216440286 U CN 216440286U
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- absorption tower
- tail gas
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- hydrogen fluoride
- nitrogen trifluoride
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Abstract
The utility model provides equipment for recovering hydrogen fluoride in tail gas of a nitrogen trifluoride electrolytic cell, which comprises a secondary absorption tower, wherein one side of the upper end of the secondary absorption tower is connected with a discharge tower conveying pipe, the secondary absorption tower is connected with a primary absorption tower through a first connecting pipe, the primary absorption tower is connected with a plurality of condensers through second connecting pipes, the bottoms of the condensers are connected to an acid storage facility through conveying pipes, the condensers are respectively connected to a tail gas main pipe through transverse pipes, and the tail gas main pipe is connected to a plurality of electrolytic cells through electrolytic cell connecting pipes. The method can reduce the content of the hydrogen fluoride in the tail gas of the nitrogen trifluoride electrolytic cell to be below 3ppm, simultaneously can recycle more than 50 percent of the hydrogen fluoride for production, and prepares the rest hydrogen fluoride into hydrofluoric acid as a byproduct for sale, thereby ensuring that the tail gas reaches the standard and is discharged, meeting the environmental protection requirement and reducing the cost.
Description
Technical Field
The utility model belongs to the technical field of tail gas treatment equipment, and particularly relates to equipment for recovering hydrogen fluoride in tail gas of a nitrogen trifluoride electrolytic cell.
Background
Nitrogen trifluoride has excellent etching rate and selectivity, no residue is left on the surface of an etched object, and the nitrogen trifluoride is a very good cleaning agent. With the development of nanotechnology and the large-scale development of technology in the electronics industry, the demand for it will increase.
At present, in the production process of nitrogen trifluoride, the tail gas of an electrolytic cell usually contains a large amount of hydrogen fluoride, and the direct discharge of the hydrogen fluoride not only pollutes the environment, but also causes the waste of raw materials.
To this end, an apparatus for recovering hydrogen fluoride from the tail gas of a nitrogen trifluoride electrolyzer was devised to solve the above-mentioned problems.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide equipment for recovering hydrogen fluoride in tail gas of a nitrogen trifluoride electrolysis bath, which is simple in structure, safe, environment-friendly, good in using effect, high in practicability and capable of being popularized and applied.
In order to solve the technical problems, the utility model adopts the technical scheme that: the utility model provides a retrieve equipment of hydrogen fluoride in nitrogen trifluoride electrolysis trough tail gas, a serial communication port, including the second grade absorption tower, upper end one side of second grade absorption tower is connected with the emission tower conveyer pipe, and unabsorbed electrolysis cell tail gas is carried to the emission tower from this, the second grade absorption tower is connected with the one-level absorption tower through first connecting pipe, the one-level absorption tower is connected with two condensers through the second connecting pipe, duct connections is passed through to the bottom of condenser to store up sour facility, two the condenser is responsible for through violently union coupling to tail gas respectively, the tail gas is responsible for and is connected at least three electrolysis trough through the electrolysis trough connecting pipe, concentrates the aftertreatment earlier with electrolysis trough anode tail gas.
The bottom of one-level absorption tower is connected with one-level acid tank through defeated acid union coupling, the bottom of second grade absorption tower is connected with the second grade acid tank through another defeated acid union coupling, one-level acid tank with one side of second grade acid tank is connected with the delivery pump, two through the installation union coupling respectively one side of delivery pump corresponds respectively and is connected with first shower and second shower, first shower with the second shower is installed respectively the second grade absorption tower with in the one-level absorption tower.
Preferably, the temperature of the first-stage absorption tower and the second-stage absorption tower is normal temperature, the pressure of the first-stage absorption tower and the second-stage absorption tower is normal pressure, the absorption liquid of the first-stage absorption tower and the absorption liquid of the second-stage absorption tower are pure water, and the first-stage absorption tower and the second-stage absorption tower are both provided with packing layers, so that the pure water can fully absorb the hydrogen fluoride in the anode tail gas.
Preferably, the second connection pipe and the condenser are connected by a fixed pipe.
Preferably, the condenser uses nitrogen gas for condensation, the condensation temperature is controlled between-50 ℃ and-20 ℃, and the condenser is safe and reliable and has no secondary pollution.
Preferably, a pure water filling port is arranged on one side of the secondary acid tank, and pure water can be added into the secondary acid tank as required.
Preferably, one side of the upper end of the primary acid tank is connected to the first spray pipe through a third connecting pipe.
Preferably, the first shower with the one end of second shower is connected with the connector respectively, two the connector is installed respectively the one-level absorption tower with in the second grade absorption tower, two shower nozzles are evenly installed to the lower extreme of connector, and two the shower nozzle with the packing layer corresponds the setting, guarantees that pure water fully absorbs to the hydrogen fluoride in the positive pole tail gas.
Compared with the prior art, the utility model has the following advantages:
1. according to the utility model, the hydrogen fluoride in the tail gas of the nitrogen trifluoride electrolysis bath is condensed and absorbed by the condensing tower, the first absorption tower and the second absorption tower, so that the content of the hydrogen fluoride in the tail gas of the nitrogen trifluoride electrolysis bath can be reduced to below 3ppm, and the environment-friendly requirement is met.
2. According to the utility model, the first acid tank, the second acid tank, the delivery pump and the spray pipe form a circulating system, more than 50% of anhydrous hydrogen fluoride can be recovered for production, and the rest anhydrous hydrogen fluoride is prepared into hydrofluoric acid as a byproduct for sale, so that a certain cost can be reduced, and the practicability is greatly improved.
The present invention will be described in further detail with reference to the drawings and examples.
Drawings
Fig. 1 is a schematic structural view of the present invention.
FIG. 2 is a schematic view of the structure of an absorption column of the present invention.
Description of reference numerals:
1-a discharge tower duct; 2-a secondary absorption tower; 3-a first connecting pipe;
4-a first shower; 5-first stage absorption tower; 6-a pure water filling port;
7-acid conveying pipe; 8-second-stage acid tank; 9-finished acid outlet;
10-a second connecting tube; 11-fixed tube; 12-a second shower;
13-a condenser; 14-a cross tube; 15-tail gas main pipe;
16-a conveying pipe; 17-a transfer pump; 18-installing a pipe;
19-first-stage acid tank; 20-third connecting pipe; 21-an electrolytic cell;
22-connecting pipe of electrolytic bath; 23-a connector; 24-a spray head;
25-a filler layer.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, but rather should be construed as broadly as the present invention is capable of modification in various respects, all without departing from the spirit and scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
As shown in fig. 1-2, the utility model comprises a secondary absorption tower 2, wherein an exhaust tower conveying pipe 1 is connected to one side of the upper end of the secondary absorption tower 2, unabsorbed electrolysis cell tail gas is conveyed to the exhaust tower, the secondary absorption tower 2 is connected to a primary absorption tower 5 through a first connecting pipe 3, the primary absorption tower 5 is connected to two condensers 13 through a second connecting pipe 10, one condenser 13 is mainly used, the other condenser 13 is in standby, the bottom of the condenser 13 is connected to an acid storage facility through a conveying pipe 16, the two condensers 13 are respectively connected to a tail gas main pipe 15 through transverse pipes 14, the tail gas main pipe 15 is connected to at least three electrolysis cells 21 through an electrolysis cell connecting pipe 22, and the electrolysis cell anode tail gas is firstly concentrated and then treated.
The bottom of one-level absorption tower 5 is connected with one-level acid tank 19 through defeated acid pipe 7, the bottom of second grade absorption tower 2 is connected with second grade acid tank 8 through defeated acid pipe 7, one-level acid tank 19 with one side of second grade acid tank 8 is connected with delivery pump 17, two respectively through installation pipe 18 one side of delivery pump 17 corresponds respectively and is connected with first shower 4 and second shower 12, first shower 4 with second shower 12 corresponds respectively and installs second grade absorption tower 2 with in the one-level absorption tower 5.
In this example, the gas composition in the anode tail gas of the electrolytic cell was: n is a radical of2(60％-88％)、NF3 (10％～38％)，HF(1％-2％)，N2F2Less than 1%.
In this embodiment, the temperature of the first-stage absorption tower 5 and the second-stage absorption tower 2 is normal temperature, the pressure is normal pressure, the absorption liquid of the first-stage absorption tower 5 and the second-stage absorption tower 2 is pure water, the first-stage absorption tower 5 and the second-stage absorption tower 2 are both provided with a packing layer 25, and the pure water is ensured to fully absorb the hydrogen fluoride in the anode tail gas.
In this embodiment, the second connection pipe 10 and the condenser 13 are connected by a fixed pipe.
In the embodiment, the condenser 13 uses nitrogen for condensation, the condensation temperature is controlled to be between 50 ℃ below zero and 20 ℃ below zero, and the method is safe and reliable and has no secondary pollution.
In this embodiment, a pure water filling port 6 is provided at one side of the secondary acid tank 8, and pure water can be added to the secondary acid tank 8 as required.
In this embodiment, one side of the upper end of the primary acid tank 19 is connected to the first spray pipe 4 through a third connection pipe 20.
In this embodiment, first shower 4 with the one end of second shower 12 is connected with connector 23 respectively, two the other end of connector 23 is fixed respectively in one-level absorption tower 5 with in the second grade absorption tower 2, two shower nozzles 24 are evenly installed to the lower extreme of connector 23, and two shower nozzle 24 with packing layer 25 corresponds the setting, guarantees that pure water fully absorbs the hydrogen fluoride in the positive pole tail gas.
When the equipment is operated, anode tail gas generated by the electrolytic cell 21 enters the transverse pipe 14 through the tail gas main pipe 15, enters the condenser 13 through the transverse pipe 14 to be condensed (the temperature is controlled to be-50 ℃ to-20 ℃), most hydrogen fluoride gas in the anode tail gas of the electrolytic cell is condensed into hydrogen fluoride liquid, the hydrogen fluoride liquid is periodically returned to the electrolytic cell 21 from a liquid discharge valve at the bottom of the condenser 13 or is discharged through a conveying pipe 16 connected with the bottom of the condenser 13, uncondensed anode tail gas of the electrolytic cell enters the primary absorption tower 5 from a second connecting pipe 10 connected with the top of the condenser 13, pure water is sprayed out of the second spraying pipe 12 to absorb the hydrogen fluoride in the anode tail gas of the electrolytic cell, the liquid after absorbing the hydrogen fluoride is collected to the bottom of the primary absorption tower 5, the unabsorbed anode tail gas of the electrolytic cell enters the secondary absorption tower 2 from a first connecting pipe 3 connected with the top of the primary absorption tower 5, pure water sprayed by the first spray pipe 4 absorbs hydrogen fluoride in the tail gas of the electrolytic cell, liquid after hydrogen fluoride absorption is converged to the bottom of the secondary absorption tower 2, and residual gas is discharged from the discharge tower conveying pipe 1 at the top of the secondary absorption tower 2.
After the liquid at the bottom in the secondary absorption tower 2 reaches a certain amount, the liquid enters a secondary acid tank 8 through an acid conveying pipe 7, and after the hydrofluoric acid in the secondary acid tank 8 reaches a certain amount, the liquid is conveyed 20 to a primary acid tank 19 through a third connecting pipe by a conveying pump 17; after the liquid at the bottom in the primary absorption tower 5 reaches a certain amount, the liquid enters a primary acid tank 19 through an acid conveying pipe 7, the primary acid tank 19 is provided with a hydrofluoric acid outlet 9, and the hydrofluoric acid is discharged from the hydrofluoric acid outlet 9 when the concentration of the hydrofluoric acid reaches a required value.
Pure water is added into the second-stage acid tank 8 from the pure water filling port 6, the pure water in the second-stage acid tank 8 is pumped into the first-stage acid tank 19 by the delivery pump 17, and then the pure water is pumped into the second-stage acid tank 8, so that circulating water at all stages can be recycled until hydrofluoric acid is prepared and discharged.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Any simple modifications, alterations and equivalent changes made to the above embodiments according to the technical essence of the present invention are still within the scope of the technical solution of the present invention.
Claims (8)
1. The equipment for recovering hydrogen fluoride from the tail gas of the nitrogen trifluoride electrolysis cell is characterized by comprising a secondary absorption tower (2), wherein one side of the upper end of the secondary absorption tower (2) is connected with a discharge tower conveying pipe (1), the secondary absorption tower (2) is connected with a primary absorption tower (5) through a first connecting pipe (3), the primary absorption tower (5) is connected with at least two condensers (13) through a second connecting pipe (10), the bottom of each condenser (13) is connected to an acid storage facility through a conveying pipe (16), each condenser (13) is connected to a tail gas main pipe (15) through a transverse pipe (14), and the tail gas main pipe (15) is connected to a plurality of electrolysis cells (21) through electrolysis cell connecting pipes (22);
the bottom of one-level absorption tower (5) is connected with one-level acid tank (19) through defeated acid pipe (7), the bottom of second grade absorption tower (2) is connected with second grade acid tank (8) through another defeated acid pipe (7), one-level acid tank (19) with one side of second grade acid tank (8) is connected with delivery pump (17), two through installation pipe (18) respectively one side of delivery pump (17) corresponds respectively and is connected with first shower (4) and second shower (12), first shower (4) with second shower (12) are installed respectively second grade absorption tower (2) with in one-level absorption tower (5).
2. The apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that the absorption liquids of the primary absorption tower (5) and the secondary absorption tower (2) are pure water, and a packing layer (25) is arranged in each of the primary absorption tower (5) and the secondary absorption tower (2).
3. An apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that the second connecting pipe (10) and the condenser (13) are connected by a fixed pipe (11).
4. An apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that the condenser (13) is operated with nitrogen gas, the condensation temperature being controlled between-50 ℃ and-20 ℃.
5. An apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that one side of the secondary acid tank (8) is provided with a pure water filler (6).
6. An apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that the upper end side of the primary acid tank (19) is connected to the first shower pipe (4) through a third connecting pipe (20).
7. The apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 1, characterized in that one end of the first spray pipe (4) and one end of the second spray pipe (12) are respectively connected with a connector (23), and the connectors (23) are installed in the primary absorption tower (5) and the secondary absorption tower (2).
8. The apparatus for recovering hydrogen fluoride from nitrogen trifluoride electrolyzer tail gas according to claim 7, characterized in that the lower end of the connector (23) is equipped with a plurality of spray heads (24) at equal intervals, and the plurality of spray heads (24) and the packing layer (25) are correspondingly arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122592640.4U CN216440286U (en) | 2021-10-27 | 2021-10-27 | Equipment for recovering hydrogen fluoride in tail gas of nitrogen trifluoride electrolytic cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122592640.4U CN216440286U (en) | 2021-10-27 | 2021-10-27 | Equipment for recovering hydrogen fluoride in tail gas of nitrogen trifluoride electrolytic cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216440286U true CN216440286U (en) | 2022-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122592640.4U Active CN216440286U (en) | 2021-10-27 | 2021-10-27 | Equipment for recovering hydrogen fluoride in tail gas of nitrogen trifluoride electrolytic cell |
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| CN (1) | CN216440286U (en) |
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2021
- 2021-10-27 CN CN202122592640.4U patent/CN216440286U/en active Active
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