CN216440148U

CN216440148U - Water-based stripping liquid recovery system

Info

Publication number: CN216440148U
Application number: CN202123279374.6U
Authority: CN
Inventors: 宋凯; 郑圣弘
Original assignee: Shenzhen Rongke Technology Co ltd
Current assignee: Jiangsu Rongke Equipment Technology Co ltd
Priority date: 2021-12-24
Filing date: 2021-12-24
Publication date: 2022-05-06
Anticipated expiration: 2031-12-24

Abstract

The utility model relates to the technical field of electronic chemicals, in particular to a water-based stripping liquid recovery system which comprises a plurality of groups of treatment units, wherein the liquid inlet ends of the treatment units are connected with the same waste liquid storage tank, and the liquid outlet ends of the treatment units are connected with the same blending tank; the processing unit comprises a double-stage filter, a PR particle filtering device, a resin adsorption tower and a rectifying tower which are sequentially connected through pipelines, the double-stage filter is communicated with the waste liquid storage tank, and the rectifying tower is communicated with the blending tank. Compared with the prior art, the water-based stripping liquid recovery system provided by the utility model realizes online recovery of most of effective components in the stripping liquid, realizes resource recycling, enables a supply system and the recovery system to form a closed loop, and reduces the production cost.

Description

Water-based stripping liquid recovery system

Technical Field

The utility model relates to the technical field of electronic chemicals, in particular to a water-based stripping solution recovery system.

Background

At present, in the manufacturing process of semiconductors, liquid crystal display panels and the like, a photoetching technology is often used, and after the procedures of masking, developing, etching and the like are finished, a special stripping solution is needed for removing a photoresist; the stripping liquid mainly comprises organic solvent, organic amine, about 20 percent of water and other micro-components which account for less corrosion inhibitor and the like; organic solvents and organic amines are expensive, are one of the largest consumables in the panel industry at present, have poor environmental protection performance, and easily cause pollution such as water quality, and the common treatment mode at present is incineration, which causes resource waste, so that an aqueous stripping solution recovery system which can effectively separate and recover effective components of the organic solvents and the organic amines, realize resource recycling and change waste into valuables is urgently needed.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problems, the utility model provides a water-based stripping solution recovery system.

The technical scheme adopted by the utility model is as follows: the key point of the recovery system of the aqueous stripping solution is as follows: the device comprises a plurality of groups of treatment units, wherein the liquid inlet ends of the plurality of groups of treatment units are connected with the same waste liquid storage tank, and the liquid outlet ends of the plurality of groups of treatment units are connected with the same blending tank;

the processing unit comprises a double-stage filter, a PR particle filtering device, a resin adsorption tower and a rectifying tower which are sequentially connected through pipelines, the double-stage filter is communicated with the waste liquid storage tank, and the rectifying tower is communicated with the blending tank. The method has the advantages that the aqueous stripping liquid sequentially passes through the double-stage filter, the PR particle filtering device, the resin adsorption tower and the rectifying tower, particles, PR organic matters and metal ions in the stripping liquid can be respectively removed and refined to obtain a mixture of an electronic grade organic solvent and organic amine, effective ingredients of the mixture are recycled, and resource reutilization is realized.

Preferably, the dual-stage filter comprises a filter element with a pore size of 50 μm and a filter element with a pore size of 5 μm. The effect of this scheme is to filtering the removal to the large granule thing in the useless glass liquid, reduces the load of follow-up processing.

Preferably, the PR particle filtering device is a molecular sieve filter. The effect of this scheme is that utilize molecular sieve to filter removal, other particulate matters are got rid of simultaneously to macromolecule particulate matters such as PR in the stripper waste liquid.

Preferably, the PR particle filtering device is a diatomaceous earth filter. The effect of this scheme is that utilize diatomaceous earth to filter removal, other particulate matters are got rid of simultaneously to macromolecule particulate matters such as PR in the stripping liquid waste liquid.

Preferably, the resin adsorption tower is filled with cationic macroporous adsorption resin. The effect of this scheme is to adsorb residual PR and selectively remove metal ions.

Preferably, the processing units are at least two groups.

Has the advantages that: compared with the prior art, the water-based stripping liquid recovery system provided by the utility model realizes online recovery of most effective components in the stripping liquid, realizes resource recycling, enables a supply system and a recovery system to form a closed loop, and reduces the production cost.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of the present invention;

fig. 2 is a schematic structural diagram of another embodiment of the present invention.

Detailed Description

In order to make the technical solutions of the present invention better understood, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

Example 1

As shown in fig. 1, the aqueous stripping solution recovery system comprises two groups of treatment units 2, wherein liquid inlet ends of the two groups of treatment units are connected with the same waste liquid storage tank 1, and liquid outlet ends of the two groups of treatment units are connected with the same blending tank 3; the treatment unit 2 comprises a double-stage filter 21, a PR particle filtering device 22, a resin adsorption tower 23 and a rectification tower 24 which are sequentially connected through pipelines, wherein the double-stage filter 21 is communicated with the waste liquid storage tank 1, and the rectification tower 24 is communicated with the blending tank 3; the dual-stage filter 21 comprises a filter element with a pore size of 50 μm and a filter element with a pore size of 5 μm;

the PR particle filtering device 22 is a molecular sieve filter;

the resin adsorption tower 23 is filled with cationic macroporous adsorption resin.

Example 2

As shown in fig. 2, the aqueous stripping solution recovery system comprises two groups of treatment units 2, wherein liquid inlet ends of the two groups of treatment units are connected with the same waste liquid storage tank 1, and liquid outlet ends of the two groups of treatment units are connected with the same blending tank 3; the treatment unit 2 comprises a double-stage filter 21, a PR particle filtering device 22, a resin adsorption tower 23 and a rectification tower 24 which are sequentially connected through pipelines, wherein the double-stage filter 21 is communicated with the waste liquid storage tank 1, and the rectification tower 24 is communicated with the blending tank 3; the dual-stage filter 21 comprises a filter element with a pore size of 50 μm and a filter element with a pore size of 5 μm;

the PR particulate filter device 22 is a diatomaceous earth filter;

Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.

Claims

1. An aqueous stripping solution recovery system, characterized in that: the device comprises a plurality of groups of treatment units (2), wherein the liquid inlet ends of the plurality of groups of treatment units are connected with the same waste liquid storage tank (1), and the liquid outlet ends of the plurality of groups of treatment units are connected with the same blending tank (3);

the treatment unit (2) comprises a double-stage filter (21), a PR particle filtering device (22), a resin adsorption tower (23) and a rectifying tower (24) which are sequentially connected through pipelines, the double-stage filter (21) is communicated with the waste liquid storage tank (1), and the rectifying tower (24) is communicated with the blending tank (3).

2. The aqueous stripping solution recovery system according to claim 1, wherein: the dual-stage filter (21) comprises a filter element with a pore size of 50 μm and a filter element with a pore size of 5 μm.

3. The aqueous stripping solution recovery system according to claim 1, wherein: the PR particulate filter device (22) is a molecular sieve filter.

4. The aqueous stripping solution recovery system according to claim 1, wherein: the PR particulate filter device (22) is a diatomaceous earth filter.

5. The aqueous stripping solution recovery system according to claim 1, wherein: the resin adsorption tower (23) is filled with cationic macroporous adsorption resin.

6. The aqueous stripping solution recovery system according to claim 1, wherein: the processing units (2) are at least two groups.