CN216435840U

CN216435840U - Equipment for detecting film consumption in wafer film coating processing

Info

Publication number: CN216435840U
Application number: CN202123156455.7U
Authority: CN
Inventors: 沈凯
Original assignee: Core Titanium Semiconductor Equipment Shanghai Co ltd
Current assignee: Core Titanium Semiconductor Equipment Shanghai Co ltd
Priority date: 2021-12-15
Filing date: 2021-12-15
Publication date: 2022-05-03
Anticipated expiration: 2031-12-15

Abstract

The utility model discloses a device for detecting the film consumption in the wafer film covering processing, which belongs to the wafer film covering processing field and comprises a bracket, a film roller, a motor, a driving roller, a linear driving mechanism, a rotary counter and a controller; the support is connected with two sliding bases in a sliding manner, and two ends of the adhesive film roller are respectively connected to the two sliding bases in a rotatable manner; the motor is fixedly arranged on the bracket, the driving roller is rotatably connected on the bracket, and the motor is in driving connection with the driving roller through a chain or belt transmission mechanism; the output end of the linear driving mechanism is fixedly connected with the sliding base, and the adhesive film roller is driven by the linear driving mechanism to be in pressure contact with the driving roller; the rotary counter is fixedly arranged on the bracket to detect the number of turns of the driving roller, and the controller is electrically connected with the rotary counter to detect the film consumption. The utility model relates to a rationally, not only can carry out the film blowing, can also calculate the quantity of film accurately.

Description

Equipment for detecting film consumption in wafer film coating processing

Technical Field

The utility model relates to a wafer processing field, in particular to equipment of detection film quantity in wafer tectorial membrane processing.

Background

When the chip is produced, the silicon ingot is cut firstly, so that the silicon ingot is in a sheet shape and becomes a wafer, after the wafer is formed, the wafer is polished and the surface of the wafer is coated, so that the wafer can be subjected to circuit etching in the photoetching machine, and the chip can be produced only by cutting after the circuit etching is finished.

Before a circuit is etched on a wafer, the surface of the wafer needs to be coated with a film for many times, and laser inside a photoetching machine can refract light through the material of the film and realize circuit etching through the action of the material of the film on the wafer.

In the film coating process of the wafer, the film needs to be pulled out from the film roll and then attached to the surface of the wafer, in the traditional wafer film coating process, two persons cooperate to pull the film and attach the film to the wafer, and then the film is cut off by a blade according to the size of the wafer, but the film attaching mode has low productivity and low efficiency, and a good film attaching effect cannot be ensured. Therefore, in the prior art, most of the film sticking machines are used for automatically coating the wafers, but in practical application, because the actual film consumption cannot be grasped in time, workers can only arrange a subsequent generation plan by estimation or supplement the film after the film is used up, and the two modes obviously affect the production efficiency of the wafer manufacturing process.

SUMMERY OF THE UTILITY MODEL

The quantity of film and the unable accurate and problem that in time acquireed of surplus in the wafer tectorial membrane course of working to prior art existence, the utility model aims to provide an equipment that detects the film quantity in the processing of wafer tectorial membrane.

In order to achieve the above purpose, the technical scheme of the utility model is that:

a device for detecting the film consumption in wafer film covering processing comprises a bracket, a film roller, a motor, a driving roller, a linear driving mechanism, a rotary counter and a controller; the support is connected with two sliding bases in a sliding mode, and two ends of the adhesive film roller are respectively connected to the two sliding bases in a rotatable mode; the motor is fixedly arranged on the bracket, the driving roller is rotatably connected to the bracket, and the motor is in driving connection with the driving roller through a chain or belt transmission mechanism; the output end of the linear driving mechanism is fixedly connected with the sliding base, and the adhesive film roller is driven by the linear driving mechanism to be in pressure contact with the driving roller; the rotary counter is fixedly mounted on the support to detect the number of turns of the driving roller, and the controller is electrically connected with the rotary counter to detect the film consumption.

Further, still include and be used for detecting the glued membrane cylinder with pressure sensor of contact pressure between the drive roller, pressure sensor and linear drive mechanism all with controller electric connection.

Preferably, the driving roller is a silicone roller.

Preferably, there are two linear driving mechanisms, and the output ends of the two linear driving mechanisms are respectively and fixedly connected with the two sliding bases.

Preferably, the rotary counter is a rotary encoder.

Preferably, a driving pulley is installed on an output shaft of the motor, a driven pulley is installed on the driving roller, and a synchronous belt is wound between the driving pulley and the driven pulley.

Preferably, the adhesive film roller is positioned right above the driving roller.

Adopt above-mentioned technical scheme, the beneficial effects of the utility model reside in that:

1. due to the arrangement of the electrically connected rotary counter and controller, and the motor and the driving roller which are connected through the chain or belt transmission mechanism, after the driving roller is driven by the motor to rotate, the adhesive film roller can be driven to rotate by virtue of the friction force between the driving roller and the adhesive film roller, so that the film stored on the adhesive film roller is discharged, the discharging speed of the film is the surface linear velocity of the driving roller, and the controller can calculate the discharging amount, namely the consumption and the consumption of the film by recording the number of rotation circles of the driving roller through the rotary counter;

2. because the setting for support sliding connection's slide base and sharp actuating mechanism for can drive the glued membrane cylinder through sharp actuating mechanism's action and move on the support, thereby can maintain the contact pressure between glued membrane cylinder and the drive roller all the time, prevent that the drive roller from skidding, not only ensure the stability of film blowing, still make the testing result of film quantity more accurate.

Drawings

Fig. 1 is a side view of the present invention;

fig. 2 is a front view of the present invention.

In the figure, 1-bracket, 11-slide rail, 12-slide base, 13-fixed base, 2-glue film roller, 3-motor, 4-driving roller, 5-linear driving mechanism, 6-driving belt wheel, 7-driven belt wheel and 8-synchronous belt.

Detailed Description

The following describes the present invention with reference to the accompanying drawings. It should be noted that the description of the embodiments is provided to help understanding of the present invention, but the present invention is not limited thereto. In addition, the technical features related to the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

It should be noted that, in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "back", etc. indicate the orientation or position relationship of the structure of the present invention based on the drawings, and are only for the convenience of describing the present invention, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the technical scheme, the terms "first" and "second" are only used for referring to the same or similar structures or corresponding structures with similar functions, and are not used for ranking the importance of the structures, or comparing the sizes or other meanings.

In addition, unless expressly stated or limited otherwise, the terms "mounted" and "connected" are to be construed broadly, e.g., the connection may be a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; the two structures can be directly connected or indirectly connected through an intermediate medium, and the two structures can be communicated with each other. To those skilled in the art, the specific meanings of the above terms in the present invention can be understood in relation to the present scheme in specific terms according to the general idea of the present invention.

An apparatus for detecting a film usage amount in a wafer film covering process, as shown in fig. 1 and 2, includes a support 1, a film roller 2, a motor 3, a driving roller 4, a linear driving mechanism 5, a rotary counter and a controller.

The support 1 is a three-dimensional frame-shaped structure formed by splicing metal sections. Two slide rails 11 which are vertical and are oppositely arranged are fixedly mounted on the support 1 through bolts, and a sliding base 12 is connected to each slide rail 11.

The glue film roller 2 comprises a cylinder body and a cylinder shaft which is fixed at the center of the cylinder body in a penetrating way, two ends of the cylinder shaft are respectively and rotatably connected to the two sliding bases 12 through bearings, and the cylinder shaft is configured to be horizontal. The film roller 2 is used for rolling and storing the film, and the film can be pulled out from the film roller 2 when the wafer is coated with the film.

Drive roller 4 is also the roller and sets up the roll body on the roller lateral wall, and bearing rotatable coupling is passed through on support 1 at the both ends of roller, and is corresponding, and fixed mounting has fixed baseplate 13 respectively in support 1's both sides, and the material configuration of roll body is silica gel. Meanwhile, the driving roller 4 is parallel to and opposed to the film roll 2, and the film roll 2 can approach and contact the driving roller 4 by means of a slide base.

The motor 3 is fixedly arranged on the bracket 1 through a bolt, and the motor 3 is in driving connection with the driving roller 4 through a chain or belt transmission mechanism. In this embodiment, install driving pulley 6 on the output shaft of motor 3, install driven pulley 7 on drive roller 4 (specifically the roller), and around being equipped with hold-in range 8 between driving pulley 6 and the driven pulley 7, thereby at the motor 3 during operation, drive roller 4 through hold-in range 8 and rotate. When the adhesive film roller 2 is in pressure contact with the driving roller 4, the adhesive film roller 2 is driven by the driving roller 4 to rotate, so that the discharging of the film is facilitated.

The linear driving mechanism 5 is fixedly installed on the bracket 1 through bolts, and an output end of the linear driving mechanism 5 is fixedly connected with the sliding base 12, and the linear driving mechanism 5 is preferably configured as an air cylinder, or in other embodiments, preferably configured as an electric push rod. The setting of linear driving mechanism 5 for glued membrane cylinder 2 can be close to drive roller 4 and realize the pressure contact between the two under linear driving mechanism's 5 drive, thereby when motor 3 during operation, can drive glued membrane cylinder 2 and carry out the film blowing. In this embodiment, there are two linear driving mechanisms 5, and the output ends of the two linear driving mechanisms 5 are respectively and fixedly connected to the two sliding bases 12, so that the position movement of the film roller 2 on the support 1 is more stable. Wherein the glue film roller 2 is arranged in a position directly above the drive roller 4, so that the glue film roller 2 can be brought into pressure contact with the drive roller 4 better by means of gravity.

The rotary counter and the controller are both fixedly mounted on the support 1 and are electrically connected with each other through a lead. Wherein the revolution counter is used for detecting the number of turns of the driving roller 4, and the controller is used for calculating the amount of the film according to the counting result of the revolution counter. In this embodiment, the rotary counter is a rotary encoder, such as an optoelectronic rotary encoder.

When the glue film roller is used, firstly, the glue film roller 2 is driven by the linear driving mechanism 5 to slide on the bracket 1, and the glue film roller 2 is abutted against the driving roller 4, so that a certain pressure is kept between the glue film roller 2 and the driving roller 4; the motor 3 is started, the driving roller 4 is driven to rotate through the synchronous belt 8, the driving roller 4 drives the glue film roller 2 to rotate, and the linear velocity of the surfaces of the driving roller 4 and the glue film roller 2 is the same as the linear velocity of the material to be discharged of the film because the driving roller 4 is in close contact with the glue film roller 2; in the working process of the motor 3, the rotating counter continuously records the number of turns of the driving roller 4, the controller multiplies the number of turns of the driving roller 4 by the perimeter of the driving roller 4 to obtain the discharging length of the film, and the discharging length is the using amount of the film; and in the film use, only need in time to adjust the flexible length of 5 output ends of straight line actuating mechanism can drive glued membrane cylinder 2 and lean on drive roller 4 all the time with pressure to avoid the not smooth and film quantity detection error's of film blowing that causes because of drive roller 4 skids the condition appearance.

In another preferred embodiment, a pressure sensor for detecting the contact pressure between the film roller 2 and the driving roller 4 is further included, the pressure sensor is fixedly installed on the sliding base, and a detection plate having the same height as the uppermost end of the driving roller 4 is provided on the frame 1, so that when the film roller 2 is in contact with the driving roller 4, the pressure sensor is also in synchronous contact with the detection plate, thereby measuring the contact pressure between the film roller 2 and the driving roller 4 through the pressure reading between the pressure sensor and the detection plate. And, this pressure sensor and linear drive mechanism 5 all with controller electric connection, so set up for the controller can control the work of actuating drive mechanism 5 according to pressure sensor's reading, and then makes the contact pressure between glued membrane cylinder 2 and drive roller 4 maintain the within range of setting for all the time.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. It will be apparent to those skilled in the art that various changes, modifications, substitutions and alterations can be made in the embodiments without departing from the principles and spirit of the invention, and the scope of the invention is to be accorded the full scope of the claims.

Claims

1. The utility model provides an equipment of detection film quantity in wafer tectorial membrane processing which characterized in that: comprises a bracket, a glue film roller, a motor, a driving roller, a linear driving mechanism, a rotary counter and a controller; the support is connected with two sliding bases in a sliding mode, and two ends of the adhesive film roller are respectively connected to the two sliding bases in a rotatable mode; the motor is fixedly arranged on the bracket, the driving roller is rotatably connected to the bracket, and the motor is in driving connection with the driving roller through a chain or belt transmission mechanism; the output end of the linear driving mechanism is fixedly connected with the sliding base, and the adhesive film roller is driven by the linear driving mechanism to be in pressure contact with the driving roller; the rotary counter is fixedly mounted on the support to detect the number of turns of the driving roller, and the controller is electrically connected with the rotary counter to detect the film consumption.

2. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: still including being used for detecting glued membrane cylinder with contact pressure's between the drive roller pressure sensor, pressure sensor and linear drive mechanism all with controller electric connection.

3. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: the drive roller is a silica gel roller.

4. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: the output ends of the two linear driving mechanisms are respectively fixedly connected with the two sliding bases.

5. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: the rotary counter is a rotary encoder.

6. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: install driving pulley on the output shaft of motor, install driven pulley on the drive roller, driving pulley with around being equipped with the hold-in range between the driven pulley.

7. The apparatus for detecting the film dosage in the wafer film coating process according to claim 1, wherein: the adhesive film roller is positioned right above the driving roller.