CN216427479U

CN216427479U - Germanium single crystal growing furnace is with preventing leaking drainage device

Info

Publication number: CN216427479U
Application number: CN202123142758.3U
Authority: CN
Inventors: 吕远芳
Original assignee: Baoding Three Crystal Electronic Materials Co ltd
Current assignee: Baoding Three Crystal Electronic Materials Co ltd
Priority date: 2021-12-10
Filing date: 2021-12-10
Publication date: 2022-05-03
Anticipated expiration: 2031-12-10

Abstract

The utility model discloses a germanium single crystal growing furnace is with preventing leaking drainage device, including external furnace frame, interior furnace body and drainage gasbag. The utility model discloses germanium single crystal growing furnace is with preventing leaking drainage device, when the inside atmospheric pressure of external furnace frame is too high, gaseous through the air inlet enter into the outer tube frame and extrude sealed the pad, sealed pad is at extruded in-process, the air vent at sealed pad center expands the grow, gaseous enter into the gasbag body after passing through the air vent, gaseous through exhaust manifold enters into in discharge pipe and the backward flow, the plum blossom button on the rotation discharge pipe, the post of inserting outwards shifts out from the valve frame is internal, gaseous outwards discharges after passing through the bleeder vent, the plum blossom button on the back flow is rotated in the same reason, it is inside that gaseous gets back to external furnace frame again along the back flow, the device can be when germanium single crystal growing furnace inside atmospheric pressure is too big, the initiative is to the inside drainage and the collection that carry out atmospheric pressure of germanium single crystal growing furnace, keep the stability of the inside atmospheric pressure of germanium single crystal growing furnace.

Description

Germanium single crystal growing furnace is with preventing leaking drainage device

Technical Field

The utility model relates to a germanium single crystal growing furnace technical field specifically is a germanium single crystal growing furnace is with preventing leaking drainage device.

Background

Germanium single crystal is used as an important semiconductor material, equipment required in the process of preparing germanium single crystal silicon is a germanium single crystal furnace, the germanium single crystal furnace is equipment for melting silicon semiconductor materials by using a graphite resistance heater in an inert gas environment and growing dislocation-free germanium single crystal silicon by adopting a Czochralski method, but in the use process of the germanium single crystal silicon, the phenomenon that when the gas pressure in the germanium single crystal furnace is too large, the gas in the germanium single crystal furnace is easily pressurized and leaked out, and the normal use of the germanium single crystal furnace is influenced is found.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a germanium single crystal growing furnace is with preventing leaking drainage device can be when the inside atmospheric pressure of germanium single crystal growing furnace is too big, and the initiative is to the inside drainage and the collection that carries out atmospheric pressure of germanium single crystal growing furnace, keeps the stability of the inside atmospheric pressure of germanium single crystal growing furnace, can solve the problem among the prior art.

In order to achieve the above purpose, the utility model provides a following technical scheme: a leakage-proof drainage device for a germanium single crystal furnace comprises an external furnace frame, an inner furnace body and a drainage air bag, wherein the inner furnace body is arranged inside the external furnace frame, the drainage air bag is arranged at the top of the inner furnace body, and the drainage air bag is separated from the inner furnace body by a partition plate;

the drainage air bag comprises an air bag body, an air inlet pipe, an exhaust main pipe, a discharge pipe, a return pipe and a control valve, wherein the air inlet pipe is connected to the bottom end of the air bag body, the exhaust main pipe is connected to one side of the air bag body and is communicated with the inside of the air bag body, the discharge pipe is connected to one end, away from the air bag body, of the exhaust main pipe, the return pipe is arranged below the discharge pipe, the return pipe and the exhaust main pipe are communicated with each other, and the control valve is arranged on the discharge pipe and the return pipe.

Preferably, the intake pipe includes outer tube frame, sealed pad, air vent, air inlet and gas outlet, the inside of outer tube frame is equipped with sealed pad, the air vent has been seted up to sealed inside of pad, the air inlet has been seted up to the bottom of outer tube frame, the top of outer tube frame is inserted in the gasbag body, and the gas outlet has been seted up at the top of outer tube frame.

Preferably, the control valve includes valve frame body, bleeder vent, ann inserts post, external screw thread and plum blossom button, the bleeder vent has all been seted up to valve frame body's both sides, valve frame body's inside is equipped with ann and inserts the post, external screw thread has been seted up in ann's the outside of inserting the post, ann's the outside fixedly connected with plum blossom button of inserting the post.

Preferably, the sealing gasket is a component made of rubber, four layers of sealing gaskets are arranged inside the outer tube frame, the outer side of the sealing gasket is fixedly adhered to the outer tube frame, and the vent hole inside the sealing gasket is kept in a closed state in a normal state.

Preferably, the inner wall of the valve frame body is provided with a built-in thread groove, and the external threads on the insertion column are meshed with the built-in thread groove.

Compared with the prior art, the beneficial effects of the utility model are as follows:

the utility model discloses germanium single crystal growing furnace is with preventing leaking drainage device, when the inside atmospheric pressure of external furnace frame is too high, gaseous through the air inlet enter into the outer tube frame and extrude sealed the pad, sealed pad is at extruded in-process, the air vent at sealed pad center expands the grow, gaseous enter into the gasbag body after passing through the air vent, gaseous through exhaust manifold enters into in discharge pipe and the backward flow, the plum blossom button on the rotation discharge pipe, the post of inserting outwards shifts out from the valve frame is internal, gaseous outwards discharges after passing through the bleeder vent, the plum blossom button on the back flow is rotated in the same reason, it is inside that gaseous gets back to external furnace frame again along the back flow, the device can be when germanium single crystal growing furnace inside atmospheric pressure is too big, the initiative is to the inside drainage and the collection that carry out atmospheric pressure of germanium single crystal growing furnace, keep the stability of the inside atmospheric pressure of germanium single crystal growing furnace.

Drawings

Fig. 1 is a cross-sectional view of the present invention;

FIG. 2 is a schematic structural view of the drainage balloon of the present invention;

fig. 3 is a sectional view of the intake pipe of the present invention;

fig. 4 is a cross-sectional view of the control valve of the present invention.

In the figure: 1. an external furnace frame; 2. an inner furnace body; 3. a drainage balloon; 31. an airbag body; 32. an air inlet pipe; 321. an outer tube frame; 322. a gasket; 323. a vent hole; 324. an air inlet; 325. an air outlet; 33. an exhaust manifold; 34. a discharge pipe; 35. a return pipe; 36. a control valve; 361. a valve frame body; 362. air holes are formed; 363. inserting a column; 364. externally arranging threads; 365. a quincuncial button.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, a leak-proof drainage device for a germanium single crystal furnace comprises an external furnace frame 1, an internal furnace body 2 and a drainage air bag 3, wherein the internal furnace body 2 is arranged inside the external furnace frame 1, the drainage air bag 3 is arranged at the top of the internal furnace body 2, the drainage air bag 3 is separated from the internal furnace body 2 by a partition plate, the drainage air bag 3 comprises an air bag body 31, an air inlet pipe 32, an exhaust main pipe 33, an exhaust pipe 34, a return pipe 35 and a control valve 36, the bottom end of the air bag body 31 is connected with the air inlet pipe 32, the air inlet pipe 32 comprises an external pipe frame 321, a sealing pad 322, a vent hole 323, an air inlet 324 and an air outlet 325, a sealing pad 322 is arranged inside the external pipe frame 321, the vent hole 323 is arranged inside the sealing pad 322, the sealing pad 322 is a member made of rubber material, four layers of sealing pads 322 are arranged inside the external pipe frame 321, the outer side of the sealing pad 322 is fixedly connected with the external pipe frame 321 in an adhesion manner, the vent hole 323 in the sealing gasket 322 is kept in a closed state in a normal state, the bottom of the outer tube frame 321 is provided with an air inlet 324, the top end of the outer tube frame 321 is inserted in the airbag body 31, the top of the outer tube frame 321 is provided with an air outlet 325, when the air pressure in the external oven frame 1 is too high, air enters the outer tube frame 321 through the air inlet 324 and extrudes the sealing gasket 322, the vent hole 323 in the center of the sealing gasket 322 expands and enlarges in the extrusion process of the sealing gasket 322, the air enters the airbag body 31 after passing through the vent hole 323, one side of the airbag body 31 is connected with an exhaust main 33, the exhaust main 33 is communicated with the inside of the airbag body 31, one end of the exhaust main 33, which is far away from the airbag body 31, is connected with an exhaust pipe 34, a return pipe 35 is arranged below the exhaust pipe 34, the return pipe 35 is communicated with the exhaust main 33, and the exhaust main 34 and the return pipe 35 are both provided with control valves 36, the control valve 36 comprises a valve frame 361, air holes 362, an insertion column 363, external threads 364 and a plum blossom button 365, the air holes 362 are formed in two sides of the valve frame 361, the insertion column 363 is arranged inside the valve frame 361, the external threads 364 are formed in the outer side of the insertion column 363, a built-in thread groove is formed in the inner wall of the valve frame 361, the external threads 364 on the insertion column 363 are mutually meshed with the built-in thread groove, the plum blossom button 365 is fixedly connected to the outer side of the insertion column 363, gas enters the discharge pipe 34 and the return pipe 35 through the exhaust manifold 33, the plum blossom button 365 on the discharge pipe 34 is rotated, the insertion column 363 moves outwards from the valve frame 361, the gas is discharged outwards after passing through the air holes 362, the plum blossom button 365 on the return pipe 35 is rotated in a similar manner, and the gas returns to the external furnace frame 1 along the return pipe 35.

The working principle is as follows: when the air pressure inside the external furnace frame 1 is too high, the air enters the outer tube frame 321 through the air inlet 324 and extrudes the sealing gasket 322, the vent hole 323 in the center of the sealing gasket 322 is expanded and enlarged during the extrusion process of the sealing gasket 322, the air enters the airbag body 31 through the vent hole 323, the air enters the discharge tube 34 and the return tube 35 through the exhaust main tube 33, the quincuncial button 365 on the discharge tube 34 is rotated, the inserting column 363 moves outwards from the inside of the valve frame 361, the air is discharged outwards through the vent hole 362, and similarly, the quincuncial button 365 on the return tube 35 is rotated, and the air returns to the inside of the external furnace frame 1 along the return tube 35.

In summary, the following steps: the utility model relates to a leak-proof drainage device for a germanium single crystal furnace, when the air pressure in an external furnace frame 1 is too high, the gas enters the outer pipe frame 321 through the gas inlet 324 and presses the gasket 322, and during the pressing of the gasket 322, the vent hole 323 at the center of the gasket 322 expands and becomes large, and the gas enters the airbag body 31 after passing through the vent hole 323, the gas enters the discharge pipe 34 and the return pipe 35 through the exhaust manifold 33, the quincuncial button 365 on the discharge pipe 34 is rotated, the insertion column 363 moves out of the valve frame 361, the gas is discharged out after passing through the air vent 362, similarly, the quincuncial button 365 on the return pipe 35 is rotated, the gas returns to the inside of the external furnace frame 1 along the return pipe 35 again, the device can actively drain and collect the air pressure inside the germanium single crystal furnace when the air pressure inside the germanium single crystal furnace is too large, and the stability of the air pressure inside the germanium single crystal furnace is kept.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a germanium single crystal growing furnace is with preventing leaking drainage device, includes external furnace frame (1), interior furnace body (2) and drainage gasbag (3), its characterized in that: an inner furnace body (2) is arranged inside the external furnace frame (1), a drainage air bag (3) is arranged at the top of the inner furnace body (2), and the drainage air bag (3) is separated from the inner furnace body (2) by a partition plate;

drainage gasbag (3) are including gasbag body (31), intake pipe (32), exhaust manifold (33), discharge pipe (34), back flow (35) and control valve (36), the bottom of gasbag body (31) is connected with intake pipe (32), one side of gasbag body (31) is connected with exhaust manifold (33), and inside intercommunication each other of exhaust manifold (33) and gasbag body (31), the one end that gasbag body (31) were kept away from in exhaust manifold (33) is connected with discharge pipe (34), the below of discharge pipe (34) is equipped with back flow (35), communicate each other between back flow (35) and exhaust manifold (33), all be equipped with control valve (36) on discharge pipe (34) and back flow (35).

2. The leak-proof drainage device for the germanium single crystal furnace as claimed in claim 1, wherein: the air inlet pipe (32) comprises an outer pipe frame (321), a sealing gasket (322), a vent hole (323), an air inlet (324) and an air outlet (325), the sealing gasket (322) is arranged inside the outer pipe frame (321), the vent hole (323) is formed inside the sealing gasket (322), the air inlet (324) is formed in the bottom of the outer pipe frame (321), the top end of the outer pipe frame (321) is inserted into the air bag body (31), and the air outlet (325) is formed in the top of the outer pipe frame (321).

3. The leak-proof drainage device for the germanium single crystal furnace as claimed in claim 1, wherein: the control valve (36) comprises a valve frame body (361), air holes (362), an inserting column (363), external threads (364) and a plum blossom button (365), the air holes (362) are formed in two sides of the valve frame body (361), the inserting column (363) is arranged inside the valve frame body (361), the external threads (364) are formed in the outer side of the inserting column (363), and the plum blossom button (365) is fixedly connected to the outer side of the inserting column (363).

4. The leakage-proof drainage device for the germanium single crystal furnace as claimed in claim 2, wherein: the sealing gasket (322) is a component made of rubber, four layers of sealing gaskets (322) are arranged inside the outer pipe frame (321), the outer side of each sealing gasket (322) is fixedly adhered to the outer pipe frame (321), and the air holes (323) inside the sealing gaskets (322) are kept in a closed state in a normal state.

5. The leakage-proof drainage device for the germanium single crystal furnace as claimed in claim 3, wherein: an internal thread groove is formed in the inner wall of the valve frame body (361), and external threads (364) on the inserting column (363) are meshed with the internal thread groove.