CN216351775U

CN216351775U - Exposure machine glass substrate surface temperature control unit

Info

Publication number: CN216351775U
Application number: CN202123110846.5U
Authority: CN
Inventors: 韩小立
Original assignee: Jiangsu Tenama Intelligent Manufacturing Co ltd
Current assignee: Jiangsu Tenama Intelligent Manufacturing Co ltd
Priority date: 2021-12-13
Filing date: 2021-12-13
Publication date: 2022-04-19
Anticipated expiration: 2031-12-13

Abstract

The utility model discloses a glass substrate surface temperature control unit of an exposure machine, which comprises a main box body and frame bodies, wherein the frame bodies are respectively welded and fixed on two sides outside the main box body, a shell is transversely and fixedly installed at the top end inside the main box body, a hollow box is transversely and fixedly connected to the top end outside the main box body, a temperature sensor is fixedly connected to the center of the rear end inside the main box body, and a plurality of groups of fixed clamping blocks are equally installed between two sides of the rear end inside the main box body. This exposure machine glass substrate surface temperature control unit has the framework through welded fastening respectively in the outside both sides of main tank body, when keeping the inside temperature of main tank body, servo motor starts to rotatory subtend screw rod orders about the cover block in the vertical groove in framework both ends and slides towards opening center department, removes promptly and sets up splint between cover block one side, and closed sealing gasket cooperates the tensile folded sheet to seal the notch of main tank body both sides, has solved the faster problem of equipment both sides cooling.

Description

Exposure machine glass substrate surface temperature control unit

Technical Field

The utility model relates to the technical field of temperature control devices for exposure machines, in particular to a glass substrate surface temperature control unit for an exposure machine.

Background

The exposure machine is a device which transfers images remained on films and other objects to the surfaces of other materials by emitting long-wave rays, the interior of the exposure machine mainly comprises a wafer table, a UV lamp, a paper feeder, a contact sensor, a reading unit and the like, wherein a glass plate is used as a base plate, the temperature of the object is kept to be the primary focus of the internal control requirement of the exposure machine in order to ensure the temperature of the glass plate to be constant, and an air supply mechanism is usually arranged in the device of a general exposure machine, but the sealing and heat preservation of inlets and outlets at two sides are neglected.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a glass substrate surface temperature control unit of an exposure machine, which aims to solve the problem of rapid temperature reduction of two sides of equipment in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: the utility model provides an exposure machine glass substrate surface temperature control unit, includes the main tank body and framework, the outside both sides of main tank body welded fastening respectively have the framework, the horizontal fixed mounting in top of the inside of main tank body has the casing, the horizontal fixedly connected with hollow case in outside top of the main tank body, the fixedly connected with temperature sensor is located at the center of the inside rear end of main tank body, install multiunit fixture block between the both sides of the inside rear end of main tank body, the right side on the outside top of main tank body is provided with operating panel.

Preferably, the inside both sides of framework are provided with vertical groove respectively, servo motor is installed respectively to the both sides on the outside top of framework, servo motor's output passes vertical groove and is connected with subtend screw rod, the outside top of subtend screw rod and bottom swing joint have the cover block respectively, it has splint to pass vertical groove connection between one side of cover block, the one end of splint is provided with sealed the pad respectively, fixedly connected with folded sheet respectively between the other end of splint and the framework.

Preferably, the sleeve blocks are symmetrically arranged at the top end and the bottom end of the outer portion of the opposite screw rod respectively, and the clamping plate and the folding plate are located on the same vertical plane.

Preferably, the inside of casing is provided with multiunit ventilation cavity equally, be provided with the venthole between ventilation cavity's the top and the hollow case respectively, the fan of sending gas is installed to the inside bottom of ventilation cavity, the inside both sides in ventilation cavity bottom are provided with first hole respectively, ventilation cavity's bottom is provided with the fluting, slotted inside swing joint has electronic gear respectively, swing joint has the toothed chain between electronic gear's the outside, the inside both sides of electronic gear are provided with the second hole respectively.

Preferably, the electric gear and the toothed chain are located on the same horizontal plane, and the second hole is located below the first hole.

Preferably, be provided with heating resistor between the inside both sides of hollow case, be provided with the multiunit support frame between the inside top of hollow case and the bottom, heating resistor transversely fixes on the support frame, the reposition of redundant personnel trachea is installed on the outside top of hollow case, two sets of conveyer pipes are installed at the top of reposition of redundant personnel trachea.

Compared with the prior art, the utility model has the beneficial effects that: the glass substrate surface temperature control unit of the exposure machine not only realizes the maintenance of the temperature inside the main box body and the regulation of wind power, but also realizes the efficient temperature rise;

(1) the frame bodies are respectively welded and fixed on the two sides of the outer part of the main box body, when the temperature in the main box body is kept, the servo motor is started, the sleeve blocks are driven to slide towards the center of the opening by the opposite screw rods rotating in the longitudinal grooves at the two ends of the frame bodies, namely, the clamping plate is arranged between one side of each movable sleeve block, and after the sealing gasket is closed, the notches at the two sides of the main box body are sealed by the stretched folding plates in a matched mode, so that excessive temperature loss is avoided;

(2) the multiple groups of air-passing chambers are arranged in the shell in an equal interval, only one electric gear is needed to be started and is matched with and connected with the toothed chains at all positions, so that the multiple gears are simultaneously rotated to change the positions of second holes at two sides of the electric gear, and the speed of cold and hot air flow transmitted by the air-sending fan is changed by adjusting the angle of the second holes overlapped with the first holes above the electric gear, so that the aim of adjusting wind power is fulfilled;

(3) through the horizontal fixedly connected with hollow case in the outside top of main tank, the conveyer pipe of reposition of redundant personnel trachea top connection can be according to the air current of the different temperatures of terminal conveying of connection, if still need to promote the temperature, can open the heating resistor by the support frame installation, through this kind of unsettled fixed mode, can promote and send thermal efficiency, avoids hindering silk and inner wall and excessively laminating to realize rapid heating up.

Drawings

FIG. 1 is a schematic front sectional view of the present invention;

FIG. 2 is a side view of the frame of the present invention;

FIG. 3 is a schematic structural view of the shell in front view;

fig. 4 is a schematic view of the front cross-sectional structure of the hollow box of the present invention.

In the figure: 1. a main box body; 2. a frame body; 3. a housing; 4. an operation panel; 5. a gas distributing pipe; 6. a hollow box; 7. a heating resistor; 8. a ventilation chamber; 9. a temperature sensor; 10. fixing the fixture block; 11. an air supply fan; 12. an air outlet; 13. a first hole; 14. a servo motor; 15. sleeving blocks; 16. a longitudinal slot; 17. opposite screw rods; 18. folding the board; 19. a splint; 20. a gasket; 21. grooving; 22. an electric gear; 23. a second hole; 24. a toothed chain; 25. a delivery pipe; 26. a support frame.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1: referring to fig. 1-4, a glass substrate surface temperature control unit of an exposure machine comprises a main box body 1 and a frame body 2, wherein the frame body 2 is respectively welded and fixed on two sides of the outer part of the main box body 1, a shell 3 is transversely and fixedly installed on the top end of the inner part of the main box body 1, a hollow box 6 is transversely and fixedly connected on the top end of the outer part of the main box body 1, a temperature sensor 9 is fixedly connected at the center of the rear end of the inner part of the main box body 1, a plurality of groups of fixed fixture blocks 10 are equally installed between two sides of the rear end of the inner part of the main box body 1, and an operation panel 4 is arranged on the right side of the top end of the outer part of the main box body 1;

longitudinal grooves 16 are respectively formed in two sides of the inner portion of the frame body 2, servo motors 14 are respectively installed on two sides of the top end of the outer portion of the frame body 2, the output ends of the servo motors 14 penetrate through the longitudinal grooves 16 to be connected with opposite screw rods 17, sleeve blocks 15 are respectively and movably connected to the top end and the bottom end of the outer portion of the opposite screw rods 17, a clamping plate 19 penetrates through the longitudinal grooves 16 to be connected between one sides of the sleeve blocks 15, sealing gaskets 20 are respectively arranged at one end of the clamping plate 19, folding plates 18 are respectively and fixedly connected between the other end of the clamping plate 19 and the frame body 2, the sleeve blocks 15 are respectively and symmetrically arranged at the top end and the bottom end of the outer portion of the opposite screw rods 17, and the clamping plate 19 and the folding plates 18 are located on the same vertical plane;

specifically, as shown in fig. 1 and 2, when the internal temperature of the main box 1 is maintained, the servo motor 14 is started, the opposite screw rods 17 rotating in the longitudinal grooves 16 at the two ends of the frame 2 drive the sleeve block 15 to slide towards the center of the opening, i.e. the clamp plate 19 is arranged between one side of the sleeve block 15, and after the sealing gasket 20 is closed, the stretched folding plate 18 is matched to seal the notches at the two sides of the main box 1, so as to avoid excessive temperature loss.

Example 2: a plurality of groups of ventilation chambers 8 are arranged in the shell 3 at equal intervals, air outlet holes 12 are respectively arranged between the top ends of the ventilation chambers 8 and the hollow box 6, an air supply fan 11 is arranged at the bottom end in the ventilation chamber 8, first holes 13 are respectively arranged on two sides of the bottom end in the ventilation chamber 8, a slot 21 is arranged at the bottom end of the ventilation chamber 8, an electric gear 22 is movably connected in the slot 21, a toothed chain 24 is movably connected between the outer parts of the electric gear 22, second holes 23 are respectively arranged on two sides of the inner part of the electric gear 22, the electric gear 22 and the toothed chain 24 are positioned on the same horizontal plane, and the second holes 23 are positioned below the first holes 13;

specifically, as shown in fig. 1 and 3, only one electric gear 22 needs to be started to cooperate with the toothed chain 24 at each position to rotate a plurality of gears simultaneously, so as to change the positions of the second holes 23 at both sides of the electric gear 22, and by adjusting the angle at which the electric gear overlaps the first hole 13 above, the speed of the cold and hot air flow from the air supply fan 11 is changed, thereby achieving the purpose of adjusting the wind power.

Example 3: a heating resistor 7 is arranged between two sides of the inside of the hollow box 6, a plurality of groups of supporting frames 26 are arranged between the top end and the bottom end of the inside of the hollow box 6, the heating resistor 7 is transversely fixed on the supporting frames 26, a shunt air pipe 5 is arranged at the top end of the outside of the hollow box 6, and two groups of conveying pipes 25 are arranged at the top of the shunt air pipe 5;

specifically, as shown in fig. 1 and 4, the conveying pipe 25 connected above the shunt air pipe 5 can convey air flows at different temperatures according to the connected terminals, and if the temperature needs to be raised, the heating resistor 7 mounted on the support frame 26 can be opened.

The working principle is as follows: when the utility model is used, the position of glass is limited by the fixed fixture block 10, the conveying pipe 25 connected above the shunt air pipe 5 can convey air flow with different temperatures according to the connected terminal, if the temperature is still required to be raised, the heating resistor 7 arranged by the support frame 26 can be opened, the heat conveying efficiency can be raised by the suspension fixing mode, the excessive joint of the resistance wire and the inner wall is avoided, thereby realizing rapid temperature rise, only one electric gear 22 is needed to be started, the gear chains 24 at all positions are matched and connected, a plurality of gears are simultaneously rotated, the positions of the second holes 23 at two sides of the electric gear 22 are changed, the speed of cold and hot air flow transmitted by the air conveying fan 11 is changed by adjusting the angle of the electric gear overlapped with the first hole 13 at the upper part, the aim of adjusting wind power is achieved, when the temperature sensor 9 is used for monitoring the internal temperature of the main box body 1, the servo motor 14 is started, the sleeve block 15 is driven to slide towards the opening center by the opposite screw 17 rotating in the longitudinal grooves 16 at two ends of the frame body 2, namely, a clamping plate 19 is arranged between one sides of the movable sleeve blocks 15, and after the sealing gasket 20 is closed, the clamping plate is matched with the stretched folding plate 18 to seal the notches at the two sides of the main box body 1, so that excessive temperature loss is avoided.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides an exposure machine glass substrate surface temperature control unit, includes main tank body (1) and framework (2), its characterized in that: the improved cabinet is characterized in that frame bodies (2) are welded and fixed to two outer sides of the main cabinet body (1) respectively, a shell (3) is fixedly arranged on the top end inside the main cabinet body (1) in a transverse mode, a hollow box (6) is fixedly connected to the top end outside the main cabinet body (1), a temperature sensor (9) is fixedly connected to the center of the rear end inside the main cabinet body (1), a plurality of groups of fixed fixture blocks (10) are installed between two sides of the rear end inside the main cabinet body (1) in an equal mode, and an operation panel (4) is arranged on the right side of the top end outside the main cabinet body (1).

2. The glass substrate surface temperature control unit of exposure machine of claim 1, wherein: the utility model discloses a hydraulic pressure cooker, including framework (2), servo motor (14) are installed respectively to the inside both sides of framework (2) respectively, servo motor's (14) output is passed vertical groove (16) and is connected with subtend screw rod (17), there are nested piece (15) respectively to the outside top of subtend screw rod (17) and bottom swing joint respectively, it is connected with splint (19) to pass vertical groove (16) between one side of nested piece (15), the one end of splint (19) is provided with sealed pad (20) respectively, there is fixedly connected with folded sheet (18) respectively between the other end of splint (19) and framework (2).

3. The glass substrate surface temperature control unit of exposure machine of claim 2, wherein: the sleeve blocks (15) are symmetrically arranged at the top end and the bottom end of the outer portion of the opposite screw rod (17) respectively, and the clamping plate (19) and the folding plate (18) are located on the same vertical plane.

4. The glass substrate surface temperature control unit of exposure machine of claim 1, wherein: be provided with multiunit ventilation cavity (8) between the inside of casing (3) etc, be provided with venthole (12) between the top of ventilation cavity (8) and hollow case (6) respectively, air feed fan (11) are installed to the inside bottom of ventilation cavity (8), the inside both sides in ventilation cavity (8) bottom are provided with first hole (13) respectively, the bottom of ventilation cavity (8) is provided with fluting (21), the inside swing joint respectively of fluting (21) has electronic gear (22), swing joint has toothed chain (24) between the outside of electronic gear (22), the inside both sides of electronic gear (22) are provided with second hole (23) respectively.

5. The glass substrate surface temperature control unit of exposure machine of claim 4, wherein: the electric gear (22) and the toothed chain (24) are located on the same horizontal plane, and the second hole (23) is located below the first hole (13).

6. The glass substrate surface temperature control unit of exposure machine of claim 1, wherein: be provided with between the inside both sides of hollow case (6) heating resistor (7), be provided with multiunit support frame (26) between the inside top of hollow case (6) and the bottom, heating resistor (7) transversely are fixed on support frame (26), reposition of redundant personnel trachea (5) are installed on the outside top of hollow case (6), two sets of conveyer pipe (25) are installed at the top of reposition of redundant personnel trachea (5).