CN216342647U - Vacuum pipeline system with dust collecting function - Google Patents

Vacuum pipeline system with dust collecting function Download PDF

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Publication number
CN216342647U
CN216342647U CN202121851760.5U CN202121851760U CN216342647U CN 216342647 U CN216342647 U CN 216342647U CN 202121851760 U CN202121851760 U CN 202121851760U CN 216342647 U CN216342647 U CN 216342647U
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China
Prior art keywords
pipeline
dust collecting
dust
way valve
pump
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CN202121851760.5U
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Chinese (zh)
Inventor
项健
陈剑飞
杨红
李品鑫
张丹
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Hefei Yasheng Semiconductor Equipment Technology Co ltd
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Hefei Yasheng Semiconductor Equipment Technology Co ltd
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Abstract

The utility model relates to the technical field of vacuum pipelines, in particular to a vacuum pipeline system with a dust collecting function. The device comprises a manufacturing process cavity, a first pipeline, a pump, a second pipeline and waste gas treatment equipment, wherein the first pipeline is longitudinally arranged, a three-way valve is further installed on the first pipeline, a dust collecting cup is installed at the air outlet end of the bottom of the three-way valve, and the air outlet end of the right side of the three-way valve is installed at the air inlet end of the pump through a guide pipe. Can effectively avoid the pipeline blockage caused by dust accumulation.

Description

Vacuum pipeline system with dust collecting function
Technical Field
The utility model relates to the technical field of vacuum pipelines, in particular to a vacuum pipeline system with a dust collecting function.
Background
Waste gas in the reaction cavity of the original vacuum system in the manufacturing process can be sucked by a downstream pump and then discharged to waste gas treatment equipment for treatment, in the process, dust can be condensed for a long time by a vacuum pipeline between the reaction cavity and the pump and accumulated in the running pump, the pump is blocked and stops rotating, and dust is also condensed and accumulated between the pump and the waste gas treatment equipment to cause pipeline blockage and equipment downtime.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
In order to solve the above problems in the prior art, the present invention provides a vacuum pipeline system with a dust collecting function, which can effectively avoid pipeline blockage caused by dust accumulation.
(II) technical scheme
In order to achieve the purpose, the utility model adopts the main technical scheme that: the device comprises a manufacturing process cavity, a first pipeline, a pump, a second pipeline and waste gas treatment equipment, wherein the first pipeline is arranged longitudinally, a three-way valve is further installed on the first pipeline, a dust collecting cup is installed at the gas outlet end of the bottom of the three-way valve, and the gas outlet end of the right side of the three-way valve is installed at the gas inlet end of the pump through a guide pipe.
Preferably, the dust cup is made of transparent materials.
Preferably, the inner cavity of the three-way valve is fixedly provided with a spiral spring, and one end of the bottom of the spiral spring is provided with a vibration exciter.
Preferably, a dust catcher is further installed on the second pipeline.
(III) advantageous effects
The utility model provides a vacuum pipeline system with a dust collecting function. The method has the following beneficial effects:
(1) and the dust block condensed on the first pipeline can fall into the dust collecting cup for collection, so that the phenomenon of pump blockage is avoided.
(2) And a dust catcher is additionally arranged between the pump and the waste gas treatment equipment to filter the passing gas, so that the probability of pipeline blockage is reduced, and the service life of a vacuum system is prolonged.
(3) When dust in the first pipeline needs to be cleaned, the vibration exciter is started and acts on the spiral spring, so that the first pipeline generates slight vibration, and the falling of the dust attached to the inner wall of the first pipeline is promoted
Drawings
FIG. 1 is a diagram of a vacuum line system according to the present invention;
fig. 2 is a cross-sectional view of a three-way valve of the present invention.
In the figure: 1. a process chamber; 2. a first pipeline; 3. a pump; 4. a second pipeline; 5. an exhaust gas treatment device; 6. a three-way valve; 7. a dust collecting cup; 8. a coil spring; 9. a vibration exciter; 10. a dust catcher.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, the vacuum pipeline system with dust collecting function of this embodiment includes a process chamber 1, a first pipeline 2, a pump 3, a second pipeline 4 and a waste gas treatment device 5, the first pipeline 2 is vertically disposed, the first pipeline 2 is further installed with a three-way valve 6, a dust cup 7 is installed at an air outlet end of the bottom of the three-way valve 6, and an air outlet end of the right side of the three-way valve 6 is installed at an air inlet end of the pump 3 through a guide pipe. The dust block condensed on the first pipeline 2 can fall into the dust collecting cup 7 for collection, so that the phenomenon that the pump 3 is blocked is avoided.
Furthermore, the dust cup 7 is made of transparent material. The dust collecting cup 7 made of transparent materials is convenient for observing the amount of dust stored in the dust collecting cup 7, and is convenient for later cleaning.
Further, a spiral spring 8 is fixedly arranged in the inner cavity of the three-way valve 6, and a vibration exciter 9 is installed at one end of the bottom of the spiral spring 8. When the dust in first pipeline 2 is required to be cleaned, vibration exciter 9 is started, and vibration exciter 9 acts on spiral spring 8, so that first pipeline 2 generates slight vibration, and the falling of the dust attached to the inner wall of first pipeline 2 is promoted.
Further, a dust catcher 10 is mounted on the second pipeline 4. The second pipeline 4 between the pump 3 and the waste gas treatment equipment 5 is additionally provided with the dust catcher 10, so that passing gas can be filtered, the probability of pipeline blockage is reduced, and the service life of a vacuum system is prolonged.
The working principle is as follows: the dust block condensed on the first pipeline 2 can fall into the dust collecting cup 7 for collection, so that the phenomenon that the pump 3 is blocked is avoided. When the dust in first pipeline 2 is required to be cleaned, vibration exciter 9 is started, and vibration exciter 9 acts on spiral spring 8, so that first pipeline 2 generates slight vibration, and the falling of the dust attached to the inner wall of first pipeline 2 is promoted. The second pipeline 4 between the pump 3 and the waste gas treatment equipment 5 is additionally provided with the dust catcher 10, so that passing gas can be filtered, the probability of pipeline blockage is reduced, and the service life of a vacuum system is prolonged. Wherein, the dust cup 7 made of transparent material is convenient for observing the amount of dust stored in the dust cup 7, and is convenient for cleaning in the later period.

Claims (4)

1. The utility model provides a vacuum pipe-line system with function is collected to dust, includes process cavity (1), first pipeline (2), pump (3), second pipeline (4) and exhaust-gas treatment equipment (5), its characterized in that: the first pipeline (2) is arranged longitudinally, the three-way valve (6) is further installed on the first pipeline (2), the dust collecting cup (7) is installed at the air outlet end of the bottom of the three-way valve (6), and the air outlet end of the right side of the three-way valve (6) is installed at the air inlet end of the pump (3) through a guide pipe.
2. The vacuum line system with dust collecting function as claimed in claim 1, wherein: the dust collecting cup (7) is made of transparent materials.
3. A vacuum line system with dust collecting function according to claim 2, wherein: the three-way valve (6) inner chamber rigidity is provided with coil spring (8), vibration exciter (9) are installed to coil spring (8) bottom one end.
4. The vacuum line system with dust collecting function as claimed in claim 1, wherein: and the second pipeline (4) is also provided with a dust catcher (10).
CN202121851760.5U 2021-08-06 2021-08-06 Vacuum pipeline system with dust collecting function Active CN216342647U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121851760.5U CN216342647U (en) 2021-08-06 2021-08-06 Vacuum pipeline system with dust collecting function

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121851760.5U CN216342647U (en) 2021-08-06 2021-08-06 Vacuum pipeline system with dust collecting function

Publications (1)

Publication Number Publication Date
CN216342647U true CN216342647U (en) 2022-04-19

Family

ID=81167459

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121851760.5U Active CN216342647U (en) 2021-08-06 2021-08-06 Vacuum pipeline system with dust collecting function

Country Status (1)

Country Link
CN (1) CN216342647U (en)

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