CN216253296U - Microwave heating energy feedback device for polycrystalline silicon reduction - Google Patents
Microwave heating energy feedback device for polycrystalline silicon reduction Download PDFInfo
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- CN216253296U CN216253296U CN202122958510.8U CN202122958510U CN216253296U CN 216253296 U CN216253296 U CN 216253296U CN 202122958510 U CN202122958510 U CN 202122958510U CN 216253296 U CN216253296 U CN 216253296U
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Abstract
The utility model discloses a microwave heating energy feedback device for polysilicon reduction, which comprises a microwave energy feedback inlet arranged on a chassis of a reduction furnace and a microwave energy feedback window arranged on the microwave energy feedback inlet, wherein the microwave energy feedback window comprises at least two layers of wave-transparent baffles for allowing microwaves to enter the reduction furnace, and the at least two layers of wave-transparent baffles are hermetically connected with the microwave energy feedback inlet. According to the microwave heating energy feedback device for polysilicon reduction, the silicon core is heated in a non-contact manner through the microwave energy feedback window outside the reduction furnace so as to achieve the starting purpose, so that the technical requirements of quick starting of the reduction furnace, no pollution of the reduction furnace and the production process of polysilicon can be met, meanwhile, the reliability of the device operation can be improved, and the production efficiency of the polysilicon is improved on the premise that the reduction furnace is free of pollution in starting and has a high-temperature high-pressure closed environment.
Description
Technical Field
The utility model relates to the technical field of polycrystalline silicon production, in particular to a microwave heating energy feedback device for polycrystalline silicon reduction.
Background
At present, the market of the polycrystalline silicon is rapidly developed at home and abroad, and the polycrystalline silicon is mainly applied to solar photovoltaic power generation and raw materials of semiconductors. With the increasing production scale of the polycrystalline silicon, the market demands the quality of the polycrystalline silicon to be higher and higher, and higher requirements are put forward on the production technology of the polycrystalline silicon; the polysilicon reduction furnace is used as key production equipment, and the most key link of the product quality lies in the starting technology of the reduction furnace.
In the prior art, the starting technology of the polycrystalline silicon reduction furnace mainly comprises electric radiation heating starting and high-voltage breakdown starting; however, the electric radiation heater can pollute the crystal growth environment in the furnace and affect the product quality; the high voltage breakdown is easy to generate the discharge and ignition phenomena in the reduction furnace, so that the carbon impurities of the silicon core graphite electrode are released to influence the crystal growth environment in the reduction furnace.
Therefore, how to avoid silicon core pollution caused by starting a polysilicon reduction furnace is a technical problem to be solved by the technicians in the field at present.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a microwave heating energy feedback device for polysilicon reduction, which can meet the technical requirements of quick starting of a reduction furnace, no pollution of the starting of the reduction furnace and a polysilicon production process.
In order to achieve the purpose, the utility model provides a microwave heating energy feedback device for polysilicon reduction, which comprises a microwave energy feedback inlet and a microwave energy feedback window, wherein the microwave energy feedback inlet is arranged on a chassis of a reduction furnace, the microwave energy feedback window is arranged on the microwave energy feedback inlet, the microwave energy feedback window comprises at least two layers of wave-transparent baffles for allowing microwaves to enter the reduction furnace, and the at least two layers of wave-transparent baffles are hermetically connected with the microwave energy feedback inlet.
Optionally, the at least two layers of wave-transparent baffles include a first wave-transparent baffle and a second wave-transparent baffle disposed below the first wave-transparent baffle.
Optionally, a first clamp ring is arranged between the first wave-transparent baffle and the second wave-transparent baffle, and a second clamp ring is arranged below the second wave-transparent baffle.
Optionally, the size of the second wave-transparent baffle is larger than the size of the first wave-transparent baffle.
Optionally, the distance between the second wave-transparent baffle and the first wave-transparent baffle ranges from 30 mm to 120 mm.
Optionally, the reduction furnace further comprises a first sealing ring, a second sealing ring and a third sealing ring, wherein the first sealing ring is arranged between the reduction furnace chassis and the first wave-transmitting baffle, the second sealing ring is arranged between the first wave-transmitting baffle and the first compression ring, and the third sealing ring is arranged between the reduction furnace chassis and the second wave-transmitting baffle.
Optionally, the microwave energy feedback device further comprises a cooling water channel arranged in the chassis of the reduction furnace, wherein the cooling water channel is arranged around the microwave energy feedback window and used for cooling the first sealing ring, the second sealing ring and the third sealing ring.
Optionally, the number of the microwave energy feeding inlets and the number of the microwave energy feeding windows are two, and the two microwave energy feeding windows are symmetrically arranged about the axis of the chassis of the reduction furnace.
Optionally, the microwave energy-feeding device further comprises a microwave power supply device, any one of the microwave energy-feeding windows is connected with the microwave power supply device through a square waveguide tube, and a waveguide conversion tube is connected between any one of the microwave energy-feeding windows and the corresponding square waveguide tube.
Optionally, the microwave energy feedback device further comprises a locking bolt for tightly connecting the microwave energy feedback window and a chassis of the reduction furnace.
Compared with the background technology, in order to solve the problem of pollution of silicon cores for starting the polycrystalline silicon reduction furnace, the embodiment of the utility model heats the silicon cores in a non-contact way through the microwave energy feedback window outside the reduction furnace to achieve the starting purpose; because the polycrystalline silicon reduction furnace has a high-temperature high-pressure closed environment during operation, the microwave energy feedback window can penetrate through microwave energy and bear the pressure in the furnace, and the sealing performance is good.
Specifically, the microwave heating energy feedback device for polysilicon reduction comprises a microwave energy feedback inlet and a microwave energy feedback window, wherein the microwave energy feedback inlet is arranged on a chassis of the reduction furnace, the microwave energy feedback window is arranged in the microwave energy feedback inlet, and further the microwave energy feedback window comprises at least two layers of wave-transparent baffles, the at least two layers of wave-transparent baffles are hermetically connected with the microwave energy feedback inlet, and the wave-transparent baffles are used for allowing microwaves to be emitted into the reduction furnace. Therefore, the at least two layers of wave-transparent baffles can facilitate the radiation of microwaves into the reduction furnace from bottom to top, so that the silicon core in the reduction furnace can uniformly absorb the microwaves, and the efficient heating is realized. Compared with the traditional arrangement of silicon core pollution caused by starting of a polycrystalline silicon reduction furnace, the polycrystalline silicon reduction microwave heating energy feedback device provided by the embodiment of the utility model heats the silicon core in a non-contact manner through the microwave energy feedback window outside the reduction furnace to achieve the starting purpose, so that the technical requirements of quick starting of the reduction furnace, no pollution caused by starting of the reduction furnace and production process of polycrystalline silicon can be met, meanwhile, the running reliability of the device can be improved, and the production efficiency of the polycrystalline silicon is improved on the premise that the reduction furnace is free of pollution caused by starting and has a high-temperature and high-pressure closed environment.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic view of an assembly structure of a polysilicon reduction microwave heating energy feedback device and a reduction furnace according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the arrangement of microwave energy-feeding inlets;
fig. 3 is a schematic connection diagram of the microwave energy feedback window in fig. 1.
Wherein:
1-microwave energy feeding inlet, 2-microwave energy feeding window, 201-first wave-transparent baffle, 202-second wave-transparent baffle, 203-first clamp ring, 204-second clamp ring, 205-first seal ring, 206-second seal ring, 207-third seal ring, 208-cooling water channel, 3-waveguide conversion tube, 4-square waveguide tube, 5-locking bolt, 6-reduction furnace and 601-chassis.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The core of the utility model is to provide a microwave heating energy feedback device for polysilicon reduction, which can meet the technical requirements of quick starting of a reduction furnace, no pollution of the starting of the reduction furnace and polysilicon production process.
In order that those skilled in the art will better understand the disclosure, the utility model will be described in further detail with reference to the accompanying drawings and specific embodiments.
It should be noted that the following directional terms such as "upper end, lower end, left side, right side" and the like are defined based on the drawings of the specification.
Referring to fig. 1, fig. 2 and fig. 3, fig. 1 is a schematic view illustrating an assembly structure of a polysilicon reduction microwave heating energy feedback device and a reduction furnace according to an embodiment of the present invention; FIG. 2 is a schematic diagram of the arrangement of microwave energy-feeding inlets; fig. 3 is a schematic connection diagram of the microwave energy feedback window in fig. 1.
The microwave heating energy feedback device for polysilicon reduction provided by the embodiment of the utility model comprises a microwave energy feedback inlet 1 and a microwave energy feedback window 2, wherein the microwave energy feedback inlet 1 is arranged on a base plate 601 of a reduction furnace 6, the microwave energy feedback window 2 is arranged in the microwave energy feedback inlet 1, further, the microwave energy feedback window 2 comprises at least two layers of wave-transparent baffles, the at least two layers of wave-transparent baffles are hermetically connected with the microwave energy feedback inlet 1, and the wave-transparent baffles are used for allowing microwaves to jet into the reduction furnace 6.
Therefore, the at least two layers of wave-transparent baffles can facilitate the radiation of microwaves into the reduction furnace 6 from bottom to top, so that the silicon core in the reduction furnace 6 can uniformly absorb the microwaves, and the efficient heating is realized.
It should be noted that the microwave is specifically a microwave energy for heating the polysilicon in the reduction furnace 6, and the microwave emitted from the microwave power supply device located outside the reduction furnace 6 can enter the furnace through the microwave energy feeding window 2.
Compared with the traditional arrangement of silicon core pollution caused by the starting of the polycrystalline silicon reduction furnace 6, the polycrystalline silicon reduction microwave heating energy feedback device provided by the embodiment of the utility model heats silicon cores in a non-contact manner through the microwave energy feedback window 2 outside the reduction furnace 6 to achieve the starting purpose, so that the technical requirements of quick starting of the reduction furnace 6, no pollution caused by starting of the reduction furnace 6 and a polycrystalline silicon production process can be met, meanwhile, the running reliability of the device can be improved, and the production efficiency of polycrystalline silicon is improved on the premise that the reduction furnace 6 is free of pollution and the reduction furnace 6 has a high-temperature high-pressure closed environment.
It should be noted that, because the temperature in the production process of the reduction furnace 6 can reach about 1100 ℃, and the furnace body is generally made of stainless steel, and the microwave outside the furnace cannot penetrate into the furnace, a special microwave energy feed inlet 1 needs to be designed, in the embodiment of the utility model, a hole is formed in the chassis 601 of the reduction furnace 6 to serve as the microwave energy feed inlet 1, so that the microwave energy is radiated upwards from the bottom of the reduction furnace 6, and the microwave energy is uniformly distributed between the axis of the inner ring and the axis of the middle ring of the chassis 601 of the reduction furnace 6, so that the silicon core in the furnace can efficiently absorb the microwave energy, and the silicon core can heat quickly.
In addition, it is more convenient to arrange microwave at furnace chassis 601 and present ability entry 1 than arranging the use on the bell jar of reduction furnace 6, arrange microwave at furnace chassis 601 and present ability entry 1, at this moment, microwave power supply unit need not to get into in the clean factory building of reduction, because microwave power supply unit removes and uses water route circuit can influence the clean area, consequently, arrange microwave power supply unit fixed mounting in the reduction switch board room when microwave is presented ability entry 1 at furnace chassis 601, through further optimizing for one set of microwave power supply unit of many ovens sharing, it is economic more to have.
Specifically, the at least two layers of wave-transparent baffles include a first wave-transparent baffle 201 and a second wave-transparent baffle 202 disposed below the first wave-transparent baffle 201. Wherein the size of the second wave-transparent baffle 202 is larger than that of the first wave-transparent baffle 201.
That is to say, the microwave energy feedback window 2 adopts a double-layer wave-transparent baffle plate for sealing and bearing, and the baffle plate is made of quartz, silicon nitride, diamond and other materials with good microwave penetrability and high temperature resistance of more than 2000 ℃; the pressure of the reduction furnace 6 is generally below 1MPA, so the wave-transparent material can bear the pressure in the furnace to achieve the purpose of preventing the material leakage.
Herein, the microwave feed energy inlet 1 is embodied as a circular hole, and thus, the first wave-transparent baffle 201 and the second wave-transparent baffle 202 are embodied as circular baffles. The diameter of the second wave-transparent baffle 202 is larger than that of the first wave-transparent baffle 201, any microwave energy-feedback inlet 1 comprises a first groove, a second groove and a third groove, wherein the first groove, the second groove and the third groove are arranged from bottom to top, namely the first groove is positioned on the outer side, the third groove is positioned on the inner side, the second groove is positioned between the first groove and the third groove, the inner diameter of the first groove is matched with the second wave-transparent baffle 202, the inner diameter of the second groove is matched with the first wave-transparent baffle 201, the third groove is communicated with the inner cavity of the reduction furnace 6, and the sizes of the first groove, the second groove and the third groove are gradually decreased.
In addition, according to the microwave wavelength and the aperture of the microwave energy feedback inlet 1 and the distance between the two wave-transparent baffles, the microwave can be smoothly fed into the furnace only when the requirements are met, wherein the aperture range of the microwave energy feedback inlet 1 is 100-300mm, the distance range between the second wave-transparent baffle 202 and the first wave-transparent baffle 201 is 30-120mm, and the frequency range of the microwave is 900-2600 MHZ.
In order to further achieve the effects of sealing and pressure bearing, a first compression ring 203 is arranged between the first wave-transparent baffle 201 and the second wave-transparent baffle 202, and a second compression ring 204 is arranged below the second wave-transparent baffle 202.
Furthermore, the polysilicon reduction microwave heating energy feedback device further comprises a first sealing ring 205, a second sealing ring 206 and a third sealing ring 207, wherein the first sealing ring 205 is arranged between the bottom plate 601 of the reduction furnace 6 and the first wave-transparent baffle 201, the second sealing ring 206 is arranged between the first wave-transparent baffle 201 and the first compression ring 203, and the third sealing ring 207 is arranged between the bottom plate 601 of the reduction furnace 6 and the second wave-transparent baffle 202.
That is to say, the microwave energy feedback window 2 is provided with a triple sealing ring, and the sealing ring is made of high-temperature-resistant graphite, polytetrafluoroethylene, fluororubber and the like.
In this way, the second wave-transparent baffle 202 is pressed upwards by the second pressing ring 204, the second wave-transparent baffle 202 presses the third sealing ring 207 upwards to deform the third sealing ring, so as to achieve the sealing effect, meanwhile, the first pressing ring 203 is pushed upwards to move upwards to press the second sealing ring 206 to deform, and meanwhile, the first wave-transparent baffle 201 is forced to press the first sealing ring 205 to deform the first sealing ring 205 to achieve the sealing effect.
In order to ensure the sealing safety, the polysilicon reduction microwave heating energy feedback device further comprises a cooling water channel 208 arranged in the bottom plate 601 of the reduction furnace 6, wherein the cooling water channel 208 is arranged around the microwave energy feedback window 2 and used for cooling the first sealing ring 205, the second sealing ring 206 and the third sealing ring 207.
For example, two water cooling channels can be arranged in the furnace plate and around the two wave-transparent baffles, and the cooling sealing ring can ensure the sealing safety.
In order to optimize the above embodiment, the number of the microwave energy feeding inlets 1 and the number of the microwave energy feeding windows 2 are two, and the two microwave energy feeding windows 2 are symmetrically arranged about the axis of the chassis 601 of the reduction furnace 6.
Specifically, two microwave energy feeding inlets 1 and two microwave energy feeding windows 2 are uniformly distributed between the axis of the inner ring and the axis of the middle ring of the chassis 601 of the reduction furnace 6, and microwave incidence heating is uniform and rapid, so that the production efficiency of polycrystalline silicon in the reduction furnace 6 can be improved.
The microwave energy-feeding window 2 and the chassis 601 of the reducing furnace 6 can also be fastened by adopting a locking bolt 5.
On the basis, the polysilicon reduction microwave heating energy feedback device further comprises a microwave power supply device, any microwave energy feedback window 2 is connected with the microwave power supply device through a square waveguide tube 4, and a waveguide conversion tube 3 is connected between any microwave energy feedback window 2 and the corresponding square waveguide tube 4.
The upper end of the waveguide conversion tube 3 is provided with a round port which is butted with the microwave energy feeding window 2, and the lower end is provided with a square port which is butted with the square waveguide tube 4.
It is noted that, in this specification, relational terms such as first and second, and the like are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities.
The microwave heating energy feedback device for polysilicon reduction provided by the utility model is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are provided only to help understand the concepts of the present invention and the core concepts thereof. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (10)
1. The microwave heating energy feedback device for polysilicon reduction is characterized by comprising a microwave energy feedback inlet (1) arranged on a chassis (601) of a reduction furnace (6) and a microwave energy feedback window (2) arranged on the microwave energy feedback inlet (1), wherein the microwave energy feedback window (2) comprises at least two layers of wave-transparent baffles for allowing microwaves to enter the reduction furnace (6), and the at least two layers of wave-transparent baffles are hermetically connected with the microwave energy feedback inlet (1).
2. The polysilicon reducing microwave heating energy feedback device according to claim 1, wherein the at least two layers of wave-transparent baffles comprise a first wave-transparent baffle (201) and a second wave-transparent baffle (202) arranged below the first wave-transparent baffle (201).
3. The polysilicon reduction microwave heating energy feedback device as set forth in claim 2, wherein a first clamp ring (203) is arranged between the first wave-transparent baffle plate (201) and the second wave-transparent baffle plate (202), and a second clamp ring (204) is arranged below the second wave-transparent baffle plate (202).
4. The polysilicon reducing microwave heating energy feeding device as set forth in claim 2, wherein the size of the second wave-transparent baffle (202) is larger than that of the first wave-transparent baffle (201).
5. The polysilicon reducing microwave heating energy feedback device as set forth in claim 2, wherein the distance between the second wave-transparent baffle (202) and the first wave-transparent baffle (201) is in the range of 30-120 mm.
6. The microwave heating energy feedback device for polysilicon reduction according to claim 3, further comprising a first sealing ring (205), a second sealing ring (206) and a third sealing ring (207), wherein the first sealing ring (205) is arranged between a bottom plate (601) of the reduction furnace (6) and the first wave-transparent baffle (201), the second sealing ring (206) is arranged between the first wave-transparent baffle (201) and the first compression ring (203), and the third sealing ring (207) is arranged between the bottom plate (601) of the reduction furnace (6) and the second wave-transparent baffle (202).
7. The microwave heating energy feedback device for polysilicon reduction according to claim 6, further comprising a cooling water channel (208) disposed in a bottom plate (601) of the reduction furnace (6), wherein the cooling water channel (208) is disposed around the microwave energy feedback window (2) and is used for cooling the first sealing ring (205), the second sealing ring (206) and the third sealing ring (207).
8. The microwave heating energy feedback device for polysilicon reduction according to any one of claims 1 to 7, wherein the number of the microwave energy feedback inlets (1) and the number of the microwave energy feedback windows (2) are two, and the two microwave energy feedback windows (2) are symmetrically arranged about the axis of the chassis (601) of the reduction furnace (6).
9. The polysilicon reducing microwave heating energy-feeding device according to claim 8, further comprising a microwave power supply device, wherein any one of the microwave energy-feeding windows (2) is connected with the microwave power supply device through a square waveguide tube (4), and a waveguide switching tube (3) is connected between any one of the microwave energy-feeding windows (2) and the corresponding square waveguide tube (4).
10. The microwave heating energy feedback device for polysilicon reduction according to claim 8, further comprising a locking bolt (5) for tightly connecting the microwave energy feedback window (2) with a chassis (601) of the reduction furnace (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122958510.8U CN216253296U (en) | 2021-11-29 | 2021-11-29 | Microwave heating energy feedback device for polycrystalline silicon reduction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122958510.8U CN216253296U (en) | 2021-11-29 | 2021-11-29 | Microwave heating energy feedback device for polycrystalline silicon reduction |
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| Publication Number | Publication Date |
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| CN216253296U true CN216253296U (en) | 2022-04-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122958510.8U Active CN216253296U (en) | 2021-11-29 | 2021-11-29 | Microwave heating energy feedback device for polycrystalline silicon reduction |
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- 2021-11-29 CN CN202122958510.8U patent/CN216253296U/en active Active
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