CN216250662U

CN216250662U - Single polycrystalline silicon wafer bearing graphite frame

Info

Publication number: CN216250662U
Application number: CN202122359435.3U
Authority: CN
Inventors: 李德平; 何丹
Original assignee: Shandong Runma Guangneng Technology Co ltd
Current assignee: Shandong Runma Guangneng Technology Co ltd
Priority date: 2021-09-28
Filing date: 2021-09-28
Publication date: 2022-04-08
Anticipated expiration: 2031-09-28

Abstract

The utility model relates to the technical field of silicon wafer bearing devices, in particular to a single-polycrystalline silicon wafer bearing graphite frame which comprises a frame body and counter bores, wherein the counter bores are distributed on the frame body in a rectangular array, a sinking platform for placing a silicon wafer is arranged at the lower part of the counter bores, an extrusion ring is arranged on the sinking platform, an elastic element is arranged between the extrusion ring and the sinking platform, a lining frame with an outer contour and an inner contour respectively matched with the inner contour at the upper part of the counter bores and the outer contour of the silicon wafer is arranged on the extrusion ring, clamping blocks are symmetrically arranged on the outer side of the lining frame, clamping grooves clamped and fixed with the clamping blocks are arranged at the edges of the counter bores, and notches which are communicated with the clamping grooves and are used for the clamping blocks to pass through are formed in the frame body above the clamping grooves. According to the utility model, the extrusion ring, the elastic element, the fixture block, the clamping groove and the notch are arranged, so that the lining frame arranged in the counter bore is more stable, the stability of the silicon wafer in the lining frame is further ensured, and the problem that the stability of the lining frame after being placed in the prior art is poor, and the fixation of the silicon wafer is further influenced is solved.

Description

Single polycrystalline silicon wafer bearing graphite frame

Technical Field

The utility model relates to the technical field of silicon wafer bearing devices, in particular to a single-polycrystalline silicon wafer bearing graphite frame.

Background

At present, the upper coating film graphite frame is made into corresponding right-angle and chamfer shapes according to the external dimension of a silicon wafer and is used for bearing chamfer single crystal and polycrystalline silicon wafers with different dimensions.

The existing patent with the publication number of CN205211719U provides a single-polycrystal universal graphite frame, and the single-polycrystal universal graphite frame structure is characterized in that a lining frame is arranged on a counter sink of a counter sink on a traditional graphite frame, and the lining frame is provided with an outer contour adaptive to the contour of an upper opening part of the counter sink and an inner contour adaptive to the outer contour of a silicon wafer, so that the graphite frame can be used for bearing different silicon wafers according to the sizes and the shapes of the silicon wafers, a corresponding module group is designed, the graphite frame can bear chamfered silicon wafers and right-angled silicon wafers, and the silicon wafers with different chamfer sizes can be borne simultaneously. However, the lining frame in the graphite frame is fixed in the counter bore through the matching of the tenon and the groove, so that the fixed lining frame can still move along the central axis direction of the counter bore, the fixing effect of the lining frame after being placed is poor, and the fixing of the silicon wafer is further influenced.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

Aiming at the defects of the prior art, the utility model provides the single polycrystalline silicon wafer bearing graphite frame, which can enable the lining frame arranged in the counter bore to be more stable, further ensure the stability of the silicon wafer in the lining frame, and solve the problem that the stability of the lining frame after the lining frame is placed in the prior art is poor, and further the fixation of the silicon wafer is influenced.

(II) technical scheme

In order to realize the purpose that the lining frame loaded into the counter bore is more stable and further the stability of the silicon chip in the lining frame is ensured, the utility model provides the following technical scheme: the single polycrystalline silicon wafer bearing graphite frame comprises a frame body and counter bores, wherein the counter bores are distributed in a rectangular array manner in the frame body, counter bores are arranged on the lower portion of the counter bores and are provided with counter bores used for placing silicon wafers, extrusion rings are arranged on the counter bores, elastic elements are arranged between the extrusion rings and the counter bores, outer contours and inner contours of the extrusion rings are respectively matched with the inner contours of the counter bores and the outer contours of the silicon wafers, clamping blocks are symmetrically arranged on the outer sides of the lining frames, clamping grooves fixed with the clamping blocks in a clamped mode are formed in the edges of the counter bores, and notches which are communicated with the clamping grooves and supply the clamping blocks to pass through are formed in the frame body above the clamping grooves.

Optionally, the elastic elements are four springs, and the four springs are distributed at equal angles along the circumferential direction of the bottom of the extrusion ring.

Optionally, the fixture block is in a triangular pyramid structure, and the size of the upper surface of the fixture block is consistent with that of the notch.

(III) advantageous effects

Compared with the prior art, the utility model provides a single-polycrystalline silicon wafer bearing graphite frame, which has the following beneficial effects:

1. according to the utility model, by arranging the extrusion ring, the elastic element, the fixture blocks, the clamping grooves and the notches, after the lining frame is arranged in the counter bore, the fixture blocks at two ends of the lining frame are tightly attached in the clamping grooves under the elastic force of the elastic element, so that the lining frame can be fixed in the counter bore, the fixed lining frame cannot move along the central axis direction of the counter bore, the stability of the lining frame and a silicon wafer at the inner side of the lining frame is ensured, and the problem that the stability of the lining frame after being placed in the prior art is poor, and further the fixing of the silicon wafer is influenced is solved;

2. according to the utility model, the elastic elements are arranged into four springs which are distributed at equal angles along the circumferential direction of the bottom of the extrusion ring, and after the lining frame is installed, the four springs can simultaneously apply force to the periphery of the extrusion ring, so that the stress on the periphery of the lining frame is more uniform, and the stability of the lining frame after being placed is ensured;

3. according to the utility model, the fixture block is designed into the triangular pyramid structure, and the size of the upper surface of the fixture block is consistent with that of the notch, so that the fixture block and the clamping groove of the triangular pyramid structure are easier to align, and the mounting efficiency of the lining frame is improved.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of an effective structure of a chamfer bearing silicon wafer according to the present invention;

FIG. 3 is a schematic diagram of an effective structure of the right-angle silicon wafer carrier of the present invention;

FIG. 4 is a schematic view of a counterbore configuration of the present invention;

FIG. 5 is a schematic view of a structure of a lining frame suitable for bearing a chamfered silicon wafer according to the present invention;

FIG. 6 is a schematic view of a liner frame suitable for supporting a square silicon wafer according to the present invention.

In the figure: 1. a frame body; 2. a counter bore; 3. sinking a platform; 4. extruding a ring; 5. a spring; 6. lining a frame; 7. a clamping block; 8. a notch; 9. a clamping groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example (b): referring to fig. 1 to 6, an embodiment of the present invention provides a technical solution: a single polycrystalline silicon wafer bearing graphite frame comprises a frame body 1 and counter bores 2, the counter bores 2 are distributed on the frame body 1 in a rectangular array, the lower parts of the counter bores 2 are provided with counter sinks 3 for placing silicon wafers, the counter sinks 3 are provided with extrusion rings 4, elastic elements are arranged between the extrusion rings 4 and the counter sinks 3, the extrusion rings 4 are provided with lining frames 6, the outer contours of the lining frames 6 are respectively matched with the inner contours of the upper parts of the counter bores 2 and the outer contours of the silicon wafers, clamping blocks 7 are symmetrically arranged on the outer sides of the lining frames 6, the edges of the counter bores 2 are respectively provided with clamping grooves 9 which are clamped and fixed with the clamping blocks 7, notches 8 which are communicated with the clamping grooves 9 and are used for the clamping blocks 7 to pass through are arranged on the frame body 1 above the clamping grooves 9, the lining frames 6 with different inner contours are respectively designed according to different sizes and shapes of the silicon wafers, after the lining frames 6, the inner contours of which are matched with the appearances of the silicon wafers are selected, the lining frames 6 are aligned with the notches 8 and then embedded into the counter bores 2, the extrusion ring 4 on the sinking platform 3 is pushed to move downwards to compress the elastic element, then the lining frame 6 rotates in the counter bore 2 for a certain angle, the fixture blocks 7 at the two sides of the lining frame 6 move in the clamping grooves 9 to one end far away from the notch 8, then the lining frame 6 is loosened, the fixture blocks 7 at the two ends of the lining frame 6 are tightly attached in the clamping grooves 9 under the elastic force of the elastic element, therefore, the lining frame 6 can be fixed in the counter bore 2, the fixed lining frame 6 cannot move along the central axis direction of the counter bore 2, the stability of the lining frame 6 and the silicon chip at the inner side of the lining frame 6 is ensured, when the lining frame 6 is disassembled, the lining frame 6 only needs to be pressed downwards and then rotated, the fixture blocks 7 at the two sides of the lining frame 6 are aligned with the notch 8, after the lining frame 6 is loosened, the lining frame 6 moves out of the counter bore 2 under the elastic force of the elastic element, the lining frame 6 is more convenient to take out, compared with the traditional technology that the tenon and groove are matched to fix the lining frame 6 in the counter bore 2, the fixing effect of the lining frame 6 is effectively improved, and the stability of the silicon chip in the lining frame 6 is ensured.

As a preferred embodiment, the elastic elements of this embodiment are springs 5, the number of the springs 5 is four, the four springs 5 are distributed at equal angles along the circumferential direction of the bottom of the extrusion ring 4, and the four springs 5 can simultaneously apply force to the periphery of the extrusion ring 4, so that the stress on the periphery of the lining frame 6 is more uniform, and the stability of the lining frame 6 after being placed is ensured.

As a preferred embodiment, the fixture block 7 of the present embodiment has a triangular pyramid structure, the size of the upper surface of the fixture block 7 is the same as the size of the notch 8, and alignment between the fixture block 7 and the slot 9 of the triangular pyramid structure is easier, which helps to improve the installation efficiency of the lining frame 6.

The working principle is as follows: according to the use requirement, after a lining frame 6 with the inner contour matched with the appearance of the silicon chip is selected, the fixture blocks 7 at the two ends of the lining frame 6 are aligned with the notches 8 and then embedded into the counter bores 2, the extrusion rings 4 on the sinking table 3 are pushed to move downwards to compress the elastic element, then the lining frame 6 is rotated in the counter bores 2 for a certain angle, the fixture blocks 7 at the two ends of the lining frame 6 move in the clamping grooves 9 to one end far away from the notches 8, then the lining frame 6 is loosened, the fixture blocks 7 at the two ends of the lining frame 6 are tightly attached in the clamping grooves 9 under the elastic force of the elastic element, so that the lining frame 6 can be fixed in the counter bores 2, the fixed lining frame 6 cannot move along the central axis direction of the counter bores 2, the stability of the lining frame 6 and the silicon chip at the inner side of the lining frame 6 is ensured, when the lining frame 6 is disassembled, the lining frame 6 is only required to be pressed down and then reversely rotated for a certain angle, the fixture blocks 7 at the two sides of the lining frame 6 are aligned with the notches 8, after the lining frame 6 is loosened, the lining frame 6 moves out of the counter bore 2 under the elasticity of the elastic element, so that the lining frame 6 is more convenient to take out, and compared with the traditional technology in which the lining frame 6 is fixed in the counter bore 2 by utilizing the cooperation of a tenon and a groove, the fixing effect of the lining frame 6 is effectively improved, and the stability of a silicon wafer in the lining frame 6 is ensured.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The single polycrystalline silicon wafer bearing graphite frame is characterized in that: including framework (1) and counter bore (2), counter bore (2) be rectangular array distribute in on the framework (1), counter bore (2) lower part is equipped with heavy platform (3) that are used for placing the silicon chip, be equipped with extrusion ring (4) on heavy platform (3), extrusion ring (4) with sink and be equipped with elastic element between the platform (3), be equipped with on extrusion ring (4) outline and interior outline respectively with lining frame (6) of outline and silicon chip outline looks adaptation in counter bore (2) upper portion, lining frame (6) outside symmetry is equipped with fixture block (7), counter bore (2) edge all be equipped with fixture block (7) block fixed draw-in groove (9), be located draw-in groove (9) top seted up on framework (1) with draw-in groove (9) communicate with each other and supply notch (8) that fixture block (7) pass through.

2. The single-poly silicon wafer-bearing graphite frame of claim 1, wherein: the elastic elements are springs (5), the number of the springs (5) is four, and the four springs (5) are distributed at equal angles along the circumferential direction of the bottom of the extrusion ring (4).

3. The single-poly silicon wafer-bearing graphite frame of claim 1, wherein: the fixture block (7) is in a triangular pyramid structure, and the size of the upper surface of the fixture block (7) is consistent with that of the notch (8).