CN216237247U

CN216237247U - Arc striking device, ion source module and vacuum coating machine

Info

Publication number: CN216237247U
Application number: CN202122785698.0U
Authority: CN
Inventors: 林海天; 李立升; 郑礼伟; 陈松; 杨恺
Original assignee: Dongguan Huasheng Vacuum Plated Film Technology Co ltd
Current assignee: Guangdong Huasheng Nanotechnology Co ltd
Priority date: 2021-11-13
Filing date: 2021-11-13
Publication date: 2022-04-08
Anticipated expiration: 2031-11-13

Abstract

The utility model relates to an arc striking device, an ion source module and a vacuum coating machine. The arc striking device comprises a mounting seat, a movable rod, an arc striking needle and a reset assembly. The movable rod is movably connected with the mounting seat, the outer wall of the movable rod is sleeved with a corrugated pipe, one end of the corrugated pipe is connected with the mounting seat in a sealing mode, the other end of the corrugated pipe is connected with the movable rod in a sealing mode, and when the movable rod moves relative to the mounting seat, the corrugated pipe moves in a telescopic mode under the driving of the movable rod; the arc ignition needle is used for abutting against the target material to ignite the target material; the reset assembly is used for driving the movable rod to reset and move towards the direction far away from the target. Make the striking needle contact the target through the subassembly that resets after, avoid striking needle inertial motion to avoid the striking needle excessive striking target and the risk that the striking needle burns out that causes. Through the setting of bellows, can reduce the influence of vacuum environment to the striking device, also can have certain buffering effect to the striking needle, reduce the risk that the striking needle burns out.

Description

Arc striking device, ion source module and vacuum coating machine

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to an arc striking device, an ion source module and a vacuum coating machine.

Background

Vacuum coating techniques are generally classified into Physical Vapor Deposition (PVD) techniques and Chemical Vapor Deposition (CVD) techniques. The physical vapor deposition technology is a technology of vaporizing the surface of a material source (solid or liquid) into gaseous atoms or molecules or partially ionizing the gaseous atoms or molecules into ions by a physical method under a vacuum condition, and depositing a film with a certain special function on the surface of a substrate by low-pressure gas (or plasma). The physical vapor deposition technology can adopt the phenomena of sputtering of atoms on the surface of a substance during ion bombardment and the like to realize the controllable transfer process of the atoms on the surface of the substance from a source substance to a film. The ion source provides stable high-energy plasma in the physical vapor deposition process.

The arc striking device is an essential component when the ion source starts to work. However, a large current is present at the moment of starting the ion source, and the arc ignition device is easily burnt out.

SUMMERY OF THE UTILITY MODEL

Accordingly, there is a need for an arc striking device, an ion source module and a vacuum coater for solving the problem of easy burning of an arc striking needle.

An arc ignition device comprising:

a mounting seat;

the movable rod is movably connected with the mounting seat, a corrugated pipe is sleeved on the outer wall of the movable rod, one end of the corrugated pipe is connected with the mounting seat in a sealing mode, the other end of the corrugated pipe is connected with the movable rod in a sealing mode, and when the movable rod moves relative to the mounting seat, the corrugated pipe moves in a telescopic mode under the driving of the movable rod;

the arc ignition needle is connected with the movable rod so as to move along with the movable rod relative to the mounting seat, and the arc ignition needle is used for being abutted against the target so as to ignite the target;

the resetting assembly is arranged between the mounting seat and the movable rod and is used for driving the movable rod to reset and move towards the direction far away from the target material.

In one embodiment, the movable rod comprises a first connecting section and a second connecting section which are connected, the corrugated pipe is sleeved on the first connecting section, one end of the corrugated pipe is connected with the outer wall of the second connecting section, the other end of the corrugated pipe is connected with one side of the first connecting section, which is far away from the second connecting section, and the first connecting section is partially positioned in the mounting seat and connected with the resetting component;

the second connecting section is located outside the mounting seat and connected with the arc striking needle.

In one embodiment, the cross section of the first connecting section has an area smaller than that of the second connecting section, and one end of the corrugated pipe is connected to the end face where the second connecting section and the first connecting section are connected.

In one embodiment, at least a portion of the bellows is located within the mount.

In one embodiment, the bellows is a flexible hydraulic bellows.

In one embodiment, the reset assembly comprises an elastic piece, one end of the elastic piece is connected with the mounting seat, and the other end of the elastic piece is connected with the movable rod;

when the elastic piece is positioned at the original position, the movable rod is positioned at the original position;

when the elastic piece is located at the compression position, the movable rod drives the arc striking needle to be located at the arc striking position.

In one embodiment, the reset assembly further comprises a guide member, one end of the guide member is connected with the mounting seat, and the other end of the guide member is movably connected with the movable rod.

In one embodiment, the elastic member is sleeved on the surface of the guide member, and the elastic member can move relative to the guide member.

In one embodiment, the mounting seat is provided with a mounting groove, the resetting component is positioned in the mounting groove, and the movable rod part extends into the mounting groove and is connected with the resetting component; and part of the outer wall of the corrugated pipe is connected with the inner wall of the mounting groove.

In one embodiment, the vacuum coating machine further comprises a mounting piece, wherein the mounting piece is arranged at the notch of the mounting groove and is used for being connected with the machine body of the vacuum coating machine.

In one embodiment, the device further comprises a driving component, and the driving component is used for driving the movable piece to move relative to the mounting seat.

An ion source module comprises the arc striking device.

A vacuum coating machine comprises the ion source module.

The arc striking device can be connected with the body of the vacuum coating machine through the mounting seat. When the arc striking needle works, the arc striking needle is driven by the movable rod to be close to the target material so as to be in contact with the target material to discharge. Through setting up the subassembly that resets for the arc starting needle resets after contacting the target, thereby the arc starting needle can not continue to move, avoids because the inertial motion of arc starting needle, and leads to the risk that the arc starting needle excessively strikes the target and cause burns out. The bellows is sleeved on the movable rod, and the bellows can ensure that the movable rod is separated from the vacuum environment where the arc striking needle is located in the process of moving relative to the mounting seat, so that the movable rod cannot normally move due to the vacuum environment. The corrugated pipe also has a certain dustproof function. In addition, the bellows can also reduce the inertial motion of the arc ignition needle to a certain extent through the expansion and contraction of the bellows, and the risk of burning of the arc ignition needle caused by the fact that the arc ignition needle excessively impacts the target material is reduced.

Drawings

Fig. 1 is a schematic structural diagram of an arc striking device according to an embodiment of the present invention.

Reference numerals:

100. a mounting seat; 110. mounting grooves; 111. a first groove section; 112. a second groove section; 113. a third groove section; 120. a first seat body; 121. an annular connecting portion; 130. a second seat body; 131. connecting holes; 200. a movable rod; 210. a bellows; 220. a first connection section; 221. a guide groove; 230. a second connection section; 231. a through hole; 300. an arc striking needle; 400. a reset assembly; 410. an elastic member; 420. a guide member; 500. a drive assembly; 600. a mounting member; 700. a target material.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

An embodiment of the present application provides an ion source module, which includes a main body and an arc striking device. The body may mount a target 700.

Referring to fig. 1, an embodiment of the present invention provides an arc striking device, which includes a mounting base 100, a movable rod 200, an arc striking pin 300, and a reset assembly 400.

The mounting base 100 may be connected to a main body of the ion source module, so as to facilitate the arc striking device to be mounted on the ion source module. The reset assembly 400 is disposed between the mounting seat 100 and the movable bar 200, and the reset assembly 400 is used for resetting the movable bar 200. The movable rod 200 is movably disposed on the mounting base 100. The bellows 210 is sleeved on the outer wall of the movable rod 200, and the length of the bellows 210 is variable. One end of the bellows 210 extends into the mounting seat 100 and is connected to the mounting seat 100, and the other end of the bellows 210 is connected to the movable rod 200. The bellows 210 can separate the gas environment inside and outside the bellows 210 during the movement of the movable rod 200 to avoid the influence of the vacuum environment outside the bellows 210 on the parts of the arc striking device inside the bellows 210. That is, the bellows 210 is disposed to prevent a negative pressure from being generated due to a vacuum environment, so that the movable rod 200 is sucked by a vacuum and thus cannot move normally. The arc ignition needle 300 is connected to a side of the movable rod 200 away from the mounting base 100 to move with the movable rod 200 relative to the mounting base 100, so that the arc ignition needle 300 approaches or moves away from the target 700 to discharge when approaching the target 700, thereby starting the ion source.

In the arc ignition device, when the ion source is started, the movable rod 200 drives the arc ignition needle 300 to move towards the target 700. By arranging the reset assembly 400, the arc ignition needle 300 is reset after contacting the target 700, so that the arc ignition needle 300 cannot move towards the target 700, and the risk that the arc ignition needle 300 is burnt out due to the fact that the arc ignition needle 300 excessively impacts the target 700 due to inertial movement of the arc ignition needle 300 is avoided. In addition, when the arc ignition needle 300 is in contact with the target 700 for discharge, a large current is generated, and a large force is generated. Such that the arc ignition needle 300 tends to move away from the target 700. Compared with the prior art in which the movable bar 200 is temporarily prevented from moving in the opposite direction, the arc ignition needle 300 is easily damaged. This application is through the bellows 210 that the movable rod 200 set up for bellows 210 can slide the in-process at movable rod 200, with the inside part of bellows 210 and the outside vacuum environment separation of bellows 210, avoids vacuum environment to cause the influence. In addition, in the process that the movable rod 200 moves relative to the mounting base 100, the bellows 210 correspondingly stretches, and when the bellows 210 stretches, the movable rod 200 can be buffered to a certain extent, so that the arc guiding needle 300 has a certain buffering effect when colliding with the target 700, and the risk of burning out the arc guiding needle 300 is reduced.

In some embodiments, mount 100 is provided with drive assembly 500. Wherein the driving assembly 500 is disposed at the direction of the mounting seat 100 away from the arc ignition needle 300. The driving assembly 500 may be an electromagnetic driving device with a fast response speed, which can reduce the contact time between the arc striking needle 300 and the target 700 during arc striking. In some other embodiments, the driving assembly 500 may also be a pneumatic driving device. The bellows 210 may be configured to avoid the influence of a vacuum environment on the drive assembly 500.

In some embodiments, the arc ignition device is further provided with a mounting 600. The mounting member 600 may secure the mount 100 to the body of the ion source module. In some embodiments, the middle portion of the mounting member 600 may be connected to the mounting base 100, and the edge portion of the mounting member 600 may be connected to the main body of the ion source module. In some embodiments, the middle portion of the mounting member 600 is snap-fit, threaded, or bolted to the mounting base 100. The edge of the mounting member 600 is bolted to the main body of the ion source module, or connected in some other manner. In the illustrated embodiment, mounting flange is selected for mounting member 600. The middle part of the mounting flange is connected with the mounting base 100, and the connection position can adopt a sealing connection mode. The edge part of the mounting flange is connected with the main body of the ion source module.

In some embodiments, the mounting base 100 defines a mounting slot 110. The length direction of the mounting groove 110 coincides with the moving direction of the movable rod 200, that is, the length direction of the mounting groove 110 coincides with the moving direction of the arc ignition needle 300 toward the target 700.

As shown in fig. 1, the reset assembly 400 is located in the mounting groove 110. The reset unit 400 is connected to the movable rod 200 at a side away from the bottom of the mounting groove 110. The movable rod 200 is partially positioned in the mounting groove 110, and the rest of the movable rod 200 extends out of the mounting groove 110 and is connected with the arc ignition needle 300. The installation groove 110 is formed such that the reduction assembly 400 and a portion of the movable rod 200 are located in the installation groove 110, thereby reducing the influence of high temperature outside the installation seat 100 on the reduction assembly 400 and the movable rod 200. In addition, the aforementioned installation member 600 may be provided at an opening of the installation groove 110 to facilitate installation of the installation base 100.

In some embodiments, reduction assembly 400 includes a resilient member 410. One end of the elastic member 410 is connected to the mounting seat 100, and the other end of the elastic member 410 is connected to the movable bar 200. In the illustrated embodiment, the resilient member 410 may be a high temperature resistant spring. One end of the high temperature resistant spring is fixedly connected with the bottom of the mounting groove 110, and the other end of the high temperature resistant spring is connected with one end of the movable rod 200 extending into the mounting groove 110. The high-temperature resistant spring can effectively prevent the failure problem of the elastic element 410 at high temperature, and prolong the service life of the elastic element 410.

When the elastic member 410 is located at the home position, the movable lever 200 is located at the home position. That is, when the elastic member 410 is at the original length, the movable rod 200 drives the arc-striking pin 300 to be at the original position. When the movable rod 200 drives the arc ignition needle 300 to be located at the arc ignition position, the arc ignition needle 300 is abutted against the target 700, and at this time, the elastic member 410 is located at the compression position. The elastic member 410 drives the movable rod 200 to reset because it needs to recover its original length, so that the movable rod 200 drives the arc-striking needle 300 to move away from the target. Thereby avoiding sintering of the arc ignition needle 300 and the target 700, ensuring the work of the arc ignition needle 300 and prolonging the service life thereof.

In some embodiments, the reduction assembly 400 further comprises a guide 420. One end of the guide member 420 is connected to the mounting base 100, and the other end of the guide member 420 is movably connected to the movable bar 200. The guide 420 serves to guide the movable bar 200.

In some embodiments, the guide member 420 is located within the mounting groove 110, and the guide member 420 is a rod-shaped guide member 420. The lengthwise direction of the guide member 420 coincides with the lengthwise direction of the mounting groove 110. Correspondingly, the end of the movable lever 200 is provided with a guide groove 221, and the end of the guide 420 is located in the guide groove 221. When the movable lever 200 is slid with respect to the mount 100, the guide 420 may move with respect to the guide groove 221.

In the illustrated embodiment, the elastic member 410 is fitted over the guide member 420. That is, the end of the elastic member 410 is connected to the opening of the guide groove 221. When the movable rod 200 slides relative to the mounting seat 100, the guide member 420 may move relative to the guide groove 221, and the elastic member 410 may be correspondingly extended or compressed. In addition, when the elastic member 410 is sleeved outside the guide member 420, the guide member 420 can provide a supporting force for the elastic member 410, so that when the elastic member 410 deforms, the direction of the deformation is consistent with the moving direction of the movable rod 200, and the situation that the elastic member 410 is damaged due to the fact that the direction of the deformation of the elastic member 410 is inconsistent with the moving direction of the movable rod 200 is effectively reduced.

In the illustrated embodiment, the mounting groove 110 includes a first groove section 111, a second groove section 112 and a third groove section 113 arranged in sequence along a groove bottom to groove opening direction. The cross-sectional area of the first groove section 111 is smaller than the cross-sectional area of the second groove section 112, and the cross-sectional area of the second groove section 112 is smaller than the cross-sectional area of the third groove section 113.

Wherein the end of the guide 420 may communicate with the groove bottom of the first groove section 111. The resilient member 410 is located within the second channel section 112. The portion of the first groove section 111 of the movable rod not connected to the bellows 210 is also located within the second groove section 112. A portion of the bellows 210 is located within the third trough section 113.

Specifically, the end of the guide member 420 protrudes from the first slot segment 111 to the second slot segment 112. The end of the elastic element 410 is connected to the groove bottom of the second groove section 112. That is, the end of the elastic member 410 is connected to the bottom wall of the second groove section 112 near the first groove section 111. The movable bar 200 is partially located within the second slot segment 112. The portion of the movable rod 200 sleeved with the corrugated tube 210 is located in the third slot section 113. The opening of the third channel segment 113 can be connected with the aforementioned mounting member 600 in a sealing manner.

In the illustrated embodiment, in some embodiments, the mounting base 100 includes a first base 120 and a second base 130. The first base 120 has an annular connecting portion 121, and a through hole is formed in the annular connecting portion 121, and the through hole is the first groove section 111 and the second groove section 112. The second base 130 has a connecting hole 131, and the connecting hole 131 is coaxially disposed with the through hole. The annular connecting portion 121 abuts against or is fixedly connected to an inner wall of the connecting hole 131. The portion excluding the connection hole 131 connected to the annular connection portion 121 is the aforementioned third groove section 113.

The first base 120 may be connected to the main body of the ion source module. The annular connecting portion 121 is disposed to increase a connecting area between the first housing 120 and the second housing 130.

In some other embodiments, the guide member 420 may be disposed outside the elastic member 410, and the guide member 420 is disposed parallel to the elastic member 410, and the guide member 420 has a certain gap from the elastic member 410.

Through the arrangement of the reset assembly 400, when the ion source is started, the arc ignition needle 300 is reset after contacting the target 700, so that the arc ignition needle 300 cannot move towards the target 700 due to inertial motion, and the risk that the arc ignition needle 300 is burned out due to the fact that the arc ignition needle 300 excessively impacts the target 700 is avoided. The guide member 420 is arranged to limit and guide the elastic member 410 during the movement of the arc ignition needle 300, so that the deformation direction of the elastic member 410 is consistent with the movement direction of the arc ignition needle 300.

In some embodiments, the movable bar 200 may include a first connection segment 220 and a second connection segment 230 connected.

The first connecting section 220 and the second connecting section 230 are fixedly connected, and the connecting manner of the two connecting sections may be integrally formed, or may be a connecting manner such as welding. In some embodiments, the cross-section of the first connecting section 220 has a smaller area than the cross-section of the second connecting section 230. Here, it should be noted that the cross section taken along the direction perpendicular to the first connecting section 220 to the second connecting section 230 is the cross section of the first connecting section 220 and/or the second connecting section 230.

Wherein the first connecting segment 220 is connected with the reset assembly 400. That is, the first connection segment 220 is connected with the elastic member 410. The end of the first connection section 220 is provided with the aforementioned guide groove 221. The first connection section 220 may be tubular or rod-shaped.

The second connection section 230 may be tubular or rod-shaped. The end of the second connecting section 230 remote from the first connecting section 220 is connected with the end of the ignition needle 300. The connection mode of the second connection section 230 and the arc ignition needle 300 can be selected from the connection modes of bolt connection, clamping connection, welding connection and the like.

For example, in the illustrated embodiment, the second connection section 230 has a circular rod shape, and the second connection section 230 is provided with a through hole 231 in a radial direction thereof. The end of the ignition needle 300 is inserted into the through hole 231 and connected to the sidewall of the through hole 231 by a connector such as a bolt, so that the ignition needle 300 is connected to the second connection segment 230.

In some embodiments, bellows 210 may include a plurality of bellows segments. It should be noted here that the corrugated sections may be arranged continuously, or the corrugated sections may be arranged at intervals, for example, a straight line section is arranged between adjacent corrugated sections. In the illustrated embodiment, bellows 210 is optional. For example, welded bellows, plain bellows or flexible hydraulic bellows may be used. When the flexible hydraulic corrugated pipe is selected, the cost is lower than that of a welded corrugated pipe, the rigidity of the flexible hydraulic corrugated pipe is lower than that of a common corrugated pipe, the buffering effect on the arc striking needle 300 is better, and the sealing effect is better.

As shown in fig. 1, the bellows 210 is fitted around the outer wall of the movable rod 200. Specifically, the bellows 210 is sleeved outside the first connection section 220. One end of the corrugated tube 210 is connected to the outer wall of the second connection section 230, and preferably may be connected to the end surface to which the second connection section 230 and the first connection section 210 are connected. The connection mode can be welding or other sealing connection modes. The other end of the bellows 210 is connected to a side of the first connection section 220 away from the second connection section 230. The corrugated tube 210 may be connected to the bottom of the mounting groove 110, or connected to the end surface of the second groove section 112 of the mounting groove 110, or connected to the inner wall of the second groove section 112 of the mounting groove 110. The connection mode can be welding or other sealing connection modes. In addition, in some embodiments, the inner wall of the mounting groove 110 may also be provided with an annular protrusion, an end of the annular protrusion is connected with an end of the bellows 210, and an inner wall of the annular protrusion may be slidably connected with the movable rod 200.

It should be noted that the portion between the two connecting ends of the bellows 210 is not connected to the outer wall of the first connecting section 220, so that the bellows 220 can expand and contract correspondingly with the movement of the movable member 200.

Through the arrangement of the corrugated pipe 210, the first connecting section 220 in the corrugated pipe 210, the parts in the installation groove 110 and the parts communicated with the installation groove 110 can be separated from the vacuum environment outside the corrugated pipe 210, and the negative influence of the abnormal work caused by the vacuum environment can be effectively avoided.

In the illustrated embodiment, the bellows 210 may be partially located within the mounting groove 110 and partially located outside the mounting groove 110. At least a portion of the outer wall of the bellows 210 located inside the mounting groove 110 may be welded with the inner wall of the mounting groove 110 to improve airtightness. In addition, in some other embodiments, the bellows 210 may be completely located outside the mounting groove 110, that is, the end of the bellows 210 may be connected to the opening of the mounting groove 110.

Compared with the latter arrangement mode, the arrangement mode that the corrugated pipe 210 is partially positioned in the installation groove 110 and partially positioned outside the installation groove 110 can ensure that the corrugated pipe 210 is partially positioned in a space with lower temperature, thereby effectively reducing the quality problem caused by the integral overheating of the corrugated pipe 210.

Through the movable rod 200 formed by connecting the first connecting section 220 and the second connecting section 230 and the corrugated tube 210, the movable rod 200 sleeved with the corrugated tube 210 can be better connected with the reset assembly 400 and the arc ignition needle 300, and also can have a certain buffering effect, so that the arc ignition needle 300 is not easily burnt out in the discharging process.

In the arc starting apparatus, the mount 100 is connected to the main body of the ion source module by the mounting member 600. When the ion source is started, the movable rod 200 is driven by the driving assembly 500 to slide towards the target 700, so that the arc ignition needle 300 moves towards the target 700. Through the arrangement of the elastic piece 410, after the arc ignition needle 300 contacts the target 700, the elastic piece 410 is compressed to the minimum, so that the movable rod 200 cannot move towards the target 700 continuously and reset, and the risk that the arc ignition needle 300 is burnt out due to the fact that the arc ignition needle 300 excessively impacts the target 700 due to the inertial motion of the arc ignition needle 300 is avoided. In addition, the flexible hydraulic bellows can also have a certain buffering effect when the arc ignition needle 300 moves, so that the risk of burning out the arc ignition needle 300 is reduced.

An embodiment of the application provides a vacuum coating machine for coating a workpiece. The vacuum coating machine comprises the ion source module. Specifically, the vacuum coating machine comprises a vacuum coating machine main body, and the vacuum coating machine main body can be connected with the ion source module comprising the arc striking device through connecting modes such as bolts, welding and the like.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An arc ignition device, comprising:

a mounting seat;

2. The arc striking device according to claim 1, wherein the movable rod comprises a first connecting section and a second connecting section which are connected with each other, the corrugated tube is sleeved on the first connecting section, one end of the corrugated tube is connected with the outer wall of the second connecting section, the other end of the corrugated tube is connected with one side of the first connecting section, which is far away from the second connecting section, and the first connecting section is partially located in the mounting seat and connected with the resetting component;

3. The arc ignition device according to claim 2, wherein the first connection section has a cross-sectional area smaller than that of the second connection section, and one end of the bellows is connected to an end face to which the second connection section and the first connection section are connected.

4. The arc ignition device of claim 1 wherein at least a portion of the bellows is located within a mount.

5. The arc ignition device of claim 1, wherein the bellows is a flexible hydraulic bellows.

6. The arc ignition device of claim 1, wherein the reset assembly comprises an elastic member, one end of the elastic member is connected with the mounting seat, and the other end of the elastic member is connected with the movable rod;

7. The arc ignition device of claim 6, wherein the reset assembly further comprises a guide member, one end of the guide member is connected to the mounting base, and the other end of the guide member is movably connected to the movable rod.

8. The arc ignition device of claim 1, wherein the mounting seat is provided with a mounting groove, the reset assembly is positioned in the mounting groove, and the movable rod portion extends into the mounting groove and is connected with the reset assembly; and part of the outer wall of the corrugated pipe is connected with the inner wall of the mounting groove.

9. An ion source module comprising the arc ignition apparatus of any one of claims 1 to 8.

10. A vacuum coater comprising the ion source module of claim 9.