CN216208669U

CN216208669U - Silicon wafer dust detection counting equipment

Info

Publication number: CN216208669U
Application number: CN202122696187.1U
Authority: CN
Inventors: 刘里
Original assignee: Dongguan Naisi Precision Instrument Co ltd
Current assignee: Dongguan Naisi Precision Instrument Co ltd
Priority date: 2021-11-05
Filing date: 2021-11-05
Publication date: 2022-04-05
Anticipated expiration: 2031-11-05

Abstract

The utility model discloses a silicon wafer dust detection counting device which comprises a bottom detection box, wherein a second fixed connecting block penetrates through and is fixedly connected with the middle position of any one side of the upper surface of the bottom detection box, a limiting slide rail is fixedly connected with the middle position of the upper surface of the bottom detection box, the limiting slide rail and the second fixed connecting block are vertically arranged, a fixed adjusting device is arranged on the upper surface of the limiting slide rail, the fixed adjusting device comprises a detection base, a slide seat is slidably connected with the position of the limiting slide rail, the upper surface of the slide seat is rotatably connected with the detection base, a groove is arranged on the upper surface of the detection base, a silicon wafer to be detected is arranged in the groove, two symmetrically arranged taking holes are formed in the upper surface of the detection base on two sides of the silicon wafer to be detected, and the silicon wafer to be detected is conveniently taken and placed through the taking holes. The utility model can sample and detect the cleaned silicon wafer, observe the dust amount on the surface of the silicon wafer and conveniently know the cleaning condition of the silicon wafer.

Description

Silicon wafer dust detection counting equipment

Technical Field

The utility model relates to the technical field of silicon wafer detection, in particular to a counting device for detecting silicon wafer dust.

Background

In the prior art, silicon wafers need to be cleaned after production or after long-term use, and three methods are available for physical cleaning. And brushing or scrubbing to eliminate particle contamination and most of the film adhered to the sheet. High-pressure cleaning: the sheet surface is sprayed with a liquid, the pressure of the nozzle being up to several hundred atmospheres. The high-pressure cleaning is realized by the spraying effect, and the chips are not easy to scratch and damage. However, high pressure spraying can generate electrostatic effect, and is avoided by adjusting the distance and angle between the nozzle and the sheet or adding antistatic agent. Thirdly, ultrasonic cleaning: ultrasonic sound energy is transmitted into the solution to wash away the contamination on the wafer by cavitation. However, removal of particles smaller than 1 micron from patterned wafers is difficult. The frequency is improved to the ultrahigh frequency band, and the cleaning effect is better.

In the prior art, the cleaning condition of the silicon wafer cannot be effectively detected after the silicon wafer is cleaned, the dust amount on the surface of the silicon wafer is not clear, and the cleaning degree of the silicon wafer cannot be effectively judged.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the defects in the prior art, and provides a counting device for detecting silicon wafer dust.

In order to achieve the purpose, the utility model adopts the following technical scheme: a silicon wafer dust detection counting device comprises a bottom detection box, wherein a second fixed connecting block is fixedly connected to the middle position of any one side of the upper surface of the bottom detection box in a penetrating mode, a limiting slide rail is fixedly connected to the middle position of the upper surface of the bottom detection box in a penetrating mode, the limiting slide rail and the second fixed connecting block are vertically arranged, and a fixed adjusting device is arranged on the upper surface of the limiting slide rail;

the fixed adjusting device comprises a detection base, a sliding seat is connected to the position of the limiting sliding rail in a sliding mode, the upper surface of the sliding seat is connected with the detection base in a rotating mode, a groove is formed in the position of the upper surface of the detection base, a silicon wafer to be detected is arranged in the groove, two symmetrical taking holes are formed in the positions, located on two sides of the silicon wafer to be detected, of the upper surface of the detection base, and the silicon wafer to be detected can be conveniently taken and placed through the taking holes.

Preferably, the positions of two vertical side walls of the detection base are connected with an adjusting handle in a penetrating mode through threads, the outer wall of the adjusting handle is wrapped with a rubber pad, and the rubber pad has good flexibility and is convenient to protect hands.

Preferably, the upper surface of the bottom detection box is provided with a limiting sliding groove at any position of one side of the limiting sliding rail, the inner wall of the limiting sliding groove is connected with a damping connecting block in a sliding manner, and the damping connecting block is fixedly connected with the sliding seat at the position of the limiting sliding rail.

Preferably, fixedly connected with damping rod between damping connecting block and the second fixed connection piece, the damping rod conveniently realizes the accurate condition of shining by microscope lens of adjusting.

Preferably, the upper surface of the second fixed connecting block is fixedly connected with a supporting and fixing column, the middle part of any side of the supporting and fixing column is fixedly connected with a third fixed connecting block, and one side of the supporting and fixing column, which is close to the limiting slide rail, is close to the first fixed connecting block.

Preferably, the first fixed connecting block is fixedly connected with the microscope lens, one side of the supporting and fixing column, which is close to the microscope lens, is positioned at the bottom of the microscope lens and is fixedly connected with the illuminating lamp ring, and a light source can be effectively provided through the illuminating lamp ring.

Preferably, a protective outer cover is sleeved at the outer side position of the supporting and fixing column and fixedly connected with the third fixed connecting block, a display screen is fixedly connected to the outer wall of the protective outer cover close to the top position, and the display screen is connected with the microscope lens through a cable signal, so that the imaging of the microscope lens is displayed on the display screen.

The utility model has the following beneficial effects:

according to the utility model, the micro lens and the fixed adjusting device are arranged, the silicon wafer to be detected is placed to start the lighting lamp ring and the micro lens, so that the surface of the silicon wafer to be detected is wirelessly amplified, whether dust exists on the surface of the silicon wafer is observed, the dust amount is counted on the display screen, the position of the silicon wafer to be detected, which is probed by the micro lens, is adjusted through the two adjusting handles, the detection is comprehensive, and the cleaning condition of the silicon wafers in batches is favorably detected.

Drawings

FIG. 1 is a front view of a silicon wafer dust detecting and counting apparatus according to the present invention;

FIG. 2 is a schematic diagram of an internal structure of a silicon wafer dust detecting and counting apparatus according to the present invention;

FIG. 3 is a schematic structural diagram of a bottom detection box of the silicon wafer dust detection counting device according to the present invention.

Illustration of the drawings:

1. a bottom detection box; 2. a protective outer cover; 3. a display screen; 4. adjusting the handle; 5. a lighting lamp ring; 6. a micro-lens; 7. supporting and fixing columns; 8. a first fixed connecting block; 9. a second fixed connecting block; 10. a limiting chute; 11. a damping connecting block; 12. a limiting slide rail; 13. detecting a base; 14. a discharge hole; 15. a silicon wafer to be tested; 16. and a third fixed connecting block.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-3, one embodiment of the present invention is provided: the utility model provides a detect silicon chip dust counting equipment, includes

bottom detection case

1, and 1 upper surface of bottom detection case is located arbitrary one side position of spacing slide rail 12 and has seted up

spacing spout

10, and 10 inner wall position sliding connection of spacing spout have damping connecting block 11, fixedly connected with damping rod between damping connecting block 11 and the second fixed connection piece 9.

Damping connecting block 11 and the slide fixed connection of spacing slide rail 12 position, the arbitrary one side middle part position of 1 upper surface of bottom detection case runs through fixedly connected with second fixed connection block 9, and the fixed connection of second fixed connection block 9 upper surface position supports fixed column 7, and support fixed column 7 outside position cover is equipped with protection dustcoat 2, protection dustcoat 2 and the 16 fixed connection of third fixed connection block.

2 outer walls of protective housing are close to top fixedly connected with display screen 3, through cable signal connection between display screen 3 and the micro-lens 6, support 7 arbitrary one side middle part fixedly connected with third fixed connection block 16 of fixed column, support fixed column 7 and be close to the first fixed connection block 8 of top fixedly connected with of 12 one sides of spacing slide rail.

The position of the first fixed connecting block 8 is fixedly connected with a microscope lens 6, one side of the supporting and fixing column 7, which is close to the microscope lens 6, is positioned at the bottom and is fixedly connected with a lighting lamp ring 5, the middle part of the upper surface of the bottom detection box 1 is fixedly connected with a limiting slide rail 12, the limiting slide rail 12 is vertically arranged with the second fixed connecting block 9, and a fixed adjusting device is arranged at the upper surface position of the limiting slide rail 12;

fixing adjusting device is including detecting base 13, and it has adjusting handle 4 to detect two perpendicular lateral wall positions of base 13 and run through threaded connection, and adjusting handle 4 outer wall position parcel has the rubber pad, and 12 position sliding connection of spacing slide rail have the slide, and the slide upper surface rotates with detecting base 13 to be connected, detects base 13 upper surface position and is provided with the recess, and is provided with silicon chip 15 that awaits measuring in the recess, detects base 13 upper surface position and sets up the hole 14 of getting that two symmetries set up in silicon chip 15 both sides position that awaits measuring.

The working principle is as follows: after the silicon wafer 15 to be detected is placed, the detection position of the silicon wafer 15 to be detected, which is detected by the microscope lens 6, is adjusted by the two adjusting handles 4, the illuminating lamp ring 5 is started again to provide a light source for the position of the silicon wafer 15 to be detected, the limiting lens 6 enlarges and displays the surface of the silicon wafer 15 to be detected on the display screen 3, and the number of dust is counted by the display screen 3.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.

Claims

1. The utility model provides a detect silicon chip dust counting equipment, includes bottom detection case (1), its characterized in that: a second fixed connecting block (9) penetrates through and is fixedly connected with the middle position of any one side of the upper surface of the bottom detection box (1), a limiting slide rail (12) is fixedly connected with the middle position of the upper surface of the bottom detection box (1), the limiting slide rail (12) and the second fixed connecting block (9) are vertically arranged, and a fixed adjusting device is arranged at the upper surface position of the limiting slide rail (12);

the fixing and adjusting device comprises a detection base (13), a sliding seat is connected to the position of a limiting sliding rail (12) in a sliding mode, the upper surface of the sliding seat is connected with the detection base (13) in a rotating mode, a groove is formed in the position of the upper surface of the detection base (13), a silicon wafer (15) to be detected is arranged in the groove, and two symmetrically arranged taking holes (14) are formed in the positions, located on the two sides of the silicon wafer (15) to be detected, of the upper surface of the detection base (13).

2. The silicon wafer dust detecting and counting device as claimed in claim 1, wherein: two perpendicular lateral wall positions of detection base (13) run through threaded connection and have regulation handle (4), regulation handle (4) outer wall position parcel has the rubber pad.

3. The silicon wafer dust detecting and counting device as claimed in claim 1, wherein: the bottom detection case (1) upper surface is located arbitrary one side position of spacing slide rail (12) and has seted up spacing spout (10), spacing spout (10) inner wall position sliding connection has damping connecting block (11), the slide fixed connection of damping connecting block (11) and spacing slide rail (12) position.

4. The silicon wafer dust detecting and counting device as claimed in claim 3, wherein: and a damping rod is fixedly connected between the damping connecting block (11) and the second fixed connecting block (9).

5. The silicon wafer dust detecting and counting device as claimed in claim 1, wherein: the upper surface of the second fixed connecting block (9) is fixedly connected with a supporting and fixing column (7), the middle of any side of the supporting and fixing column (7) is fixedly connected with a third fixed connecting block (16), and one side of the supporting and fixing column (7) close to the limiting slide rail (12) is close to the first fixed connecting block (8) of the top position fixedly connected with.

6. The silicon wafer dust detecting and counting device as claimed in claim 5, wherein: the position of the first fixed connecting block (8) is fixedly connected with a microscope lens (6), and one side, close to the microscope lens (6), of the supporting and fixing column (7) is located at the bottom of the microscope lens and is fixedly connected with a lighting lamp ring (5).

7. The silicon wafer dust detecting and counting device as claimed in claim 5, wherein: the supporting and fixing column (7) is sleeved with a protective outer cover (2) at the outer side position, the protective outer cover (2) is fixedly connected with a third fixed connecting block (16), the outer wall of the protective outer cover (2) is close to the top position fixedly connected with a display screen (3), and the display screen (3) is connected with the micro-lens (6) through a cable signal.