CN216174695U - Recovery device and cleaning system - Google Patents

Abstract

The utility model relates to the technical field of semiconductor cleaning equipment, and provides a recovery device and a cleaning system, wherein the recovery device comprises: the annular recovery assemblies are sleeved with each other and comprise a shell, and the shell comprises a working cavity; the first flow guide assembly is arranged in the working cavity and comprises a first channel; the second flow guide assembly is arranged in the working cavity and comprises a second channel; wherein, first passageway and second passageway are the annular channel, and first passageway and second passageway mutual independence set up, and first passageway is used for retrieving the waste gas in the working chamber, and the second passageway is used for retrieving the waste liquid in the working chamber. Through setting up a plurality of annular recovery subassemblies of establishing each other cover, set up multiple gas-liquid recovery device promptly, can use different gas-liquid recovery passageways according to the process of difference, realized the waste liquid of different processes, the separately collection and the emission of waste gas, realize the gas-liquid recovery of different compositions, improved the utilization ratio of retrieving the gas-liquid.

Description

Recovery device and cleaning system

Technical Field

The utility model relates to the technical field of semiconductor cleaning equipment, in particular to a recovery device and a cleaning system.

Background

Among the correlation technique, current single wafer cleaning equipment focuses on the collection to the waste liquid, and does not regard the collection of waste gas, mainly embodies only waste liquid collection device at cleaning equipment, does not have waste gas collection device, even cleaning equipment sets up waste gas collection device, but same waste gas collection device is adopted to multichannel process, leads to different gas-liquid mixture to mix together in gas recovery device, causes the injury of personnel or board, and still can increase the degree of difficulty of handling recovery gas.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art or the related art.

To this end, the utility model provides, in a first aspect, a recycling apparatus.

A second aspect of the utility model provides a cleaning system.

In view of the above, the present invention provides a recycling apparatus, comprising: annular recovery subassembly is established to a plurality of mutual covers, and the annular recovery subassembly includes: a housing including a working chamber; the first flow guide assembly is arranged in the working cavity and comprises a first channel; the second flow guide assembly is arranged in the working cavity and comprises a second channel; wherein, first passageway and second passageway are the annular channel, and first passageway and second passageway mutual independence set up, and first passageway is used for retrieving the waste gas in the working chamber, and the second passageway is used for retrieving the waste liquid in the working chamber.

The utility model provides a recovery device which comprises a plurality of annular recovery assemblies which are sleeved with each other, wherein each annular recovery assembly comprises a shell, a first flow guide assembly and a second flow guide assembly. Wherein, the casing includes the working chamber to the realization sets up first water conservancy diversion subassembly and second water conservancy diversion subassembly in the working chamber. Further, first water conservancy diversion subassembly sets up in the work intracavity to form first passageway, because recovery unit includes a plurality of annular recovery subassemblies of establishing each other cover, like this, the work intracavity of casing is provided with many first passageways. Meanwhile, the second flow guide assembly is arranged in the working cavity to form a second channel, and the recovery device comprises a plurality of annular recovery assemblies which are mutually sleeved, so that a plurality of second channels are arranged in the working cavity of the shell. Wherein, first passageway and second passageway are annular channel, and annular channel can play the parcel effect, effectively prevents that gas or liquid from splashing or flowing out, is favorable to the derivation of waste gas or waste liquid. And mutual independence sets up between first passageway and the second passageway to realize first passageway and second passageway mutual noninterference, independent operation realizes independently retrieving simultaneously of waste liquid and waste gas. Like this, recovery unit retrieves waste gas through first passageway at the in-process of retrieving waste gas and waste liquid, retrieves the waste liquid through the second passageway, because first passageway and second passageway independent setting, waste gas and waste liquid can be retrieved alone like this, avoid gas-liquid mixture to mix in recovery unit together, unable recycle. And, because recovery unit includes a plurality of annular recovery subassemblies of establishing each other cover, including a plurality of first passageways and a plurality of second passageways in the annular recovery subassembly, consequently, set up many first passageways and many second passageways through the working chamber at the casing, set up multiple gas-liquid recovery device promptly, can use different gas-liquid recovery passageways according to the process of difference, the waste liquid of different processes has been realized, the part of waste gas is collected and is discharged, realize the gas-liquid recovery of different compositions, the utilization ratio of retrieving the gas-liquid has been improved, the manufacturing cost of processing has been reduced.

According to the recovery device of the above technical solution of the present invention, the following additional technical features may be further provided:

in the above technical solution, further, the first flow guiding assembly further includes: the first guide plate is arranged on the inner wall of the shell, and a first channel is defined by the first guide plate and the inner wall of the shell.

In this technical scheme, first water conservancy diversion subassembly still includes first baffle. Wherein, first guide plate sets up on the inner wall of casing, and first guide plate is connected with shells inner wall promptly to enclose out first passageway between the inner wall of first guide plate and casing, in order to realize recovery unit in the course of the work, collect and discharge the waste gas that produces in the process through first passageway. The waste gas can be completely recovered in time, the influence of the waste gas on the subsequent process is avoided, and the safety and the reliability of using the recovery device are improved.

In any of the above technical solutions, further, the second flow guiding assembly further includes: and the second guide plate is arranged in the shell and positioned below the first guide plate, and a second channel is enclosed between the second guide plate and the first guide plate.

In this technical scheme, second water conservancy diversion subassembly still includes the second guide plate. The second guide plate is arranged in the shell and is positioned below the first guide plate, and therefore a second channel is defined among the second guide plate, the shell and the first guide plate. In order to realize recovery unit in the course of the work, collect and discharge the waste liquid that produces in the process through the second passageway. The waste liquid can be completely recovered in time, the influence of the waste liquid on the subsequent process is avoided, and the safety and the reliability of using the recovery device are improved.

In any of the above technical solutions, further, the second guide plate is provided with a plurality of grooves, the first guide plate and the second guide plate are fixedly connected, and the first guide plate and the grooves form a second channel.

In this technical scheme, through having seted up a plurality of recesses on the second guide plate, rethread first guide plate and second guide plate fixed connection to realize that first guide plate and recess form the second passageway. Like this, utilize first guide plate and recess to constitute the second passageway and retrieve the waste liquid, and then realize separately collecting the waste liquid of multiple process, improve the value of retrieving the waste liquid alone.

In any one of the above technical solutions, further, the second diversion assembly further includes a liquid bearing table, and the liquid bearing table is fixedly connected with the second diversion plate and used for guiding the borne waste liquid to the second channel.

In this technical scheme, set up second water conservancy diversion subassembly and still include hold the liquid platform, wherein, hold liquid platform and second guide plate fixed connection to the realization is through holding the waste liquid water conservancy diversion that the liquid platform bore to the second passageway. Like this, can effectually with the waste liquid water conservancy diversion that the cleaning process produced to the second passageway, realize separately collecting the waste liquid of multiple process, improve the value of retrieving the waste liquid alone.

In any one of the above technical solutions, further, the number of the second guide plates is plural, and a plurality of second channels are defined between two adjacent second guide plates.

In this technical scheme, be a plurality ofly through the quantity that sets up the second guide plate to it encloses a plurality of second passageways to realize between two adjacent second guide plates. Therefore, the multiple second channels are arranged in the working cavity of the shell, waste liquid of multiple processes is separately collected through the multiple second channels, and the utilization value of separately recycling the waste liquid is improved.

In any of the above technical solutions, further, the number of the first baffles is plural; the first guide plates and the second guide plates are alternately arranged in sequence to form a plurality of first channels and a plurality of second channels.

In this technical scheme, be a plurality ofly through the quantity that sets up first guide plate and second guide plate, and a plurality of first guide plates and a plurality of second guide plate alternate interval setting in proper order to contain a plurality of first passageways and a plurality of second passageway in realizing the recovery unit. Wherein, first passageway and second passageway are annular channel, and annular channel can play the parcel effect, effectively prevents that gas or liquid from splashing or flowing out, is favorable to the derivation of waste gas or waste liquid. And the first channel and the second channel are mutually independent, so that multiple first channels and multiple second channels are arranged in the working cavity of the annular structure of the shell, the waste liquid and the waste gas with different components in multiple processes are respectively recovered, and the utilization value of independently recovering the waste liquid and the waste gas is improved.

Specifically, the quantity that sets up first guide plate and second guide plate is a plurality of, with form a plurality of first passageways and a plurality of second passageway in the working cavity of casing, wherein, first passageway and second passageway are the annular channel, and mutual independence sets up between first passageway and the second passageway, recovery unit sets up to the separate collection of multiple waste liquid like this, the recovery unit that multiple waste gas separately collected, through such setting, can retrieve respectively of the waste liquid of the different composition of multichannel process and waste gas, the prior art has been solved, because the waste liquid that can't accurate recovery technology process produced, waste gas, lead to different gas-liquid to mix together, cause the injury of personnel or board, and increase the problem of the degree of difficulty of handling the recovered gas. The utilization rate of retrieving waste gas and waste liquid is improved to and recovery unit safety in utilization and reliability have been promoted.

In any of the above technical solutions, further, the first flow guiding assembly further includes: the air outlet joint is arranged on the outer wall of the shell and is communicated with the air outlet end of the first channel; the fan assembly is connected with the air outlet joint and is used for absorbing gas; wherein, the joint of giving vent to anger sets up with first passageway correspondence.

In this technical scheme, first water conservancy diversion subassembly still includes the joint of giving vent to anger and fan subassembly. Wherein, it sets up on the outer wall of casing to give vent to anger to connect, gives vent to anger to connect and communicate with the end of giving vent to anger of first passageway to the realization is through the end of giving vent to anger of first passageway with waste gas from first passageway circulation to give vent to anger to connect in, and then connect waste gas emission and retrieve through giving vent to anger. Further, set up the fan subassembly and be connected with the joint of giving vent to anger to utilize the fan subassembly to provide power for extracting waste gas in the first passageway, and then realize giving vent to anger the end with waste gas from the first passageway, extract to the joint of giving vent to anger, connect through giving vent to anger with waste gas discharge or collect, improve recovery unit gas recovery's effect, and improved waste gas recycle rate. In addition, correspond the setting through giving vent to anger joint and first passageway, a first passageway corresponds and sets up one and gives vent to anger the joint promptly, like this, a plurality of first passageways correspond and are provided with a plurality of joints of giving vent to anger to realize giving vent to anger and connect a first passageway of independent corresponding control, solve among the prior art unable accurate recovery multichannel process produced waste gas, the waste gas that leads to different processes mixes together, increase the problem of handling the degree of difficulty of retrieving gas, effectively improve recovery unit safety in utilization and reliability.

In any of the above technical solutions, further, the first flow guiding assembly further includes: and the exhaust pipeline is connected with the air outlet joint.

In this technical scheme, first water conservancy diversion subassembly still includes the exhaust duct. Wherein, exhaust duct connects with giving vent to anger to the realization is discharged the gas in the joint of giving vent to anger through exhaust duct, further recovery processing utilizes. Specifically, in the recovery unit course of operation, inhale the first passageway through the waste gas that the fan subassembly will wash the process and produce, and then the induction port through first passageway gets into the joint of giving vent to anger, is connected with exhaust duct through the joint of giving vent to anger, further discharges away waste gas through exhaust duct. The waste gas can be completely recycled in time, and the use safety and reliability of the recycling device are further improved.

In any of the above technical solutions, further, the method further includes: the first collecting piece is communicated with the air outlet end of the first channel and the liquid outlet end of the second channel.

In this solution, the recycling device further comprises a first collecting member. Wherein, first collection piece and the end of giving vent to anger of first passageway and the play liquid end homogeneous phase intercommunication of second passageway to the waste gas of collecting in the first passageway, and the waste liquid of collecting in the second passageway carry out unified recovery and handle. The air outlet end of the first channel and the liquid outlet end of the second channel are connected with the first collecting piece, so that the number of the collecting pieces is effectively reduced, the occupied space of the collecting pieces is reduced, the miniaturization design of the recovery device is facilitated, and the production cost is reduced.

In any of the above technical solutions, further, the method further includes: the second collecting piece is communicated with the air outlet end of the first channel; and the third collecting part is communicated with the liquid outlet end of the second channel.

In this solution, the recovery device further comprises a second collecting member and a third collecting member. Wherein, the second is collected the piece and is linked together with the end of giving vent to anger of first passageway to the realization is collected the processing to waste gas in the first passageway. In addition, the third collecting piece is communicated with the liquid outlet end of the second channel so as to collect and treat the waste liquid in the second channel. Through separately collecting waste gas and waste liquid, the recovery processing degree of difficulty that has realized collecting waste gas and waste liquid alone is little to the higher effect of recycle value has been solved among the prior art waste liquid, the waste gas that can't accurate recovery process produce, leads to different gas-liquids to mix together, causes the injury of personnel or board, and increases the problem of handling the degree of difficulty of retrieving gas. The potential safety hazard caused by mixing gas and liquid is avoided. Effectively improve recovery unit safety in utilization and reliability.

In any of the above technical solutions, further, the method further includes: the first lifting assembly is connected with the shell and used for driving the shell to lift.

In this technical scheme, recovery unit still includes first lift assembly. Wherein, first lifting unit is connected with the casing, drives the casing through first lifting unit to realize recovery unit and rise or descend, and then through recovery unit's motion, realize collecting separately and discharging the waste liquid of different processes and waste gas.

According to a second aspect of the present invention, there is also provided a washing system comprising: a recycling apparatus according to any one of the preceding claims.

The cleaning system provided by the utility model comprises the recovery device of any technical scheme, so that the cleaning system has all the beneficial effects of the recovery device, and is not repeated herein.

In the above technical solution, further, the method further includes: the bearing table is arranged in the working cavity and used for placing an object to be cleaned; and the second lifting assembly is connected with the bearing platform and used for driving the bearing platform to lift.

In the technical scheme, the cleaning system further comprises a bearing table and a second lifting assembly. Wherein, the plummer setting is in the work intracavity for place and treat the washing thing, to realize will treating that the washing thing is placed and wash on the plummer, improve cleaning quality. Simultaneously, set up the second lifting unit and be connected with the plummer for the drive plummer goes up and down, in order to realize driving the plummer through second lifting unit and move for recovery unit, and then realize that different cleaning process correspond different first passageway and second passageway, realized that the waste liquid of different processes, the separately collection of waste gas and emission.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural diagram of a recycling apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic view of a part of the recycling apparatus of the embodiment shown in FIG. 1;

FIG. 3 is a schematic view of a part of the recycling apparatus of the embodiment shown in FIG. 1;

FIG. 4 is a schematic diagram of a D-D cross-sectional structure of the recycling apparatus of the embodiment shown in FIG. 1;

FIG. 5 is a schematic view of a cross-sectional view E-E of the recycling apparatus of the embodiment shown in FIG. 1;

FIG. 6 is a schematic structural diagram of a recycling apparatus according to another embodiment of the present invention;

FIG. 7 is a schematic structural view of a recycling apparatus according to yet another embodiment of the present invention;

FIG. 8 is a schematic structural view of a recycling apparatus according to yet another embodiment of the present invention;

FIG. 9 is a schematic structural view of a recycling apparatus according to yet another embodiment of the present invention;

FIG. 10 is a schematic diagram of a first position of a single wafer of the recycling apparatus of the embodiment shown in FIG. 9;

FIG. 11 is a schematic diagram of a second position of the single wafer of the recycling apparatus of the embodiment shown in FIG. 9;

FIG. 12 is a schematic diagram of a third position of the single wafer of the recycling apparatus of the embodiment shown in FIG. 9;

wherein, the correspondence between the reference numbers and the component names in fig. 1 to 12 is:

100, a recovery device;

110 of the housing of the portable electronic device,

120 a first flow guide assembly, 1202 a first channel, 1204 a first flow guide plate, 1206 an outlet fitting, 1208 an exhaust conduit;

130 a second flow guide assembly, 1302 a second channel, 1304 a second flow guide plate, 1306 a liquid bearing table;

140 of the first collecting member,

150 of the second collection member,

160 a third collecting member;

170 single crystal circle;

Detailed Description

In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the utility model will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described herein, and thus the scope of the present invention is not limited by the specific embodiments disclosed below.

A reclamation apparatus 100 and a washing system provided according to some embodiments of the present invention will be described with reference to fig. 1 to 12.

As shown in fig. 9, the recycling apparatus 100 according to an embodiment of the present invention includes a plurality of annular recycling assemblies nested in each other, wherein the annular recycling assemblies include a housing 110, a first flow guiding assembly 120, and a second flow guiding assembly 130. Wherein the housing 110 includes a working chamber to enable the first flow directing assembly 120 and the second flow directing assembly 130 to be disposed within the working chamber. Further, the first diversion assembly 120 is disposed in the working chamber to form the first passage 1202, and since the recycling device 100 includes a plurality of annular recycling assemblies sleeved with each other, the working chamber of the housing 110 is disposed with a plurality of first passages 1202. Meanwhile, the second diversion assembly 130 is disposed in the working chamber to form a second channel 1302, and since the recycling apparatus 100 includes a plurality of annular recycling assemblies sleeved with each other, a plurality of second channels 1302 are disposed in the working chamber of the housing 110. The first channel 1202 and the second channel 1302 are both annular channels, and the annular channels can play a role in wrapping, so that gas or liquid is effectively prevented from splashing or flowing out, and the waste gas or waste liquid is guided out. And the first channel 1202 and the second channel 1302 are arranged independently from each other, so that the first channel 1202 and the second channel 1302 are not interfered with each other and operate independently, and the waste liquid and the waste gas are recovered independently at the same time. Like this, recovery unit 100 is retrieving waste gas and waste liquid's in-process, retrieves waste gas through first passageway 1202, retrieves the waste liquid through second passageway 1302, because first passageway 1202 and second passageway 1302 independent setting, waste gas and waste liquid can be retrieved alone like this, avoid gas-liquid mixture to mix together in recovery unit 100, unable recycle. And, because recovery unit 100 includes a plurality of annular recovery subassemblies of establishing each other, including a plurality of first passageways 1202 and a plurality of second passageway 1302 in the annular recovery subassembly, consequently, set up many first passageways 1202 and many second passageways 1302 through the working chamber at casing 110, set up multiple gas-liquid recovery unit 100 promptly, can use different gas-liquid recovery passageways according to the process of difference, the waste liquid of different processes has been realized, the separation of waste gas is collected and is discharged, realize the gas-liquid recovery of different components, the utilization ratio of retrieving gas-liquid has been improved, the manufacturing cost of processing has been reduced.

Specifically, among the prior art, when single wafer washs, need the waste liquid that the accurate recovery process produced, still need avoid waste gas to the influence of later process, present most cleaning equipment only has waste liquid collection device, does not have waste gas collection device, even be provided with waste gas collection device, also same waste gas collection device is adopted to multichannel process, lead to different gas-liquid mixture to mix in gas recovery device together, cause the injury of personnel or board, and still can increase the degree of difficulty of handling recovery gas. In the present application, as shown in fig. 1 to 3, the recycling device 100 includes a plurality of mutually sleeved annular recycling assemblies, wherein the annular recycling assemblies include a casing 110, the casing 110 is provided with a working chamber, specifically, the casing 110 is an annular casing 110, the working chamber is an annular cavity, the annular casing 110 mainly plays a role of wrapping, protects internal components, and prevents liquid and gas from splashing or flowing out. Further, the first flow guide assembly 120 and the second flow guide assembly 130 are arranged in the working cavity of the housing 110, wherein the first flow guide assembly 120 comprises the first channel 1202, the second flow guide assembly 130 comprises the second channel 1302, and the first channel 1202 and the second channel 1302 are both annular channels which can play a role in wrapping, so that gas or liquid is effectively prevented from splashing or flowing out, and the waste gas or waste liquid is led out. Since the recycling device 100 includes a plurality of annular recycling assemblies sleeved with each other, each annular recycling assembly includes a plurality of first channels 1202 and a plurality of second channels 1302, the plurality of first channels 1202 are used for recycling waste gas generated in a plurality of processes, that is, the first channels 1202 are used for absorbing waste gas generated in a cleaning process of the plurality of processes, and the plurality of second channels 1302 are used for recycling waste liquid generated in the cleaning process of the plurality of processes, that is, the second channels 1302 are used for absorbing waste liquid generated in the cleaning process. The plurality of first passages 1202 and the plurality of second passages 1302 are independent of each other, that is, the recovery apparatus 100 is provided as the multiple gas-liquid recovery apparatus 100. Like this, in recovery unit 100 operation in-process, can adopt different passageways to collect and discharge to the waste liquid, the waste gas that different processes produced, utilize multiple gas-liquid recovery unit 100, realized the waste liquid of the different compositions of multichannel process, the waste gas is retrieved respectively. The problem of among the prior art, because waste liquid, the waste gas that the unable accurate recovery technology process produced lead to different gas-liquids to mix together, cause personnel or the injury of board to and increase the degree of difficulty of handling the recovery gas is solved. The utilization rate of the recovered waste gas and waste liquid is improved, and the use safety and reliability of the recovery device 100 are improved.

In concrete application, can use different recovery unit 100 of material preparation difference according to the difference of waste gas waste liquid kind, include the recovery unit 100 of several kinds of different material preparation in the same set of multiple gas-liquid recovery unit 100 promptly, like this, can effectively avoid alone the material can not compatible different waste gas, waste liquid of retrieving to can effectively reduce the cost of manufacture.

In the above embodiment, further: as shown in fig. 2-4, the first flow directing assembly 120 further includes a first flow deflector 1204. The first baffle 1204 is disposed on an inner wall of the casing 110, that is, the first baffle 1204 is connected to the inner wall of the casing 110, and a first passage 1202 is defined between the first baffle 1204 and the inner wall of the casing 110, so that the exhaust gas generated in the process is collected and discharged through the first passage 1202 in the operation process of the recovery device 100. The waste gas can be completely recovered in time, the influence of the waste gas on the subsequent process is avoided, and the safety and the reliability of using the recovery device 100 are improved.

Specifically, in the cleaning process, the cleaning process can produce gas waste gas, if the waste gas that the process produced is not collected in time and is discharged, when next process washs, mix with the waste gas that next process produced, the waste gas after the mixture can take place chemical reaction, releases harmful gas, perhaps gives off heat, and then influences the whole life-span of equipment. In addition, the exhaust gas cannot be recycled after mixing, resulting in high production cost. As shown in fig. 2 and 3, a first baffle 1204 is disposed on the inner wall of the casing 110, and the first baffle 1204 and the inner wall of the casing 110 enclose a first channel 1202, so that the recovery device 100 collects and discharges the exhaust gas generated in the process through the first channel 1202. Specifically, the waste gas recovery route is as shown by the arrow in fig. 5, so that the waste gas can be completely recovered in time, the influence of the waste gas on the subsequent process is avoided, and the waste gas recovery efficiency is improved.

In any of the above embodiments, further, as shown in fig. 2-4, the second baffle assembly 130 further includes a second baffle 1304. Wherein the second baffle 1304 is disposed within the housing 110 and below the first baffle 1204 such that a second channel 1302 is defined between the second baffle 1304, the housing 110, and the first baffle 1204. So that the recovery device 100 can collect and discharge the waste liquid generated in the process through the second channel 1302 during the operation. The waste liquid can be completely recovered in time, the influence of the waste liquid on the subsequent process is avoided, and the safety and the reliability of using the recovery device 100 are improved.

Specifically, in the cleaning process, cleaning solution can directly get rid of corresponding second passageway 1302 under the effect of centrifugal force in, flow to the waste liquid collection device the inside along the exhaust pipe of second passageway 1302 to the realization is collected and is discharged the waste liquid of cleaning process, improves waste liquid recycle and rate. As shown in fig. 2 and fig. 3, the second baffle 1304 is disposed on the inner wall of the casing 110, and the second baffle 1304, the inner wall of the casing 110 and the first baffle 1204 enclose the second channel 1302, so that the recovery device 100 collects and discharges the waste liquid in the process through the second channel 1302, prevents the waste liquid from splashing through the second channel 1302, and accurately recovers the waste liquid generated in the process. Specifically, the waste liquid recycling route is shown as an arrow in fig. 4, so that the waste liquid can be completely recycled in time, the influence of the waste liquid on the subsequent process is avoided, and the waste liquid recycling efficiency is improved.

In any of the above embodiments, further, the second baffle 1304 is provided with a plurality of grooves, and the first baffle 1204 and the second baffle 1304 are fixedly connected to each other, so that the first baffle 1204 and the grooves form the second channel 1302. In this way, the first guide plate 1204 and the groove form the second channel 1302 to recycle the waste liquid, so that the waste liquid in multiple processes is separately collected, and the utilization value of the separately recycled waste liquid is improved.

Specifically, through having seted up a plurality of recesses on second guide plate 1304, rethread first guide plate 1204 and second guide plate 1304 fixed connection, be equivalent to the thin annular shell of one deck of recess outside cladding at second guide plate 1304 promptly, and then form a fluid passage, and then realize retrieving the waste liquid that produces in the cleaning process through fluid passage, effectively prevent that the waste liquid from splashing, can accurately retrieve the waste liquid that the technology process produced, thereby the realization is separately collected the waste liquid of multiple process.

In any of the above embodiments, as shown in fig. 8 to 12, the second diversion assembly 130 further includes a liquid receiving platform (1306), wherein the liquid receiving platform (1306) is fixedly connected to the second diversion plate 1304, so as to divert waste liquid carried by the liquid receiving platform (1306) to the second channel 1302 through the liquid receiving platform (1306). Like this, can effectually be with the waste liquid water conservancy diversion that the cleaning process produced to second channel 1302, realize separately collecting the waste liquid of multiple process, improve the value of independently retrieving the waste liquid.

Specifically, because hold liquid platform (1306) and second guide plate 1304 fixed connection, in the cleaning process, cleaning solution under the effect of centrifugal force after wasing, directly get rid of the recess that sets up on the lateral wall at the rear portion of holding liquid platform (1306), through holding liquid platform (1306) waste liquid water conservancy diversion that will bear promptly to second passageway 1302 in, make the waste liquid can in time be retrieved completely, avoid the waste liquid to produce the influence to the next process, improve the security and the reliability of using recovery unit 100.

In any of the above embodiments, further, as shown in fig. 2 to 4, the first flow guiding assembly 120 further includes an air outlet joint 1206 and a fan assembly. Wherein, the joint 1206 of giving vent to anger sets up on the outer wall of casing 110, and the end intercommunication is held with the giving vent to anger of first passageway 1202 to the end of giving vent to anger through first passageway 1202 with waste gas from first passageway 1202 circulation to in the joint 1206 of giving vent to anger, and then through the joint 1206 of giving vent to anger with waste gas emission and recovery. Further, set up the fan subassembly and be connected with the joint 1206 of giving vent to anger to utilize the fan subassembly to provide power for extracting waste gas in the first passageway 1202, and then realize giving vent to anger the end with waste gas from first passageway 1202, extract to the joint 1206 of giving vent to anger, connect 1206 through giving vent to anger with waste gas discharge or collect, improve the effect of recovery unit 100 gas recovery, and improved waste gas recycle rate. In addition, joint 1206 and first passageway 1202 correspond the setting through giving vent to anger, a first passageway 1202 corresponds and sets up one and give vent to anger and connect 1206 promptly, like this, a plurality of first passageways 1202 correspond and are provided with a plurality of joints 1206 of giving vent to anger, in order to realize giving vent to anger and connect 1206 and correspond a control first passageway 1202 alone, solve among the prior art can't accurately retrieve the waste gas that produces in the multichannel process, lead to the waste gas of different processes to mix together, increase the problem of handling the degree of difficulty of retrieving gas, effectively improve recovery unit 100 safety in utilization and reliability.

Specifically, as shown in fig. 2 and 3, the air inlet is provided at the air outlet end of the first channel 1202, and the size of the air inlet is set to be small, so that only air is introduced as much as possible, liquid is prevented from entering, and the difficulty of gas-liquid mixing treatment is increased. And then, the air outlet connector 1206 is externally connected with a fan assembly, so that in the working process of the recovery device 100, the fan assembly is opened, waste gas generated in the cleaning process enters the first channel 1202 through the suction force of the fan assembly, then is sucked into the air outlet connector 1206 through the air suction port, and is discharged or collected through the air outlet connector 1206, and the collection and the discharge of the waste gas generated in the process are realized. The waste gas can be completely recovered in time, the influence of the waste gas on the subsequent process is avoided, and the waste gas recovery efficiency is improved. And, through will give vent to anger and connect 1206 and first passageway 1202 and correspond the setting, a first passageway 1202 corresponds and sets up one and give vent to anger and connect 1206 promptly, thus, a plurality of first passageways 1202 correspond and are provided with a plurality of joints 1206 of giving vent to anger, in recovery unit 100 course of work, it can correspond control a first passageway 1202 alone to have realized giving vent to anger to connect 1206, the problem of the waste gas that produces among the unable accurate recovery multichannel process among the prior art has been solved, and then the waste gas of having solved different processes mixes together, increase the problem of the degree of difficulty of handling the recovered gas, can separately collect the waste gas that every process produced, effectively improve recovery unit 100 safety in utilization and reliability.

In specific applications, the sizes of the air suction ports can be reasonably arranged through simulation analysis of the gas flow field in the first channel 1202, so that the best effect of waste gas collection can be achieved, the waste gas collection device can be set according to actual conditions, and the waste gas collection device is not listed one by one.

In any of the above embodiments, further, as shown in fig. 6 and 7, the first flow guide assembly 120 further includes an exhaust conduit 1208. Wherein, exhaust duct 1208 is connected with the joint 1206 of giving vent to anger to the realization is discharged the gas in the joint 1206 of giving vent to anger through exhaust duct 1208, further recovery processing utilizes. Specifically, during the operation of the recycling apparatus 100, the exhaust gas generated by the cleaning process is sucked into the first channel 1202 through the fan assembly, and then enters the air outlet joint 1206 through the air suction port of the first channel 1202, and is connected with the exhaust pipe 1208 through the air outlet joint 1206, so that the exhaust gas is further discharged through the exhaust pipe 1208. The waste gas can be completely recycled in time, and the use safety and reliability of the recycling device 100 are further improved.

In any of the above embodiments, further, as shown in fig. 6, the recycling apparatus 100 further includes a first collecting member 140. The first collecting member 140 is communicated with the gas outlet end of the first channel 1202 and the liquid outlet end of the second channel 1302, so as to realize uniform recovery and treatment of the waste gas collected in the first channel 1202 and the waste liquid collected in the second channel 1302. Specifically, as shown by arrows in fig. 6, the exhaust gas and waste liquid recycling route connects the gas outlet end of the first channel 1202 and the liquid outlet end of the second channel 1302 with the first collecting member 140, so that the number of the collecting members and the occupied space of the collecting members are effectively reduced, which is beneficial to the miniaturization design of the recycling device 100, and further reduces the production cost.

In any of the above embodiments, further, as shown in fig. 7, the recycling device 100 further includes a second collecting member 150 and a third collecting member 160. The second collecting member 150 is communicated with the gas outlet end of the first channel 1202 to collect the exhaust gas in the first channel 1202. In addition, the third collecting member 160 is communicated with the liquid outlet end of the second channel 1302 to collect and treat the waste liquid in the second channel 1302. Specifically, waste gas and waste liquid recovery route are as shown by the arrow in fig. 7, through separately collecting waste gas and waste liquid, and it is little to have realized the recovery processing degree of difficulty of separately collecting waste gas and waste liquid to the higher effect of recycle value has solved among the prior art waste liquid, the waste gas that can't accurate recovery technology process produced, leads to different gas-liquid to mix together, causes the injury of personnel or board, and increases the problem of handling the degree of difficulty of retrieving gas. The potential safety hazard caused by mixing gas and liquid is avoided. Effectively improving the use safety and reliability of the recovery device 100.

In any of the above embodiments, further, the recycling device 100 further includes a first lifting assembly. Wherein, first lifting unit is connected with casing 110, drives casing 110 through first lifting unit to realize that recovery unit 100 rises or descends, and then through recovery unit 100's motion, realize separately collecting and discharging the waste liquid of different processes and waste gas.

Specifically, the first lifting assembly is connected to the housing 110, so that the first lifting assembly can drive the housing 110, that is, the recovery device 100, to move up and down, as shown in fig. 10 to 12, during the cleaning process, by moving the recovery device 100, when the recovery device 100 moves to a first position as shown in fig. 10, one cleaning solution and gas can be recovered, when the recovery device 100 moves to a second position as shown in fig. 11, another cleaning solution and gas can be recovered, and when the recovery device 100 moves to a third position as shown in fig. 12, another cleaning solution and gas can be recovered, so that the above processes are repeated, thereby respectively recovering waste liquid and waste gas with different components for cleaning a plurality of processes, and different gas-liquid recovery channels can be used according to different processes, thereby realizing waste liquid and waste gas with different processes, The waste gas is separately collected and discharged, so that the gas-liquid recovery of different components is realized, the utilization rate of the recovered waste gas and the waste liquid is improved, and the production cost of processing is reduced.

In specific application, the first lifting assembly can be set as a motor, and can be set according to actual conditions, and the first lifting assembly is not listed one by one here.

In any of the above embodiments, as shown in fig. 8, a plurality of second channels 1302 are enclosed between two adjacent second baffles 1304 by setting the number of the second baffles 1304 to be multiple. In this way, by providing the multiple second channels 1302 in the working chamber of the housing 110, the waste liquid in multiple steps can be separately collected through the multiple second channels 1302, and the utility value of separately recovering the waste liquid can be improved.

Specifically, as shown in fig. 8, the number of the second diversion plates 1304 is set to be plural, a plurality of adjacent second diversion plates 1304 can be enclosed with the housing 110 to form a plurality of second channels 1302, so that the recovery device 100 is set to separately collect multiple waste liquids, and the waste gases are collected in a centralized manner, and through such setting, the waste liquids of different processes can be collected and discharged separately, the waste gases are collected in a centralized manner, so that the structural complexity of the recovery device 100 is reduced, and the difficulty of waste gas recovery is reduced. Meanwhile, the utilization rate of the separated recovery of the waste liquid is improved, and the production cost is effectively reduced.

In a specific application, the recycling apparatus 100 may be configured as three second channels 1302, one recycling apparatus 100 of the first channel 1202, that is, a recycling apparatus 100 of a gas-liquid channel, so as to separate and recycle the waste liquid and achieve the best effect of recycling the waste gas collectively, or may be configured as another type of recycling apparatus 100, which may be configured by itself according to the actual situation, and is not listed here.

In any of the above embodiments, as shown in fig. 9, a plurality of first deflectors 1204 and a plurality of second deflectors 1304 are further provided, and the plurality of first deflectors 1204 and the plurality of second deflectors 1304 are alternately arranged in sequence, so that the recovery device 100 includes a plurality of first passages 1202 and a plurality of second passages 1302. The first channel 1202 and the second channel 1302 are both annular channels, and the annular channels can play a role in wrapping, so that gas or liquid is effectively prevented from splashing or flowing out, and the waste gas or waste liquid is guided out. And the first channel 1202 and the second channel 1302 are arranged independently, so that the multiple first channels 1202 and the multiple second channels 1302 are arranged in the working cavity of the annular structure of the shell 110, so that waste liquid and waste gas with different components in multiple processes are respectively recycled, and the utilization value of separately recycling the waste liquid and the waste gas is improved.

Specifically, as shown in fig. 9, the number of the first baffles 1204 and the second baffles 1304 is set to be multiple, so as to form multiple first channels 1202 and multiple second channels 1302 in the working cavity of the housing 110, wherein the first channels 1202 and the second channels 1302 are both annular channels, the first channels 1202 and the second channels 1302 are independently arranged, and the air outlet joints 1206 are arranged corresponding to the first channels 1202, that is, one air outlet joint 1206 is arranged corresponding to one first channel 1202, so that multiple first channels 1202 are correspondingly provided with multiple air outlet joints 1206, so as to realize that one first channel 1202 is controlled independently and correspondingly by one air outlet joint 1206. And every second channel 1302 all is provided with out the liquid end, and recovery unit 100 sets up to the separate collection of multiple waste liquid like this, and recovery unit 100 that the separate collection of multiple waste gas, through such setting, can retrieve respectively the waste liquid of the different compositions of multichannel process and waste gas, solved prior art, because waste liquid, the waste gas that can't accurately retrieve the technology process and produce, lead to different gas-liquids to mix together, cause the injury of personnel or board to and increase the problem of handling the degree of difficulty of retrieving gas. The utilization rate of the recovered waste gas and waste liquid is improved, and the use safety and reliability of the recovery device 100 are improved.

Specifically, the recycling device 100 may be provided with three second channels 1302 and three first channels 1202, wherein the three second channels 1302 correspond to three liquid outlet ends, and the three first channels 1202 correspond to three gas outlet joints 1206, that is, three groups of three gas-liquid channel recycling devices 100 are provided, so that the waste liquid is recycled separately, and the waste gas recycling effect reaches the best state. For example, as shown in fig. 10 to 12, since more than one solution is used to treat the single wafer 170 during the cleaning process, if the different solutions are mixed together, harmful gas may be released or heat may be released, which may affect the overall life of the equipment, and the mixed solutions cannot be recycled. By arranging the recovery device 100 with three sets of three gas and three liquid channels, namely, arranging three sets of first channels 1202 and three sets of second channels 1302, in the cleaning process, the recovery device 100 can move up and down under the control of a first lifting assembly, if the solution a is used, at the moment, the recovery device 100 is arranged at the first position of the first set of recovery device 100 as shown in fig. 10, cleaning is started, then the solution a and the gas a enter the second channels 1302 and the first channels 1202, and at the moment, fan assemblies of the other two sets of channels are closed; if solution B is used, then the reclamation apparatus 100 is positioned with the single wafer 170 at the second position of the second set of reclamation apparatus 100 as shown in FIG. 11, where the second set of fan assemblies is turned on and the remaining two sets of fan assemblies are turned off. In the cleaning process, the solution B is thrown into the second channel 1302 by centrifugal force, and the gas B is sucked away by the first channel 1202; if solution C is used, then the reclamation apparatus 100 is positioned with the single wafer 170 at the third position of the third set of reclamation apparatus 100 as shown in fig. 12, where the third set of fan assemblies is turned on and the remaining two sets of fan assemblies are turned off. During the cleaning process, the C solution is thrown into the second channel 1302 by centrifugal force, and the C gas is sucked away by the first channel 1202. The waste liquid and the waste gas with different components in a plurality of processes are respectively recycled and utilized.

In a specific application, the number of the first channels 1202 and the second channels 1302 may be changed according to the requirement of the equipment cleaning process, that is, the number of the second channels 1302 for collecting waste liquid and the number of the first channels 1202 for collecting waste gas may be changed according to the requirement of the equipment cleaning process, or the recovery devices 100 may be set in other forms, and may be set according to the actual situation, which is not listed herein.

According to a second aspect of the present invention, there is also provided a washing system comprising: the recycling apparatus 100 of any of the above embodiments.

In this embodiment, the cleaning system includes the recycling device 100 of any of the above embodiments, and therefore, has all the advantages of the recycling device 100.

In a particular application, the cleaning system may be specifically configured as a single wafer cleaning system.

In the above embodiment, further: the cleaning system also includes a load bearing platform and a second lifting assembly. Wherein, the plummer setting is in the work intracavity for place and treat the washing thing, to realize will treating that the washing thing is placed and wash on the plummer, improve cleaning quality. Meanwhile, a second lifting assembly is arranged to be connected with the bearing table and used for driving the bearing table to lift, so that the bearing table is driven to move relative to the recovery device 100 through the second lifting assembly, different cleaning procedures are achieved corresponding to different first channels 1202 and different second channels 1302, and waste liquid and waste gas of different procedures are collected and discharged separately.

Specifically, a carrying table capable of rotating at a high speed is arranged in the middle of the recovery device 100, the object to be cleaned can be specifically set as a single wafer 170, and the single wafer 170 can be fixed on the carrying table to rotate at a high speed. A shower head for spraying a high-speed solution is disposed above the single wafer 170. In the whole cleaning process, since the cleaning system uses a plurality of solutions to treat the single wafer 170, if the different solutions are mixed together, harmful gas may be released, or heat may be released, thereby affecting the overall life of the equipment, and the mixed solutions cannot be recycled. This application can guarantee that waste gas and waste liquid in the cleaning process can not leak outward through setting up the plummer in the casing 110 work cavity of recovery unit 100, through the collection that is favorable to waste gas and waste liquid. Further, be connected with the plummer through setting up second lifting unit, realized the plummer can elevating movement, and then drive and wait to wash the thing and go up and down, drive the plummer through second lifting unit and move for recovery unit 100, realize that every way washing process corresponds different gas-liquid recovery passageway, and then realize the waste liquid of different processes, the separately collection and the emission of waste gas, realize the gas-liquid of different compositions and retrieve, the utilization ratio of retrieving waste gas and waste liquid has been improved, the manufacturing cost of processing has been reduced.

In specific application, the second lifting assembly can be set as a motor, and can be set according to actual conditions, and the motor is not listed one by one here.

In the description of the present invention, the terms "plurality" or "a plurality" refer to two or more, and unless otherwise specifically limited, the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention; the terms "connected," "mounted," "secured," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the description herein, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (11)

1. A recycling apparatus, comprising:

a plurality of annular recovery subassemblies of establishing each other overlap, the annular recovery subassembly includes:

a housing including a working chamber;

the first flow guide assembly is arranged in the working cavity and comprises a first channel;

the second flow guide assembly is arranged in the working cavity and comprises a second channel;

the first channel and the second channel are annular channels, the first channel and the second channel are mutually independent, the first channel is used for recycling waste gas in the working cavity, and the second channel is used for recycling waste liquid in the working cavity.

2. The recycling apparatus according to claim 1, wherein the first flow directing assembly further comprises:

the first guide plate is arranged on the inner wall of the shell, and the first guide plate and the inner wall of the shell enclose the first channel.

3. The recycling apparatus according to claim 2, wherein the second flow directing assembly further comprises:

the second guide plate is arranged in the shell and located below the first guide plate, and a second channel is defined between the second guide plate and the first guide plate.

4. The recycling apparatus according to claim 3,

the second guide plate is provided with a plurality of grooves, the first guide plate is fixedly connected with the second guide plate, and the first guide plate and the grooves form a second channel.

5. The recycling apparatus according to claim 3,

the second diversion assembly further comprises a liquid bearing table, and the liquid bearing table is fixedly connected with the second diversion plate and used for guiding the borne waste liquid to the second channel.

6. The recycling apparatus according to any one of claims 1 to 5, wherein the first flow guide assembly further comprises:

the air outlet joint is arranged on the outer wall of the shell and is communicated with the air outlet end of the first channel;

the fan assembly is connected with the air outlet joint and is used for absorbing gas;

the air outlet joint is arranged corresponding to the first channel.

7. The recycling apparatus according to any one of claims 1 to 5, further comprising:

the first collecting piece is communicated with the gas outlet end of the first channel and the liquid outlet end of the second channel and is used for collecting waste gas of the first channel and waste liquid of the second channel.

8. The recycling apparatus according to any one of claims 1 to 5, further comprising:

the second collecting piece is communicated with the air outlet end of the first channel and is used for collecting the waste gas of the first channel;

and the third collecting piece is communicated with the liquid outlet end of the second channel and is used for collecting the waste liquid of the second channel.

9. The recycling apparatus according to any one of claims 1 to 5, further comprising:

the first lifting assembly is connected with the shell and used for driving the shell to lift.

10. A cleaning system, comprising: the recycling apparatus according to any one of claims 1 to 9.

11. The cleaning system of claim 10, further comprising:

the bearing table is arranged in the working cavity and used for placing an object to be cleaned;

and the second lifting assembly is connected with the bearing platform and used for driving the bearing platform to lift.

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