CN216170969U - NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process - Google Patents
NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process Download PDFInfo
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- CN216170969U CN216170969U CN202122620228.9U CN202122620228U CN216170969U CN 216170969 U CN216170969 U CN 216170969U CN 202122620228 U CN202122620228 U CN 202122620228U CN 216170969 U CN216170969 U CN 216170969U
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Abstract
The utility model relates to an electrolytic method for producing NF3Device and method for treating nickel-containing dust in process belong to the technical field of chemical industry. Comprises a workbench, a blower, a dust chamber, an absorption water tank, a spraying mechanism and an air draft mechanism; the dust chamber is a semi-closed space, one open side of the dust chamber is provided with a workbench containing nickel powderThe dust electrolytic tank is placed on the workbench; the air blower is positioned on one side of the workbench, which is far away from the dust removal chamber, and supplies transverse wind power to blow the nickel powder dust in the electrolytic bath to the dust removal chamber; the bottom of the dust chamber is of a porous sieve plate structure, and the absorption water tank is positioned below the porous sieve plate; the spraying mechanism is used for providing atomized water to the top of the dust removal chamber close to the workbench, and the atomized water absorbs dust in the dust removal chamber and then flows into the absorption water tank; the air draft mechanism is used for exhausting air containing unadsorbed dust in the dust removal chamber, filtering, collecting and discharging. The device can realize the harmless treatment of the nickel-containing dust, and the dust emission concentration is less than or equal to 50mg/m3。
Description
Technical Field
The utility model relates to an electrolytic method for producing NF3Processing apparatus of nickeliferous dust of in-process belongs to chemical industry technical field.
Background
Nitrogen trifluoride (NF)3) The gas is widely and importantly applied to the industries of semiconductors and liquid crystal panels as a special gas. Preparation of NF3The main method of the gas is molten salt electrolysis, the anode is a nickel anode, and the electrolyte is NF3xHF molten salt, electrolysis temperature 90-140 deg.C, electrolysis voltage 5-10V, and electrolysis current density 30mA/cm2～200mA/cm2The anode produces NF3Cathode producing H2。
In NF3In production, the nickel anode will form Ni and NiF due to corrosionx(x ═ 2 or 3) mixtures melted in the electrolytic system, due to Ni and NiFxIn NF3xHF the limited solubility of the molten salt system, it can deposit on the bottom of the cell or adsorb on the cell and electrodes. In addition, part of Ni and NiFxThe mixture will follow the NF3The molten salt of xHF evaporates and is adsorbed on the lid. Therefore, after the electrolysis operation is finished, the tank body, the tank cover and the electrodes need to be cleaned. After the cleaning is finished, partial Ni and NiF still remainxThe mixture is attached to the tank body, the tank cover and the electrodeFurther polishing treatment is required, and dust containing Ni is generated in the process and is discharged after treatment.
At present, the conventional metal dust treatment means adopts an air draft mode, and metal dust is intercepted and enriched by a dust remover along with the atmosphere and then is discharged into the atmosphere. Treating NF by this method3There are two major problems with Ni-containing dust in the production process: (1) regardless of the wind direction, the Ni-containing dust subjected to polishing has different granularity, and the dust sinks and floats simultaneously, so that the Ni-containing dust in the dust removal chamber does not flow along the air flow direction, floats to all places and even diffuses outwards along the inlet of the dust removal chamber; (2) the filter screen in the dust remover has too high mesh, fine dust can be discharged into the atmosphere, the filter screen has too low mesh, and large-particle dust can quickly block the dust remover; the use of a wet scrubber causes the Ni-containing dust to form a sludge-like mass in the scrubber, clogging the scrubber, and due to the NiF2The solubility in water is 25.1g/L, and F ions of water in a wet dust collector system exceed the discharge requirement and cannot be treated.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention aims to provide an electrolytic process for producing NF3Processing apparatus of nickeliferous dust in-process.
In order to achieve the purpose, the technical scheme of the utility model is as follows:
NF produced by electrolysis method3The nickel-containing dust treatment device comprises a workbench, a blower, a dust removal chamber, an absorption water tank, a spraying mechanism and an air draft mechanism; the dust removal chamber is a semi-closed space, a workbench is arranged on one open side of the dust removal chamber, and the electrolytic bath containing nickel dust is placed on the workbench; the air blower is positioned on one side of the workbench, which is far away from the dust removal chamber, and supplies transverse wind power to blow the nickel powder dust in the electrolytic bath to the dust removal chamber; the bottom of the dust chamber is of a porous sieve plate structure, and the absorption water tank is positioned below the porous sieve plate; the spraying mechanism is used for providing atomized water to the top of the dust removal chamber close to the workbench, and the atomized water absorbs dust in the dust removal chamber and then flows into the absorption water tank; the air draft mechanism is used for exhausting air containing unadsorbed dust in the dust removal chamber, filtering, collecting and discharging.
Furthermore, the size of the sieve holes of the porous sieve plate is 8mm-40 mm.
Furthermore, the device also comprises an absorption water pump and a filter, wherein a water inlet of the absorption water pump is connected with the absorption water tank, a water outlet of the absorption water pump is connected with the filter, and the filter is connected with the spraying mechanism.
Further, the absorption water pump is a centrifugal pump, a reciprocating pump or a mixed flow pump; the filter comprises molecular sieve adsorption filler and a filter screen with the mesh number less than or equal to 500 meshes.
Further, the spraying mechanism comprises an atomizing nozzle, a spraying water tank and a spraying water pump; the atomizing nozzle is positioned at the top of the dust removing chamber and close to the workbench, water is stored in the spraying water tank, the water inlet of the spraying water pump is connected with the spraying water tank, and the water outlet of the spraying water pump is connected with the atomizing nozzle.
Further, the spray water pump is a centrifugal pump, a reciprocating pump or a mixed flow pump.
Further, the air draft mechanism comprises a dust remover, an exhaust fan and a discharge tower; the inlet of the dust remover is connected to the top of the dust chamber far away from the workbench, the outlet of the dust remover is connected with the inlet of the exhaust fan, and the outlet of the exhaust fan is connected with the discharge tower.
Furthermore, the dust remover is also respectively connected with a spraying mechanism and an absorption water tank, the spraying mechanism is also used for cleaning the dust remover, and the cleaned water enters the absorption water tank; the dust remover is a bag type dust remover or an electrostatic dust remover.
Advantageous effects
The utility model provides an electrolytic method for producing NF3Processing apparatus of nickel-containing dust of in-process, nickel-containing dust blow to the clean room through the air-blower, and most dust absorbs the absorption pond through the atomizing water, and remaining dust is taken out through air draft mechanism along with the air, collects through filtering, and the remaining air is arranged to the atmosphere through the emission tower. The device can realize NF3The nickel-containing dust is subjected to harmless treatment in the production process, and the dust emission concentration is less than or equal to 50mg/m3. The remaining nickel-containing dust cannot float outdoors due to the water curtain, and the problem of nickel-containing dust floating is effectively solved.
Furthermore, the treatment device is provided with the absorption water pump and the filter, so that the Ni-containing wastewater in the absorption water tank can be pumped out, and then is discharged into the spraying mechanism after Ni-containing substances are removed through filtering and adsorption, and water resources are recycled.
The utility model provides an electrolytic method for producing NF3In the process, the method combines the operations of water absorption, air supply and air draft, and firstly utilizes the transverse wind power provided by a blower to blow Ni-containing dust to a dust chamber; secondly, use of NiF2The solubility in water and the adsorption capacity of atomized water to fine particle dust, and the atomized water is sprayed from top to bottom to remove most of dust containing Ni; and finally, pumping out the residual dust along with the air by an air pumping mechanism arranged at the top of the dust removal chamber, and further removing the dust and then discharging the dust to the atmosphere through a discharge tower. The spraying amount of atomized water and the air draft amount of the air draft mechanism are strictly controlled, the spraying amount is too small, an effective water curtain cannot be formed, and nickel-containing dust can float out of the dust removing chamber; the spraying amount is too large, so that atomized water is not easy to flow back, and nickel-containing slurry is remained on the porous sieve plate and even flows out of the dust removal chamber; when the air draft is too small, a small amount of dust containing Ni will float in the dust removing chamber; the air draft volume is too big, and fan power is big, extravagant electric energy, and second can take out partial atomizing water, combines with the dust that contains Ni to form mud, blocks up air draft mechanism.
Drawings
FIG. 1 is a schematic view of the structure of the processing apparatus according to the present invention.
Wherein, 1-a workbench; 2-a blower; 3-a dust removal chamber; 4-an atomizing spray head; 5-an absorption pool; 6-absorption water pump; 7-a filter; 8-spraying a water tank; 9-a spray water pump; 10-a dust remover; 11-an exhaust fan; 12-evacuation column.
Detailed Description
The present invention will be described in further detail with reference to specific examples.
As shown in FIG. 1, an electrolytic process for the production of NF3The nickel-containing dust treatment device comprises a workbench 1, a blower 2, a dust removal chamber 3, an absorption water tank 5, a spraying mechanism and an air draft mechanism; the dust chamber 3 is a semi-closed space, and the opening of the dust chamber 3A workbench 1 is arranged on one placing side, and an electrolytic tank containing nickel dust is placed on the workbench 1; the blower 2 is positioned on one side of the workbench 1 far away from the dust removal chamber 3, and the blower 2 provides transverse wind power to blow nickel powder dust in the electrolytic bath to the dust removal chamber 3; the bottom of the dust chamber is of a porous sieve plate structure, and the absorption water tank 5 is positioned below the porous sieve plate; the spraying mechanism is used for providing atomized water to the top of the dust removal chamber 3 close to the workbench 1, and the atomized water absorbs dust in the dust removal chamber 3 and then flows into the absorption water tank 5; the air draft mechanism is used for exhausting air containing unadsorbed dust in the dust removal chamber 3, filtering, collecting and discharging.
The size of the sieve pore of the porous sieve plate is 8mm-40 mm. If the size of the sieve pores is too small, Ni-containing slurry is formed around the sieve pores, so that the risk of overflowing to the outside of the dust removing chamber is high, and the cleaning difficulty is increased; the oversize sieve mesh increases the risk that the operator is stumbled to cause the injury.
The device also comprises an absorption water pump 6 and a filter 7, wherein the water inlet of the absorption water pump 6 is connected with the absorption water pool 5, the water outlet of the absorption water pump 6 is connected with the filter 7, and the filter 7 is connected with the spraying mechanism. When the water level of the absorption water tank 5 reaches the high point of the water tank liquid level, the absorption water pump 6 is started, Ni-containing water enters the spraying mechanism after being filtered by the filter 7, Ni-containing substances are enriched on the filter 7, and the Ni-containing substances can be cleaned by spraying water and discharged into the absorption water tank 5 during treatment.
The absorption water pump 6 is a centrifugal pump, a reciprocating pump or a mixed flow pump; the filter 7 comprises molecular sieve adsorption filler and a filter screen with the mesh number less than or equal to 500 meshes.
The spraying mechanism comprises an atomizing nozzle 4, a spraying water tank 8 and a spraying water pump 9; the atomizing nozzle 4 is located the dust excluding chamber 3 top and is close to workstation 1 department, stores water in the spray tank 8, and the water inlet and the spray tank 8 of spray pump 9 are connected, and the delivery port and the atomizing nozzle 4 of spray pump 9 are connected.
The spray water pump 9 is a centrifugal pump, a reciprocating pump or a mixed flow pump.
The air draft mechanism comprises a dust remover 10, an exhaust fan 11 and a discharge tower 12; the inlet of the dust remover 10 is connected with the top of the dust chamber 3 far away from the workbench 1, the outlet of the dust remover 10 is connected with the inlet of the exhaust fan 11, and the outlet of the exhaust fan 11 is connected with the discharge tower 12.
The dust collector 10 is a bag type dust collector or an electrostatic dust collector.
The dust remover 10 is also respectively connected with a spraying mechanism and the absorption water tank 5, the spraying mechanism is also used for cleaning the dust remover 10, and the cleaned water enters the absorption water tank 5.
In the device, the workbench mainly plays a role in placing the electrolytic tank attached with Ni-containing dust.
The function of the blower is to provide transverse wind force to blow the grinded Ni-containing dust to the dust chamber.
The dust chamber has the function of providing a semi-closed space, can effectively prevent dust from floating everywhere, and is provided with a porous sieve plate at the bottom, an absorption water tank is arranged below the porous sieve plate, and the dust chamber has the function of collecting atomized water containing Ni dust and is convenient to clean; the front half part of the top of the dust chamber is connected with an atomizing nozzle in the spraying mechanism, and the rear half part of the top of the dust chamber is connected with a dust remover in the air draft mechanism. The dust removal room is trilateral dead of sealing, and one side is opened, is workstation and air-blower from inside to outside in proper order, and operating personnel stands between air-blower and work platform, can satisfy operating personnel occupational health requirement.
The atomizing nozzle is used for atomizing water to form mist water for absorbing the Ni-containing dust.
One of the functions of the absorption water tank is to store water containing Ni dust, and the other function is to provide a place for settling the Ni dust, so that the nickel dust is conveniently cleaned for recycling.
The absorption water pump is used for pumping the water in the absorption water tank into the spraying water tank, and the spraying water pump is used for pumping the water in the spraying water tank to the upper part of the dust chamber.
The filter is used for removing Ni-containing dust and particles dissolved in water in the absorption water tank and ensuring NiF in the spraying water tank in the process of pumping the water in the absorption water tank to the spraying water tank2Concentration lower than saturation concentration for preventing NiF2The atomizing nozzle is blocked too early, and the service life of the atomizing collision head is prolonged. When the filter is cleaned, the water in the spray water tank can be used for cleaning and then is discharged into the absorption water tank.
The spraying water tank is used for providing a water source for absorbing the dust containing Ni.
The dust remover is used for removing residual Ni-containing dust in the air draft mechanism. When the dust remover is cleaned, the water in the spraying water tank can be used for cleaning and then is discharged into the absorption water tank.
The exhaust fan is used for providing power for the air exhaust mechanism.
The discharge tower serves as a place for discharging air in the exhaust mechanism.
NF produced by electrolysis method3A method of in-process nickel-containing dust treatment, the method steps comprising:
(1) the cell containing the nickel dust is placed on a bench 1.
(2) Starting the air blower 2, polishing nickel-containing dust attached to the electrolytic bath, blowing the dust into the dust removal chamber 3, simultaneously starting the spraying mechanism to spray atomized water from the top of the dust removal chamber 3, and enabling the atomized water to enter the absorption water tank 5 through a porous sieve plate at the bottom of the dust removal chamber 3 after the atomized water absorbs the dust; wherein the spraying amount of the atomized water per square in the dust chamber 3 is 100L/min-3000L/min, preferably 200L/min-2500L/min.
(3) Starting an air draft mechanism, pumping out unadsorbed dust in the dust removal chamber 3 along with air, filtering, collecting and discharging; wherein the air draft amount of the air draft mechanism is 2000m3/h～20000m3H, preferably 2500m3/h～18000m3/h。
Example 1
In this embodiment, the spray amount of atomized water per square in the dust chamber 3 is 1200L/min, and the air suction amount of the air suction mechanism is 15000m3Measured dust concentration at the outlet of the discharge tower 12 was 38mg/m3。
Example 2
In this embodiment, the spray amount of atomized water per square in the dust chamber 3 is 800L/min, and the air draft amount of the air draft mechanism is 12000m3At the outlet of the discharge column 12, the dust concentration was found to be 43mg/m3。
Comparative example 1
In this comparative example, the spray amount of atomized water per square in the dust removal chamber 3 was 50L/min, and the air suction amount of the air suction mechanism was 15000m3H, only part of dust can be absorbed due to too small amount of atomized waterAnd the rest dust scatters inside and outside the dust chamber.
Comparative example 2
In the comparative example, the spray amount of atomized water per square in the dust chamber 3 was 1000L/min, and the air suction amount of the air suction mechanism was 35000m3The air draft amount is too large, a small amount of atomized water is pumped to the dust remover along with air, and after the operation for a period of time, air blown by the air blower forms vortex in the dust removing chamber, so that the atomized water drifts around; in addition, the exhaust fan is abnormal. And stopping operating the device, opening the dust remover, and finding that the mud containing Ni blocks the dust remover to cause the exhaust system to work normally.
Comparative example 3
The treatment device of the comparative example only comprises a workbench, a blower, a dust chamber, a dust remover, an exhaust fan and a discharge tower, and during treatment, part of dust is extracted by the exhaust fan and part of dust floats inside and outside the dust chamber.
In summary, the present invention includes but is not limited to the above embodiments, and any equivalent substitutions or partial modifications made under the spirit and principle of the present invention should be considered within the protection scope of the present invention.
Claims (8)
1. NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process, its characterized in that: comprises a workbench (1), a blower (2), a dust chamber (3), an absorption water pool (5), a spraying mechanism and an air draft mechanism; the dust removal chamber (3) is a semi-closed space, a workbench (1) is arranged on one open side of the dust removal chamber (3), and an electrolytic bath containing nickel dust is placed on the workbench (1); the air blower (2) is positioned on one side of the workbench (1) far away from the dust removal chamber (3), and the air blower (2) provides transverse wind power to blow nickel dust in the electrolytic bath to the dust removal chamber (3); the bottom of the dust removal chamber is of a porous sieve plate structure, and the absorption water tank (5) is positioned below the porous sieve plate; the spraying mechanism is used for providing atomized water to the top of the dust removal chamber (3) close to the workbench (1), and the atomized water absorbs dust in the dust removal chamber (3) and then flows into the absorption water tank (5); the air draft mechanism is used for exhausting air which is not adsorbed with dust in the dust removal chamber (3), filtering and collecting the air and discharging the air.
2. An electrolytic process for the production of NF as claimed in claim 13Processing apparatus of nickeliferous dust of in-process, its characterized in that: the mesh size of the porous sieve plate is 8mm-40 mm.
3. An electrolytic process for the production of NF as claimed in claim 13Processing apparatus of nickeliferous dust of in-process, its characterized in that: the device also comprises an absorption water pump (6) and a filter (7), wherein the water inlet of the absorption water pump (6) is connected with the absorption water pool (5), the water outlet of the absorption water pump (6) is connected with the filter (7), and the filter (7) is connected with the spraying mechanism.
4. An electrolytic process for the production of NF as claimed in claim 33Processing apparatus of nickeliferous dust of in-process, its characterized in that: the absorption water pump (6) is a centrifugal pump, a reciprocating pump or a mixed flow pump; the filter (7) comprises a molecular sieve adsorption filler and a filter screen with the mesh number less than or equal to 500.
5. An electrolytic process for the production of NF as claimed in claim 13Processing apparatus of nickeliferous dust of in-process, its characterized in that: the spraying mechanism comprises an atomizing nozzle (4), a spraying water tank (8) and a spraying water pump (9); the atomizing nozzle (4) is positioned at the top of the dust removing chamber (3) and close to the workbench (1), water is stored in the spraying water tank (8), the water inlet of the spraying water pump (9) is connected with the spraying water tank (8), and the water outlet of the spraying water pump (9) is connected with the atomizing nozzle (4).
6. An electrolytic process for the production of NF as claimed in claim 53Processing apparatus of nickeliferous dust of in-process, its characterized in that: the spray water pump (9) is a centrifugal pump, a reciprocating pump or a mixed flow pump.
7. An electrolytic process for the production of NF as claimed in claim 13Processing apparatus of nickeliferous dust of in-process, its characterized in that: the air draft mechanism comprises a dust remover (10), an exhaust fan (11) and a discharge tower (12); the inlet of the dust remover (10) is connected with the top of the dust removing chamber (3) far away from the workbench (1) to remove dustThe outlet of the device (10) is connected with the inlet of an exhaust fan (11), and the outlet of the exhaust fan (11) is connected with a discharge tower (12).
8. An electrolytic process for the production of NF as claimed in claim 73Processing apparatus of nickeliferous dust of in-process, its characterized in that: the dust remover (10) is also respectively connected with a spraying mechanism and an absorption water tank (5), the spraying mechanism is also used for cleaning the dust remover (10), and the cleaned water enters the absorption water tank (5); preferably, the dust collector (10) is a bag-type dust collector or an electrostatic dust collector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122620228.9U CN216170969U (en) | 2021-10-29 | 2021-10-29 | NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122620228.9U CN216170969U (en) | 2021-10-29 | 2021-10-29 | NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process |
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| Publication Number | Publication Date |
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| CN216170969U true CN216170969U (en) | 2022-04-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122620228.9U Active CN216170969U (en) | 2021-10-29 | 2021-10-29 | NF produced by electrolysis method3Processing apparatus of nickeliferous dust of in-process |
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| CN (1) | CN216170969U (en) |
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2021
- 2021-10-29 CN CN202122620228.9U patent/CN216170969U/en active Active
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